CN104499057A - View window device for infrared pyrometer - Google Patents

View window device for infrared pyrometer Download PDF

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Publication number
CN104499057A
CN104499057A CN201510004173.5A CN201510004173A CN104499057A CN 104499057 A CN104499057 A CN 104499057A CN 201510004173 A CN201510004173 A CN 201510004173A CN 104499057 A CN104499057 A CN 104499057A
Authority
CN
China
Prior art keywords
water
adjusting base
cooled sleeve
infrared pyrometer
chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201510004173.5A
Other languages
Chinese (zh)
Inventor
张云伟
李百泉
何丽娟
李海飞
樊中华
翟德云
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CENTURY GOLDRAY SEMICONDUCTOR CO., LTD.
Original Assignee
BEIJING HUAJIN CHUANGWEI ELECTRONICS Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BEIJING HUAJIN CHUANGWEI ELECTRONICS Co Ltd filed Critical BEIJING HUAJIN CHUANGWEI ELECTRONICS Co Ltd
Priority to CN201510004173.5A priority Critical patent/CN104499057A/en
Publication of CN104499057A publication Critical patent/CN104499057A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a view window device for an infrared pyrometer, which comprises a mounting base and a water-cooling sleeve, wherein the infrared pyrometer is arranged on the mounting base; the water-cooling sleeve is connected between the mounting base and a single-crystal furnace; the inner chamber of the water-cooling sleeve is connected with the furnace chamber of the single-crystal furnace; a water interlayer is arranged at the outer side of the inner chamber of the water-cooling sleeve; the mounting base comprises a first regulating base and a second regulating base; and the infrared pyrometer is aligned with a temperature-measuring point in the single-crystal furnace by controlling the first regulating base and the second regulating base. According to the invention, a water-cooling temperature insulation manner is adopted, and the two regulating bases are used for regulation, thus overcoming the defect that the temperature-measuring point can not be regulated at will when the infrared pyrometer is directly fixed on a crystal-growing furnace, and lowering the working temperature. Besides, the view window device is convenient to operate and high in measurement reliability.

