CN218630379U

CN218630379U - Lighting device and detection equipment

Info

Publication number: CN218630379U
Application number: CN202222712358.XU
Authority: CN
Inventors: 杨乐; 周璐阳; 孟立春; 陈鲁
Original assignee: Shenzhen Zhongke Feice Technology Co Ltd
Current assignee: Shenzhen Zhongke Feice Technology Co Ltd
Priority date: 2022-10-14
Filing date: 2022-10-14
Publication date: 2023-03-14
Anticipated expiration: 2032-10-14

Abstract

The embodiment of the application discloses lighting device and check out test set for promote the control accuracy to illumination light, include: the device comprises a light source component, a light amplification component and a diaphragm component; the light source assembly is used for emitting illumination light; the diaphragm assembly and the light amplification assembly are both positioned on a light path from the light source assembly to a sample; the light amplification assembly is used for enabling the light-emitting end face of the light source assembly or the surface of the sample to be conjugated with the diaphragm assembly; and/or the illumination device further comprises an objective lens positioned between the sample and the light amplification assembly, the sample being disposed at a focal plane of the objective lens, the light amplification assembly being configured to conjugate the diaphragm assembly to the focal plane of the objective lens away from the sample; one end of the light amplification assembly, which is close to the diaphragm assembly, is an amplification end.

Description

Lighting device and detection equipment

Technical Field

The embodiment of the application relates to the technical field of optical detection, in particular to an illuminating device and a detection device.

Background

In the detection equipment of bright field illumination, the spot size formed on the surface of a sample by an illumination beam emitted by a light source component and the incident angle of an incident beam incident on the surface of the sample influence the speed and the precision of detection or measurement; in order to improve the speed and accuracy of detection or measurement, a diaphragm is often required to be arranged in an incident light path so as to control the size and incident angle of a light spot formed on the surface of a sample by an illumination light beam.

However, the aperture of the light-emitting end face of the light source assembly is small, so that the control precision of the illumination field of the illumination light beams through the diaphragm is low; the small conjugate plane of the focusing assembly entrance pupil plane also results in a low accuracy of control of the illumination angle of the illumination beam by the diaphragm.

SUMMERY OF THE UTILITY MODEL

The embodiment of the application provides a lighting device and detection equipment for promote the control accuracy of illumination visual field and illumination angle.

A first aspect of embodiments of the present application provides a lighting device, including: the device comprises a light source component, a light amplification component and a diaphragm component;

the light source assembly is used for emitting illumination light;

the diaphragm assembly and the light amplification assembly are both positioned on a light path from the light source assembly to a sample;

the light amplification assembly is used for enabling the light-emitting end face of the light source assembly or the surface of the sample to be conjugated with the diaphragm assembly; and/or the illumination device further comprises an objective lens positioned between the sample and the light amplification assembly, the sample being disposed at a focal plane of the objective lens, the light amplification assembly being configured to conjugate the diaphragm assembly to the focal plane of the objective lens away from the sample; one end of the light amplification component close to the diaphragm component is an amplification end.

In some implementations, the stop assembly includes an aperture stop or a field stop;

the aperture diaphragm is used for adjusting the incident angle of the illumination light irradiating the surface of the sample;

the field diaphragm is used for adjusting the spot size of the illumination light irradiated to the surface of the sample.

In some specific implementations, the light amplification assembly is configured to conjugate the light-emitting end surface of the light source assembly with the diaphragm assembly; the illumination device further comprises a focusing element positioned in an optical path between the diaphragm assembly and the sample, the focusing element comprising an objective lens;

the focusing element conjugates the diaphragm assembly with the sample surface, or the sample is arranged at the focal plane of the focusing element, the diaphragm assembly being located at the focal plane of the focusing element remote from the sample or at the conjugate plane of the focusing element remote from the focal plane of the sample.

