CN218584291U

CN218584291U - Semiconductor pipeline detector

Info

Publication number: CN218584291U
Application number: CN202223350250.7U
Authority: CN
Inventors: 王娟; 夏伟龙
Original assignee: Shanghai Qihui Technology Engineering Co ltd
Current assignee: Shanghai Qihui Technology Engineering Co ltd
Priority date: 2022-12-14
Filing date: 2022-12-14
Publication date: 2023-03-07
Anticipated expiration: 2032-12-14

Abstract

The utility model discloses a semiconductor pipeline detector, its technical scheme main points are, include: the body, the fixed cover of body both sides excircle wall is equipped with solid fixed ring in a left side and the solid fixed ring in a right side, body excircle wall fixed mounting has the lantern ring, body one side is provided with the sealed cowling, sealed cowling one side sets up the vacuum valve, the inside detection subassembly that is provided with of sealed cowling for detect the seal of semiconductor pipeline, can seal the detection device through solid fixed ring in a left side and the solid fixed ring in a right side and fix on the body that needs the detection, bear the internals through the lantern ring and connect solid fixed ring and sealed cowling, can start when using through the vacuum valve and bleed and make the atmospheric pressure in the sealed cowling and continuously reduce until being close vacuum state, thereby form the atmospheric pressure difference and be convenient for accomplish subsequent detection, can detect out the leakproofness of body through the detection subassembly, and can carry out the sign indication to the damage leakage department of body.

Description

Semiconductor pipeline detector

Technical Field

The utility model relates to a pipeline inspection technical field, concretely relates to semiconductor pipeline detector.

Background

The semiconductor technology relates to inflammable, toxic and corrosive gases, is an essential important raw material for manufacturing precise semiconductor electronic elements and new energy photoelectric products, gas leakage in production can cause very serious product quality accidents and personal injuries, and in order to ensure safety, when pipeline construction is carried out, the tightness detection of the pipeline is of vital importance.

For example, chinese patent publication No. CN203010212U proposes a pipeline detector, which includes a pressure gauge, a buffer coil, a detection tube and a valve, when in use, an outlet of a pipeline to be detected is first closed, then an inlet of the pipeline is hermetically connected with a pipeline interface, the valve is opened, a compressed air is connected to an air pipe interface for pressurization, when the pressure gauge has a reading, the air is stopped from being added, the valve is closed, the reading of the pressure gauge is observed again, if the reading of the pressure gauge does not change, it is indicated that the detected pipeline has a good sealing state, and no leakage point exists; if the reading of the pressure gauge is gradually reduced, the situation that a detected pipeline has a leakage point needs to be checked and eliminated in time is indicated, but the scheme cannot well detect the tightness of the semiconductor pipeline and indicate the detection position, and therefore a novel semiconductor pipeline detector is provided.

SUMMERY OF THE UTILITY MODEL

To solve the problems mentioned in the background art, the present invention is directed to a semiconductor pipeline detector to solve the problems mentioned in the background art.

The above technical object of the present invention can be achieved by the following technical solutions:

a semiconductor pipeline detector comprising: the body, fixed cover of body both sides excircle wall is equipped with solid fixed ring in a left side and the solid fixed ring in the right side, body excircle wall fixed mounting has the lantern ring, body one side is provided with the sealed cowling, the inside detection subassembly that is provided with of sealed cowling for detect semiconductor pipeline's seal.

Through adopting above-mentioned technical scheme, can fix detection device on the body that needs detected through solid fixed ring in a left side and the solid fixed ring in the right side, bear the internals through the lantern ring and connect solid fixed ring and sealed cowling, can make inside reaching the vacuum state when airtight through the sealed cowling and be convenient for detect, can detect out the leakproofness of body through detecting element to can instruct the leakage department.

Preferably, the detection assembly comprises: the fixed slot, the fixed slot is seted up lantern ring one side, the inside fixed mounting of fixed slot has the magnetic ring, the inside fixed joint of fixed slot has the hoop, the inside fixed joint of fixed slot has the cover net, cover net one side fixed mounting has the powder layer.

Through adopting above-mentioned technical scheme, through seting up the fixed slot, can inhale through the magnetic ring and fix the hoop, fix the cover net around the body round through magnetic attraction joint during use, reach afterwards in making the sealed cowling and be close vacuum state, damage such as crackle appears in the body, the inside gas of body can extrude from the crackle and blow the cover net under the atmospheric pressure difference of both sides, powder layer part on the cover net will be blown away this moment, just can judge the airtight condition of body this moment and can distinguish according to the state of powder layer and indicate body damaged position.

Preferably, lantern ring one side fixed mounting has the spliced pole, the fixed cover of spliced pole excircle wall is equipped with the pivot, pivot both sides fixed mounting have solid fixed ring in a left side and the solid fixed ring in the right side, the fixed cover in lantern ring excircle wall is equipped with the sealed cowling.

