CN114563138A - Device and method for detecting vacuum glass welding seam leakage rate - Google Patents
Device and method for detecting vacuum glass welding seam leakage rate Download PDFInfo
- Publication number
- CN114563138A CN114563138A CN202111562425.8A CN202111562425A CN114563138A CN 114563138 A CN114563138 A CN 114563138A CN 202111562425 A CN202111562425 A CN 202111562425A CN 114563138 A CN114563138 A CN 114563138A
- Authority
- CN
- China
- Prior art keywords
- vacuum glass
- vacuum
- inflatable bag
- helium
- leak rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/202—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material using mass spectrometer detection systems
- G01M3/205—Accessories or associated equipment; Pump constructions
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M3/00—Investigating fluid-tightness of structures
- G01M3/02—Investigating fluid-tightness of structures by using fluid or vacuum
- G01M3/04—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point
- G01M3/20—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material
- G01M3/22—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators
- G01M3/225—Investigating fluid-tightness of structures by using fluid or vacuum by detecting the presence of fluid at the leakage point using special tracer materials, e.g. dye, fluorescent material, radioactive material for pipes, cables or tubes; for pipe joints or seals; for valves; for welds; for containers, e.g. radiators for welds
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P40/00—Technologies relating to the processing of minerals
- Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
- Y02P40/57—Improving the yield, e-g- reduction of reject rates
Abstract
The application discloses a device and a method for detecting the leak rate of a vacuum glass welding seam, which relate to the technical field of vacuum glass detection and comprise a detection table, an inflatable bag and a helium mass spectrometer with an air pumping and detecting system; the detection table is used for placing vacuum glass; the inflatable bag is used for filling helium, and the inflatable bag is used for wrapping the welding seams on the peripheral side of the vacuum glass and is connected with the vacuum glass in a sealing way; one side of the vacuum glass is provided with a detection hole communicated with the inner space, the helium mass spectrometer is used for connecting the detection hole, vacuumizing the inside of the vacuum glass and measuring the comprehensive leakage rate of the welding seams on the peripheral side of the vacuum glass.
Description
Technical Field
The application relates to the technical field of vacuum glass detection, in particular to a device and a method for detecting the leak rate of a vacuum glass welding seam.
Background
During the production and use of vacuum glass, the average free path of gas molecules in the vacuum glass is required to be far larger than the gap between two pieces of vacuum glass to maintain the vacuum degree of the heat insulation performance. To meet the above requirements, three main points are to ensure: 1. out-gassing control of the constituent materials; 2. controlling leakage of the vacuum glass edge seal, namely welding quality; 3. and a getter is implanted in the gas-absorbing device and is used for absorbing the gas exhausted in the later stage of incomplete exhaust and the gas leaked from the welding seam. The control of the above 2 nd influencing factor is of great importance because the implantation amount of the getter is limited, and if the welding seam leakage rate is too large, the vacuum glass can hardly maintain the required service life. The existing welding seam detection technology adopts nondestructive inspection to detect the quality of a welding seam, but the leakage rate of the welding seam cannot be reflected visually.
Disclosure of Invention
The application aims to provide a device and a method for detecting the leak rate of a vacuum glass weld joint, and aims to solve the problem that the leak rate of the weld joint cannot be intuitively reflected.
On one hand, the application provides a device for detecting the leak rate of a vacuum glass welding seam, which comprises a detection table, an air bag and a helium mass spectrometer with an air pumping and detecting system;
the detection table is used for placing vacuum glass; the inflatable bag is used for filling helium, and the inflatable bag is used for wrapping the welding seams on the peripheral side of the vacuum glass and is connected with the vacuum glass in a sealing way; one side of the vacuum glass is provided with a detection hole communicated with the inner space, the helium mass spectrometer is used for connecting the detection hole, vacuumizing the inside of the vacuum glass and measuring the comprehensive leakage rate of the welding seams on the peripheral side of the vacuum glass.
Optionally, a pressing frame for pressing the inflatable bag is arranged on the detection table, the periphery of one side of the inflatable bag is clamped between the vacuum glass and the detection table, and the periphery of the other side of the inflatable bag is clamped between the vacuum glass and the pressing frame.
Optionally, the detection table is further provided with an isolation air curtain device, and the isolation air curtain device blows air towards the vacuum glass to form an air curtain for blocking air leakage between the joint seam of the inflatable bag and the vacuum glass and the detection hole.
