CN218642868U - Temperature measurement adjusting device of crystal growth furnace - Google Patents
Temperature measurement adjusting device of crystal growth furnace Download PDFInfo
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- CN218642868U CN218642868U CN202222801078.6U CN202222801078U CN218642868U CN 218642868 U CN218642868 U CN 218642868U CN 202222801078 U CN202222801078 U CN 202222801078U CN 218642868 U CN218642868 U CN 218642868U
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Abstract
The utility model discloses a temperature measurement adjusting device of a crystal growth furnace, which relates to the technical field of temperature measurement adjusting devices and comprises a frame, a furnace cover, a temperature measurement window and a temperature measurement adjusting device; the frame is arranged outside the furnace body, the middle part of the furnace cover is provided with a through hole, and the temperature measurement observation window is arranged outside the furnace cover; the temperature measurement adjusting device is arranged on the frame and used for installing the infrared thermometer and adjusting the position of the infrared thermometer. The mounting plate can adjust the inclination angle relative to the fixed plate, and the infrared thermometer can be adjusted to be in a state of being vertical to the temperature measuring channel by adjusting the inclination angle of the mounting plate, so that the temperature measuring field of view is larger; and the influence of external light on the temperature measurement precision of the infrared thermometer is eliminated by adopting a light shield with a light absorption layer. The device has the advantages that the adjustment mode is automatic adjustment, manual operation is not needed, and time and labor are saved; and the temperature of the center of the light spot in the cavity can be measured by matching with a computer algorithm, so that the temperature repetition precision is improved, and the crystal growth process can be better monitored.
Description
Technical Field
The utility model relates to a temperature measurement adjusting device technical field especially relates to a crystal growth furnace temperature measurement adjusting device.
Background
Silicon carbide (SiC) is an important third-generation semiconductor material, is an ideal material for manufacturing high-temperature, high-frequency, high-power, high-voltage and anti-radiation electronic devices, has important application value in the fields of military industry, aerospace, solid-state lighting, power electronics and the like, and therefore becomes one of the leading edge and the highest point of the current global semiconductor material industry.
A Physical Vapor Transport-PVT (Physical Vapor Transport-PVT) method is a common method for growing silicon carbide crystals, in the method, a silicon carbide seed crystal is arranged on a graphite crucible cover or at the top end, silicon carbide powder serving as a growing raw material is filled in the graphite crucible, the growing temperature is controlled, the growing raw material is decomposed into gas-phase components and then is conveyed to the seed crystal to grow the silicon carbide crystals under the driving of axial temperature gradient in the graphite crucible, in the growing process, a temperature measuring device is required to be used for accurately monitoring the temperature in a furnace for a long time, however, the currently and commonly used fixing mode of an infrared thermometer makes the infrared thermometer be unadjustable, so that the focus of the infrared thermometer is fixed, the relative position of a temperature measuring light spot after each time of loading and unloading of the crucible deviates, the phenomenon that the focus of the infrared thermometer is not aligned with the center of the temperature measuring light spot of the crucible exists, the temperature of the center of the temperature measuring light spot of the crucible cannot be obtained, but the temperature of the center of the temperature measuring light spot of the crucible is crucial to a silicon carbide crystal growing process.
Therefore, a temperature measuring device capable of being automatically adjusted is needed, so that the temperature measuring focus of the infrared thermometer can be adjusted within a certain range, the temperature of the center of the crucible temperature measuring light spot can be obtained, and the growing environment of the silicon carbide crystal can be better analyzed.
Disclosure of Invention
For solving the technical problem, the utility model provides a crystal growth stove temperature measurement adjusting device for the temperature measurement focus of infrared radiation thermometer can be adjusted within the certain limit, obtains the temperature at crucible temperature measurement facula center with this, comes the environment of better analysis silicon carbide crystal growth.
In order to achieve the above object, the utility model provides a following scheme:
the utility model provides a temperature measuring and adjusting device of a crystal growing furnace, which comprises a frame, a furnace cover, a temperature measuring window and a temperature measuring and adjusting device; the frame is arranged outside the furnace body, a through hole is formed in the middle of the furnace cover, and the temperature measurement observation window is arranged on the outer side of the furnace cover and is coaxial with the through hole; the temperature measurement adjusting device is arranged on the frame and used for installing an infrared thermometer and adjusting the position of the infrared thermometer.
