CN218631955U

CN218631955U - Detachable silicon boat and tool thereof

Info

Publication number: CN218631955U
Application number: CN202222106685.0U
Authority: CN
Inventors: 范荣; 李士昌
Original assignee: Shengjisheng Precision Technology Ningbo Co ltd; SGS Ningbo Semiconductor Technology Co Ltd
Current assignee: Shengjisheng Precision Technology Ningbo Co ltd; SGS Ningbo Semiconductor Technology Co Ltd
Priority date: 2022-08-11
Filing date: 2022-08-11
Publication date: 2023-03-14
Anticipated expiration: 2032-08-11

Abstract

The utility model provides a removable silicon boat, including the extension board of two relative settings, and be located two left tooth bars between the extension board, right side tooth bar and spacing tooth bar, the opposite face of two extension boards be equipped with a plurality ofly with left tooth bar, the protruding portion of the end looks joint of right tooth bar and spacing tooth bar, protruding portion is equipped with tightly decides the hole, left side tooth bar, the tip of right tooth bar and spacing tooth bar all is equipped with the fastener that is connected to tightly decides the hole, the opposite side of left side tooth bar and right tooth bar is equipped with respectively puts the groove, it is equipped with the portion of shelving that is used for supporting the wafer to put the groove, spacing tooth bar is equipped with the spacing groove. Compared with the prior art, the silicon boat structure of the scheme is convenient to disassemble and assemble, and an operator can more accurately perform assembly operation by arranging the convex embedding part, so that the assembly precision is effectively improved, and the silicon boat structure has better practicability. The application also discloses frock of removable silicon boat, including limiting plate, support clamp platform and spacing clamp platform to can make left tooth stick, right tooth stick or spacing tooth stick keep accomplishing the assembly at required angle.

Description

Detachable silicon boat and tool thereof

Technical Field

The utility model relates to a technical field of semiconductor processing equipment, concretely relates to removable silicon boat and frock of removable silicon boat.

Background

Wafers are silicon wafers used for manufacturing silicon semiconductor circuits, and the main processing methods thereof include single wafer processing and batch wafer processing, i.e., processing a single wafer or a plurality of wafers at a time. During wafer production, it is generally necessary to transport through a silicon boat.

The common silicon boat mostly comprises a top plate, a bottom plate and a plurality of side tooth bars, wherein two ends of the side tooth bars are respectively connected to the top cover and the bottom cover, and the inner sides of the side tooth bars are provided with shelving slots for supporting wafers. In most silicon boats on the market at present, a top plate, a bottom plate and side tooth rods are formed by direct welding, so that the processing cost is high, and the precision is low; in addition, some detachable silicon boats are available, but the disassembly and the assembly are troublesome and the assembly precision is low.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the problem that the silicon boat in the prior art is troublesome to disassemble and assemble and has lower assembly precision.

In order to solve the problem, the utility model provides a removable silicon boat, including the extension board of two relative settings and all be located left tooth stick, right tooth stick and at least one spacing tooth stick between two extension boards, two the left front portion, the right front portion and the rear portion of the opposite face of extension board be equipped with respectively a plurality of with the protruding embedded part of the end looks joint of left tooth stick, right tooth stick and spacing tooth stick, protruding embedded part is equipped with tightly decides the hole, the tip of left side tooth stick, right tooth stick and spacing tooth stick all is equipped with the fastener that is connected to tightly decides the hole, the opposite side of left side tooth stick and right tooth stick is equipped with the rest groove that is used for supplying the wafer to pass of a plurality of long edge direction distributions respectively, rest the groove and be equipped with the portion of shelving that is used for supporting the wafer that is used for supporting wafer that the rest groove corresponds one by one step.

Above-mentioned scheme makes the tip of left tooth stick, right tooth stick and spacing tooth stick can be fixed a position in advance at the relevant position of extension board through the setting of protruding portion, is connected to the fastener again afterwards and tightly decides the hole, can realize the removable installation of the relative extension board of left tooth stick, right tooth stick and spacing tooth stick. Compared with the prior art, the scheme is convenient to disassemble and assemble, the operator can accurately perform assembly operation by arranging the convex embedding part, the assembly precision is effectively improved, and the novel assembling tool has better practicability.