Optionally, the isolation air curtain device blows air obliquely towards one side far away from the detection hole along the peripheral side.
Optionally, the helium mass spectrometer is connected to the detection hole through a vacuum bellows.
Optionally, one end of the vacuum corrugated pipe close to the detection hole is connected with a sealing ring, and the inner diameter of the sealing ring is larger than the diameter of the detection hole.
Optionally, the inner side of the sealing ring is connected with an annular support, and the annular support is detachably connected with the vacuum corrugated pipe.
Optionally, a gap exists between the annular support and the vacuum glass.
Optionally, the detection hole is located at the center of the vacuum glass.
In another aspect, the present application provides a method for detecting a leak rate of a vacuum glass weld, comprising the following steps:
the method comprises the following steps: after the vacuum glass is filled into the inflatable bag, the peripheral side of the inflatable bag is wrapped on the peripheral welding line of the vacuum glass, the vacuum glass is placed on a detection table, and the edge of the inflatable bag is pressed on the vacuum glass through a pressing frame; aligning the vacuum corrugated pipe to the detection hole, and starting an air pumping system of the helium mass spectrometer to carry out vacuum pumping treatment on the interior of the vacuum glass;
step two: opening a detection system of the helium mass spectrometer, and opening an isolation gas curtain device; after the air in the inflatable bag is discharged, helium gas is filled in the inflatable bag;
step three: reading a result; reading a leak rate value when a helium leak rate curve displayed by a helium mass spectrometer is stable, wherein the leak rate value is the comprehensive total helium leak rate of the whole piece of vacuum glass and has a unit of Pa.L/s;
step four: processing data; calculating the outer edge area of the glass welding seam, and dividing the measured comprehensive total helium leakage rate by the outer edge total area of the welding seam to obtain the helium leakage rate of the unit sealing area of the vacuum glass, wherein the unit is Pa.L/s.mm 2;
step five: repeating the first step to the fourth step for multiple times, and taking the average value as a final measurement result.
In summary, the present application includes at least one of the following benefits:
1. the comprehensive total leakage rate of the welding seam of the vacuum glass is obtained through visual detection of a helium mass spectrometer, the leakage rate of the welding seam of the vacuum glass in unit area is further calculated, so that the welding quality index of the vacuum glass is obtained, and the rationality of the welding process of the product, the vacuum performance of the welding flux and the quantitative index for judging the service life of the vacuum glass are guided by the index;
2. the compression frame can reduce helium leakage in the inflatable bag;
3. by adopting the isolated air curtain device, helium gas possibly leaked from the edge of the inflatable bag can be prevented from flowing to the periphery of the detection hole to influence the measurement result, and the accuracy of the detection result is improved;
4. a gap exists between the annular support frame and the vacuum glass, so that after vacuumizing, the sealing ring can generate enough deformation and is abutted against the surface of the vacuum glass, and the connection sealing state between the vacuum corrugated pipe and the detection hole is kept.
Drawings
FIG. 1 is an overall schematic view of the present embodiment;
FIG. 2 is a partially enlarged view of the present embodiment;
fig. 3 is an overall plan view of the present embodiment.
Description of reference numerals: 1. a detection table; 2. an air bag; 21. an inflation inlet; 3. a helium mass spectrometer; 31. a vacuum bellows; 32. a seal ring; 33. an annular support; 4. vacuum glass; 41. welding seams; 42. a detection hole; 5. a pressing frame; 6. an isolated air curtain device.
Detailed Description
The present application is described in further detail below with reference to figures 1-3.
The embodiment of the application discloses a device for detecting the leak rate of a vacuum glass welding seam. The device comprises a detection table 1, an air bag 2 and a helium mass spectrometer 3 with an air pumping and detection system. The detection table 1 is used for placing the vacuum glass 4 so as to facilitate detection. The airbag 2 has an inflation port 21 for filling helium gas toward the inside of the airbag 2. The air bag 2 is used for being sleeved on the peripheral side of the vacuum glass 4, so that the welding seam 41 on the peripheral side of the vacuum glass 4 is positioned inside the air bag 2. The center of the glass layer on one side of the vacuum glass 4 is provided with a detection hole 42, and the detection hole 42 is communicated with the inside of the vacuum glass 4 and is used for detecting the helium mass spectrometer 3. The aperture of the detection hole 42 is not less than 10 mm.
