CN219421135U - Plasma cleaning machine torch convenient to loading and unloading - Google Patents
Plasma cleaning machine torch convenient to loading and unloading Download PDFInfo
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- CN219421135U CN219421135U CN202320270290.6U CN202320270290U CN219421135U CN 219421135 U CN219421135 U CN 219421135U CN 202320270290 U CN202320270290 U CN 202320270290U CN 219421135 U CN219421135 U CN 219421135U
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Abstract
The utility model belongs to the technical field of semiconductor tail gas treatment, in particular to a plasma cleaning machine torch convenient to assemble and disassemble, which comprises a cathode and an anode arranged below the cathode, wherein the outer side wall of the cathode is in threaded connection with a cathode shell, the outer side wall of the anode is fixedly provided with an anode shell, the bottom side of the cathode shell is in a boss structure, and the cathode shell is fixedly connected with the anode shell through a screw sleeve; when the utility model is installed and disassembled, the anode shell is inserted into the clamping groove A, the clamping lug is clamped on the surface of the fixing seat through the clamping groove A and the clamping groove B, a user rotates the whole anode shell, the clamping lug drives the clamping ring to rotate, the pin hole B is aligned with the pin hole A, then the pin is inserted into the pin hole A and the pin hole B, the installation and fixation of the torch are realized, when the disassembly is needed, the pin is pulled out, the anode shell is rotated to align the clamping groove B with the clamping groove A, and then the anode shell can be pulled out from the clamping ring.
Description
Technical Field
The utility model belongs to the technical field of semiconductor tail gas treatment, and particularly relates to a plasma cleaning machine torch convenient to assemble and disassemble.
Background
The method comprises the steps that a plasma water washing device is adopted in process tail gas treatment, a plasma torch discharges between a cathode and an anode, working gas flows through the plasma water washing device to ionize under the action of strong current to form plasma flame, the plasma flame is sprayed out through a spray nozzle under the action of the working gas to form jet flow flame, then the jet flow flame is mixed with waste gas to be treated, the waste gas is heated by the plasma flow, and organic matters or halides in the waste gas are converted into inorganic micromolecule matters such as carbon dioxide, water and the like under the action of gases such as air;
through investigation publication (bulletin) number: CN210670707U discloses a thermal plasma torch generator, in which a technical scheme is disclosed that the middle part of the top wall of the anode is in a truncated cone structure, the edge of the truncated cone structure is parallel to the edge of the truncated cone at the lower end of the cathode, the peripheral part of the top wall of the anode, which is positioned in the middle part of the truncated cone structure, is in a flat-top structure, and the flat-top structure is symmetrically arranged with the plane at the lower end of the cathode mounting bracket; the device has the technical effects that the device adopts a direct current and non-conversion arc structure, current between an anode and a cathode is not in direct contact, plasma is sprayed out from the annular center of the anode under the pressure of working gas such as nitrogen and contacts with waste gas and the like, so that reaction is completed rapidly;
however, the conventional loading and unloading manner of the torch is mostly of flange structure, so that the loading and unloading of the torch is inconvenient in maintenance and cleaning of the reaction chamber, time and labor are wasted, and the use of users is inconvenient.
In order to solve the problems, a plasma cleaning machine torch convenient to assemble and disassemble is provided in the application.
Disclosure of Invention
To solve the problems set forth in the background art. The utility model provides a plasma cleaning machine torch convenient to assemble and disassemble, which has the characteristic of being convenient for rapidly assembling and disassembling the plasma torch.
In order to achieve the above purpose, the present utility model provides the following technical solutions: the utility model provides a plasma cleaning machine torch convenient to loading and unloading, includes the negative pole and sets up the positive pole of negative pole below, the lateral wall threaded connection of negative pole has the negative pole casing, the lateral wall of positive pole is fixed with the positive pole casing, the bottom side of negative pole casing is boss structure, the negative pole casing pass through the swivel nut with positive pole casing fixed connection, the lateral wall of positive pole casing is fixed with the card ear, the below of positive pole casing is equipped with the baffle, the baffle passes through screw fixedly connected with fixing base, the appearance intracavity of fixing base is rotated and is connected with the snap ring, the surface of baffle seted up with card ear assorted draw-in groove A, the surface of snap ring seted up with card ear assorted draw-in groove B, the fixing base is fixed in cleaning machine reaction chamber department.