Preferably, the end parts of the left toothed bar, the right toothed bar and the limiting toothed bar are provided with mounting holes, and the fasteners are bolts and are connected to the mounting holes, so that the mounting and dismounting are convenient.

Preferably, the end faces of the end portions of the left tooth bar, the right tooth bar and the limiting tooth bar are respectively provided with a strip-shaped clamping groove, the convex embedding portions are strip-shaped bosses protruding out of the opposite faces of the two support plates respectively, the insertion direction of the strip-shaped bosses and the insertion direction of the strip-shaped clamping grooves are perpendicular to the radial direction of the support plates, and the mounting holes and the tightening holes are opposite to the radial direction of the support plates and are respectively located in the strip-shaped clamping grooves and the strip-shaped bosses. Through designing the grafting direction to strip boss and strip draw-in groove, not only make left tooth stick, right tooth stick and spacing tooth stick to get into from the side of extension board and assemble, it is more convenient to assemble the operation, makes left tooth stick, right tooth stick and spacing tooth stick can bear the radial external force of relative extension board better moreover, and overall structure is more stable.

As preferred, the terminal surface of the tip of left side tooth stick, right tooth stick and spacing tooth stick all is equipped with the column draw-in groove, the convex embedded portion is respectively protrusion in the column boss of two extension board opposite faces, the grafting direction of column boss and column draw-in groove is on a parallel with the axial of extension board, mounting hole is relative with tight locating hole the radial setting of extension board just is located respectively column draw-in groove and column boss, the setting up of column boss are convenient for left tooth stick, right tooth stick and spacing tooth stick radial positioning when the assembly for the assembly is more accurate.

Preferably, the support plate is a flange plate, so that the support plate is convenient to process and convenient for subsequent operation.

Preferably, the placing groove is formed in the side, away from the limiting toothed bar, of the left toothed bar and the right toothed bar, and the placing portion protrudes towards the middle position of the left toothed bar and the middle position of the right toothed bar, so that stable support for the wafer is achieved.

The utility model also provides a frock of removable silicon boat is applied to as above removable silicon boat, press from both sides the platform and be located two spacing clamp platforms between two support clamp platforms including the support of limiting plate, two adjacent settings, the support is pressed from both sides the platform and is equipped with the fixed plate and towards the clamping bolt that the fixed plate activity set up, leave the space that supplies the extension board to get into between clamping bolt and the fixed plate, spacing one end arch of pressing from both sides the platform is equipped with in order to form holder and the other end and can follow lateral sliding's support and push away the piece, the limiting plate is connected to including rotating spacing end of pressing from both sides and being located spacing portion between holder and the support and push away the piece, spacing portion is used for supporting left dentate stick, right dentate stick or spacing dentate stick, it is used for promoting to push away the piece spacing portion court the holder rotates so that left dentate stick, right dentate stick or spacing dentate stick are by the centre gripping between holder and spacing portion.

Above-mentioned scheme is through supporting the impetus of pushing away the piece to the limiting plate for spacing portion can be adjusted to required angle, and then laminates to the spacing portion of limiting plate through the side with left tooth stick, right tooth stick or spacing tooth stick, can make left tooth stick, right tooth stick or spacing tooth stick can be held between spacing portion and holder with suitable angle, makes things convenient for the assembly operation of follow-up relative extension board of left tooth stick, right tooth stick or spacing tooth stick. Compared with the prior art, above-mentioned scheme simple to use, convenient operation, and can make left tooth stick, right tooth stick or spacing tooth stick keep accomplishing the assembly at required angle, possess better practicality.

Drawings

FIG. 1 is an isometric view of a removable silicon boat;

FIG. 2 is a schematic front view of a detachable silicon boat;

FIG. 3 isbase:Sub>A schematic cross-sectional view taken along line A-A in FIG. 2;

FIG. 4 is an axial view of a support plate of a removable silicon boat;

FIG. 5 isbase:Sub>A schematic cross-sectional view of another embodiment taken along line A-A of FIG. 2;

FIG. 6 is a schematic axial view of a support plate of another embodiment of a removable silicon boat;

FIG. 7 is an isometric view of a tool for a removable silicon boat;

FIG. 8 is a cross-sectional view of a position limiting clamp of a tool for a detachable silicon boat.

