CN218580055U - MOCVD (metal organic chemical vapor deposition) built-in dust collector - Google Patents
MOCVD (metal organic chemical vapor deposition) built-in dust collector Download PDFInfo
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- CN218580055U CN218580055U CN202221263785.8U CN202221263785U CN218580055U CN 218580055 U CN218580055 U CN 218580055U CN 202221263785 U CN202221263785 U CN 202221263785U CN 218580055 U CN218580055 U CN 218580055U
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- mocvd
- fixedly connected
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Abstract
The utility model discloses a MOCVD embeds dust catcher relates to MOCVD technical field. This MOCVD embeds dust catcher, includes the bottom plate, the middle part of bottom plate upside is provided with installation mechanism, the upside fixedly connected with supporting shoe of bottom plate right-hand member, installation mechanism's upside is provided with the dust catcher body, the right side fixedly connected with suction tube of dust catcher body, the upside of bottom plate left end is provided with stabilizing mean. The utility model discloses in, through being provided with mounting groove, installation piece, clamp splice, screw rod, threaded rod, clamp plate one and clamp plate, make the dismantlement efficiency of dust catcher body increase, the staff later stage of being convenient for maintains, increases staff's maintenance efficiency, reduces staff's work load.
Description
Technical Field
The utility model relates to a MOCVD technical field especially relates to a built-in dust catcher of MOCVD.
Background
MOCVD is metal organic chemical vapor deposition, which adopts the method that a liquid source is sent into a vaporizing chamber to obtain a gaseous source substance, then the gaseous source substance is sent into a reaction chamber through flow control, or a liquid precursor is directly injected into the reaction chamber to be vaporized and deposited in the reaction chamber, and the method has the advantages of simplifying the source conveying mode, reducing the requirements on materials, facilitating the realization of the alternate deposition of various films to obtain a super-lattice structure and the like
Through retrieval, the application number is '201320559697.7', the built-in dust collector for the MOCVD is provided, the filter screen of the built-in dust collector for the MOCVD is not easy to block, the cleaning efficiency is high, the maintenance and use cost is low, and the service life is long. Still exist not enoughly, the dust collection box is fixed inside the glove box, is difficult to dismantle the dust collection box and falls to take out the dust, and the later stage maintenance personal of being not convenient for overhauls the dust collection box.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects existing in the prior art and providing a MOCVD (metal organic chemical vapor deposition) built-in dust collector.
In order to realize the purpose, the utility model adopts the following technical scheme: an MOCVD (metal organic chemical vapor deposition) built-in dust collector comprises a bottom plate, wherein an installation mechanism is arranged in the middle of the upper side of the bottom plate, a supporting block is fixedly connected to the upper side of the right end of the bottom plate, a dust collector body is arranged on the upper side of the installation mechanism, a suction pipe is fixedly connected to the right side of the dust collector body, and a stabilizing mechanism is arranged on the upper side of the left end of the bottom plate;
the mounting mechanism comprises clamping blocks, the clamping blocks are fixedly connected to the upper sides of the left end and the right end of the bottom plate, mounting grooves are formed in the upper side of the bottom plate and located on the left side and the right side of each clamping block, mounting blocks are arranged on the inner sides of the mounting grooves, and screws are arranged between the clamping blocks on the left side and the right side;
the stabilizing mechanism comprises a fixing plate, the fixing plate is fixedly connected to the upper side of the left end of the bottom plate, a sliding groove is formed in the right side of the fixing plate, a sliding plate is connected to the inner side of the sliding groove in a sliding mode, a lifting plate is fixedly connected to the right side of the sliding plate, a pressing plate II is fixedly connected to the lower side of the right end of the lifting plate and is a fixing rod fixedly connected to the middle of the lower side of the lifting plate, and a pressing plate I is fixedly connected to the lower side of the fixing rod.
As a further description of the above technical solution:
the installation block and the installation groove are mutually matched.
As a further description of the above technical solution:
the clamping block is fixedly connected with the dust collector body.
As a further description of the above technical solution:
the inside of spout rotates and is connected with the threaded rod, threaded rod and slide threaded connection.
As a further description of the above technical solution:
the upper end of the threaded rod penetrates through the fixed plate and is fixedly connected with the rotary table.
As a further description of the above technical solution:
and a spring is sleeved on the outer side of the fixed rod.
As a further description of the above technical solution:
and a stabilizing plate is fixedly connected between the sliding plate and the lifting plate and is arranged in a triangular structure.
As a further description of the above technical solution:
arc-shaped grooves are formed in the right sides of the second pressing plate and the supporting block.
