CN218628767U - Differential pressure sensor - Google Patents
Differential pressure sensor Download PDFInfo
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- CN218628767U CN218628767U CN202221920226.XU CN202221920226U CN218628767U CN 218628767 U CN218628767 U CN 218628767U CN 202221920226 U CN202221920226 U CN 202221920226U CN 218628767 U CN218628767 U CN 218628767U
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Abstract
The utility model belongs to the technical field of the measuring instrument, a differential pressure sensor is disclosed. The differential pressure sensor comprises a positive pressure end and a negative pressure end which is arranged opposite to the positive pressure end; the positive pressure sensing film is arranged at the positive pressure end, and the negative pressure sensing film is arranged at the negative pressure end; the pressure of the medium to be measured acts on the positive pressure sensing film, the pressure of the atmosphere acts on the negative pressure sensing film, and the negative pressure end is isolated from the atmosphere through the negative pressure sensing film; the isolation cover is connected with the negative pressure end and is surrounded with the negative pressure end to form an accommodating cavity for accommodating the negative pressure sensing film, and a plurality of drainage holes are formed in the periphery of the isolation cover and used for discharging residual liquid on the negative pressure sensing film; the base is connected with the positive pressure end, and the isolation cover and the base form an electrical isolation bin; the pressure chip is arranged in the electrical isolation bin, and the positive pressure sensing pressure film and the negative pressure sensing pressure film act on two sides of the pressure chip through oil pressure. Through the utility model discloses, promoted measurement accuracy, prolonged sensor life.
Description
Technical Field
The utility model relates to a measuring instrument technical field especially relates to a differential pressure sensor.
Background
Differential pressure sensors are widely used in fluid pressure and flow measurement devices. The differential pressure sensor and the detection principle are as follows: the differential pressure sensor is internally provided with a diaphragm, two pressure signals at different positions of the fluid are converted into changes of electric signals, and the changes of the electric signals are processed through a detection circuit at the rear end to obtain a differential pressure value of applied pressure.
The differential pressure sensor has more application fields, and particularly has wider application in the field of ships.
At present, when a marine differential pressure sensor is operated on the sea, seawater or steam condensate is remained or accumulated from a negative pressure end of the differential pressure sensor under the environment of high humidity and high salt, so that the negative pressure end cannot be kept consistent with the atmospheric pressure, and the measurement precision is reduced; meanwhile, the negative pressure end enters the sensor due to accumulation of seawater or steam condensate, so that the service life of the differential pressure sensor is easily shortened, and even the differential pressure sensor is scrapped.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a differential pressure sensor prevents comdenstion water hydrops shutoff negative pressure end, influences measurement accuracy, avoids inside comdenstion water and corrosive medium hydrops get into the sensor, influences the sensor life-span.
To achieve the purpose, the utility model adopts the following technical proposal:
a differential pressure sensor, comprising:
the device comprises a positive pressure end and a negative pressure end opposite to the positive pressure end;
the negative pressure sensing film is arranged at the negative pressure end; the pressure of a medium to be measured acts on the positive pressure sensing diaphragm, the pressure of the atmosphere acts on the negative pressure sensing diaphragm, and the negative pressure end is isolated from the atmosphere through the negative pressure sensing diaphragm;
the isolation cover is connected with the negative pressure end, an accommodating cavity is formed by the isolation cover and the negative pressure end in an enclosing mode and used for accommodating the negative pressure sensing film, and a plurality of drainage holes are formed in the periphery of the isolation cover and used for discharging residual liquid on the negative pressure sensing film;
the base is connected with the positive pressure end, and the isolation cover and the base form an electrical isolation bin;
the pressure chip is arranged in the electrical isolation bin, and the positive pressure sensing film and the negative pressure sensing film act on two sides of the pressure chip through oil pressure.
As a differential pressure sensor's preferred scheme, the malleation end includes positive pressure welding platform, the negative pressure end includes negative pressure welding platform, the welding of malleation pressure sensing diaphragm is in on the malleation welding platform, the welding of negative pressure sensing diaphragm is in on the negative pressure welding platform.
As a preferred scheme of the differential pressure sensor, a sealing ring is arranged between the negative pressure welding table and the isolation cover.
As a preferable scheme of the differential pressure sensor, the differential pressure sensor further comprises a sleeve, one end of the sleeve is connected with the isolation cover, and the other end of the sleeve is connected with the base.
As a preferred scheme of the differential pressure sensor, the differential pressure sensor further comprises a differential pressure cup seat, the pressure chip is arranged on the differential pressure cup seat, a positive pressure oil cavity and a negative pressure oil cavity are arranged on the differential pressure cup seat, the positive pressure oil cavity and the negative pressure oil cavity are respectively arranged on two sides of the pressure chip, and silicone oil is filled in the positive pressure oil cavity and the negative pressure oil cavity.
