CN218568795U - Concatenation formula silicon boat - Google Patents
Concatenation formula silicon boat Download PDFInfo
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- CN218568795U CN218568795U CN202222112549.2U CN202222112549U CN218568795U CN 218568795 U CN218568795 U CN 218568795U CN 202222112549 U CN202222112549 U CN 202222112549U CN 218568795 U CN218568795 U CN 218568795U
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- toothed bar
- bar
- limiting
- support plate
- tooth stick
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model provides a concatenation formula silicon boat, extension board and left tooth stick including two relative settings, right tooth stick and spacing tooth stick, the outer loop side of two extension boards is equipped with a plurality ofly and the concave embedding portion of left tooth stick, the tip looks joint of right tooth stick and spacing tooth stick, concave embedding portion is equipped with tightly decides the hole, left tooth stick, the tip of right tooth stick and spacing tooth stick all is equipped with the fastener, the opposite side of left tooth stick and right tooth stick is equipped with the rest groove that is used for supplying the wafer to pass respectively, the rest groove is equipped with the portion of putting that is used for supporting the wafer, spacing tooth stick is equipped with a plurality ofly and the rest groove corresponds the spacing groove that is used for supporting the wafer. The silicon boat structure of above-mentioned scheme easy dismounting, and make the operator can assemble the operation more accurately through the setting of location portion, effectively promoted the assembly precision, possessed better practicality.
Description
Technical Field
The utility model relates to a technical field of semiconductor processing equipment, concretely relates to anchor clamps of concatenation formula silicon boat and concatenation formula silicon boat.
Background
Wafers are silicon wafers used for manufacturing silicon semiconductor circuits, and the main processing methods thereof include single wafer processing and batch wafer processing, i.e., processing a single wafer or a plurality of wafers at a time. During wafer production, it is generally necessary to transport through a silicon boat.
The common silicon boat mostly comprises a top plate, a bottom plate and a plurality of side tooth bars, wherein two ends of the side tooth bars are respectively connected to the top cover and the bottom cover, and the inner sides of the side tooth bars are provided with shelving slots for supporting wafers. In most silicon boats on the market at present, a top plate, a bottom plate and side tooth rods are formed by direct welding, so that the processing cost is high, and the precision is low; in addition, some detachable silicon boat structures are available, but the disassembly and the assembly are troublesome and the assembly precision is low.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the problems that the disassembly and the assembly of the silicon boat structure in the prior art are troublesome and the assembly precision is low.
In order to solve the problem, the utility model provides a concatenation formula silicon boat, including the extension board of two relative settings and all be located left tooth stick, right tooth stick and at least one spacing tooth stick between two extension boards, two left front side, right front side and the rear side of the outer loop side of extension board be equipped with respectively a plurality of with the concave embedding portion of the tip looks joint of left tooth stick, right tooth stick and spacing tooth stick, concave embedding portion is equipped with tight fixed orifices, the tip of left tooth stick, right tooth stick and spacing tooth stick all is equipped with the fastener that is connected to tight fixed orifices, the opposite side of left tooth stick and right tooth stick is equipped with the groove of shelving that is used for supplying the wafer to pass of a plurality of long edge direction distributions respectively, it is equipped with the portion of shelving that is used for supporting the wafer to shelve the groove, spacing tooth stick be equipped with a plurality of with the spacing groove that is used for supporting the wafer that shelves the groove corresponds one by one.
According to the scheme, the end parts of the left toothed bar, the right toothed bar and the limiting toothed bar can be positioned at corresponding positions of the support plate in advance through the arrangement of the concave embedding parts, and then the fastening piece is connected to the fastening hole, so that the splicing type installation of the left toothed bar, the right toothed bar and the limiting toothed bar relative to the support plate can be realized; simultaneously, because concave embedding portion distributes in the outer loop side of extension board for left tooth stick, right tooth stick and spacing tooth stick can assemble with the extension board from side, and the personnel of being convenient for operate. Compared with the prior art, the scheme is convenient to disassemble and assemble, the operator can accurately carry out assembly operation by the aid of the concave embedding part, assembly precision is effectively improved, and the novel assembling tool has good practicability.
Preferably, the end parts of the left toothed bar, the right toothed bar and the limiting toothed bar are provided with mounting holes, and the fasteners are bolts and are connected to the mounting holes, so that the mounting and dismounting are convenient.