In some implementations, the focusing element is used to conjugate the diaphragm assembly to the sample surface; the focusing element comprises a third lens group and an objective lens, the third lens group and the objective lens are sequentially arranged on a light path between the light source assembly and the sample, the sample is arranged on a focal surface of the objective lens, and the diaphragm assembly is arranged on the focal surface of the third lens group.

In some implementations, the optical amplification assembly includes: the optical amplification assembly comprises a first lens group and a second lens group, the amplification end of the optical amplification assembly is the end of the second lens group far away from the first lens group, and the focal length of the first lens group is smaller than that of the second lens group.

In some implementations, the aperture assembly includes a field stop that is conjugate to the sample surface; the illuminating device further comprises a focusing element, and the focusing element comprises a third lens group and an objective lens which are sequentially arranged along a light path from the light source assembly to the sample;

the lighting device further includes: the aperture diaphragm is positioned at the focal plane of the objective lens close to the third lens group; or the aperture diaphragm is positioned on the focal plane of the second lens group close to the first lens group, the third lens group and the second lens group form a zoom lens, and the zoom lens performs zoom-out imaging on the aperture diaphragm.

In some specific implementations, the illumination device further includes a fourth lens group positioned between the objective lens and the fourth lens group, the fourth lens group being positioned between the light amplification assembly and the third lens group; the diaphragm assembly comprises an aperture diaphragm;

the diaphragm assembly is positioned between the fourth lens group and the second lens group, and the fourth lens group and the second lens group perform reduction imaging on the diaphragm assembly until the objective lens is close to the focal plane of the third lens group; or the diaphragm assembly is positioned on the focal plane of the objective lens close to the third lens group.

In some specific implementations, the illumination device further includes a field stop,

the field diaphragm is positioned between the first lens group and the second lens group, the fourth lens group, the third lens group and the objective lens are used for reducing and imaging the field diaphragm to the surface of the sample; or the field diaphragm is positioned between the third lens group and the fourth lens group, and the third lens group and the fourth lens group reduce and image the field diaphragm to the surface of the sample.

In some implementations, the lighting device further includes: a first polarizing plate and a second polarizing plate;

the first polaroid is positioned on the light path from the aperture diaphragm to the second lens group, and the second polaroid is positioned on the light path from the second lens group to the field diaphragm;

the first polarizer and the second polarizer are used for adjusting the power and/or polarization state of the illumination light incident on the sample surface.

In some specific implementations, the light amplifying assembly includes a third lens group and an objective lens sequentially disposed along a light path from the light source assembly to the sample, the sample is disposed on a focal plane of the objective lens, and the diaphragm assembly is disposed on a focal plane of the third lens group.

In some implementations, the illumination device further includes a focusing element positioned in an optical path between the stop assembly and the sample;

the light amplification assembly conjugates the aperture assembly with an intermediate image, and the focusing element conjugates the intermediate image with the sample surface.

In some implementations, the optical amplification assembly includes: a first lens group and a second lens group, the diaphragm assembly is positioned on the light path from the light source to the light amplification assembly,

the amplifying end of the optical amplifying assembly is positioned at one end of the first lens group, which is far away from the second lens group;

the focusing element comprises a third lens group and an objective lens which are sequentially arranged on a light path between the diaphragm assembly and the sample, and the sample is arranged on the focal plane of the objective lens.

In some implementations, the aperture assembly includes a field aperture, and the illumination device further includes: an aperture diaphragm;

the field diaphragm is positioned at the focal plane of the objective lens close to the third lens group, the third lens group and the objective lens form a scaler, and the scaler performs reduced imaging on the aperture diaphragm.

In some implementations, the light source assembly includes: at least one of a beam stabilizing assembly, a wavelength filtering assembly, and a power conditioning assembly, and a light source.

A second aspect of the embodiments of the present application provides a detection apparatus, including: the illumination device and the imaging assembly of the first aspect;

the illumination device is used for emitting illumination light to irradiate the surface of the sample;

the imaging component is used for receiving signal light formed after the illumination light irradiates the surface of the sample, and detecting the surface of the sample according to the signal light.