The description of the reference numerals,

a1, a support plate; a11, fastening holes; a12, strip-shaped bosses; a13, columnar bosses; a2, a left toothed bar; a21, placing grooves; a22, a placing part; a3, a right tooth bar; a4, limiting toothed bars; a41, a limiting groove; a42, strip-shaped clamping grooves; a43, columnar clamping grooves; a44, mounting holes; a5, a fastener;

b1, supporting a clamping table; b11, fixing plates; b12, clamping a bolt; b2, limiting the clamping table; b21, a clamping seat; b22, a pushing piece; b23, limiting plates; b231, a limiting part; b232, a switching end; b24, positioning bolts.

Detailed Description

In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, embodiments accompanied with figures are described in detail below. The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention. It should be noted that all the directional indicators (such as upper, lower, left, right, front, rear, inner and outer) in the embodiments of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.

Referring to fig. 1-4, an embodiment of the present invention provides a detachable silicon boat, including two opposite support plates a1, and a left tooth bar a2, a right tooth bar a3 and at least one limiting tooth bar a4, which are located between the two support plates a1, wherein the left front portion, the right front portion and the rear portion of the opposite surfaces of the two support plates a1 are respectively provided with a plurality of convex embedding portions which are clamped with the end portions of the left tooth bar a2, the right tooth bar a3 and the limiting tooth bar a4, the convex embedding portions are provided with fastening holes a11, the end portions of the left tooth bar a2, the right tooth bar a3 and the limiting tooth bar a4 are respectively provided with fastening pieces a5 connected to the fastening holes a11, the opposite sides of the left tooth bar a2 and the right tooth bar a3 are respectively provided with a plurality of shelf grooves 21 which are distributed along the long side direction and are used for wafers to pass through, the shelf grooves a21 are provided with shelf portions a22 for supporting wafers, and the limiting tooth bars a4 are provided with a plurality of limiting grooves 41 a corresponding to the wafer one by one.

The scheme enables the ends of the left tooth bar a2, the right tooth bar a3 and the limiting tooth bar a4 to be pre-positioned at corresponding positions of the support plate a1 through the arrangement of the convex embedding parts, and then the fastening piece a5 is connected to the fastening hole a11, so that the detachable installation of the left tooth bar a2, the right tooth bar a3 and the limiting tooth bar a4 relative to the support plate a1 can be realized. Compared with the prior art, the scheme is convenient to disassemble and assemble, the operator can accurately perform assembly operation by arranging the convex embedding part, the assembly precision is effectively improved, and the novel assembling tool has better practicability.

In this embodiment, the end portions of the left tooth bar a2, the right tooth bar a3 and the limiting tooth bar a4 are all provided with mounting holes a44, and the fasteners a5 are bolts and are connected to the mounting holes a44, so that the assembly and disassembly are convenient. The support plate a1 is a flange plate, so that the processing is convenient, and the subsequent operation is convenient.

The shape of the convex embedding part can be changed according to requirements, for example, in this embodiment, the end surfaces of the end parts of the left tooth bar a2, the right tooth bar a3 and the limiting tooth bar a4 are respectively provided with a strip-shaped clamping groove a42, the convex embedding part is a strip-shaped boss a12 protruding from the opposite surfaces of the two support plates a1, the strip-shaped clamping groove a42 and the strip-shaped boss are both elongated, the insertion direction of the strip-shaped boss a12 and the strip-shaped clamping groove a42 is perpendicular to the radial direction of the support plate a1, and the mounting hole a44 and the fastening hole a11 are both arranged in the radial direction of the support plate a1 and are respectively located in the strip-shaped clamping groove a42 and the strip-shaped boss a12. Through the grafting direction to strip boss a12 and strip draw-in groove a42 design, not only make left tooth stick a2, right tooth stick a3 and spacing tooth stick a4 can follow the side entering of extension board a1 and assemble, it is more convenient to assemble the operation, makes left tooth stick a2, right tooth stick a3 and spacing tooth stick a4 can bear the radial external force of relative extension board a1 better moreover, and overall structure is more stable.