As a preferred scheme of the differential pressure sensor, a positive pressure oil filling pipe and a negative pressure oil filling pipe are further arranged on the differential pressure cup base, the positive pressure oil filling pipe is communicated with the positive pressure oil cavity, the silicone oil is filled into the positive pressure oil cavity through the positive pressure oil filling pipe, the negative pressure oil filling pipe is communicated with the negative pressure oil cavity, and the silicone oil is filled into the negative pressure oil cavity through the negative pressure oil filling pipe.
As a preferred scheme of the differential pressure sensor, one side of the negative pressure oil cavity, which is close to the pressure chip, is provided with insulating ceramic, a first through hole is formed in the insulating ceramic, the first through hole is communicated with the negative pressure oil cavity, and the silicone oil can act on the pressure chip through the first through hole.
As a preferred scheme of the differential pressure sensor, a filling ceramic is arranged on the other side, close to the pressure chip, in the positive pressure oil cavity, and a second through hole is formed in the filling ceramic and communicated with the positive and negative pressure oil filling pipe.
As a preferable scheme of the differential pressure sensor, the electrical isolation chamber is filled with pouring sealant so as to isolate the interior of the electrical isolation chamber from the exterior.
As a preferable scheme of the differential pressure sensor, the drain holes are in a long strip shape and are uniformly arranged on the periphery of the isolation cover.
Has the advantages that: in the utility model, the positive pressure end and the negative pressure end which are arranged relatively, the positive pressure sensing film and the negative pressure sensing film are arranged to ensure that the pressure of the medium to be measured acts on the positive pressure sensing film and the atmospheric pressure acts on the negative pressure sensing film, and further the negative pressure sensing film is isolated from the atmosphere, so that condensed water accumulated liquid can not form a liquid column with a certain height on the negative pressure sensing film, the influence of the generated liquid pressure on the negative pressure sensing film can be almost ignored, the negative pressure end is always at the atmospheric pressure, and the measurement precision is improved; in addition, a plurality of drainage holes are formed in the periphery of the isolation cover and used for discharging residual liquid on the negative pressure sensing diaphragm, and condensate and residual water remained on the negative pressure sensing diaphragm can be effectively discharged or air-dried through the drainage holes, so that the condition that the condensate and corrosive effusion enter the sensor to influence the service life of the sensor is avoided; the electrical isolation bin is formed by the isolation cover and the base, and the pressure chip is arranged in the electrical isolation bin, so that the stable performance of internal electrical elements such as the pressure chip is ensured.
Drawings
Fig. 1 is a cross-sectional view of a differential pressure sensor from a first perspective provided by an embodiment of the present invention;
FIG. 2 is an enlarged view of a portion of FIG. 1 at A;
fig. 3 is a cross-sectional view of a second perspective of a differential pressure sensor provided by an embodiment of the present invention.
In the figure:
100. a positive pressure end; 110. A positive pressure sensing film; 120. A positive pressure welding stage;
200. a negative pressure end; 210. A negative pressure sensing film; 220. A negative pressure welding stage;
300. an isolation cover; 310. A hydrophobic pore;
400. a base; 410. A joint;
500. a pressure chip;
600. a seal ring;
700. a sleeve;
800. a differential pressure cup holder; 810. a positive pressure oil chamber; 820. a negative pressure oil cavity; 830. a positive pressure oil charge tube; 840. a negative pressure oil-filled tube; 850. an insulating ceramic; 851. a first through hole; 860. filling ceramic; 861. a second through hole;
900. an electrical isolation bin; 910. and (4) conducting wires.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not to be construed as limiting the invention. It should be further noted that, for the convenience of description, only some of the structures associated with the present invention are shown in the drawings, not all of them.
In the description of the present invention, unless otherwise explicitly specified or limited, the terms "connected", "connected" and "fixed" are to be construed broadly, e.g., as being fixedly connected, detachably connected, or integrated; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present disclosure, unless expressly stated or limited otherwise, the first feature "on" or "under" the second feature may comprise direct contact between the first and second features, or may comprise contact between the first and second features not directly. Also, the first feature "on," "above" and "over" the second feature may include the first feature being directly above and obliquely above the second feature, or simply indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "right", etc. are used in an orientation or positional relationship based on that shown in the drawings only for convenience of description and simplicity of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.