Description

The observation window device that a kind of infrared pyrometer uses
Technical field
The present invention relates to a kind of observation window device be connected on crystal growth process furnace, infrared pyrometer can aim at the point for measuring temperature in process furnace through this device.
Background technology
Growing method has crystal pulling method, gas phase subliming method, chemical Vapor deposition process etc. usually, and these growth temperatures are usually higher, can reach more than 1000 DEG C, and chemical substance is easy and thermocouple reacts, or thermocouple is difficult to cleaning after growth.
At present, bring into use the pyrometer of infrared light measuring tempeature to detect the crystalline temp in crystal growing process in industry, eliminate thermocouple in time.The useful range of infrared pyrometer reaches as high as 3000 DEG C, and does not contact with reactive material, decreases the pollution in crystal growth.But the operating ambient temperature of infrared pyrometer is higher, reduction of service life, due to the difference of crystal shape and growth method, how to adjust infrared pyrometer make it an aim at difficult problem that point for measuring temperature is all puzzlement those skilled in the art.
Summary of the invention
For prior art Problems existing, the object of the present invention is to provide a kind of observation window device that greatly can reduce infrared pyrometer working temperature, be convenient to adjust infrared pyrometer aligning point for measuring temperature.
For achieving the above object, the observation window device that a kind of infrared pyrometer of the present invention uses, this observation window device comprises mount pad and water-cooled sleeve, infrared pyrometer is arranged on described mount pad, described water-cooled sleeve is connected between mount pad and single crystal growing furnace, and the inner chamber of water-cooled sleeve is connected with the furnace chamber of described single crystal growing furnace;
Wherein, the inner chamber arranged outside of water-cooled sleeve has water interlayer, mount pad comprises the first adjusting base and the second adjusting base, described first adjusting base and described second adjusting base are provided with vision slit, first adjusting base is arranged on the end away from single crystal growing furnace of water-cooled sleeve, second adjusting base is arranged on the first adjusting base, infrared pyrometer is fixed on described second adjusting base, between first adjusting base and the second adjusting base, fix respectively by multiple adjusting bolt perpendicular to water-cooled sleeve axis direction between first adjusting base and water-cooled sleeve, and the position of infrared pyrometer is adjusted by the collapsing length of regulating and controlling bolt, its inner chamber through two described vision slits and water-cooled sleeve is made to detect the temperature of point for measuring temperature in described single crystal growing furnace,
The vision slit of the inner chamber of water-cooled sleeve, the vision slit of the first adjusting base or the second adjusting base is provided with the hermetic seal partition be made up of glass or quartz, ensures the vacuum tightness in single crystal growing furnace while not affecting infrared pyrometer and measuring.
Further, described first adjusting base and described second adjusting base, described adjusting bolt between the first adjusting base and described water-cooled sleeve are uniform along the circumferential direction of water-cooled sleeve, and at least arrange three.
Further, the described water interlayer of described current sleeve is provided with water-in and water outlet.
Infrared pyrometer is through the vision slit in the first adjustment seat and the second adjustment seat, and the inner chamber of water-cooled sleeve detects the temperature of point for measuring temperature in single crystal growing furnace; Water-cooled sleeve is used for stopping high temperature; Controlled the relative position of the first adjustment seat and the second adjustment seat by adjusting bolt, realize infrared pyrometer and aim at monitoring point, in use, also can by only regulating the second adjustment seat to realize; Hermetic seal partition stops high temperature further, ensures the vacuum tightness in single crystal growing furnace simultaneously; Improve because of the inaccurate problem of temperature survey that the problems such as point for measuring temperature departs from cause in camera lens process of growth, this device is easy to operate, the reliability of measuring result is high.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention.
Embodiment
Below, with reference to accompanying drawing, the present invention is more fully illustrated, shown in the drawings of exemplary embodiment of the present invention.But the present invention can be presented as multiple multi-form, and should not be construed as the exemplary embodiment being confined to describe here.But, these embodiments are provided, thus make the present invention comprehensively with complete, and scope of the present invention is fully conveyed to those of ordinary skill in the art.
For ease of illustrating, here can use such as " on ", the space relative terms such as D score " left side " " right side ", for illustration of the element of shown in figure or the feature relation relative to another element or feature.It should be understood that except the orientation shown in figure, spatial terminology is intended to comprise device different azimuth in use or operation.Such as, if the device in figure is squeezed, be stated as the element being positioned at other elements or feature D score will be positioned at other elements or feature " on ".Therefore, exemplary term D score can comprise upper and lower both orientation.Device can otherwise be located (90-degree rotation or be positioned at other orientation), and space used here illustrates relatively can correspondingly explain.
Be illustrated in figure 1 the specific embodiment of the observation window device that a kind of infrared pyrometer of the present invention uses, this observation window device comprises mount pad and water-cooled sleeve 1, infrared pyrometer 2 is arranged on mount pad, single crystal growing furnace is provided with Link Port 3, the lower end of water-cooled sleeve 1 is connected on the Link Port 3 of single crystal growing furnace, the upper end of water-cooled sleeve 1 is connected on mount pad, the inner chamber 4 of water-cooled sleeve 1 is connected with the furnace chamber of single crystal growing furnace by Link Port 3, water interlayer 5 is had in the inner chamber arranged outside of water-cooled sleeve 1, water interlayer 5 is provided with water-in 6 and water outlet 7, water coolant enters water interlayer 5 from water-in 6, lower the temperature to water-cooled sleeve 1 inner chamber 4, water coolant after heat exchange flows out water interlayer 5 from water outlet 7.
Mount pad comprises the first adjusting base 8 and the second adjusting base 9, first adjusting base 8 and the second adjusting base 9 are provided with vision slit 10,11, the signal sampling channel that infrared pyrometer 2 detects point for measuring temperature temperature in process furnace is formed by vision slit 10,11 and water-cooled sleeve 1 inner chamber, the packing sheet 12 of a hermetic seal is set in this passage, packing sheet 12 has quartz or glass material to make, further stop high temperature, ensure the vacuum tightness in single crystal growing furnace, do not affect the thermometric of infrared pyrometer 2 simultaneously.First adjusting base 8 is arranged on the upper end of water-cooled sleeve 1, second adjusting base 9 is arranged on the first adjusting base 8, infrared pyrometer 2 is fixed on the second adjusting base 9, therefore, packing sheet 12 can be arranged in the inner chamber 4 of water-cooled sleeve 1 or is arranged on the vision slit 10 of the first adjusting base 8 or is arranged on the vision slit 11 of the second adjusting base 9, and example is in FIG arranged on the vision slit 10 of the first adjusting base 8 by packing sheet 12.Between the first adjusting base 8 and water-cooled sleeve 1, multiple adjusting bolt perpendicular to water-cooled sleeve 1 axis direction is set, this adjusting bolt passes screw 14 overhead in the circumferential exterior surface of water-cooled sleeve 1, first adjusting base 8 is fixed on water-cooled sleeve 1 upper end, and adjusting bolt is at least provided with uniform three of circumferential direction along water-cooled sleeve 1, by adjusting the extrusion of adjusting bolt and then controlling the relative position of the first adjusting base 8 and water-cooled sleeve 1, same, between the first adjusting base 8 and the second adjusting base 9, multiple adjusting bolt perpendicular to water-cooled sleeve 1 axis direction is set, this adjusting bolt passes screw 13 overhead in the circumferential exterior surface of the second adjusting base 9, second adjusting base 9 is fixed on the first adjusting base 8, and this adjusting bolt is at least provided with uniform three of circumferential direction along water-cooled sleeve 1, by adjusting the extrusion of adjusting bolt and then controlling the relative position of the second adjusting base 9 and the first adjusting base 8, make infrared pyrometer 2 through these two vision slits 10 by twice adjustment, 11 and the inner chamber 4 of water-cooled sleeve 1 detect and be positioned at the temperature of the point for measuring temperature of single crystal growing furnace.