According to the technical scheme, the embodiment of the application has the following advantages: the light amplification assembly is arranged in the illumination light path, and the imaging of the light inlet end face of the diaphragm assembly is amplified, so that the control precision of an illumination angle or an illumination view field is improved.

Drawings

Fig. 1 is a schematic structural diagram of a lighting device disclosed in an embodiment of the present application;

fig. 2 is another schematic structural diagram of the lighting device disclosed in the embodiment of the present application;

FIG. 3 is a schematic structural diagram of a detecting apparatus disclosed in an embodiment of the present application;

fig. 4 is another schematic structural diagram of the detection apparatus disclosed in the embodiment of the present application.

Detailed Description

In order to make those skilled in the art better understand the technical solutions of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only a part of the embodiments of the present application, and not all the embodiments. All other embodiments obtained by a person of ordinary skill in the art based on the embodiments in the present application without making any creative effort belong to the protection scope of the present application.

In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience in describing the embodiments of the present application and simplifying the description, but do not indicate or imply that the referred devices or elements must have specific orientations, be configured in specific orientations, and operate, and thus, should not be construed as limiting the embodiments of the present application. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the embodiments of the present application, it should be noted that the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, a fixed connection, a detachable connection, or an integral connection unless otherwise explicitly stated or limited; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. Specific meanings of the above terms in the embodiments of the present application can be understood in specific cases by those of ordinary skill in the art.

Referring to fig. 1, an illumination apparatus disclosed herein for illuminating a sample surface includes: a light source assembly 101, a light amplification assembly 102, and a diaphragm assembly 103;

the light source assembly 101 is for emitting illumination light;

the diaphragm assembly 103 and the light amplification assembly 102 are both positioned on the light path from the light source assembly 101 to the sample;

the light amplification assembly 102 is used for conjugating the light-emitting end face or the sample surface of the light source assembly 101 with the diaphragm assembly 103; and/or, the illumination apparatus further comprises an objective lens 1041 located between the sample and the light magnifying assembly 102, the sample being disposed at a focal plane of the objective lens 1041, the light magnifying assembly 102 being configured to conjugate the diaphragm assembly 103 to the focal plane of the objective lens 1041 away from the sample; one end of the light amplification assembly 102 near the diaphragm assembly 103 is an amplification end.

The diaphragm assembly 103 may be located at the position of the diaphragm 1031 or the position of the diaphragm 1032 in fig. 1.

Specifically, the light-exiting end surface or the sample surface of the light source assembly 101 is conjugated with the diaphragm assembly 103, and/or the focal plane of the objective lens 1041 away from the sample 105 is conjugated with the diaphragm assembly 103. Among them, as for the light amplification member 102, one of both ends (light entrance end face and light exit end face) of the light amplification member 102 (in a direction perpendicular to the optical axis of the illumination device) closer to the diaphragm member 103 is an amplification end. That is, the light amplification assembly 102 is used to amplify the light-emitting end surface of the light source assembly 101 or the sample surface, and/or a focal surface (in a direction perpendicular to the optical axis of the illumination device) farther away from the sample 105 in two focal planes of the objective 1041 into the diaphragm assembly 103, so as to achieve a higher accuracy of controlling the incident angle (i.e., the illumination angle) of the diaphragm assembly 103 (irradiated to the sample surface) or the spot size (i.e., the illumination field) of the sample surface.

In this embodiment, the light amplification assembly 102 is disposed in the illumination light path to amplify the image at the stop assembly 103, thereby improving the control accuracy of the illumination field or the illumination angle.

In some specific implementations, the diaphragm assembly 103 of the present embodiment may be a field diaphragm or an aperture diaphragm, which is not limited in this embodiment. The aperture diaphragm can comprise at least one switchable diaphragm shape, and the incident angle of the illumination light irradiated to the surface of the sample can be adjusted by switching the diaphragm shape of the aperture diaphragm, so that various types of illumination such as four-level illumination and the like can be realized. In addition, the aperture of the field diaphragm is adjustable, and the size of a light spot (or an illumination field) irradiated on the surface of the sample can be adjusted by adjusting the aperture of the field diaphragm.