Optionally, the temperature measurement window comprises a sealing central ring, a quartz glass sheet, a baffle ring and a window flange opening; the through hole of the furnace cover is connected with one end of a window connecting pipe, and the sealing center ring is arranged at the other end of the window connecting pipe; the quartz glass sheet is arranged on the sealing center ring; the window flange opening is arranged at the other end of the window connecting pipe, and the baffle ring is arranged between the window flange opening and the quartz glass sheet.
Optionally, a notch is formed in the sealing center ring, and the quartz glass sheet is disposed in the notch.
Optionally, a sealing groove is formed in one side, facing the quartz glass sheet, of the notch, and a sealing ring is arranged in the sealing groove.
Optionally, the window connecting pipe and the window flange opening are connected by a quick-connection clamp and sealed by an O-ring.
Optionally, the temperature measuring and adjusting device includes a connecting plate, a horizontal sliding table, a linear push rod, a fixing plate and a mounting plate;
one end of the connecting plate is connected with the frame;
the horizontal sliding table comprises an X-axis linear sliding table and a Y-axis linear sliding table; the other end of the connecting plate is connected with a base of the X-axis linear sliding table, and a base of the Y-axis linear sliding table is connected with a sliding block of the X-axis linear sliding table; the sliding block of the Y-axis linear sliding table is connected with the fixed plate; the fixing plate is connected with the mounting plate;
the linear push rods comprise an X-axis linear push rod and a Y-axis linear push rod; the fixed end of the X-axis linear push rod is connected with the base of the X-axis linear sliding table, and the movable end of the X-axis linear push rod is connected with the sliding block of the X-axis linear sliding table; the fixed end of the Y-axis linear push rod is connected with the base of the Y-axis linear sliding table, and the movable end of the Y-axis linear push rod is connected with the sliding block of the Y-axis linear sliding table;
one end of the fixing plate is connected with a sliding block of the Y-axis linear sliding table, and the mounting plate is connected with the fixing plate; the infrared thermometer is arranged on the mounting plate.
Optionally, the fixed plate with be provided with the leveling subassembly between the mounting panel, the leveling subassembly is used for adjusting the mounting panel with levelness between the fixed plate.
Optionally, the leveling assembly comprises three adjusting screw groups, and each adjusting screw group comprises two screws and a connecting hole; three screw hole groups are arranged on the fixing plate and the mounting plate, and each screw hole group comprises two threaded holes;
one screw passes through the mounting plate connecting hole and then is screwed into a threaded hole on the fixing plate, and the other screw is screwed into the rear end part of the threaded hole on the mounting plate and props against the fixing plate.
Optionally, the temperature measurement adjusting device further comprises a light shield, and the light shield is arranged between the infrared thermometer and the window flange opening.
Optionally, a light absorbing layer is sprayed in the light shield.
The utility model discloses for prior art gain following technological effect:
1. the mounting plate can adjust the inclination angle relative to the fixed plate, the infrared thermometer is fixed on the mounting plate, and the inclination angle of the infrared thermometer relative to the vertical direction is adjusted by adjusting the inclination angle of the mounting plate, so that the temperature measurement view field is larger, and the focus of the infrared thermometer is more easily aligned with the temperature measurement light spot;
2. and the influence of external light on the temperature measurement precision of the infrared thermometer is eliminated by adopting a light shield with a light absorption layer.
3. The focus adjusting mode of the infrared thermometer of the device is automatic adjustment, manual operation is not needed, and time and labor are saved;
4. the highest temperature of the center of the temperature measuring light spot of the crucible can be measured by matching with a computer algorithm, and the growth process of the crystal can be better monitored.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings required to be used in the embodiments will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and it is obvious for those skilled in the art that other drawings can be obtained according to the drawings without creative efforts.