Preferably, the concave embedding part is a concave through groove penetrating through two end faces of the support plate, the end parts of the left tooth bar, the right tooth bar and the limiting tooth bar are all clamped to the concave through groove, and the mounting hole and the fastening hole are opposite to the radial arrangement of the support plate, so that the support plate is convenient to process and assemble.
Preferably, the concave through grooves on the side surface of the outer ring on the rear side of the support plate are two and are both conical, the two limiting gear rods are two, and the cross sections of the end parts of the two limiting gear rods are both conical, so that the overall stability is further improved, and a more stable supporting effect on the wafer is realized.
Preferably, the side of the end portion of each of the left toothed bar, the right toothed bar and the limiting toothed bar is provided with a strip-shaped transverse groove, each concave embedding portion is a concave clamping groove penetrating through two end faces of the support plate, the middle of each concave clamping groove is provided with an inserting piece which is inserted into the corresponding strip-shaped transverse groove, the mounting hole and the fastening hole are opposite to each other, the support plate is axially arranged and is respectively located in the corresponding strip-shaped transverse groove and the corresponding inserting piece, therefore, the assembly accuracy of the left toothed bar, the right toothed bar and the limiting toothed bar relative to the support plate is further improved, and the overall structure is firmer.
Preferably, the concave embedding part is a concave transverse groove arranged between the opposite surface of the support plate and the side surface of the outer ring, the side surfaces of the end parts of the left tooth bar, the right tooth bar and the limiting tooth bar are respectively provided with a raised strip-shaped lug which is inserted into the concave transverse groove, and the mounting hole and the fastening hole are axially arranged relative to the support plate and are respectively positioned on the strip-shaped lug and the concave transverse groove, so that the assembly is more convenient.
Preferably, the support plate is a flange plate, so that the support plate is convenient to machine and convenient for subsequent operation.
Preferably, the placing groove is located on the side, away from the limiting toothed bar, of the left toothed bar and the right toothed bar, and the placing part protrudes towards the middle position of the left toothed bar and the right toothed bar, so that stable support of the wafer is achieved.
The utility model also provides an anchor clamps of concatenation formula silicon boat is applied to as above concatenation formula silicon boat, support including limiting plate, two adjacent settings press from both sides the platform and be located two spacing clamp platforms between the support clamp platform, support the clamp platform and be equipped with the fixed plate and the clamping bolt that sets up towards the fixed plate activity, leave the space that supplies the extension board to get into between clamping bolt and the fixed plate, the one end arch of spacing clamp platform is equipped with in order to form holder and the other end and follows lateral sliding's support and push away the piece, the limiting plate is connected to including rotating the commentaries on classics end and the being located of holder spacing portion between holder and the support and push away the piece, spacing portion is used for supporting left tooth stick, right tooth stick or spacing tooth stick, it is used for promoting to push away the piece spacing portion court the holder rotates so that left tooth stick, right tooth stick or spacing tooth stick are by the centre gripping between holder and spacing portion.
Above-mentioned scheme is through supporting the impetus to the limiting plate for spacing portion can be adjusted to required angle, and then laminates to the spacing portion of limiting plate through the side with left tooth stick, right tooth stick or spacing tooth stick, can make left tooth stick, right tooth stick or spacing tooth stick can be held between spacing portion and holder with suitable angle, makes things convenient for the assembly operation of follow-up left tooth stick, right tooth stick or the relative extension board of spacing tooth stick. Compared with the prior art, above-mentioned scheme simple to use, convenient operation, and can make left tooth stick, right tooth stick or spacing tooth stick keep accomplishing the assembly at required angle, possess better practicality.
Drawings
FIG. 1 is a schematic view of a spliced silicon boat;
FIG. 2 is a schematic front view of a spliced silicon boat;
FIG. 3 is a schematic cross-sectional view of embodiment A taken along line X-X in FIG. 2;
FIG. 4 is a schematic view of an embodiment A of a support plate of a spliced silicon boat;
FIG. 5 is a schematic sectional view of embodiment B taken along line X-X in FIG. 2;
FIG. 6 is a schematic view of embodiment B of a support plate of a spliced silicon boat;
FIG. 7 is a schematic sectional view of embodiment C taken along line X-X in FIG. 2;
FIG. 8 is a schematic view of embodiment C of a support plate of a spliced silicon boat;
FIG. 9 is a schematic view of example C of the left tooth bar of a spliced silicon boat;
FIG. 10 is a cross-sectional view of embodiment D taken along line X-X in FIG. 2;
FIG. 11 is a schematic view of an embodiment D of a support plate of a spliced silicon boat;
FIG. 12 is an axial view of a fixture of a spliced silicon boat.