Further, on the basis of the foregoing embodiments, different lighting manners may be implemented in some specific implementations to achieve different lighting effects, please refer to the following:

it should be noted that the light amplification element 102 of the embodiment of the present application is composed of a first lens group and a second lens group, a focal length of the first lens group is smaller than a focal length of the second lens group, and an amplification end of the light amplification element 102 is an end of the second lens group (in a direction perpendicular to an optical axis of the illumination apparatus) farther away from the first lens group. The first lens group may be a lens group 1021 and the second lens group may be a lens group 1022, or the first lens group may be a lens group 1022 and the second lens group may be a lens group 1023, or the first lens group may be a lens group 1023 and the second lens group may be an objective lens 1041.

In other embodiments, the optical amplifying assembly 102 may include only one lens group capable of performing an amplifying function, or three or more lens groups.

Referring to fig. 1, another illumination apparatus disclosed in the present embodiment is similar to the embodiment described in fig. 1, except that the light amplification element 102 is used to conjugate the light-emitting end surface of the light source module 101 with the diaphragm assembly 103, and the illumination apparatus further includes a focusing element 104 located on the light path between the diaphragm assembly 103 and the sample 105, where the focusing element 104 includes at least an objective lens. The focusing element 104 may be used, among other things, to focus the illumination light onto part or all of the area of the sample surface.

In this embodiment, the focusing element 104 may conjugate the diaphragm assembly 103 with the sample surface, and the focusing element 104 includes a third lens group and an objective lens sequentially disposed on the light path between the diaphragm assembly 103 and the sample 105, wherein the sample 105 may be disposed on any focal plane of the objective lens, and the diaphragm assembly 103 may be disposed on two focal planes (in a direction perpendicular to the optical axis of the illumination device) of the third lens group that are further away from the focal plane of the objective lens. In this case, the optical amplifying assembly 102 is an optical lens assembly 1021 and an optical lens assembly 1022.

The stop assembly 103 is a field stop, the stop assembly 103 is conjugate to the sample surface, and the illumination apparatus further comprises an aperture stop, as shown in fig. 1, where the aperture stop may be located at a focal plane of the objective lens (in a direction perpendicular to the optical axis of the illumination apparatus) near the third lens group; or the third lens group and the second lens group form a zoom which is close to the focal plane of the first lens group (in the direction perpendicular to the optical axis of the lighting device) to zoom out the aperture diaphragm for imaging. It can be understood that, in this embodiment, there are two diaphragms (a field diaphragm and an aperture diaphragm), and if the aperture diaphragm is the diaphragm 1031, the field diaphragm is the diaphragm 1032; if the field stop is stop 1032, the aperture stop is stop 1031.

It should be noted that the focusing assembly may include only an objective lens for conjugating the diaphragm assembly to the surface of the object to be measured.

In other embodiments of the invention, only the diaphragm assembly, i.e. the field diaphragm, may be included, not the aperture diaphragm.

On the basis of the foregoing embodiments, in consideration of the need to adjust the beam properties of the illumination beam, the illumination device of the embodiment of the present application further includes: a first polarizing plate 1061 and a second polarizing plate 1062; the first polarizer 1061 is located on the light path from the diaphragm 1031 to the second lens group, and the second polarizer 1062 is located on the light path from the second lens group to the diaphragm 1032; the first polarizer 1061 and the second polarizer 1062 may adjust beam properties of the illumination beam, and may be specifically used to adjust the power and/or polarization state of the illumination beam incident on the sample surface, which is not limited herein.

In one embodiment, the present application provides in-situ lighting as shown in fig. 1.