As the plasma cleaning machine torch convenient to assemble and disassemble is preferable, pin holes A which are symmetrically arranged are formed in the positions, close to the two sides of the clamping groove A, of the surface of the baffle plate, pin holes B are formed in the surface of the clamping ring, the pin holes B and the clamping groove B are arranged at an included angle of 30 degrees, and pins are inserted into the pin holes A.
As the plasma cleaning machine torch convenient to assemble and disassemble, the surface of the baffle plate is preferably provided with the observation window, and the position of the surface of the clamping ring, which is close to the observation window, is carved with scales.
As the plasma cleaning machine torch convenient to assemble and disassemble, the inner wall of the screw sleeve is matched with the bottom side of the cathode shell, the inner wall of the screw sleeve is provided with the sealing gasket, and the surface of one side, close to the baffle, of the clamping ring is fixedly provided with the sealing gasket.
As the plasma cleaning machine torch convenient to assemble and disassemble, the bottom side of the clamping ring is preferably provided with a plurality of balls.
Compared with the prior art, the utility model has the beneficial effects that:
when the utility model is installed and disassembled, the anode shell is inserted into the clamping groove A, the clamping lug is clamped on the surface of the fixing seat through the clamping groove A and the clamping groove B, a user rotates the whole anode shell, the clamping lug drives the clamping ring to rotate, the pin hole B is aligned with the pin hole A, then the pin is inserted into the pin hole A and the pin hole B, the installation and fixation of the torch are realized, when the disassembly is needed, the pin is pulled out, the anode shell is rotated to align the clamping groove B with the clamping groove A, and then the anode shell can be pulled out from the clamping ring.
Drawings
The accompanying drawings are included to provide a further understanding of the utility model and are incorporated in and constitute a part of this specification, illustrate the utility model and together with the embodiments of the utility model, serve to explain the utility model. In the drawings:
FIG. 1 is a schematic diagram of the structure of the present utility model;
FIG. 2 is a schematic view of the structure of the screw sleeve according to the present utility model;
FIG. 3 is a schematic view of a snap ring according to the present utility model;
FIG. 4 is a schematic view of a baffle plate according to the present utility model;
in the figure: 1. a cathode; 2. a cathode housing; 3. a screw sleeve; 4. an anode casing; 5. clamping ears; 6. a baffle; 61. a clamping groove A; 62. pin holes A; 63. an observation window; 7. a clasp; 71. a clamping groove B; 72. pin holes B; 8. a fixing seat.
Detailed Description
The following description of the embodiments of the present utility model will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present utility model, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the utility model without making any inventive effort, are intended to be within the scope of the utility model.
Example 1
As shown in fig. 1;
a plasma cleaning machine torch convenient to assemble and disassemble comprises a cathode 1 and an anode arranged below the cathode 1;
in this embodiment: the method comprises the steps that a plasma water washing device is adopted in process tail gas treatment, a plasma torch discharges between a cathode and an anode, working gas flows through the plasma water washing device to ionize under the action of strong current to form plasma flame, the plasma flame is sprayed out through a spray nozzle under the action of the working gas to form jet flow flame, then the jet flow flame is mixed with waste gas to be treated, the waste gas is heated by the plasma flow, and organic matters or halides in the waste gas are converted into inorganic micromolecule matters such as carbon dioxide, water and the like under the action of gases such as air;
through investigation publication (bulletin) number: CN210670707U discloses a thermal plasma torch generator, in which a technical scheme is disclosed that the middle part of the top wall of the anode is in a truncated cone structure, the edge of the truncated cone structure is parallel to the edge of the truncated cone at the lower end of the cathode, the peripheral part of the top wall of the anode, which is positioned in the middle part of the truncated cone structure, is in a flat-top structure, and the flat-top structure is symmetrically arranged with the plane at the lower end of the cathode mounting bracket; the device has the technical effects that the device adopts a direct current and non-conversion arc structure, current between an anode and a cathode is not in direct contact, plasma is sprayed out from the annular center of the anode under the pressure of working gas such as nitrogen and contacts with waste gas and the like, so that reaction is completed rapidly;
however, the existing loading and unloading modes of the torch are mostly in flange structures, so that the loading and unloading of the torch is inconvenient during maintenance and cleaning of the reaction chamber, time and labor are wasted, and the use of users is inconvenient; in order to solve the above problems, the following modifications are proposed.