FIG. 1 is a schematic view of the sectional structure of the temperature measuring and adjusting device of the crystal growing furnace of the present invention;
FIG. 2 is a schematic view of the axial measurement structure of the temperature measurement adjusting device of the crystal growing furnace of the utility model;
FIG. 3 is an enlarged schematic structural view of a temperature measuring window of the temperature measuring and adjusting device of the crystal growth furnace of the present invention;
FIG. 4 is a schematic view of the structure of the adjusting device axis measurement in the temperature measuring and adjusting device of the crystal growing furnace of the utility model;
FIG. 5 is a schematic structural view of a leveling component in the temperature measurement adjusting device of the crystal growth furnace of the present invention;
FIG. 6 is a schematic view of the cross-sectional structure of the leveling component in the temperature measuring and adjusting device of the crystal growth furnace of the present invention.
Description of reference numerals: 100. a frame; 200. a furnace cover; 300. a temperature measuring window; 400. a temperature measurement adjusting device; 500. an infrared thermometer;
301. a sealing center ring; 302. a quartz glass sheet; 303. a baffle ring; 304. a window flange opening;
401. a connecting plate; 4021. an X-axis linear sliding table; 4022. a Y-axis linear sliding table; 4031. an X-axis linear push rod; 4032. a Y-axis linear push rod; 404. a fixing plate; 405. mounting a plate; 406. a light shield.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
As shown in fig. 1 to 4, the present embodiment provides a temperature measurement adjusting device for a crystal growth furnace, which includes a frame 100, a furnace cover 200, a temperature measurement window 300 and a temperature measurement adjusting device 400; the frame 100 is arranged outside the furnace body, the middle part of the furnace cover 200 is provided with a through hole, and the temperature measurement observation window is arranged outside the furnace cover 200 and is coaxial with the through hole; the temperature measurement adjusting device 400 is disposed on the frame 100, and the temperature measurement adjusting device 400 is used to mount the infrared thermometer 500 and adjust the position of the infrared thermometer 500.
In this embodiment, the temperature measurement window 300 includes a sealing center ring 301, a quartz glass plate 302, a baffle ring 303, and a window flange opening 304; the through hole of the furnace cover 200 is connected with one end of a window connecting pipe, and the sealing central ring 301 is arranged at the other end of the window connecting pipe; a quartz glass plate 302 is arranged on the sealing center ring 301; the window flange 304 is disposed at the other end of the window connecting tube, and a baffle ring 303 is disposed between the window flange 304 and the quartz glass plate 302. A notch is provided in the seal center ring 301 and a quartz glass plate 302 is disposed in the notch. One side of the notch facing the quartz glass sheet 302 is provided with a sealing groove, and an O-shaped sealing ring is arranged in the sealing groove. The window connecting pipe is connected with the window flange opening 304 through a quick-connection clamp, so that the disassembly and assembly speed is higher, the operation is more convenient, and the time for subsequently cleaning the quartz glass sheet 302 is reduced.
The temperature measurement adjusting device 400 comprises a connecting plate 401, a horizontal sliding table, a linear push rod, a fixing plate 404 and a mounting plate 405; one end of the connecting plate 401 is connected with the frame 100; the horizontal sliding table comprises an X-axis linear sliding table 4021 and a Y-axis linear sliding table 4022; the other end of the connecting plate 401 is connected with a base of the X-axis linear sliding table 4021, and a base of the Y-axis linear sliding table 4022 is connected with a sliding block of the X-axis linear sliding table 4021; the slide block of the Y-axis linear sliding table 4022 is connected with the fixed plate 404; the fixed plate 404 is connected with the mounting plate 405; the linear push rods comprise an X-axis linear push rod 4031 and a Y-axis linear push rod 4032; the fixed end of the X-axis linear push rod 4031 is connected with the base of the X-axis linear sliding table 4021, and the movable end of the X-axis linear push rod 4031 is connected with the sliding block of the X-axis linear sliding table 4021; the fixed end of the Y-axis linear push rod 4032 is connected with the base of the Y-axis linear sliding table 4022, and the movable end of the Y-axis linear push rod 4032 is connected with the sliding block of the Y-axis linear sliding table 4022; one end of the fixing plate 404 is connected with the slide block of the Y-axis linear sliding table 4022, and the other end is connected with the mounting plate 405; the infrared thermometer 500 is disposed on the mounting plate 405.
The X-axis linear push rod 4031 and the Y-axis linear push rod 4032 respectively push the X-axis linear sliding table 4021 and the Y-axis linear sliding table 4022, and the position of the infrared thermometer 500 in the horizontal direction can be finally adjusted.