The utility model discloses following beneficial effect has:
1. the utility model discloses in, through being provided with mounting groove, installation piece, clamp splice, screw rod, threaded rod, clamp plate one and clamp plate, make the dismantlement efficiency of dust catcher body increase, the staff later stage of being convenient for maintains, increases staff's maintenance efficiency, reduces staff's work load.
2. The utility model discloses in, through being provided with lifter plate, dead lever, spring, clamp plate one, clamp plate two and supporting shoe, make the stability of dust catcher body and suction tube, avoid the vibration that the operation of dust catcher body made the production influential to connecting stability.
Drawings
FIG. 1 is an overall three-dimensional structure diagram of an MOCVD built-in vacuum cleaner according to the present invention;
fig. 2 is a front view of the MOCVD internal vacuum cleaner provided by the utility model;
fig. 3 is a side view of the MOCVD internal vacuum cleaner provided by the utility model;
fig. 4 is a top view of the MOCVD internal vacuum cleaner provided by the present invention.
Illustration of the drawings:
1. a base plate; 2. a support block; 3. an installation mechanism; 301. mounting grooves; 302. a clamping block; 303. mounting blocks; 304. a screw; 4. a cleaner body; 5. a suction pipe; 6. a stabilizing mechanism; 601. a fixing plate; 602. a chute; 603. a slide plate; 604. a lifting plate; 605. a threaded rod; 606. a turntable; 607. a stabilizing plate; 608. a fixing rod; 609. a spring; 610. pressing a first plate; 611. and a second pressing plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
Referring to fig. 1-4, the present invention provides an embodiment: the utility model provides a MOCVD embeds dust catcher, comprising a base plate 1, the middle part of 1 upside of bottom plate is provided with installation mechanism 3, installation mechanism 3 is convenient for dismantle dust catcher body 4 fast, the upside fixedly connected with supporting shoe 2 of 1 right-hand member of bottom plate, installation mechanism 3's upside is provided with dust catcher body 4, the right side fixedly connected with suction tube 5 of dust catcher body 4, suction tube 5 is the dust absorption pipe of dust catcher body 4, be convenient for inhale dust catcher body 4 with the dust in the MOCVD equipment, the upside of 1 left end of bottom plate is provided with stabilizing mean 6, stabilizing mean 6 is convenient for increase the stability of dust catcher body 4, the stability of connecting is influenced in the vibration when avoiding moving.
The stabilizing mechanism 6 comprises a fixing plate 601, the fixing plate 601 is fixedly connected to the upper side of the left end of the bottom plate 1, the right side of the fixing plate 601 is provided with a sliding groove 602, the inner side of the sliding groove 602 is slidably connected with a sliding plate 603, the right side of the sliding plate 603 is fixedly connected with a lifting plate 604, the lower side of the right end of the lifting plate 604 is fixedly connected with a pressing plate two 611, the middle part of the lower side of the lifting plate 604 is fixedly connected with a fixing rod 608, the lower side of the fixing rod 608 is fixedly connected with a pressing plate one 610, the inner part of the sliding groove 602 is rotatably connected with a threaded rod 605, the threaded rod 605 is in threaded connection with the sliding plate 603, the upper end of the threaded rod 605 passes through the fixing plate 601 and is fixedly connected with a rotating disc 606, the outer side of the fixing rod 608 is sleeved with a spring 609, a stabilizing plate 607 is fixedly connected between the sliding plate 603 and the lifting plate 604, and the stabilizing plate 607 is in a triangular structure, the arc-shaped grooves are formed in the right sides of the second pressing plate 611 and the supporting block 2, the arc-shaped grooves are attached to the outer side of the suction pipe 5, when the dust collector is used, a worker rotates the rotary table 606, the rotary table 606 drives the threaded rod 605 to rotate, the threaded rod 605 drives the sliding plate 603 to move, the sliding plate 603 drives the lifting plate 604 to lift, the lifting plate 604 drives the fixing rod 608 to lift, the fixing rod 608 drives the first pressing plate 610 to lift, the lifting plate 604 drives the second pressing plate 611 to lift, the first pressing plate 610 is separated from the dust collector body 4, the second pressing plate 611 is separated from the supporting block 2, the dust collector body 4 is convenient to detach quickly, the stability of the dust collector body 4 and the suction pipe 5 is guaranteed through the pressing of the first pressing plate 610 and the second pressing plate 611, the fixing rod 608 and the spring 609, and the influence of vibration on the connection stability of the dust collector body 4 is reduced.
The working principle is as follows: when the dust collector body 4 needs to be disassembled, a worker rotates the rotary table 606, the rotary table 606 drives the threaded rod 605 to rotate, the threaded rod 605 drives the sliding plate 603 to move, the sliding plate 603 drives the lifting plate 604 to lift, the lifting plate 604 drives the first pressing plate 610 and the upper side of the second pressing plate 611, the first pressing plate 610 is separated from the dust collector body 4, the second pressing plate 611 is separated from the supporting block 2, then the worker rotates the screw 304 to separate the screw 304 from the clamping block 302 from the mounting block 303, the dust collector body 4 is convenient to disassemble from the upper side of the bottom plate 1, the dust collector body 4 can be disassembled only by rotating the screw 304 and the threaded rod 605, the disassembling efficiency is improved, the workload of the worker is reduced, in addition, the first pressing plate 610 and the second pressing plate 611 enable the dust collector body 4 and the suction pipe 5 to be limited, and the stability of the dust collector body 4 is improved.
Finally, it should be noted that: the foregoing is illustrative of the preferred embodiments of the present invention, and is not to be construed as limiting the invention, and any modifications, equivalent alterations, improvements and the like made within the spirit and principle of the invention are intended to be included within the scope of the invention.
Claims (8)
1. The MOCVD built-in dust collector comprises a bottom plate (1), and is characterized in that: an installation mechanism (3) is arranged in the middle of the upper side of the bottom plate (1), a supporting block (2) is fixedly connected to the upper side of the right end of the bottom plate (1), a dust collector body (4) is arranged on the upper side of the installation mechanism (3), a suction pipe (5) is fixedly connected to the right side of the dust collector body (4), and a stabilizing mechanism (6) is arranged on the upper side of the left end of the bottom plate (1);
the mounting mechanism (3) comprises clamping blocks (302), the clamping blocks (302) are fixedly connected to the upper sides of the left end and the right end of the bottom plate (1), mounting grooves (301) are formed in the upper side of the bottom plate (1) and positioned on the left side and the right side of each clamping block (302), mounting blocks (303) are arranged inside the mounting grooves (301), and screws (304) are arranged between the clamping blocks (302) on the left side and the right side;
stabilizing mean (6) is including fixed plate (601), fixed plate (601) fixed connection is at the upside of bottom plate (1) left end, spout (602) have been seted up on the right side of fixed plate (601), the inboard sliding connection of spout (602) has slide (603), the right side fixedly connected with lifter plate (604) of slide (603), the downside fixedly connected with clamp plate two (611) of lifter plate (604) right-hand member is middle part fixedly connected with dead lever (608) of lifter plate (604) downside, the downside fixedly connected with clamp plate (610) of dead lever (608).
2. The MOCVD internal vacuum cleaner according to claim 1, wherein: the mounting block (303) and the mounting groove (301) are arranged in a mutually adaptive mode.
3. The MOCVD internal vacuum cleaner according to claim 1, wherein: the clamping block (302) is fixedly connected with the dust collector body (4).
4. The MOCVD internal vacuum cleaner according to claim 1, wherein: the inside of spout (602) is rotated and is connected with threaded rod (605), threaded rod (605) and slide (603) threaded connection.
5. The MOCVD built-in vacuum cleaner of claim 4, wherein: the upper end of the threaded rod (605) penetrates through the fixing plate (601) and is fixedly connected with the rotating disc (606).
6. The MOCVD internal vacuum cleaner according to claim 1, wherein: and a spring (609) is sleeved on the outer side of the fixing rod (608).
7. The MOCVD internal vacuum cleaner according to claim 1, wherein: and a stabilizing plate (607) is fixedly connected between the sliding plate (603) and the lifting plate (604), and the stabilizing plate (607) is arranged in a triangular structure.
8. The MOCVD internal vacuum cleaner according to claim 1, wherein: arc-shaped grooves are formed in the right sides of the second pressing plate (611) and the supporting block (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221263785.8U CN218580055U (en) | 2022-05-24 | 2022-05-24 | MOCVD (metal organic chemical vapor deposition) built-in dust collector |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221263785.8U CN218580055U (en) | 2022-05-24 | 2022-05-24 | MOCVD (metal organic chemical vapor deposition) built-in dust collector |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218580055U true CN218580055U (en) | 2023-03-07 |
Family
ID=85358457
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221263785.8U Active CN218580055U (en) | 2022-05-24 | 2022-05-24 | MOCVD (metal organic chemical vapor deposition) built-in dust collector |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218580055U (en) |
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2022
- 2022-05-24 CN CN202221263785.8U patent/CN218580055U/en active Active
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