Further, the method comprises the following steps:
as shown in fig. 1-4;
in combination with the above:
for convenience of users to assemble and disassemble the torch, the outer side wall of the cathode 1 is in threaded connection with the cathode shell 2, the outer side wall of the anode is fixedly provided with the anode shell 4, the bottom side of the cathode shell 2 is of a boss structure, the cathode shell 2 is fixedly connected with the anode shell 4 through the threaded sleeve 3, the outer side wall of the anode shell 4 is fixedly provided with the clamping lug 5, the baffle 6 is arranged below the anode shell 4 and fixedly connected with the fixing seat 8 through a screw, the holding cavity of the fixing seat 8 is rotationally connected with the clamping ring 7, the surface of the baffle 6 is provided with a clamping groove A61 matched with the clamping lug 5, the surface of the clamping ring 7 is provided with a clamping groove B71 matched with the clamping lug 5, and the fixing seat 8 is fixed at the reaction chamber of the cleaning machine.
In this embodiment: when the utility model is used, a user can connect and fix the cathode shell 2 and the anode shell 4 through the threaded sleeve 3 to form a complete torch, the torch is inserted into the baffle 6, the clamping lug 5 is inserted into the clamping groove A61 and enters into the clamping groove B71 on the clamping ring 7, the user rotates the anode shell 4 to drive the clamping ring 7 to rotate, the baffle 6 and the fixing seat 8 clamp the clamping lug 5 to prevent the anode shell 4 from falling off, the installation of the torch is completed, and when the torch needs to be disassembled, the anode shell 4 is rotated to align the clamping lug 5, the clamping groove B71 and the clamping groove A61, so that the anode shell 4 can be pulled out, and the utility model is rapid and convenient and is convenient for the user to use.
Still further, the method comprises:
in an alternative embodiment, the two sides of the surface of the baffle 6, which are close to the clamping groove A61, are provided with symmetrically arranged pin holes A62, the surface of the clamping ring 7 is provided with pin holes B72, the pin holes B72 and the clamping groove B71 are arranged at an included angle of 30 degrees, and pins are inserted into the pin holes A62.
In this embodiment: through the design, the pin is inserted into the pin hole A62 and the pin hole B72 to enable the clamping ring 7 to be fixedly locked, and the clamping ring 7 is prevented from rotating in the use process, so that the anode casing 4 is prevented from falling out of the clamping ring 7.
Still further, the method comprises:
in an alternative embodiment, the surface of the baffle 6 is provided with a viewing window 63, and the surface of the snap ring 7 is graduated near the viewing window 63.
In this embodiment: through this design, the user can see the rotation angle of snap ring 7 through viewing window 63, and the user of being convenient for controls snap ring 7 to accurate position.
Still further, the method comprises:
in an alternative embodiment, the inner wall of the screw sleeve 3 is matched with the bottom side of the cathode shell 2, the inner wall of the screw sleeve 3 is provided with a sealing gasket, and the surface of one side, close to the baffle 6, of the clamping ring 7 is fixed with the sealing gasket.
In this embodiment: through the design, the sealing gasket can prevent semiconductor tail gas from leaking from the connecting part, so that the torch has better sealing performance.
Still further, the method comprises:
in an alternative embodiment, the underside of the snap ring 7 is provided with balls.
In this embodiment: through this design, the ball makes snap ring 7 rotate in a flexible way, and the user of being convenient for rotates snap ring 7.