A leveling component is arranged between the fixing plate 404 and the mounting plate 405, and is used for adjusting the levelness between the mounting plate 405 and the fixing plate 404. More specifically, three sets of screw holes are circumferentially disposed on the fixing plate 404 and the mounting plate 405, and each set of screw holes includes two screw holes and one connecting hole. When an installer installs the screws, the installer can adjust the depth of the three sets of screws screwed into the threaded holes to make the mounting plate 405 in a state parallel to the temperature measurement light spot, so that the temperature measurement line of the infrared thermometer 500 is parallel to the temperature measurement channel. The specific adjusting method is that each group of screws is divided into two, one of the screws passes through a connecting hole of the mounting plate 405 and then is screwed into a threaded hole on the fixing plate 404, the other screw passes through a threaded hole on the mounting plate 405 and then is propped against the fixing plate 404 by an end face, and the mounting plate 405 is adjusted by the fact that the screwing depths of the three groups of screws are different.
The temperature measurement adjusting device 400 further includes a light shield 406, and the light shield 406 is disposed between the infrared thermometer 500 and the window flange opening 304. The light-absorbing layer is sprayed in the light shield 406. The light shield 406 can block most of the light from the outside during the operation of the device, but some light with incident angle can still enter between the window flange opening 304 and the light shield 406, and the light is either direct or reflected between the window flange opening 304 and the light shield 406, and the light absorption layer can absorb the direct or reflected light, so as to eliminate the influence of the light on the temperature measurement accuracy of the infrared thermometer 500.
The infrared thermometer 500 in the device can detect heat in a reaction chamber of equipment, generate a thermal image on a video monitor and finish temperature calculation, and the computer can find the position of a temperature measuring spot in the image according to an algorithm through the thermal image uploaded by the infrared thermometer 500, so that the linear push rod is controlled to adjust the position of a temperature measuring center of the infrared thermometer 500 and move the position of the temperature measuring center of the spot in the image.
When the temperature measurement adjusting device of the crystal growth furnace in this embodiment is installed, an installer adjusts a fixing screw between the mounting plate 405 and the fixing plate 404 according to actual requirements, because the infrared thermometer 500 is installed perpendicular to the mounting plate 405, if the angle of the upper plane of the mounting plate 405 changes, the inclination of the infrared thermometer 500 also changes, and further the vertical position of the infrared thermometer 500 relative to the reaction chamber can be adjusted, the infrared energy in the reaction chamber is detected by the infrared thermometer 500 through a temperature measurement window, and the infrared thermometer 500 generates a thermal image on a video monitor, at this time, a computer analyzes the thermal image transmitted from the infrared thermometer 500 according to an algorithm, finds out the central position of a light spot in the image, and then moves the infrared thermometer 500 in the horizontal direction by controlling the extension and retraction of the push rods of the two linear push rods, so that the temperature measurement center of the infrared thermometer 500 is aligned with the center of the light spot.
It should be noted that, as is apparent to those skilled in the art, the present invention is not limited to the details of the above-described exemplary embodiments, but can be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein, and any reference signs in the claims are not to be construed as limiting the claim concerned.
The principle and the implementation mode of the present invention are explained by applying specific examples in the present specification, and the above descriptions of the examples are only used to help understanding the method and the core idea of the present invention; meanwhile, for those skilled in the art, the idea of the present invention may be changed in the specific embodiments and the application range. In summary, the content of the present specification should not be construed as a limitation of the present invention.
Claims (10)
1. A temperature measurement adjusting device of a crystal growth furnace is characterized by comprising a frame, a furnace cover, a temperature measurement window and a temperature measurement adjusting device; the frame is arranged outside the furnace body, a through hole is formed in the middle of the furnace cover, and the temperature measuring window is arranged on the outer side of the furnace cover and is coaxial with the through hole; the temperature measurement adjusting device is arranged on the frame and used for installing an infrared thermometer and adjusting the position of the infrared thermometer.