Through adopting above-mentioned technical scheme, through two solid fixed rings of spliced pole fixed, the solid fixed ring in the left side of connecting through the pivot can be convenient for rotate the cover with the solid fixed ring in the right side and establish and fix on the body.

Preferably, a vacuum valve is arranged on one side of the sealing cover.

Through adopting above-mentioned technical scheme, can start when using through the vacuum valve and bleed and make the atmospheric pressure in the sealed cowling reduce until being close vacuum state thereby accomplish and detect.

Preferably, the fixed ring in a left side with circle wall fixed mounting has sealed the pad in the fixed ring in the right side, the fixed ring in a left side with fixed ring one side threaded connection has fixation nut in the right side.

Through adopting above-mentioned technical scheme, can strengthen the leakproofness when using through sealed pad, prevent that gas leakage from influencing the testing result accuracy, and can provide certain cushioning effect when establishing through the fixed cover of fixation nut extrusion and prevent that the dynamics from excessively damaging the body.

Preferably, the fixed cover of body one side is equipped with the connector, connector one side fixed mounting has the air-blower.

Through adopting above-mentioned technical scheme, on can being convenient for switching fixed connection body to air-blower through the connector, can be to keeping inside stable standard atmospheric pressure or the strong atmospheric pressure of normal during operation to the air-blower internal air conveying.

To sum up, the utility model discloses mainly have following beneficial effect:

through seting up the fixed slot, can inhale through the magnetic ring and fix the hoop, fix the cover net around the body round through magnetic attraction joint during use, reach in the sealed cowling afterwards and be close vacuum state, if damage such as crackle appears in the body, the inside gas of body can extrude from the crackle and blow the cover net under the atmospheric pressure difference of both sides, powder bed part on the cover net will be blown away this moment, just can judge the airtight condition of body this moment and can distinguish according to the state of powder bed and indicate out body damaged position

Thereby can start when using through the vacuum valve and bleed and make the atmospheric pressure reduction in the sealed cowling and accomplish the detection until being close to the vacuum state, can strengthen the leakproofness when using through sealed the pad, prevent that gas leakage from influencing the testing result accuracy, and can provide certain cushioning effect when establishing through the fixed cover of fixation nut extrusion and prevent that the dynamics from too big damage the body.

Drawings

Fig. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic structural view of the sealing cover of the present invention;

FIG. 3 is a schematic view of the structure of the connection column of the present invention;

fig. 4 is a schematic view of the structure of the collar of the present invention.

Reference numerals are as follows: 1. a pipe body; 2. a left retaining ring; 3. a right securing ring; 4. a sealing cover; 5. a vacuum valve; 6. a collar; 7. fixing grooves; 8. a magnetic ring; 9. an iron ring; 10. netting; 11. a powder layer; 12. connecting columns; 13. a rotating shaft; 14. a gasket; 15. fixing a nut; 16. a connector; 17. a blower.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1, 2, 3 and 4, a semiconductor pipeline detector includes: body 1, the fixed cover of 1 both sides excircle wall of body is equipped with solid fixed ring in a left side 2 and the solid fixed ring in a

right side

3, 1 excircle wall fixed mounting of body has

lantern ring

6, 1 one side of body is provided with sealed cowling 4, the inside determine module that is provided with of sealed cowling 4, an leakproofness for detecting the semiconductor pipeline, can fix detection device on the body 1 of required detection through solid fixed ring in a left side 2 and the solid fixed ring in a right side 3, bear internals and connect solid fixed ring and sealed cowling 4 through the lantern ring 6, can make inside reach the vacuum state when airtight through sealed cowling 4 and be convenient for detect, can detect out the leakproofness of body 1 through the determine module, and can instruct the leakage department, the determine module includes: fixed slot 7, fixed slot 7 is seted up in lantern ring 6 one side, the inside fixed mounting of fixed slot 7 has magnetic ring 8, the inside fixed joint of fixed slot 7 has hoop 9, the inside fixed joint of fixed slot 7 has cover net 10, cover net 10 one side fixed mounting has powder layer 11, through seting up fixed slot 7, can fix hoop 9 through the magnetic attraction of magnetic ring 8, fix the cover net 10 around 1 round of body through the magnetic attraction joint during use, it is close vacuum state to reach in the sealed cowling 4 afterwards, damage such as crackle appears in body 1, the inside gas of body 1 can extrude from the crackle and blow pressure cover net 10 under the atmospheric pressure difference of both sides, powder layer 11 local on the cover net 10 will be blown away this moment, just can judge the airtight condition of body 1 and can discern according to the state of powder layer 11 and indicate body 1 damaged position this moment.