The working principle and the using flow of the utility model are as follows: when the utility model is used, a user can connect and fix the cathode shell 2 and the anode shell 4 through the threaded sleeve 3 to form a complete torch, the torch is inserted into the baffle 6, at the moment, the clamping lug 5 is inserted into the clamping groove A61 and enters into the clamping groove B71 on the clamping ring 7, the user rotates the anode shell 4 to drive the clamping ring 7 to rotate, when the pin hole A62 and the pin hole B72 are aligned, the pin is inserted into the pin hole A62 and the pin hole B72 to fixedly lock the clamping ring 7, the clamping ring 7 is prevented from rotating in the using process, the baffle 6 and the fixing seat 8 clamp the clamping lug 5, so that the anode shell 4 is prevented from falling out of the clamping ring 7, the installation of the torch is completed, when the torch is required to be disassembled, the pin is pulled out, then the anode shell 4 is rotated, the clamping lug 5 and the clamping groove B71 are aligned with the clamping groove A61, the anode shell 4 can be pulled out, the operation is quick and convenient, the user can conveniently use, and the user can conveniently observe the rotation angle of the clamping ring 7 through the observation window 63, and the user can conveniently control the clamping ring 7 to an accurate position.
Finally, it should be noted that: the foregoing description is only a preferred embodiment of the present utility model, and the present utility model is not limited thereto, but it is to be understood that modifications and equivalents of some of the technical features described in the foregoing embodiments may be made by those skilled in the art, although the present utility model has been described in detail with reference to the foregoing embodiments. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model should be included in the protection scope of the present utility model.
Claims (5)
1. The utility model provides a plasma cleaning machine torch convenient to loading and unloading, includes negative pole (1) and sets up the positive pole of negative pole (1) below, its characterized in that: the utility model discloses a cleaning machine, including positive pole (1) and negative pole, lateral wall threaded connection of positive pole (1) has negative pole casing (2), the lateral wall of positive pole is fixed with positive pole casing (4), the bottom side of negative pole casing (2) is boss structure, negative pole casing (2) pass through swivel nut (3) with positive pole casing (4) fixed connection, the lateral wall of positive pole casing (4) is fixed with card ear (5), the below of positive pole casing (4) is equipped with baffle (6), baffle (6) are through screw fixedly connected with fixing base (8), the appearance intracavity rotation of fixing base (8) is connected with snap ring (7), the surface of baffle (6) seted up with card ear (5) assorted draw-in groove A (61), the surface of snap ring (7) seted up with card ear (5) assorted draw-in groove B (71), fixing base (8) are fixed in the cleaning machine reaction chamber department.
2. The plasma cleaning machine torch convenient to assemble and disassemble as set forth in claim 1, wherein: the surface of baffle (6) is close to draw-in groove A (61) both sides department has seted up pinhole A (62) that the symmetry set up, pinhole B (72) have been seted up on the surface of snap ring (7), pinhole B (72) with draw-in groove B (71) are 30 degrees contained angles setting, the pin has been inserted in pinhole A (62).
3. The plasma cleaning machine torch convenient to assemble and disassemble as set forth in claim 1, wherein: an observation window (63) is formed in the surface of the baffle plate (6), and scales are carved on the surface of the clamping ring (7) at positions close to the observation window (63).
4. The plasma cleaning machine torch convenient to assemble and disassemble as set forth in claim 1, wherein: the inner wall of the screw sleeve (3) is matched with the bottom side of the cathode shell (2), a sealing gasket is arranged on the inner wall of the screw sleeve (3), and a sealing gasket is fixed on the surface of one side, close to the baffle (6), of the clamping ring (7).
5. The plasma cleaning machine torch convenient to assemble and disassemble as set forth in claim 1, wherein: the bottom side of the clamping ring (7) is provided with a plurality of balls.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320270290.6U CN219421135U (en) | 2023-02-21 | 2023-02-21 | Plasma cleaning machine torch convenient to loading and unloading |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202320270290.6U CN219421135U (en) | 2023-02-21 | 2023-02-21 | Plasma cleaning machine torch convenient to loading and unloading |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN219421135U true CN219421135U (en) | 2023-07-25 |
Family
ID=87207160
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202320270290.6U Active CN219421135U (en) | 2023-02-21 | 2023-02-21 | Plasma cleaning machine torch convenient to loading and unloading |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN219421135U (en) |
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2023
- 2023-02-21 CN CN202320270290.6U patent/CN219421135U/en active Active
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