Referring to fig. 2, another illumination device disclosed in this embodiment of the present application is similar to the embodiment described in fig. 1, in which the light magnifying assembly provided in this embodiment also comprises a first lens group and a second lens group, a focal length of the first lens group is smaller than a focal length of the second lens group, and a magnifying end of the light magnifying assembly is an end of the second lens group (in a direction perpendicular to an optical axis of the illumination device) farther away from the first lens group. Or the light amplifying assembly comprises one, three or more than three lens groups or reflectors; as long as the amplification function can be realized.

Further, the first lens group of the light amplifying assembly is the lens group 2021, the second lens group of the light amplifying assembly is the lens group 2022, and the diaphragm assembly 103 is an aperture diaphragm, the illumination device provided by the embodiment of the present application further includes a fourth lens group (i.e., the lens group 2023), wherein the third lens group (i.e., the lens group 2024) is located between the objective lens 1041 and the fourth lens group, and the fourth lens group is located between the light amplifying assembly 102 and the third lens group. The diaphragm assembly 103 is located between the fourth lens group and the second lens group, and the fourth lens group and the second lens group perform reduction imaging on the diaphragm assembly 103 to a focal plane of the objective lens 1041 close to the third lens group; alternatively, the diaphragm assembly 103 is located on the objective lens 1041 near the focal plane of the third lens group. That is, the diaphragm assembly 103 may be located at the position shown by the diaphragm 1031 in fig. 2 or the position of the diaphragm 1032. At this time, three surfaces of the light-emitting end surface of the light source module 101, the plane where the aperture stop is located and perpendicular to the optical axis of the illumination device, and the focal plane where the focusing element 104 is farther away from the sample 105 (in the direction perpendicular to the optical axis of the illumination device) are mutually conjugated to form kohler illumination.

In this embodiment, the diaphragm assembly is located at the focal plane of the third lens group, and the focal plane of the objective lens far away from the object to be measured is located at the focal plane of the fourth lens group. Or, the illumination system does not include a fourth lens group, and the third lens group reduces and images the diaphragm assembly to a focal plane of the objective lens far away from the object to be measured. Or one or more fifth lens groups are arranged in front of the third lens group and the fourth lens group.

In other embodiments of the present invention, the lighting device does not include the third and fourth lens groups.

Furthermore, the illumination device of the present embodiment further includes a field stop, wherein the field stop is conjugate to the sample surface.

The field diaphragm is positioned between the first lens group and the second lens group, the fourth lens group, the third lens group and the objective lens reduce and image the field diaphragm to the surface of the sample; alternatively, the field stop is located between the third and fourth lens groups, and the third and fourth lens groups demagnify the field stop to the sample surface, that is, the field stop may be located at the position shown by the stop 1031 or at the position of the stop 1032 in fig. 2. It should be noted that the arrangement of the lens group in the present application enables the field stop to conjugate with the object to be measured, and the number of the lens group is not limited. And the number of lens groups for imaging on the surface of the sample by reducing the field stop is not limited, and imaging reduction can be realized.

It can be understood that, in the present embodiment, there are two diaphragms (field diaphragm and aperture diaphragm), where the aperture diaphragm is diaphragm 1031, and the field diaphragm is diaphragm 1032. In other embodiments of the invention, only the diaphragm assembly, i.e. the aperture diaphragm, may be included, excluding the field diaphragm.

On the basis of the foregoing embodiments, in consideration of the need to adjust the beam properties of the illumination beam, the illumination device of the embodiment of the present application further includes: a first polarizing plate 2061 and a second polarizing plate 2062; wherein the first polarizer 2061 is located on the light path from the diaphragm 1031 to the fourth lens group, and the second polarizer 2062 is located on the light path from the diaphragm 1032 to the third lens group; the first polarizer 2061 and the second polarizer 2062 can adjust the beam properties of the illumination beam, and can be used to adjust the power and/or polarization state of the illumination beam incident on the sample surface, which is not limited herein.