2. The crystal growth furnace temperature measurement adjusting device according to claim 1, wherein the temperature measurement window comprises a sealing center ring, a quartz glass sheet, a baffle ring and a window flange opening; the through hole of the furnace cover is connected with one end of a window connecting pipe, and the sealing central ring is arranged at the other end of the window connecting pipe; the quartz glass sheet is arranged on the sealing center ring; the window flange opening is arranged at the other end of the window connecting pipe, and the baffle ring is arranged between the window flange opening and the quartz glass sheet.
3. The crystal growth furnace temperature measurement adjusting device according to claim 2, wherein the sealing center ring is provided with a notch, and the quartz glass sheet is arranged in the notch.
4. The temperature measurement adjusting device of the crystal growth furnace as claimed in claim 3, wherein a sealing groove is formed in one side of the notch facing the quartz glass sheet, and a sealing ring is arranged in the sealing groove.
5. The crystal growth furnace temperature measurement adjusting device according to claim 2, wherein the window connecting pipe is connected with the window flange port through a quick-connection clamp and sealed through an O-shaped ring.
6. The crystal growth furnace temperature measurement adjusting device of claim 2, wherein the temperature measurement adjusting device comprises a connecting plate, a horizontal sliding table, a linear push rod, a fixing plate and a mounting plate;
one end of the connecting plate is connected with the frame;
the horizontal sliding table comprises an X-axis linear sliding table and a Y-axis linear sliding table; the other end of the connecting plate is connected with a base of the X-axis linear sliding table, and a base of the Y-axis linear sliding table is connected with a sliding block of the X-axis linear sliding table; the sliding block of the Y-axis linear sliding table is connected with the fixed plate; the fixing plate is connected with the mounting plate;
the linear push rods comprise an X-axis linear push rod and a Y-axis linear push rod; the fixed end of the X-axis linear push rod is connected with the base of the X-axis linear sliding table, and the movable end of the X-axis linear push rod is connected with the sliding block of the X-axis linear sliding table; the fixed end of the Y-axis linear push rod is connected with the base of the Y-axis linear sliding table, and the movable end of the Y-axis linear push rod is connected with the sliding block of the Y-axis linear sliding table;
one end of the fixed plate is connected with a sliding block of the Y-axis linear sliding table, and the mounting plate is connected with the fixed plate; the infrared thermometer is arranged on the mounting plate.
7. The crystal growth furnace temperature measurement adjusting device of claim 6, wherein a leveling component is arranged between the fixing plate and the mounting plate, and the leveling component is used for adjusting levelness between the mounting plate and the fixing plate.
8. The crystal growth furnace temperature measurement adjusting device according to claim 7, wherein the leveling assembly comprises three adjusting screw groups, each adjusting screw group comprising two screws; three screw hole groups are arranged on the fixing plate and the mounting plate, and each screw hole group comprises two threaded holes and a connecting hole;
one screw passes through the mounting plate connecting hole and then is screwed into a threaded hole on the fixing plate, and the other screw is screwed into the rear end part of the threaded hole on the mounting plate and props against the fixing plate.
9. The crystal growth furnace temperature measurement adjusting device of claim 6, further comprising a light shield disposed between the infrared thermometer and the window flange.
10. The crystal growth furnace temperature measurement adjusting device according to claim 9, wherein a light absorbing layer is sprayed in the light shield.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222801078.6U CN218642868U (en) | 2022-10-24 | 2022-10-24 | Temperature measurement adjusting device of crystal growth furnace |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222801078.6U CN218642868U (en) | 2022-10-24 | 2022-10-24 | Temperature measurement adjusting device of crystal growth furnace |
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| Publication Number | Publication Date |
|---|---|
| CN218642868U true CN218642868U (en) | 2023-03-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222801078.6U Active CN218642868U (en) | 2022-10-24 | 2022-10-24 | Temperature measurement adjusting device of crystal growth furnace |
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| CN (1) | CN218642868U (en) |
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- 2022-10-24 CN CN202222801078.6U patent/CN218642868U/en active Active
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Address after: No. 365, Xinxing 1st Road, Cixi hi tech Industrial Development Zone, Ningbo City, Zhejiang Province, 315300 Patentee after: Ningbo Hengpu Technology Co.,Ltd. Address before: No. 365, Xinxing 1st Road, Cixi hi tech Industrial Development Zone, Ningbo City, Zhejiang Province, 315300 Patentee before: Ningbo Hengpu Vacuum Technology Co.,Ltd. |