The description of the reference numerals,
a1, a support plate; a11, fastening holes; a12, concave through grooves; a13, concave clamping grooves; a131, inserting pieces; a14, concave transverse grooves; a2, a left toothed bar; a21, placing grooves; a22, a placing part; a3, a right tooth bar; a4, limiting toothed bars; a41, a limiting groove; a42, strip-shaped transverse grooves; a43, strip-shaped lugs; a44, mounting holes; a5, a fastener;
b1, supporting a clamping table; b11, fixing plates; b12, clamping a bolt; b2, limiting the clamping table; b21, a clamping seat; b22, a pushing piece; b23, a limiting plate; b231, a limiting part; b232, a switching end; b24, positioning bolts.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention more comprehensible, embodiments accompanied with figures are described in detail below. The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention. It should be noted that all the directional indicators (such as upper, lower, left, right, front, rear, inner and outer) in the embodiments of the present invention are only used to explain the relative position relationship between the components, the motion situation, etc. in a specific posture (as shown in the drawings), and if the specific posture is changed, the directional indicator is changed accordingly.
Referring to fig. 1-4, an embodiment of the present invention provides a spliced silicon boat, including two opposite support plates a1, and a left tooth bar a2, a right tooth bar a3 and at least one limiting tooth bar a4, which are located between the two support plates a1, the left front side, the right front side and the rear side of the outer ring side of the two support plates a1 are respectively provided with a plurality of recessed embedding portions which are clamped with the end portions of the left tooth bar a2, the right tooth bar a3 and the limiting tooth bar a4, the recessed embedding portions are provided with fastening holes a11, the end portions of the left tooth bar a2, the right tooth bar a3 and the limiting tooth bar a4 are respectively provided with fastening pieces a5 connected to the fastening holes a11, the opposite sides of the left tooth bar a2 and the right tooth bar a3 are respectively provided with a plurality of shelf grooves a21 which are distributed along the long side direction and are used for wafers to pass through, the shelf grooves a22 used for supporting wafers are provided on the limiting tooth bar a4, which is provided with a plurality of limiting grooves 41 a corresponding to the shelf grooves a21 one by one.
According to the scheme, the end parts of the left tooth bar a2, the right tooth bar a3 and the limiting tooth bar a4 can be positioned at corresponding positions of the support plate a1 in advance through the arrangement of the concave embedding parts, and then the fastening piece a5 is connected to the fastening hole a11, so that the splicing installation of the left tooth bar a2, the right tooth bar a3 and the limiting tooth bar a4 relative to the support plate a1 can be realized; meanwhile, the concave embedding parts are distributed on the side face of the outer ring of the support plate a1, so that the left tooth bar a2, the right tooth bar a3 and the limiting tooth bar a4 can be assembled with the support plate a1 from the side, and the operation of personnel is facilitated. Compared with the prior art, the scheme is convenient to disassemble and assemble, the operator can accurately carry out assembly operation by the aid of the concave embedding part, assembly precision is effectively improved, and the novel assembling tool has good practicability.
In this embodiment, the end portions of the left tooth bar a2, the right tooth bar a3 and the limiting tooth bar a4 are all provided with mounting holes a44, and the fasteners a5 are bolts and are connected to the mounting holes a44, so that the assembly and disassembly are convenient. The support plate a1 is a flange plate, so that the processing is convenient, and the subsequent operation is convenient.
The shape of the concave embedding part can be changed according to the requirement, as shown in fig. 3 and 4, in the embodiment a, the concave embedding part is a concave through groove a12 penetrating through two end faces of the support plate a1, the end parts of the left tooth bar a2, the right tooth bar a3 and the limiting tooth bar a4 are all clamped to the concave through groove a12, and the mounting hole a44 and the fastening hole a11 are all radially arranged relative to the support plate a1, so that the processing and the assembly are both convenient.