In another embodiment, as shown in fig. 5 and 6, the end surfaces of the end portions of the left tooth bar a2, the right tooth bar a3 and the limiting tooth bar a4 are respectively provided with a cylindrical clamping groove a43, the convex embedding portions are cylindrical bosses a13 respectively protruding from opposite surfaces of the two support plates a1, the inserting direction of the cylindrical bosses a13 and the cylindrical clamping grooves a43 is parallel to the axial direction of the support plates a1, the mounting holes a44 and the fastening holes a11 are radially arranged relative to the support plates a1 and respectively located in the cylindrical clamping grooves a43 and the cylindrical bosses a13, and the arrangement of the cylindrical bosses a13 facilitates the radial positioning of the left tooth bar a2, the right tooth bar a3 and the limiting tooth bar a4 during assembling, so that the assembling is more accurate.

In this embodiment, the shelf a21 is located on the side of the left tooth bar a2 and the right tooth bar a3 away from the limit tooth bar a4, and the shelf portion a22 protrudes toward the middle position of the left tooth bar a2 and the right tooth bar a3, so as to realize stable support of the wafer.

As shown in fig. 7 and 8, the embodiment of the utility model provides a still provide a frock of removable silicon boat, be applied to removable silicon boat as above, including limiting plate b23, two adjacent support of setting press from both sides platform b1 and be located two spacing clamp platforms b2 between two support clamp platforms b1, the up end that supports clamp platform b1 is equipped with fixed plate b11 and can moves towards fixed plate b 11's clamping bolt b12, moves towards fixed plate b11 through rotating clamping bolt b12, can make extension board a1 by the centre gripping between fixed plate b11 and clamping bolt b 12. One end of the limiting clamping table b2 protrudes to form a clamping seat b21, the other end of the limiting clamping table b2 is provided with a pushing part b22 capable of sliding in the transverse direction, the limiting plate b23 comprises a switching end b232 connected to the limiting clamping table b2 in a rotating mode and a limiting part b231 located between the clamping seat b21 and the pushing part b22, the limiting part b231 is used for supporting the left tooth bar a2, the right tooth bar a3 or the limiting tooth bar a4, the side, facing the limiting part b231, of the pushing part b22 is an arc-shaped pushing surface, and the pushing surface of the pushing part b22 is used for pushing the limiting part b231 to rotate towards the clamping seat b21 so that the left tooth bar a2, the right tooth bar a3 or the limiting tooth bar a4 can be clamped between the clamping seat b21 and the limiting part 231 b 21.

More specifically, the restraint platform b2 is provided with an elongated slot disposed in the transverse direction and facing the restraint plate b23, and the elongated slot penetrates the restraint platform b2 in the vertical direction. The abutting part b22 is connected with the long-shaped groove in a sliding mode, so that the angle of the limiting part b231 of the limiting plate b23 can be adjusted through sliding the abutting part b22, and control is accurate. The bottom of the abutting part b22 is provided with a positioning bolt b24 inserted into the long groove, so that the position between the abutting part b22 and the long groove can be adjusted by adjusting the positioning bolt b24, and the operation is simple and convenient.

Although the present disclosure has been described above, the scope of the present disclosure is not limited thereto. It will be apparent to those skilled in the art that various changes and modifications can be made without departing from the spirit and scope of the disclosure, and those changes and modifications will fall within the scope of the invention.