Claims (3)

1. the observation window device of an infrared pyrometer use, it is characterized in that, this observation window device comprises mount pad and water-cooled sleeve, infrared pyrometer is arranged on described mount pad, described water-cooled sleeve is connected between mount pad and single crystal growing furnace, and the inner chamber of water-cooled sleeve is connected with the furnace chamber of described single crystal growing furnace;
Wherein, the inner chamber arranged outside of water-cooled sleeve has water interlayer, mount pad comprises the first adjusting base and the second adjusting base, described first adjusting base and described second adjusting base are provided with vision slit, first adjusting base is arranged on the end away from single crystal growing furnace of water-cooled sleeve, second adjusting base is arranged on the first adjusting base, infrared pyrometer is fixed on described second adjusting base, between first adjusting base and the second adjusting base, fix respectively by multiple adjusting bolt perpendicular to water-cooled sleeve axis direction between first adjusting base and water-cooled sleeve, and the position of infrared pyrometer is adjusted by the collapsing length of regulating and controlling bolt, its inner chamber through two described vision slits and water-cooled sleeve is made to detect the temperature of point for measuring temperature in described single crystal growing furnace,
The vision slit of the inner chamber of water-cooled sleeve, the vision slit of the first adjusting base or the second adjusting base is provided with the hermetic seal partition be made up of glass or quartz, ensures the vacuum tightness in single crystal growing furnace while not affecting infrared pyrometer and measuring.
2. observation window device as claimed in claim 1, it is characterized in that, described first adjusting base and described second adjusting base, described adjusting bolt between the first adjusting base and described water-cooled sleeve are uniform along the circumferential direction of water-cooled sleeve, and at least arrange three.
3. observation window device as claimed in claim 1, is characterized in that, the described water interlayer of described current sleeve is provided with water-in and water outlet.
CN201510004173.5A 2015-01-06 2015-01-06 View window device for infrared pyrometer Pending CN104499057A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201510004173.5A CN104499057A (en) 2015-01-06 2015-01-06 View window device for infrared pyrometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201510004173.5A CN104499057A (en) 2015-01-06 2015-01-06 View window device for infrared pyrometer