Further, as shown in fig. 5 and 6, in the embodiment B, two concave through grooves a12 are formed in the outer ring side surface of the rear side of the support plate a1, and are both conical, two limiting tooth bars a4 are formed, and the cross sections of the end portions of the two limiting tooth bars a4 are both conical, so that the overall stability is further improved, and a more stable supporting effect on the wafer is realized.
As shown in fig. 7, 8 and 9, in embodiment C, strip-shaped transverse grooves a42 are respectively formed on the side surfaces of the end portions of the left tooth bar a2, the right tooth bar a3 and the limit tooth bar a4, the concave embedding portions are concave clamping grooves a13 penetrating through two end surfaces of the support plate a1, inserting pieces a131 inserted into the strip-shaped transverse grooves a42 are arranged in the middle of the concave clamping grooves a13, and the mounting hole a44 and the fastening hole a11 are axially arranged relative to the support plate a1 and respectively located in the strip-shaped transverse grooves a42 and the inserting pieces a131, so that the assembling accuracy of the left tooth bar a2, the right tooth bar a3 and the limit tooth bar a4 relative to the support plate a1 is further improved, and the overall structure is firmer.
As shown in fig. 10 and 11, in embodiment D, the recessed embedding portion is a recessed transverse groove a14 provided between the opposite surface of the support plate a1 and the outer ring side surface, the side surfaces of the end portions of the left tooth bar a2, the right tooth bar a3 and the limiting tooth bar a4 are provided with a raised strip-shaped protruding piece a43 inserted into the recessed transverse groove a14, and the mounting hole a44 and the fastening hole a11 are provided in the axial direction of the support plate a1 and are respectively located in the strip-shaped protruding piece a43 and the recessed transverse groove a14, so that the assembly is more convenient.
In this embodiment, the placing groove a21 is located on the side of the left tooth bar a2 and the right tooth bar a3 far away from the limiting tooth bar a4, and the placing part a22 protrudes towards the middle position of the left tooth bar a2 and the right tooth bar a3, so as to realize stable support for the wafer.
As shown in fig. 12, the embodiment of the utility model provides a concatenation formula silicon boat's anchor clamps are still provided, are applied to concatenation formula silicon boat as above, including limiting plate b23, two adjacent support that set up press from both sides platform b1 and be located two spacing clamp platforms b2 between two support clamp platforms b1, the up end that supports clamp platform b1 is equipped with fixed plate b11 and can moves towards fixed plate b 11's clamping bolt b12, moves towards fixed plate b11 through rotating clamping bolt b12, can make extension board a1 by the centre gripping between fixed plate b11 and clamping bolt b 12. One end of the limiting clamping table b2 protrudes to form a clamping seat b21, the other end of the limiting clamping table b2 is provided with a pushing part b22 capable of sliding along the transverse direction, the limiting plate b23 comprises a switching end b232 connected to the limiting clamping table b2 in a rotating mode and a limiting part b231 located between the clamping seat b21 and the pushing part b22, the limiting part b231 is used for supporting the left tooth bar a2, the right tooth bar a3 or the limiting tooth bar a4, and the pushing part b22 is used for pushing the limiting part b231 to rotate towards the clamping seat b21 so that the left tooth bar a2, the right tooth bar a3 or the limiting tooth bar a4 can be clamped between the clamping seat b21 and the limiting part b 231.
More specifically, the position-limiting clamping table b2 is provided with an elongated groove arranged along the transverse direction and facing the position-limiting plate b23, and the elongated groove vertically penetrates through the position-limiting clamping table b2. The abutting part b22 is connected with the long-shaped groove in a sliding mode, so that the angle of the limiting part b231 of the limiting plate b23 can be adjusted through sliding the abutting part b22, and control is accurate. The bottom of the abutting part b22 is provided with a positioning bolt b24 inserted into the long groove, so that the position between the abutting part b22 and the long groove can be adjusted by adjusting the positioning bolt b24, and the operation is simple and convenient.
Although the present disclosure has been described above, the scope of the present disclosure is not limited thereto. It will be apparent to those skilled in the art that various changes and modifications can be made without departing from the spirit and scope of the disclosure, and these changes and modifications will fall within the scope of the invention.