The helium mass spectrometer 3 is connected with a vacuum bellows 31, and a flange interface is installed at the end of the vacuum bellows 31 to completely cover the detection hole 42. The flange interface goes out to install rubber material's sealing washer 32, and fixed the bonding has ring carrier 33 on the sealing washer 32 inner wall, and ring carrier 33 and flange interface can dismantle the connection. Moreover, the annular support 33 is located on one side of the sealing ring 32 far away from the vacuum glass 4, and in the whole detection process, a certain gap is kept between the annular support 33 and the vacuum glass 4, so that when the helium mass spectrometer 3 performs air extraction on the inside of the vacuum glass 4, the sealing ring 32 can generate enough deformation and is abutted against the surface of the vacuum glass 4, and the sealing stability is kept.
In order to reduce helium leakage from the edges of the airbag 2. The detection table 1 is also provided with a pressing frame 5. The pressing frame 5 can be driven to be close to or far from the vacuum glass 4 by adopting a cylinder driving mode. After the inflatable bag 2 is sleeved on the periphery of the vacuum glass 4, the lower side edge of the inflatable bag 2 is tightly pressed between the detection table 1 and the vacuum glass 4; the upper side edge of the vacuum glass is pressed between the pressing frame 5 and the vacuum glass 4. In order to increase the reliability of the detection. The distance from the combined seam of the upper side edge of the air bag 2 and the vacuum glass 4 to the detection hole 42 is more than 100 mm.
In addition, a shielding air curtain device 6 is mounted on the inspection table 1. The isolation air curtain device 6 is arranged around the outside of the detection hole 42, and the isolation air curtain device 6 is positioned inside the pressing frame 5. The isolation air curtain device 6 blows air towards the vacuum glass 4 to form an annular air curtain so as to prevent helium which may leak from the joint seam of the air bag 2 and the vacuum glass 4 from flowing to the detection hole 42 and affecting the detection result. The isolating air curtain device 6 blows air downwards in an inclined mode towards the direction far away from the detection hole 42, and the isolating effect is further improved.
The application also discloses a method for detecting the leak rate of the vacuum glass weld joint. The method comprises the following steps:
the method comprises the following steps: after the vacuum glass 4 is filled into the inflatable bag 2, the peripheral side of the inflatable bag 2 is wrapped on the peripheral welding line 41 of the vacuum glass 4, the vacuum glass 4 is placed on the detection table 1, and the edge of the inflatable bag 2 is pressed on the vacuum glass 4 through the pressing frame 5; aligning the vacuum bellows 31 to the detection hole 42, and starting an air pumping system of the helium mass spectrometer 3 to carry out vacuum pumping treatment on the inside of the vacuum glass 4;
step two: the detection system of the helium mass spectrometer 3 is opened, and the isolating gas curtain device 6 is opened; after the air in the air bag 2 is exhausted, helium gas is filled;
step three: reading a result; when a helium leakage rate curve displayed by the helium mass spectrometer 3 is stable, reading a leakage rate value, wherein the value is the comprehensive total helium leakage rate of the whole piece of vacuum glass 4 and the unit is Pa.L/s;
step four: processing data; calculating the outer edge area of the glass welding seam 41, and dividing the measured comprehensive total helium leakage rate by the total outer edge area of the welding seam 41 to obtain the helium leakage rate of the vacuum glass 4 in unit sealing area, wherein the unit is Pa.L/s.mm 2;
step five: repeating the first step to the fourth step for multiple times, and taking the average value as a final measurement result.
The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.
Claims (10)
1. The utility model provides a detect device of vacuum glass welding seam leak rate which characterized in that: comprises a detection table, an air bag and a helium mass spectrometer with an air pumping and detecting system;
the detection table is used for placing vacuum glass; the inflatable bag is used for filling helium, and the inflatable bag is used for wrapping the welding seams on the peripheral side of the vacuum glass and is connected with the vacuum glass in a sealing way; one side of the vacuum glass is provided with a detection hole communicated with the inner space, the helium mass spectrometer is used for connecting the detection hole, vacuumizing the inside of the vacuum glass and measuring the comprehensive leakage rate of the welding seams on the peripheral side of the vacuum glass.
2. The device for detecting the leak rate of the vacuum glass weld joint according to claim 1, wherein: the detection table is provided with a pressing frame for pressing the inflatable bag, the periphery of one side of the inflatable bag is clamped between the vacuum glass and the detection table, and the periphery of the other side of the inflatable bag is clamped between the vacuum glass and the pressing frame.