Publications (1)

Publication Number Publication Date
CN104499057A true CN104499057A (en) 2015-04-08

Family

ID=52940506

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201510004173.5A Pending CN104499057A (en) 2015-01-06 2015-01-06 View window device for infrared pyrometer

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Country Link
CN (1) CN104499057A (en)

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0618334A (en) * 1992-06-29 1994-01-25 Mikuni Seisakusho:Kk Temperature measuring device for heated matter
CN2656970Y (en) * 2003-10-24 2004-11-17 北京七星华创电子股份有限公司 Temp. monitor device
CN101982742A (en) * 2010-11-01 2011-03-02 庆天袆 Infrared thermometry device
CN202039160U (en) * 2011-02-18 2011-11-16 上海普罗新能源有限公司 Infrared thermometer-mounting mechanism for polycrystalline silicon ingot furnaces
CN202247020U (en) * 2011-10-09 2012-05-30 晶伟电子材料有限公司 Monocrystalline silicon round rod splicing device
CN202390572U (en) * 2011-08-30 2012-08-22 宁夏日晶新能源装备股份有限公司 Polycrystal furnace adopting polycrystal furnace infrared temperature controlling device
CN103290486A (en) * 2012-02-29 2013-09-11 宁夏日晶新能源装备股份有限公司 Liquid level temperature measuring device for single crystal furnace
CN204530025U (en) * 2015-01-06 2015-08-05 北京华进创威电子有限公司 The observation window device that a kind of infrared pyrometer uses

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0618334A (en) * 1992-06-29 1994-01-25 Mikuni Seisakusho:Kk Temperature measuring device for heated matter
CN2656970Y (en) * 2003-10-24 2004-11-17 北京七星华创电子股份有限公司 Temp. monitor device
CN101982742A (en) * 2010-11-01 2011-03-02 庆天袆 Infrared thermometry device
CN202039160U (en) * 2011-02-18 2011-11-16 上海普罗新能源有限公司 Infrared thermometer-mounting mechanism for polycrystalline silicon ingot furnaces
CN202390572U (en) * 2011-08-30 2012-08-22 宁夏日晶新能源装备股份有限公司 Polycrystal furnace adopting polycrystal furnace infrared temperature controlling device
CN202247020U (en) * 2011-10-09 2012-05-30 晶伟电子材料有限公司 Monocrystalline silicon round rod splicing device
CN103290486A (en) * 2012-02-29 2013-09-11 宁夏日晶新能源装备股份有限公司 Liquid level temperature measuring device for single crystal furnace
CN204530025U (en) * 2015-01-06 2015-08-05 北京华进创威电子有限公司 The observation window device that a kind of infrared pyrometer uses

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Effective date of registration: 20170109

Address after: Tonghui trunk road 100176 Beijing city Daxing District economic and Technological Development Zone No. 17 hospital

Applicant after: CENTURY GOLDRAY SEMICONDUCTOR CO., LTD.

Address before: Tonghui trunk road 101111 Beijing city Daxing District economic and Technological Development Zone No. 17 hospital

Applicant before: Beijing Huajin Chuangwei Electronics Co., Ltd.

C41 Transfer of patent application or patent right or utility model
RJ01 Rejection of invention patent application after publication

Application publication date: 20150408

RJ01 Rejection of invention patent application after publication