Claims (8)
1. The spliced silicon boat is characterized by comprising two oppositely arranged support plates (a 1), and a left toothed bar (a 2), a right toothed bar (a 3) and at least one limiting toothed bar (a 4) which are all positioned between the two support plates (a 1), wherein a plurality of concave embedding parts clamped with the end parts of the left toothed bar (a 2), the right toothed bar (a 3) and the limiting toothed bar (a 4) are respectively arranged on the left front side, the right front side and the rear side of the outer ring side of the two support plates (a 1), the concave embedding parts are concavely distributed on the outer ring side of the two support plates (a 1), the concave embedding parts are provided with fastening holes (a 11), the end parts of the left toothed bar (a 2), the right toothed bar (a 3) and the limiting toothed bar (a 4) are respectively provided with a fastening part (a 5) connected to the fastening holes (a 11), the opposite sides of the left toothed bar (a 2) and the right toothed bar (a 3) are respectively provided with a plurality of fastening parts (a 5) which are distributed along the long edge direction and are used for the wafer placing grooves (21 a) to pass through, and the wafer placing grooves (21 a) are used for supporting wafers one by one, and the wafer placing grooves (21 a) are arranged on the wafer placing grooves (21 a 4), and the wafer supporting grooves (21 a) one by one.
2. The spliced silicon boat as claimed in claim 1, wherein the ends of the left toothed bar (a 2), the right toothed bar (a 3) and the limiting toothed bar (a 4) are provided with mounting holes (a 44), and the fasteners (a 5) are bolts and are connected to the mounting holes (a 44).
3. The spliced silicon boat as claimed in claim 2, wherein the recessed embedding part is a recessed through groove (a 12) penetrating through two end faces of the support plate (a 1), the ends of the left gear bar (a 2), the right gear bar (a 3) and the limiting gear bar (a 4) are clamped to the recessed through groove (a 12), and the mounting hole (a 44) and the fastening hole (a 11) are arranged in a radial direction of the support plate (a 1).
4. Spliced silicon boat according to claim 3, characterized in that the concave through slots (a 12) of the outer ring side of the rear side of the support plate (a 1) are two and are both conical, the limit gear bars (a 4) are two, and the cross section of the end of the two limit gear bars (a 4) is both conical.
5. The spliced silicon boat as claimed in claim 2, wherein strip-shaped transverse grooves (a 42) are formed in the side surfaces of the ends of the left toothed bar (a 2), the right toothed bar (a 3) and the limiting toothed bar (a 4), the concave embedding portions are concave clamping grooves (a 13) penetrating through two end surfaces of the support plate (a 1), inserting pieces (a 131) inserted into the strip-shaped transverse grooves (a 42) are formed in the middle of the concave clamping grooves (a 13), and the mounting holes (a 44) and the fastening holes (a 11) are axially arranged relative to the support plate (a 1) and are respectively located in the strip-shaped transverse grooves (a 42) and the inserting pieces (a 131).
6. The spliced silicon boat as claimed in claim 2, wherein the recessed embedding part is a recessed transverse groove (a 14) arranged between the opposite surface of the support plate (a 1) and the side surface of the outer ring, the side surfaces of the end parts of the left tooth bar (a 2), the right tooth bar (a 3) and the limiting tooth bar (a 4) are respectively provided with a raised strip-shaped lug (a 43) inserted into the recessed transverse groove (a 14), and the mounting hole (a 44) and the fastening hole (a 11) are arranged in the axial direction of the support plate (a 1) and are respectively positioned in the strip-shaped lug (a 43) and the recessed transverse groove (a 14).
7. Spliced silicon boat according to one of claims 1 to 6, characterized in that the support plate (a 1) is a flange.
8. Spliced silicon boat according to one of claims 1 to 6, characterized in that the rest (a 21) is located on the side of the left and right gear bars (a 2, a 3) away from the limit gear bar (a 4), and the rest (a 22) is convex towards the middle position of the left and right gear bars (a 2, a 3).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222112549.2U CN218568795U (en) | 2022-08-11 | 2022-08-11 | Concatenation formula silicon boat |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222112549.2U CN218568795U (en) | 2022-08-11 | 2022-08-11 | Concatenation formula silicon boat |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218568795U true CN218568795U (en) | 2023-03-03 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222112549.2U Active CN218568795U (en) | 2022-08-11 | 2022-08-11 | Concatenation formula silicon boat |
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| Country | Link |
|---|---|
| CN (1) | CN218568795U (en) |
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2022
- 2022-08-11 CN CN202222112549.2U patent/CN218568795U/en active Active
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