In a third embodiment of the invention, the illumination device further comprises an objective lens positioned between the sample and the light magnifying assembly, the sample being disposed at a focal plane of the objective lens, the light magnifying assembly conjugating the aperture assembly to the focal plane of the objective lens away from the sample. The light amplification assembly may be composed of a first lens group and a second lens group, the first lens group and the second lens group may be the lens group 1022 and the lens group 1023, and the diaphragm assembly may be an aperture diaphragm, excluding a field diaphragm, which is located at the amplification end of the amplification assembly (i.e., where the diaphragm 1031 is located). On this basis, the present embodiment may not include the lens group 1021, the diaphragm 1032, the polarizer 1061, the polarizer 1062, and the turning element 106 (which may be a beam splitter) as shown in fig. 1.

In a fourth embodiment of the invention, the illumination device further comprises an objective lens positioned between the sample and the light magnifying assembly, the sample being disposed at a focal plane of the objective lens, the light magnifying assembly conjugating the aperture assembly to the focal plane of the objective lens away from the sample. The light amplification component can be composed of a first lens group and a second lens group, the first lens group and the second lens group can be a lens group 2023 and a lens group 2024, the diaphragm component can be an aperture diaphragm, and the aperture diaphragm is positioned at the amplification end of the amplification component. The present embodiment may further include a lens group 2021 and a lens group 2022, where the lens group 2021 and the lens group 2022 magnify and image the light-emitting end surface of the light source module to a diaphragm assembly (i.e. an aperture stop, that is, the position of the diaphragm 1031 in fig. 2 does not include a field stop), and the aperture stop may be imaged to a focal plane of the objective 1041 away from the sample 105 through the lens group 2023 and the lens group 2024. On this basis, the present embodiment may not include the mirror group 2021, the mirror group 2022, the reflecting mirror 207, the polarizer 2061, the polarizer 2062, the aperture 1032, and the diverting element 106 (which may be a beam splitter).

In a fifth embodiment of the present invention, the optical amplifying element is used to conjugate the surface of the sample with the diaphragm assembly, wherein, referring to fig. 2, the optical amplifying element can be a lens assembly 2024 and an objective lens 1041, the sample is disposed on a focal plane of the objective lens 1041, the diaphragm assembly is disposed at an end of the amplifier away from the sample, and specifically, the diaphragm assembly is located on the focal plane of the lens assembly 2024. In other embodiments of the present invention, the light magnifying assembly may not include the mirror group 2024, and the objective 1041 conjugates the aperture assembly with the sample surface. Alternatively, the light amplifying assembly may further include a plurality of other lens groups.

The diaphragm assembly is a field stop which may be located at the position of the diaphragm 1032 in fig. 2, that is to say at a position conjugate to the focal plane of the objective 1041 remote from the sample 105, the diaphragm assembly not comprising an aperture stop. On this basis, the present embodiment may not include the mirror group 2021, the mirror group 2022, the mirror 207, the polarizer 2061, the polarizer 2062, the optical diaphragm 1031, and the turning element 106 (which may be a beam splitter) shown in fig. 2, or may include some components of the mirror group 2021, the mirror group 2022, the mirror 207, the polarizer 2061, the polarizer 2062, the optical diaphragm 1031, and the turning element 106 (which may be a beam splitter).

Referring to fig. 1, a light amplification assembly for conjugating the sample surface with a diaphragm assembly comprising a diaphragm 1023, the light amplification assembly comprising a set of mirrors 1023 and an objective lens 1041; in this embodiment, the lighting assembly further includes: lens group 1022 and lens group 1021. In other embodiments, the optical lens assembly 1022, the optical lens assembly 1021, and the optical stop 1031 may not be included, or only a part of the optical lens assembly 1022, the optical lens assembly 1021, and the optical stop 1031 may be included.