Claims

1. The detachable silicon boat is characterized by comprising two opposite support plates (a 1), a left tooth bar (a 2), a right tooth bar (a 3) and at least one limiting tooth bar (a 4), wherein the left tooth bar (a 2), the right tooth bar (a 3) and the at least one limiting tooth bar (a 4) are located between the two support plates (a 1), a plurality of convex embedding parts are arranged on the left front part, the right front part and the rear part of the opposite surfaces of the two support plates (a 1) respectively, the convex embedding parts are in clamping connection with the end parts of the left tooth bar (a 2), the right tooth bar (a 3) and the limiting tooth bar (a 4), the convex embedding parts protrude out of the two opposite surfaces of the support plates (a 1), fastening parts (a 5) connected to the fastening holes (a 11) are arranged on the end parts of the left tooth bar (a 2), the right tooth bar (a 3) and the limiting tooth bar (a 4), a plurality of long-edge-direction-distributed grooves (a 21) for wafers to pass through are arranged on the opposite sides of the left tooth bar (a 2) and the right tooth bar (a 3), and a plurality of wafer-placing grooves (21 a) for supporting grooves (a 22 a) corresponding to the limiting tooth bar (a 4) are arranged one by one.

2. The detachable silicon boat according to claim 1, wherein the ends of the left gear bar (a 2), the right gear bar (a 3) and the limit gear bar (a 4) are provided with mounting holes (a 44), and the fasteners (a 5) are bolts and are connected to the mounting holes (a 44).

3. The detachable silicon boat according to claim 2, wherein the end surfaces of the ends of the left tooth bar (a 2), the right tooth bar (a 3) and the limit tooth bar (a 4) are respectively provided with a strip-shaped slot (a 42), the convex embedding parts are strip-shaped bosses (a 12) which respectively protrude from the opposite surfaces of the two support plates (a 1), the insertion direction of the strip-shaped bosses (a 12) and the strip-shaped slots (a 42) is perpendicular to the radial direction of the support plates (a 1), and the mounting holes (a 44) and the fastening holes (a 11) are arranged in the radial direction of the support plates (a 1) and are respectively located in the strip-shaped slots (a 42) and the strip-shaped bosses (a 12).

4. The detachable silicon boat according to claim 2, wherein the end surfaces of the ends of the left tooth bar (a 2), the right tooth bar (a 3) and the limit tooth bar (a 4) are provided with columnar clamping grooves (a 43), the convex embedding parts are columnar bosses (a 13) respectively protruding from the opposite surfaces of the two support plates (a 1), the plugging directions of the columnar bosses (a 13) and the columnar clamping grooves (a 43) are parallel to the axial direction of the support plates (a 1), and the mounting holes (a 44) and the fastening holes (a 11) are arranged in the radial direction of the support plates (a 1) and are respectively located in the columnar clamping grooves (a 43) and the columnar bosses (a 13).

5. A detachable silicon boat according to any one of claims 1 to 4, wherein said support plate (a 1) is a flange.

6. A detachable silicon boat according to any one of claims 1 to 4, characterized in that the rest (a 21) is located on the side of the left and right pins (a 2, a 3) away from the limit pin (a 4), and the rest (a 22) is convex toward the middle of the left and right pins (a 2, a 3).

7. A tool for a detachable silicon boat, which is applied to the detachable silicon boat as claimed in any one of claims 1 to 6, and is characterized by comprising a limiting plate (b 23), two adjacently arranged supporting clamping tables (b 1) and two limiting clamping tables (b 2) positioned between the two supporting clamping tables (b 1), wherein the supporting clamping tables (b 1) are provided with a fixing plate (b 11) and a clamping bolt (b 12) movably arranged towards the fixing plate (b 11), a gap for the supporting plate (a 1) to enter is reserved between the clamping bolt (b 12) and the fixing plate (b 11), one end of the limiting clamping table (b 2) is protruded to form a clamping seat (b 21), and the other end of the limiting clamping table is provided with a pushing piece (b 22) capable of sliding along the transverse direction, the limiting plate (b 23) comprises a switching end (b 232) rotatably connected to the limiting clamping table (b 2) and a limiting portion (b 231) located between the clamping seat (b 21) and the abutting piece (b 22), the limiting portion (b 231) is used for supporting the left tooth bar (a 2), the right tooth bar (a 3) or the limiting tooth bar (a 4), and the abutting piece (b 22) is used for pushing the limiting portion (b 231) to rotate towards the clamping seat (b 21) so that the left tooth bar (a 2), the right tooth bar (a 3) or the limiting tooth bar (a 4) can be clamped between the clamping seat (b 21) and the limiting portion (b 231).