3. The device for detecting the leak rate of the vacuum glass weld joint according to claim 2, wherein: the detection table is also provided with an isolation air curtain device, and the isolation air curtain device blows air towards the vacuum glass to form an air curtain for blocking air leakage between the joint seam of the inflatable bag and the vacuum glass and the detection hole.
4. The device for detecting the leak rate of the vacuum glass weld joint according to claim 3, wherein: the isolation air curtain device blows air obliquely towards one side far away from the detection hole along the peripheral side.
5. The device for detecting the leak rate of the vacuum glass weld joint according to claim 1, wherein: the helium mass spectrometer is connected to the detection hole through a vacuum bellows.
6. The device for detecting the leak rate of the vacuum glass weld joint according to claim 5, wherein: one end of the vacuum corrugated pipe close to the detection hole is connected with a sealing ring, and the inner diameter of the sealing ring is larger than the diameter of the detection hole.
7. The device for detecting the leak rate of the vacuum glass weld joint according to claim 6, wherein: the inner side of the sealing ring is connected with an annular support, and the annular support is detachably connected with the vacuum corrugated pipe.
8. The device for detecting the leak rate of the vacuum glass weld joint according to claim 7, wherein: and a gap is formed between the annular support and the vacuum glass.
9. The device for detecting the leak rate of the vacuum glass weld joint according to claim 1, wherein: the detection hole is positioned in the center of the vacuum glass.
10. A method for detecting the leak rate of a vacuum glass weld joint is characterized by comprising the following steps: comprises the following steps of (a) carrying out,
the method comprises the following steps: after the vacuum glass is filled into the inflatable bag, the peripheral side of the inflatable bag is wrapped on the peripheral welding line of the vacuum glass, the vacuum glass is placed on a detection table, and the edge of the inflatable bag is pressed on the vacuum glass through a pressing frame; aligning the vacuum corrugated pipe to the detection hole, and starting an air pumping system of the helium mass spectrometer to carry out vacuum pumping treatment on the interior of the vacuum glass;
step two: opening a detection system of the helium mass spectrometer, and opening an isolation gas curtain device; after the air in the inflatable bag is discharged, helium gas is filled in the inflatable bag;
step three: reading a result; reading a leak rate value when a helium leak rate curve displayed by a helium mass spectrometer is stable, wherein the value is the comprehensive total helium leak rate of the whole vacuum glass weld joint and is in a unit of Pa.L/s;
step four: processing data; calculating the outer edge area of the glass welding seam, and dividing the measured comprehensive total helium leakage rate by the total outer edge area of the welding seam to obtain the helium leakage rate of the unit sealing area of the vacuum glass, wherein the unit is Pa.L/s.mm 2;
step five: repeating the first step to the fourth step for multiple times, and taking the average value as a final measurement result.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111562425.8A CN114563138A (en) | 2021-12-20 | 2021-12-20 | Device and method for detecting vacuum glass welding seam leakage rate |
| PCT/CN2022/140003 WO2023116624A1 (en) | 2021-12-20 | 2022-12-19 | Device and method for measuring leak rate of weld seam of vacuum glass |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111562425.8A CN114563138A (en) | 2021-12-20 | 2021-12-20 | Device and method for detecting vacuum glass welding seam leakage rate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114563138A true CN114563138A (en) | 2022-05-31 |
Family
ID=81711629
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111562425.8A Pending CN114563138A (en) | 2021-12-20 | 2021-12-20 | Device and method for detecting vacuum glass welding seam leakage rate |
Country Status (2)
| Country | Link |
|---|---|
| CN (1) | CN114563138A (en) |