Referring to fig. 1, fig. 2, fig. 3 and fig. 4, 6 one side fixed mounting of lantern ring has spliced pole 12, the fixed cover of spliced pole 12 excircle wall is equipped with

pivot

13, 13 both sides fixed mounting of pivot has solid fixed ring 2 in a left side and solid fixed ring 3 in the right side, 6 excircle wall fixed cover of lantern ring is equipped with sealed cowling 4, fix two solid fixed rings through spliced pole 12, solid fixed ring 2 in a left side and the solid fixed ring 3 in the right side that connect through pivot 13 can be convenient for rotate the cover and establish and fix on body 1, sealed cowling 4 one side sets up vacuum valve 5, can start to bleed when using through vacuum valve 5 and make the atmospheric pressure in the sealed cowling 4 reduce until being close vacuum state and accomplish the detection, solid fixed ring 2 in a left side and the solid fixed ring 3 in a right side fixed ring wall fixed mounting has sealed pad 14, solid fixed ring 2 in a left side and the solid fixed ring 3 one side threaded connection of right side has fixation nut 15, can strengthen the leakproofness when using through sealed pad 14, prevent that gas leakage influences the detection result accuracy, and can provide certain cushioning effect and prevent the too big damage body 1 when fixing the fixed cover is established through fixation nut 15 extrusion, body 1 one side is equipped with connector 16, the air blower, the normal work of air pressure is maintained through the strong air blower internal stability of air pressure or the air pressure of air blower work of keeping.

The working principle is as follows: referring to fig. 1-4, the detecting device can be fixed on the tube 1 to be detected by the left fixing ring 2 and the right fixing ring 3, the inner member is supported by the lantern ring 6 and connected with the fixing ring and the sealing cover 4, the sealing cover 4 can make the inner part reach a vacuum state for convenient detection when closed, the iron ring 9 can be fixed by magnetic attraction through the magnetic ring 8 by arranging the fixing groove 7, the sleeve net 10 which winds the tube 1 for one circle is clamped and fixed by magnetic attraction when in use, the vacuum valve 5 can start to pump air to reduce the air pressure in the sealing cover 4 until the air pressure is close to the vacuum state when in use, if the tube 1 has cracks, the gas in the tube 1 can extrude and press the sleeve net 10 from the cracks under the air pressure difference of the two sides, at the moment, the powder layer 11 on the sleeve net 10 can be blown away partially, just can judge the airtight condition of body 1 this moment and can discern according to the state of powder layer 11 and indicate out body 1 damaged position, fix two solid fixed rings through spliced pole 12, the solid fixed ring 2 of left side and the solid fixed ring 3 of right side connected through pivot 13 can be convenient for rotate the cover and establish on body 1, can strengthen the leakproofness when using through sealed pad 14, prevent to leak gas and influence the testing result accuracy, and can provide certain cushioning effect when establishing through fixation nut 15 extrusion fixed cover and prevent the too big damage body 1 of dynamics, can be convenient for on switching fixed connection body 1 to the air-blower 17 through connector 16, can maintain inside stable standard atmospheric pressure or the strong atmospheric pressure of normal during operation to carry the air in the body 1 through air-blower 17.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A semiconductor pipeline detector, comprising:

the device comprises a pipe body (1), wherein a left fixing ring (2) and a right fixing ring (3) are fixedly sleeved on the outer circle wall surfaces of two sides of the pipe body (1), a lantern ring (6) is fixedly installed on the outer circle wall surface of the pipe body (1), and a sealing cover (4) is arranged on one side of the pipe body (1);

the detection assembly is arranged inside the sealing cover (4) and used for detecting the tightness of the semiconductor pipeline.

2. The semiconductor pipeline detector of claim 1, wherein the detection assembly comprises:

fixed slot (7), set up in fixed slot (7) the lantern ring (6) one side, fixed slot (7) inside fixed mounting has magnetic ring (8), fixed slot (7) inside fixed joint has hoop (9), fixed slot (7) inside fixed joint has cover net (10), cover net (10) one side fixed mounting has powder layer (11).

3. The semiconductor pipeline detector according to claim 1, wherein a connecting column (12) is fixedly mounted on one side of the lantern ring (6), a rotating shaft (13) is fixedly sleeved on the outer circular wall surface of the connecting column (12), the left fixing ring (2) and the right fixing ring (3) are fixedly mounted on two sides of the rotating shaft (13), and the sealing cover (4) is fixedly sleeved on the outer circular wall surface of the lantern ring (6).

4. A semiconductor pipeline detector according to claim 1, characterized in that a vacuum valve (5) is arranged on one side of the sealing cover (4).

5. The semiconductor pipeline detector according to claim 1, wherein a sealing gasket (14) is fixedly arranged on the inner circle wall surface of the left fixing ring (2) and the right fixing ring (3), and a fixing nut (15) is connected to one side of the left fixing ring (2) and the right fixing ring (3) in a threaded mode.

6. A semiconductor pipeline detector according to claim 1, wherein a connector (16) is fixedly arranged on one side of the pipe body (1), and a blower (17) is fixedly arranged on one side of the connector (16).