Referring to fig. 1 and 2, the present embodiment relates to a differential pressure sensor, which includes a positive pressure end 100 and a negative pressure end 200 opposite to the positive pressure end 100; a positive pressure sensing diaphragm 110 and a negative pressure sensing diaphragm 210, wherein the positive pressure sensing diaphragm 110 is arranged at the positive pressure end 100, and the negative pressure sensing diaphragm 210 is arranged at the negative pressure end 200; the pressure of the medium to be measured acts on the positive pressure sensing diaphragm 110, the pressure of the atmosphere acts on the negative pressure sensing diaphragm 210, and the negative pressure end 200 is isolated from the atmosphere by the negative pressure sensing diaphragm 210; the isolation cover 300 is connected with the negative pressure end 200, the isolation cover 300 and the negative pressure end 200 are surrounded to form an accommodating cavity for accommodating the negative pressure sensing diaphragm 210, and the periphery of the isolation cover 300 is provided with a plurality of drainage holes 310 for discharging residual liquid on the negative pressure sensing diaphragm 210; the base 400 is connected with the positive pressure end 100, and the isolation cover 300 and the base 400 are enclosed to form an electrical isolation bin 900; the pressure chip 500 is disposed in the electrical isolation chamber 900, and the positive pressure sensing diaphragm 110 and the negative pressure sensing diaphragm 210 act on two sides of the pressure chip 500 through oil pressure. The negative pressure sensing diaphragm 210 is always at atmospheric pressure, when the fluid medium to be measured from the outside acts on the positive pressure sensing diaphragm 110, the positive pressure sensing diaphragm 110 acts on one side of the pressure chip 500 through oil pressure, and the negative pressure sensing diaphragm 210 side always is at atmospheric pressure, so that the atmospheric pressure of the negative pressure end 200 acts on the other side of the pressure chip 500 through oil pressure by the negative pressure sensing diaphragm 210, the resistance value of the pressure chip 500 changes through the action of the oil pressure on the two sides, the changed resistance value signal is output, and the pressure of the fluid medium to be measured at the positive pressure end 100 is further obtained through the change of the output electric signal. The negative pressure sensing diaphragm 210 is isolated from the atmosphere, so that the condensed water accumulated liquid cannot form a liquid column with a certain height on the negative pressure sensing diaphragm 210, the influence of the generated liquid pressure on the negative pressure sensing diaphragm 210 can be almost ignored, the negative pressure end 200 is always at the atmospheric pressure, and the measurement precision is improved; condensate and residual water remained on the negative pressure sensing diaphragm 210 can be effectively discharged or air-dried through the drain holes 310, and the condensate and corrosive effusion are prevented from entering the sensor to influence the service life of the sensor; the electrical isolation bin 900 is formed by the isolation cover 300 and the base 400, and the pressure chip 500 is arranged in the electrical isolation bin 900, so that the stable performance of the internal electrical elements such as the pressure chip 500 is ensured.
Optionally, the hydrophobic holes 310 are elongated and uniformly arranged on the periphery of the isolation cover 300. Facilitating drainage or air drying of the condensed water or corrosive liquid from the drain holes 310.
Referring to fig. 1, in the present embodiment, the positive pressure end 100 includes a positive pressure welding stage 120, the negative pressure end 200 includes a negative pressure welding stage 220, the positive pressure sensing diaphragm 110 is welded on the positive pressure welding stage 120, and the negative pressure sensing diaphragm 210 is welded on the negative pressure welding stage 220.
Preferably, a sealing ring 600 is disposed between the negative pressure welding stage 220 and the isolation cover 300. By arranging the sealing ring 600, the condensate and the residual water are guaranteed to be isolated in the accommodating cavity and cannot enter the electrical isolation bin 900.
Optionally, the differential pressure sensor further comprises a sleeve 700, one end of the sleeve 700 is welded with the isolation cap 300, and the other end of the sleeve 700 is welded with the base 400. Those skilled in the art will appreciate that to make the differential pressure sensor more compatible with harsh environmental conditions, the sleeve 700 may be made of a more corrosion resistant metal or the sleeve 700 may be coated with a corrosion resistant layer on its outer wall.
Optionally, a fitting 410 is attached to the base 400, and the fitting 410 has threads thereon for securing the differential pressure sensor to a predetermined mounting location. Those skilled in the art will appreciate that the differential pressure sensor can be adapted to various environmental installation locations by the configuration or thread size of the fitting 410, and that the differential pressure sensor can be more adaptable to installation by the provision of the fitting 410, making it easier to modularize the assembly.
In this embodiment, the differential pressure sensor further includes a differential pressure cup 800, the pressure chip 500 is disposed on the differential pressure cup 800, a positive pressure oil chamber 810 and a negative pressure oil chamber 820 are disposed on the differential pressure cup 800, the positive pressure oil chamber 810 and the negative pressure oil chamber 820 are respectively disposed on two sides of the pressure chip 500, and silicone oil is filled in the positive pressure oil chamber 810 and the negative pressure oil chamber 820. Through the action of the silicone oil in the positive pressure oil chamber 810 and the negative pressure oil chamber 820 on the pressure chip 500, the oil pressure in the positive pressure oil chamber 810 and the negative pressure oil chamber 820 can be obtained, further, a positive pressure flow channel is arranged on the positive pressure welding table 120, a negative pressure flow channel is arranged on the negative pressure welding table 220, the positive pressure flow channel is communicated with the positive pressure oil chamber 810, the negative pressure flow channel is communicated with the negative pressure oil chamber 820, the positive pressure sensing film 110 is arranged at the flow channel opening of the positive pressure flow channel, and the negative pressure sensing film 210 is arranged at the negative pressure flow channel opening; it is ensured that the pressure action at both ends of the positive pressure sensing diaphragm 110 and the negative pressure sensing diaphragm 210 can be transmitted to the pressure chip 500 through the silicone oil.
Optionally, the differential pressure cup 800 is further provided with a positive pressure oil-filled tube 830 and a negative pressure oil-filled tube 840, the positive pressure oil-filled tube 830 is communicated with the positive pressure oil chamber 810, silicone oil is filled into the positive pressure oil chamber 810 through the positive pressure oil-filled tube 830, the negative pressure oil-filled tube 840 is communicated with the negative pressure oil chamber 820, and silicone oil is filled into the negative pressure oil chamber 820 through the negative pressure oil-filled tube 840. The silicon oil is respectively filled into the positive pressure oil chamber 810 and the negative pressure oil chamber 820 through the positive pressure oil filling pipe 830 and the negative pressure oil filling pipe 840, and oil ports of the positive pressure oil filling pipe 830 and the negative pressure oil filling pipe 840 are sealed in a spot welding mode when the volume of the silicon oil reaches the pre-charging volume.
Alternatively, an insulating ceramic 850 is provided on the side of the negative pressure oil chamber 820 close to the pressure chip 500, a first through hole 851 is provided in the insulating ceramic 850, the first through hole 851 is communicated with the negative pressure oil chamber 820, and silicone oil can act on the pressure chip 500 through the through hole 851. The shape and size are less affected by temperature due to the low coefficient of thermal expansion of the ceramic material. In the embodiment, the insulating ceramic 850 is bonded on one side of the pressure chip 500, the volume change of the insulating ceramic 850 is very small, so the influence of the internal stress on the pressure chip 500 is hardly caused, the pressure effect on the pressure chip 500 is completely dependent on the pressure of the silicone oil in the negative pressure oil cavity 820, and the insulating ceramic 850 is arranged to avoid the influence of the temperature on the measurement accuracy.
Referring to fig. 2, a filling ceramic 860 is disposed at the other side of the positive pressure oil chamber 810 close to the pressure chip 500, a second through hole 861 is disposed in the filling ceramic 860, and the second through hole 861 is communicated with the positive pressure oil filling pipe 830. The filled ceramic 860 occupies partial volume of the positive pressure oil chamber 810, so that the filling of silicone oil with a certain volume in the positive pressure oil chamber 810 can be saved, and meanwhile, the filled ceramic 860 can also avoid the influence of temperature on the measurement precision.
Preferably, the electrical isolation chamber 900 is filled with a potting adhesive to isolate the interior of the electrical isolation chamber 900 from the exterior. In order to further protect the electrical performance of internal components and prevent water vapor or impurities from entering the electrical isolation bin 900, after the differential pressure sensor is assembled, the electrical isolation bin 900 is filled with pouring sealant, the inner space of the electrical isolation bin 900 is sealed by the pouring sealant, and the electrical insulation of the electrical internal components is improved.
Referring to fig. 3, in the present embodiment, the internal components of the differential pressure sensor are in signal connection with the external control terminal through the wires 910, and when the differential pressure sensor works, the differential pressure sensor converts the pressure signal into an electrical signal and transmits the electrical signal to the external control terminal through the wires 910. Specifically, the wire 910 extends from inside to outside through a preset hole, and after the differential pressure sensor is assembled, the pouring sealant is filled into the electrical isolation bin 900 through the preset hole, and the hole is further sealed by the pouring sealant, so that the differential pressure sensor is electrically insulated from the external environment.
It is obvious that the above embodiments of the present invention are only examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Numerous obvious variations, rearrangements and substitutions will now occur to those skilled in the art without departing from the scope of the invention. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement or improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.