| WO (1) | WO2023116624A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023116624A1 (en) * | 2021-12-20 | 2023-06-29 | 维爱吉(厦门)科技有限责任公司 | Device and method for measuring leak rate of weld seam of vacuum glass |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4553435A (en) * | 1983-07-19 | 1985-11-19 | The United States Of America As Represented By The Secretary Of The Air Force | Elevated transient temperature leak test for unstable microelectronic packages |
| CN103674448B (en) * | 2013-11-08 | 2017-03-29 | 北京卫星环境工程研究所 | Control pressurer system and space capsule junction device for detecting leak rate and method |
| CN204087821U (en) * | 2014-08-26 | 2015-01-07 | 中国科学院等离子体物理研究所 | Square tube weld seam helium air-leakage test vacuum frock |
| CN104458151A (en) * | 2014-12-25 | 2015-03-25 | 中国西电电气股份有限公司 | Lightning arrester sealing test device and method |
| CN204758234U (en) * | 2015-07-01 | 2015-11-11 | 西安亨特电力科技有限公司 | Thermal power unit vacuum system equipment leak testing system |
| CN106017818B (en) * | 2016-06-01 | 2018-12-04 | 天津博益气动股份有限公司 | A kind of suction gun probe of suction-type nitrogen hydrogen leak detector |
| CN106124134B (en) * | 2016-07-27 | 2018-10-16 | 中国科学院长春光学精密机械与物理研究所 | Optical window component device for detecting leak rate and detection method |
| CN107036769B (en) * | 2017-04-18 | 2019-01-08 | 中国工程物理研究院材料研究所 | It is a kind of for calibrating the system and method for different probe gas vacuum leak leak rates |
| CN108871693B (en) * | 2018-07-04 | 2019-08-06 | 中国原子能科学研究院 | A kind of leak hunting method for superconducting cyclotron vacuum chamber |
| CN110595698A (en) * | 2019-10-21 | 2019-12-20 | 哈电集团（秦皇岛）重型装备有限公司 | Helium mass spectrometer leak detection device and method for butt weld of pipe and tube |
| CN216791544U (en) * | 2021-12-20 | 2022-06-21 | 维爱吉(厦门)科技有限责任公司 | Device for detecting leakage rate of vacuum glass welding seam |
| CN114563138A (en) * | 2021-12-20 | 2022-05-31 | 维爱吉(厦门)科技有限责任公司 | Device and method for detecting vacuum glass welding seam leakage rate |
-
2021
- 2021-12-20 CN CN202111562425.8A patent/CN114563138A/en active Pending
-
2022
- 2022-12-19 WO PCT/CN2022/140003 patent/WO2023116624A1/en unknown
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2023116624A1 (en) * | 2021-12-20 | 2023-06-29 | 维爱吉(厦门)科技有限责任公司 | Device and method for measuring leak rate of weld seam of vacuum glass |
Also Published As
| Publication number | Publication date |
|---|---|
| WO2023116624A1 (en) | 2023-06-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US3949596A (en) | Leak test fixture and method for using same | |
| CN205352639U (en) | Dress powder canning leak hunting device | |
| CN103471780B (en) | Airtight container end cap weld inspection system and detection method | |
| CN206831183U (en) | A kind of gas leak detection apparatus | |
| CN216791544U (en) | Device for detecting leakage rate of vacuum glass welding seam | |
| CN114563138A (en) | Device and method for detecting vacuum glass welding seam leakage rate | |
| CN109506845A (en) | Test device and test method for the leak detection of pipeline weld seam | |
| CN206019949U (en) | Fast accurate tubing leakage point detector | |
| CN103776596B (en) | A kind of vacuum leak detection bag | |
| CN116026529A (en) | Method for detecting leakage of packaging sleeve subjected to powder filling and sealing welding | |
| CN206974636U (en) | A kind of device for testing blood plasma separate cup sealing | |
| CN2539021Y (en) | Leakage-preventing flange sealer | |
| CN215811477U (en) | Gas pipeline sealing detection device | |
| CN201096590Y (en) | Momentum wheel base and seal cover leakage rate inspection device | |
| CN102494849B (en) | Air tightness detecting device and implementation method for same | |
| CN213148245U (en) | Air tightness checking structure of battery bottom shell assembly | |
| CN208223738U (en) | A kind of micro- device for detecting leakage of mental package lid | |
| CN108663164B (en) | Inspection method capable of simultaneously detecting gas purity and air tightness of high-pressure container | |
| CN206095887U (en) | Sealing material gas permeability detection device | |
| JPS6359093B2 (en) | ||
| CN218511964U (en) | Semiconductor target helium detection jig | |
| JP2015117830A (en) | Manufacturing method of vacuum insulation panel | |
| CN217878212U (en) | Leakage detection device for insulating flange | |
| CN217442795U (en) | Novel slip helium cover leak hunting box | |
| CN219104304U (en) | Detect rotatory target dorsal scale pipe gas tightness device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |