CN218580047U

CN218580047U - Spraying control device of ion sputtering instrument

Info

Publication number: CN218580047U
Application number: CN202223151035.4U
Authority: CN
Inventors: 郑启伟; 王霞
Original assignee: Wuhan Newtech Biotechnology Co ltd
Current assignee: Wuhan Newtech Biotechnology Co ltd
Priority date: 2022-11-28
Filing date: 2022-11-28
Publication date: 2023-03-07
Anticipated expiration: 2032-11-28

Abstract

The utility model discloses an ion sputtering appearance spraying controlling means, including control instrument body, control panel and a cylinder, the installation shell is installed on the top of telescopic link, the internally mounted of installation shell has a motor, no. two cylinders are installed to the output of a motor, the stripper plate is installed to the output of No. two cylinders. The utility model discloses an install the stripper plate, the telescopic link carries out concertina movement through the kinetic energy that a cylinder provided, the removal about can promoting the installation shell on top carries out, the motor produces kinetic energy through work and offers the output, can transfer No. two cylinders and rotate, the sample of accomplishing the one side to the spraying of fixed station top through the stripper plate extrudes the centre gripping turn-over, thereby the realization need not carry out the bring to rest to ion sputtering appearance spraying controlling means, the unnecessary staff carries out manual turn-over to the spraying sample, alright carry out the spraying to the sample another side, effectively improve the spraying work efficiency of sample.

Description

Spraying control device of ion sputtering instrument

Technical Field

The utility model relates to an ion sputtering appearance spraying technical field specifically is an ion sputtering appearance spraying controlling means.

Background

The ion sputtering appearance is a desktop coating system who has compact structure, it is particularly suitable for the non-conductive sample high quality coating film among the scanning electron microscope imaging, the sample is dry clean to the basic requirement of ion sputtering coating film, when necessary, thereby exchange the sample and clean the sample surface with the position of negative pole utilizes spark discharge, later the sample recovers, sputter coating film again, iron, nickel, copper lead etc. are the cathode material that the ion sputtering appearance is commonly used, electric rigid gold sometimes, platinum, palladium, indium and other metals also can be as cathode material, oxygen is the common reaction gas of ion sputtering appearance, at present, because the sample frame is mostly fixed state, after the spraying of sample one side is accomplished, need to carry out the shut down operation to ion sputtering appearance spraying controlling means, need the staff to carry out the turn-over to the spraying sample and start ion sputtering appearance spraying controlling means again and carry out the spraying to the sample another side, complex operation, reduce sample spraying work efficiency easily, therefore, the utility model provides an ion sputtering appearance spraying controlling means.

The ion sputtering instrument spraying control device in the patent document has the defects that:

the patent document CN210560718U discloses a spraying control device for an ion sputtering instrument, wherein the right item of protection "comprises an ion sputtering instrument body, a metal spraying cylinder, a cover plate, a window cylinder and a window mirror, wherein a first button and a second button are arranged on the window cylinder; the utility model discloses can help personnel to realize the later stage and adjust the sample and put the state when using ion sputtering appearance to spout gold in real time, realize better spraying, this ion sputtering appearance spraying controlling means, though can help personnel to realize the later stage and adjust the sample and put the state when using ion sputtering appearance to spout gold in real time, realize better spraying, but after spraying sample one side spraying, need carry out the bring to rest to ion sputtering appearance spraying controlling means, it carries out the turn-over to the spraying sample and starts ion sputtering appearance spraying controlling means once more and carry out the spraying to the sample another side to need the staff, reduce sample spraying work efficiency easily, thereby need increase to solve the problem that leads to reducing sample spraying work efficiency because of turning over to the sample to the automatic turn-over structure of spraying sample.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an ion sputtering appearance spraying controlling means to solve and to provide in the above-mentioned background art because the sample frame is mostly fixed state, after sample one side spraying is accomplished, need carry out the bring to rest to ion sputtering appearance spraying controlling means, need the staff to carry out the turn-over to the spraying sample and start ion sputtering appearance spraying controlling means once more and carry out the spraying to the sample another side, complex operation reduces sample spraying work efficiency's problem easily.

In order to achieve the above object, the utility model provides a following technical scheme: a spraying control device of an ion sputtering instrument comprises a control instrument body, a control panel and a first air cylinder, wherein the control panel is installed on one side of the control instrument body, a fixed table is installed on the top of the control instrument body, a transparent working chamber is installed on the top of the control instrument body, and the transparent working chamber is located on the outer side of the fixed table;

the telescopic link is installed to the output of a cylinder, the installation shell is installed on the top of telescopic link, the internally mounted of installation shell has a motor, no. two cylinders are installed to the output of a motor, the stripper plate is installed to the output of No. two cylinders.

Preferably, the bottom of control instrument body is installed the multiunit bottom leg symmetrically, and a sealing ring is installed No. one at the top of control instrument body, and a sealing ring contacts with the outside of transparent studio.

Preferably, an adjusting knob is installed on one side of the control plate in a penetrating mode.

Preferably, the top of the fixed table is movably provided with a sample.

Preferably, the top movable mounting of transparent studio has the top cap, and seal ring is installed to the bottom of top cap, and seal ring contacts with the inner wall of transparent studio, and the top of top cap is run through and is installed the gas-supply pipe, and the bottom of top cap is installed the sputter nozzle, and the sputter nozzle link up with the gas-supply pipe and be connected.

Preferably, a first air cylinder is symmetrically arranged at the top of the fixed table.

Preferably, the protective housing is installed to the top symmetry of control instrument body, and the protective housing is located one side of transparent studio, and the internally mounted of protective housing has No. two motors, and the rotation axis is installed to the output of No. two motors, and the rotation axis activity runs through the top of protective housing, and the outside of rotation axis is run through the meshing and is installed the connecting plate, and the mounting panel is installed in one side connection of connecting plate, and the cleaning pad is installed in the outside connection of mounting panel.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses an install the stripper plate, produce kinetic energy through a cylinder work and provide the telescopic link of output No. one, kinetic energy that the telescopic link provided through a cylinder carries out concertina movement, the removal about can promoting the installation shell on top carries out, the installation shell is used for providing mounted position and protection for the motor of inside No. one, a motor produces kinetic energy through work and provides the output, can transfer No. two cylinders and rotate, no. two cylinders produce kinetic energy through work and provide the output stripper plate, the stripper plate carries out concertina movement through the kinetic energy that No. two cylinders provided, accomplish the sample of one side through the stripper plate to the spraying of fixed station top and extrude the centre gripping turn-over, thereby realize not needing to carry out the shut down motion to ion sputtering appearance spraying controlling means, the staff that does not need carries out manual turn-over to the spraying sample, alright carry out the spraying to the sample another side, effectively improve the spraying work efficiency of sample.

2. The utility model discloses an install cleaning pad, no. two motors produce kinetic energy through the work and provide the output rotation axis, the kinetic energy that the rotation axis provided through No. two motors carries out the rotation and rotates, it is connected to run through the meshing through connecting plate and rotation axis, can drive the connecting plate and carry out the removal from top to bottom, the mounting panel provides the mounted position for the cleaning pad in the outside, be connected with the connecting plate through the mounting panel, inner wall through cleaning pad and transparent studio contacts, thereby realize carrying out self-cleaning's effect to the inner wall of transparent studio, avoid transparent studio because repetitious usage, the sputtering shower nozzle carries out coating film processing to the sample, inner wall to transparent studio causes the pollution to block the sight, influence the real-time observation to the sample in outside staff later stage when the instrumentation spraying.

Drawings

Fig. 1 is a perspective view of the present invention;

FIG. 2 is a cross-sectional view of the transparent working chamber of the present invention;

FIG. 3 is a schematic view of the connecting plate structure of the present invention;

FIG. 4 is a cross-sectional view of a first cylinder of the present invention;

fig. 5 is a schematic view of the structure at a of the present invention.

In the figure: 1. a control instrument body; 101. a bottom leg; 102. a first sealing ring; 2. a control panel; 201. adjusting a knob; 3. a fixed table; 301. a sample; 4. a transparent working chamber; 401. a top cover; 402. a sealing gasket; 403. a gas delivery pipe; 404. a sputtering nozzle; 5. a first cylinder; 501. a first telescopic rod; 502. mounting a shell; 503. a first motor; 504. a second cylinder; 505. a pressing plate; 6. a protective shell; 601. a second motor; 602. a rotating shaft; 603. a connecting plate; 604. mounting a plate; 605. a cleaning pad.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front", "rear", "both ends", "one end", "the other end", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of the description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "disposed," "connected," and the like are to be construed broadly, and for example, "connected" may be either fixedly connected or detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Referring to fig. 1, 2 and 5, the present invention provides an embodiment: a spraying control device of an ion sputtering instrument;

the device comprises a control instrument body 1, a control panel 2, a fixed platform 3 and a transparent working chamber 4, wherein a plurality of groups of bottom legs 101 are symmetrically arranged at the bottom of the control instrument body 1, a first sealing ring 102 is arranged at the top of the control instrument body 1, the first sealing ring 102 is contacted with the outer side of the transparent working chamber 4, the control panel 2 is arranged at one side of the control instrument body 1, an adjusting knob 201 is arranged at one side of the control panel 2 in a penetrating manner, the fixed platform 3 is arranged at the top of the control instrument body 1, a sample 301 is movably arranged at the top of the fixed platform 3, the transparent working chamber 4 is arranged at the top of the control instrument body 1, the transparent working chamber 4 is positioned at the outer side of the fixed platform 3, a top cover 401 is movably arranged at the top end of the transparent working chamber 4, a sealing gasket 402 is arranged at the bottom end of the top cover 401, the sealing gasket 402 is contacted with the inner wall of the transparent working chamber 4, and an air conveying pipe 403 is arranged at the top of the top cover 401 in a penetrating manner, the bottom end of the top cover 401 is provided with a sputtering spray head 404, the sputtering spray head 404 is communicated and connected with a gas conveying pipe 403, the control instrument body 1 is an ion sputtering instrument spraying control device and is used for carrying out sputtering coating on a sample 301, the bottom leg 101 provides a proper using height for the control instrument body 1, the bottom leg is in contact with the outer side of the bottom end of the transparent working chamber 4 through the first sealing ring 102 and can seal the bottom end of the transparent working chamber 4, the control instrument body 1 is electrically connected with the control instrument body 2 through the control panel 2, the operation of the control instrument body 1 can be regulated and controlled through the adjusting knob 201, the fixed table 3 provides a coating position for placing the sample 301 movably placed at the top part by being arranged at the top part of the control instrument body 1, the sealing ring 402 is in extrusion contact with the inner wall at the top end of the transparent working chamber 4, and the top cover 401 can be arranged at the top part of the transparent working chamber 4, the gas pipe 403 is used for conveying gas into the transparent operating chamber 4, so that the internal pressure of the transparent operating chamber 4 is increased to a suitable pressure, and the sample 301 is sprayed by the sputtering nozzle 404, thereby completing the coating.

Referring to fig. 2 and 4, the present invention provides an embodiment: a spraying control device of an ion sputtering instrument;

including a cylinder 5, telescopic link 501 is installed to the output of a cylinder 5, installation shell 502 is installed on the top of telescopic link 501, internally mounted of installation shell 502 has motor 503, no. two cylinders 504 are installed to the output of motor 503, stripper plate 505 is installed to the output of No. two cylinders 504, cylinder 5 is installed to fixed station 3's top symmetry, cylinder 5 is installed at the top of fixed station 3, work through cylinder 5 produces kinetic energy and provides telescopic link 501 for output, telescopic link 501 carries out the concertina movement through the kinetic energy that cylinder 5 provided, can promote the installation shell 502 on top to carry out the removal from top to bottom, installation shell 502 is used for providing mounted position and protection for inside motor 503, motor produces kinetic energy through work and provides the output, can transfer No. two cylinders to rotate, no. two cylinders 504 produce kinetic energy through work and provide stripper plate 505, stripper plate 505 carries out the concertina movement through the kinetic energy that cylinder 504 provided, sample 301 that the top spraying was accomplished to fixed station 3 through stripper plate 505 turns over the face, and realize that ion spray coating work need not carry out the effective sample spray coating control 301, the another side of the sample 301, the spray coating work efficiency can be improved to the No. one, the sample.

Referring to fig. 2, 3 and 5, the present invention provides an embodiment: a spraying control device of an ion sputtering instrument;

including protective housing 6, protective housing 6 is installed to the top symmetry of control instrument body 1, and protective housing 6 is located one side of transparent studio 4, the internally mounted of protective housing 6 has No. two motor 601, rotation axis 602 is installed to No. two motor 601's output, and rotation axis 602 activity runs through the top of protective housing 6, the outside of rotation axis 602 runs through the meshing and installs connecting plate 603, mounting panel 604 is installed to one side connection of connecting plate 603, the outside connection of mounting panel 604 installs cleaning pad 605, protective housing 6 is used for protecting inside No. two motor 601 steady operation, no. two motor 601 produces kinetic energy through the work and provides output rotation axis 602, rotation axis 602 rotates through the kinetic energy that No. two motor 601 provided, run through the meshing and connect through connecting plate 603 and rotation axis 602, can drive connecting plate 603 and carry out the removal from top to bottom, mounting panel 604 provides the mounted position for the cleaning pad 605 in the outside, connect through mounting panel 604 and connecting plate 603, contact through cleaning pad 605 and the inner wall of transparent studio 4, thereby realize carrying out the effect of self-cleaning to the inner wall of transparent studio 4, avoid transparent studio 4 because of repetitious usage, shower nozzle 404 processes sample 301, the inner wall of transparent studio 4 influences the later stage and stops the appearance of the post pollution of the appearance of using observation instrument in real-time.

The working principle is as follows: the sample 301 is sprayed and processed by the sputtering spray head 404, kinetic energy is generated by the work of the first air cylinder 5 and is provided for the first expansion link 501 at the output end, the first expansion link 501 performs telescopic motion by the kinetic energy provided by the first air cylinder 5, the top mounting shell 502 can be pushed to move up and down, the mounting shell 502 is used for providing mounting position and protection for the internal first motor 503, the first motor 503 generates kinetic energy through work and provides the kinetic energy for an output end, the second cylinder 504 can be adjusted to rotate, the second cylinder 504 generates kinetic energy through work and provides the kinetic energy for the extrusion plate 505 at the output end, the extrusion plate 505 performs telescopic motion through the kinetic energy provided by the second cylinder 504, the sample 301 coated on the top of the fixed table 3 is turned over by the pressing plate 505, therefore, the operation stop of the spraying control device of the ion sputtering instrument is not needed, the other surface of the sample 301 can be sprayed without manually turning over the sprayed sample 301 by a worker, the spraying working efficiency of the sample 301 is effectively improved, the second motor 601 generates kinetic energy through working and provides the kinetic energy for the output end rotating shaft 602, the rotating shaft 602 rotates through the kinetic energy provided by the second motor 601 and is connected with the rotating shaft 602 through the connecting plate 603 in a penetrating and meshing way, the attachment plate 603 can be moved up and down, the mounting plate 604 provides a mounting location for the outer cleaning pad 605, connected to the connection plate 603 by means of the mounting plate 604, contacted to the inner wall of the transparent working chamber 4 by means of the cleaning pad 605, thereby realizing the effect of automatically cleaning the inner wall of the transparent working chamber 4, avoiding the sputtering spray head 404 from coating the sample 301 due to the repeated use of the transparent working chamber 4, the inner wall of the transparent working chamber 4 is polluted to block the sight, and the real-time observation of the sample 301 by external workers in the later stage when the instrument is used for spraying is influenced.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

Claims

1. The utility model provides an ion sputtering appearance spraying controlling means, includes control instrument body (1), control panel (2) and a cylinder (5), its characterized in that: a control panel (2) is installed on one side of the control instrument body (1), a fixed table (3) is installed on the top of the control instrument body (1), a transparent working chamber (4) is installed on the top of the control instrument body (1), and the transparent working chamber (4) is located on the outer side of the fixed table (3);

an telescopic link (501) is installed to the output of a cylinder (5), installation shell (502) is installed on the top of a telescopic link (501), the internally mounted of installation shell (502) has motor (503), no. two cylinders (504) are installed to the output of motor (503), stripper plate (505) is installed to the output of No. two cylinders (504).

2. The ion sputtering instrument spraying control device according to claim 1, characterized in that: the bottom of control instrument body (1) is installed the symmetry multiunit and is ended leg (101), and sealing ring (102) are installed No. one at the top of control instrument body (1), and sealing ring (102) contact with the outside of transparent studio (4).

3. The ion sputtering instrument spraying control device according to claim 1, characterized in that: and an adjusting knob (201) is arranged on one side of the control plate (2) in a penetrating way.

4. The ion sputtering instrument spraying control device according to claim 1, characterized in that: and the top of the fixed table (3) is movably provided with a sample (301).

5. The ion sputtering instrument spraying control device according to claim 1, characterized in that: the top movable mounting of transparent studio (4) has top cap (401), and seal ring (402) are installed to the bottom of top cap (401), and seal ring (402) contact with the inner wall of transparent studio (4), and the top of top cap (401) is run through and is installed gas-supply pipe (403), and sputtering shower nozzle (404) is installed to the bottom of top cap (401), and sputtering shower nozzle (404) link up with gas-supply pipe (403) and be connected.

6. The ion sputtering instrument spraying control device according to claim 4, characterized in that: a first cylinder (5) is symmetrically installed at the top of the fixed table (3).

7. The ion sputtering instrument spraying control device according to claim 2, characterized in that: protective housing (6) are installed to the top symmetry of control instrument body (1), and protective housing (6) are located one side of transparent studio (4), the internally mounted of protective housing (6) has No. two motor (601), rotation axis (602) are installed to the output of No. two motor (601), and rotation axis (602) activity runs through the top of protective housing (6), connecting plate (603) are installed in the outside through the meshing of rotation axis (602), mounting panel (604) are installed in the connection of one side of connecting plate (603), the outside of mounting panel (604) is connected and is installed cleaning pad (605).