Claims (10)
1. A differential pressure sensor, comprising:
the device comprises a positive pressure end (100) and a negative pressure end (200) opposite to the positive pressure end (100);
the pressure sensing device comprises a positive pressure sensing film (110) and a negative pressure sensing film (210), wherein the positive pressure sensing film (110) is arranged at the positive pressure end (100), and the negative pressure sensing film (210) is arranged at the negative pressure end (200); the pressure of a medium to be measured acts on the positive pressure sensing film (110), the pressure of the atmosphere acts on the negative pressure sensing film (210), and the negative pressure end (200) is isolated from the atmosphere through the negative pressure sensing film (210);
the isolation cover (300) is connected with the negative pressure end (200), the isolation cover (300) and the negative pressure end (200) are surrounded to form an accommodating cavity for accommodating the negative pressure sensing diaphragm (210), and the periphery of the isolation cover (300) is provided with a plurality of drainage holes (310) for discharging residual liquid on the negative pressure sensing diaphragm (210);
the base (400) is connected with the positive pressure end (100), and the isolation cover (300) and the base (400) are enclosed to form an electrical isolation bin (900);
the pressure chip (500) is arranged in the electrical isolation bin (900), and the positive pressure sensing film (110) and the negative pressure sensing film (210) act on two sides of the pressure chip (500) through oil pressure.
2. The differential pressure sensor of claim 1, wherein the positive pressure tip (100) comprises a positive pressure weld station (120) and the negative pressure tip (200) comprises a negative pressure weld station (220), the positive pressure sensing diaphragm (110) being welded to the positive pressure weld station (120) and the negative pressure sensing diaphragm (210) being welded to the negative pressure weld station (220).
3. The differential pressure sensor of claim 2, wherein a seal ring (600) is disposed between the negative pressure weld land (220) and the isolation cap (300).
4. The differential pressure sensor of claim 1, further comprising a sleeve (700), one end of the sleeve (700) being welded to the isolation cap (300) and the other end of the sleeve (700) being welded to the base (400).
5. The differential pressure sensor as claimed in claim 1, wherein the differential pressure sensor further comprises a differential pressure cup (800), the pressure chip (500) is disposed on the differential pressure cup (800), a positive pressure oil chamber (810) and a negative pressure oil chamber (820) are disposed on the differential pressure cup (800), the positive pressure oil chamber (810) and the negative pressure oil chamber (820) are respectively disposed on two sides of the pressure chip (500), and silicone oil is filled in the positive pressure oil chamber (810) and the negative pressure oil chamber (820).
6. The differential pressure sensor according to claim 5, wherein a positive pressure oil-filled pipe (830) and a negative pressure oil-filled pipe (840) are further arranged on the differential pressure cup holder (800), the positive pressure oil-filled pipe (830) is communicated with the positive pressure oil chamber (810), the positive pressure oil chamber (810) is filled with the silicone oil through the positive pressure oil-filled pipe (830), the negative pressure oil-filled pipe (840) is communicated with the negative pressure oil chamber (820), and the negative pressure oil chamber (820) is filled with the silicone oil through the negative pressure oil-filled pipe (840).
7. The differential pressure sensor as claimed in claim 5, wherein an insulating ceramic (850) is arranged on one side of the negative pressure oil chamber (820) close to the pressure chip (500), a first through hole (851) is formed in the insulating ceramic (850), the first through hole (851) is communicated with the negative pressure oil chamber (820), and the silicone oil can act on the pressure chip (500) through the first through hole (851).
8. The differential pressure sensor according to claim 6, wherein a filled ceramic (860) is arranged on the other side of the positive pressure oil chamber (810) close to the pressure chip (500), a second through hole (861) is arranged in the filled ceramic (860), and the second through hole (861) is communicated with the positive pressure oil filling pipe (830).
9. The differential pressure sensor according to claim 1, wherein the electrically isolating chamber (900) is filled with a potting compound to isolate the inside of the electrically isolating chamber (900) from the outside.
10. The differential pressure sensor according to claim 1, wherein the hydrophobic holes (310) are elongated and uniformly arranged on the outer circumference of the isolation cover (300).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221920226.XU CN218628767U (en) | 2022-07-25 | 2022-07-25 | Differential pressure sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221920226.XU CN218628767U (en) | 2022-07-25 | 2022-07-25 | Differential pressure sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218628767U true CN218628767U (en) | 2023-03-14 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221920226.XU Active CN218628767U (en) | 2022-07-25 | 2022-07-25 | Differential pressure sensor |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218628767U (en) |
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2022
- 2022-07-25 CN CN202221920226.XU patent/CN218628767U/en active Active
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