In other implementations, an illumination device similar to the previous embodiments is provided, except that the illumination device of the present embodiment includes a focusing element 104, and the focusing element 104 is located in the optical path between the diaphragm assembly 103 and the sample 105. The light magnifying assembly may conjugate the diaphragm assembly 103 to the intermediate image, and the focusing element 104 conjugates the intermediate image to the focal surface of the objective lens away from the sample, wherein the light magnifying assembly comprises the lens group 2021 and the lens group 2022 in the embodiment shown in fig. 2; the diaphragm assembly 103 is located at the position of the light source assembly 101 in fig. 2, and the light source assembly 101 can move away from the diaphragm assembly 103 along the optical axis of the illumination device.

In this embodiment, the magnifying end of the optical magnifying element is located at an end of the first lens group away from the second lens group, the focusing element 104 includes a third lens group (i.e. the lens group 2024) and an objective lens 1041 sequentially disposed along the light path between the diaphragm assembly 103 and the sample 105, and the sample 105 is disposed on the focal plane of the objective lens 1041. Referring to FIG. 2, the first lens group can be lens group 2021, and the second lens group can be lens group 2022.

In another embodiment of the invention, the illumination device comprises a focusing element 104, and the focusing element 104 is located in the optical path between the diaphragm assembly 103 and the sample 105. The light magnifying assembly may conjugate the aperture assembly 103 to the intermediate image and the focusing element 104 conjugates the intermediate image to the sample surface.

Further, if the diaphragm assembly 103 is a field diaphragm in this embodiment, the illumination device may further include an aperture diaphragm, where the field diaphragm is located at a focal plane of the objective lens close to the third lens group, and the third lens group and the objective lens form a zoom device, and the zoom device performs zoom-out imaging on the aperture diaphragm.

The light source assembly 101 in any of the lighting devices shown in the foregoing embodiments may include: at least one of a beam stabilizing component, a wavelength filtering component and a power conditioning component, and a light source.

It should be noted that any of the lens groups described in the embodiments of the present application may include at least one lens or at least one mirror.

Referring to fig. 3, a detection apparatus disclosed in an embodiment of the present application includes: the illumination device (i.e., illumination device 10 shown in fig. 1) and imaging assembly 30 shown in the previous embodiments.

In this embodiment, the turning element 105 is used to transmit the signal light formed after the illumination beam emitted from the focusing element 104 reaches the sample surface to the imaging component 30; the imaging assembly 30 is configured to receive the signal light emitted from the turning element 106 and detect the surface of the sample 105 according to the signal light.

With reference to fig. 3, in other embodiments, the imaging assembly includes an imaging lens group 301 and an image capturing device 302; in which the imaging lens group 301 and the image pickup device 302 are arranged in order in the direction in which the signal light exits from the steering element 106. Imaging mirror group 301 is used to cause signal light emitted from steering element 106 to reach image capturing device 302.

Referring to fig. 4, a detection apparatus disclosed in an embodiment of the present application includes: the illumination device (i.e., illumination device 20 shown in fig. 2) and imaging assembly 30 shown in the previous embodiment.

In this embodiment, the turning element 106 is used for transmitting the signal light formed after the illumination beam emitted from the focusing element 104 reaches the sample surface to the imaging component 30; the imaging assembly 30 is configured to receive the signal light emitted from the turning element 206 and detect the surface of the sample 105 according to the signal light.

With continued reference to fig. 4, in other embodiments, the imaging assembly includes an imaging lens assembly 301 and an image capturing device 302; wherein the imaging lens group 301 and the image pickup device 302 are arranged in order in the direction in which the signal light exits from the steering element 106. Imaging mirror group 301 is used to cause signal light emitted from steering element 106 to reach image capturing device 302. In this embodiment, the reflective element 207 is used to reflect the illumination light emitted from the light source assembly 101 to the sample 105.

The foregoing description of the present application with reference to specific embodiments is not intended to limit the present application to these embodiments. For those skilled in the art to which the present application pertains, several changes and substitutions may be made without departing from the spirit of the present application, and these changes and substitutions should be considered to fall within the scope of the present application.

Claims

1. An illumination device for illuminating a sample surface, comprising: the device comprises a light source component, a light amplification component and a diaphragm component;

the light source assembly is used for emitting illumination light;

the light amplification assembly is used for enabling the light-emitting end face of the light source assembly or the surface of the sample to be conjugated with the diaphragm assembly; and/or, the illumination device further comprises an objective lens located between the sample and the light magnifying assembly, the sample being disposed at a focal plane of the objective lens, the light magnifying assembly being for conjugating the diaphragm assembly with the focal plane of the objective lens away from the sample; one end of the light amplification component close to the diaphragm component is an amplification end.

2. The illumination device of claim 1, wherein the diaphragm assembly comprises an aperture diaphragm or a field diaphragm;

the aperture diaphragm is used for adjusting the incident angle of the illumination light irradiated to the surface of the sample;

the field diaphragm is used for adjusting the spot size of the illumination light irradiated on the surface of the sample.

3. A lighting device as recited in claim 1, wherein said light amplification element is configured to conjugate an exit end surface of said light source element to said diaphragm element; the illumination device further comprises a focusing element positioned in an optical path between the diaphragm assembly and the sample, the focusing element comprising an objective lens;

4. An illumination device according to claim 3, characterized in that the focusing element is adapted to conjugate the diaphragm assembly to the sample surface; the focusing element comprises a third lens group and an objective lens, the third lens group and the objective lens are sequentially arranged on a light path between the light source assembly and the sample, the sample is arranged on a focal surface of the objective lens, and the diaphragm assembly is arranged on the focal surface of the third lens group.

5. A lighting device as recited in any one of claims 1-4, wherein said light amplification element comprises: the optical amplification assembly comprises a first lens group and a second lens group, the amplification end of the optical amplification assembly is the end of the second lens group far away from the first lens group, and the focal length of the first lens group is smaller than that of the second lens group.

6. The illumination device of claim 5, wherein the stop assembly comprises a field stop, the field stop being conjugate to the sample surface; the illuminating device further comprises a focusing element, and the focusing element comprises a third lens group and an objective lens which are sequentially arranged along a light path from the light source assembly to the sample;

7. An illumination device as recited in claim 5, further comprising a fourth lens group and a third lens group, said third lens group being disposed between said objective lens and said fourth lens group, said fourth lens group being disposed between said light amplification element and said third lens group; the diaphragm assembly comprises an aperture diaphragm;

8. The illumination device of claim 7, further comprising a field stop,

the field diaphragm is positioned between the first lens group and the second lens group, the fourth lens group, the third lens group and the objective lens are used for reducing and imaging the field diaphragm to the surface of the sample; or the field diaphragm is positioned between the third lens group and the fourth lens group, and the third lens group and the fourth lens group image the field diaphragm in a reduced manner to the surface of the sample.

9. A lighting device as recited in claim 6, further comprising: a first polarizing plate and a second polarizing plate;

the first polaroid is positioned on a light path from the aperture diaphragm to the second lens group, and the second polaroid is positioned on a light path from the second lens group to the field diaphragm;

10. The illumination device as recited in claim 1, wherein the light amplifying assembly comprises a third lens group and an objective lens sequentially disposed along a light path from the light source assembly to the sample, the sample is disposed at a focal surface of the objective lens, and the stop assembly is disposed at a focal surface of the third lens group.

11. The illumination device of claim 1, further comprising a focusing element positioned in an optical path between the diaphragm assembly and the sample;

12. A lighting device as recited in claim 11, wherein said light amplification element comprises: a first lens group and a second lens group, the diaphragm assembly is positioned on the light path from the light source to the light amplification assembly,

13. The illumination device of claim 12, wherein the stop assembly comprises a field stop, the illumination device further comprising: an aperture diaphragm;

14. A lighting device as recited in any one of claims 1-4 or 10-13, wherein said light source assembly comprises: at least one of a beam stabilizing assembly, a wavelength filtering assembly, and a power conditioning assembly, and a light source.

15. A detection apparatus, comprising: the illumination device and imaging assembly of any one of claims 1 to 4 or 10 to 13;