CN218575753U - Polishing device based on silicon rod processing usefulness - Google Patents

Abstract

The utility model discloses a grinding device based on silicon rod processing usefulness, including dust collection box, carousel and first mounting sleeve, first fixed plate is installed to the one end at dust collection box top, and the other end at dust collection box top installs the second fixed plate, the one end that the second fixed plate was kept away from to first fixed plate is installed the motor, and the output of motor installs the pivot, the pivot passes first fixed plate, and the pivot is kept away from the one end of motor and is installed the carousel. The utility model discloses install first fixed plate, motor, pivot, first electric pneumatic cylinder, first clamping piece and second clamping piece, when polishing, can fix the one end of silicon rod through first clamping piece and second clamping piece earlier, the motor drives the carousel through the pivot and rotates, can make the piece of polishing rotate and polish the silicon rod, the in-process of polishing, silicon rod self does not rotate, can avoid the silicon rod to receive great stress at rotation in-process self to can avoid silicon rod wearing and tearing or atress fracture.

Description

Polishing device based on silicon rod processing usefulness

Technical Field

The utility model relates to a silicon rod processing equipment technical field specifically is a grinding device based on silicon rod processing usefulness.

Background

The silicon rod is a silicon single crystal rod formed by shaping or pulling in a hearth through a zone-melting or straight-pulling process, the silicon rod is a raw material of a silicon wafer and is also one of raw materials commonly used by semiconductor equipment manufacturing, when the silicon rod is produced, burrs are left on the outer side of the silicon rod, and the outer side of the silicon rod needs to be polished through a polishing device, so that the outer side of the silicon rod is kept smooth.

Present grinding device based on silicon rod processing usefulness is fixed with the silicon rod earlier mostly when using, drives the silicon rod again and rotates and polish, and the silicon rod rotates in-process and produces the friction with the abrasive disc for the silicon chip part receives great stress, and because silicon rod hardness is lower, makes the silicon rod wear and tear easily, splits even, consequently, this practicality provides a grinding device based on silicon rod processing usefulness is used for solving above-mentioned problem.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a grinding device based on silicon rod processing usefulness to solve the problem that proposes in the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme: a polishing device for silicon rod processing comprises a dust collection box, a rotary table and a first mounting sleeve, wherein a first fixing plate is mounted at one end of the top of the dust collection box, a second fixing plate is mounted at the other end of the top of the dust collection box, a motor is mounted at one end, far away from the second fixing plate, of the first fixing plate, a rotary shaft is mounted at the output end of the motor, penetrates through the first fixing plate, a rotary table is mounted at one end, far away from the motor, of the rotary shaft, a third electric pneumatic cylinder is mounted at an intermediate position, far away from one end of the rotary shaft, of the rotary table, a connecting block is mounted at the output end of the third electric pneumatic cylinder, a set of push-pull rods are symmetrically hinged to the outer side of the connecting block, a first mounting sleeve is hinged to one end, far away from the connecting block, of the first mounting sleeve, a connecting rod is mounted at the inner part of the first mounting sleeve, a second clamping piece is mounted at the top of the first mounting sleeve, a top plate is mounted at the top of the second mounting sleeve, a first pneumatic cylinder penetrates through the output end of the first electric pneumatic cylinder, a set of the second mounting sleeve is mounted at the output end of the second mounting sleeve, a connecting plate is mounted at the top of the second mounting sleeve, and a set of the first mounting sleeve is mounted at the output end of the second mounting sleeve, and the input of air pump installs the exhaust tube that extends to the dust collection box inside, the top that the air pump one end was kept away from to the dust collection box is installed control panel, control panel's output passes through the wire respectively with the input electric connection of air pump, motor, first electric pneumatic cylinder, second electric pneumatic cylinder and third electric pneumatic cylinder.

Preferably, the inside of second installation sleeve pipe all installs pole in the installation, pole all passes the opening in the installation, and the pole in the installation keeps away from the one end of second installation sleeve pipe all to be connected with the connecting rod.

Preferably, an extension spring is installed at one end of the installation inner rod close to the second installation sleeve, and one end of the extension spring far away from the installation inner rod is connected with the second installation sleeve.

Preferably, third sliding assemblies are mounted at two ends inside the second mounting sleeve, third guide sliding blocks are mounted at one ends, close to the mounting inner rod, of the third sliding assemblies in a sliding mode, and one ends, far away from the third sliding assemblies, of the third guide sliding blocks are connected with the mounting inner rod.

Preferably, a set of first sliding assembly is installed to the one end symmetry that the pivot was kept away from to the carousel, and the one end that the carousel was kept away from to first sliding assembly all has a first direction slider, the one end that first sliding assembly was kept away from to first direction slider all with first installation bushing.

Preferably, the inside one end that is close to third electric pneumatic cylinder of first installation cover all installs the second sliding subassembly, and the one end that third electric pneumatic cylinder was kept away from to the second sliding subassembly all slidable mounting have the second to lead the slider, the one end that second sliding subassembly was kept away from to the second direction slider all is connected with the connecting rod.

Preferably, a filter screen is installed inside the dust collection box, and through holes are uniformly formed in the top of the dust collection box.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the polishing device for processing the silicon rod is provided with a first fixing plate, a motor, a rotating shaft, a first electric pneumatic cylinder, a first clamping piece and a second clamping piece, one end of the silicon rod can be fixed through the first clamping piece and the second clamping piece during polishing, the motor drives a turntable to rotate through the rotating shaft, the polishing pieces can rotate and polish the silicon rod, the silicon rod does not rotate during polishing, the silicon rod is prevented from being subjected to large stress during rotation, and the silicon rod is prevented from being abraded or broken under stress;

2. when the silicon rod processing-based polishing device is used, the third electric pneumatic cylinder pushes or pulls the connecting block to move, so that the two groups of push-pull rods can push or pull the first mounting sleeve to move simultaneously, the distance between the two groups of polishing sheets can be adjusted, the polishing sheets can be tightly attached to the outer side of the silicon rod, and the device can polish the silicon rods with different diameters;

3. the polishing device for processing the silicon rod is provided with a second mounting sleeve, a connecting rod, a second electric pneumatic cylinder and a mounting inner rod, in the polishing process, the second electric pneumatic cylinder pushes or pulls the second mounting sleeve to move, the connecting rod can be driven to move, and polishing pieces can be moved to different positions outside the silicon rod for polishing;

4. this grinding device based on silicon rod processing usefulness installs dust collection box, exhaust tube, filter screen and air pump, and the in-process of polishing, air pump bleed through the exhaust tube, can collect the dust suction dust collection box inside that produces of polishing, can avoid the dust to cause the pollution, and the device uses environmental protection more.

Drawings

Fig. 1 is a schematic front sectional view of the present invention;

fig. 2 is a schematic front view of the present invention;

FIG. 3 is a schematic view of a partial structure of the present invention;

fig. 4 is a schematic front sectional view of a second mounting sleeve according to the present invention.

In the figure: 1. a dust collection box; 2. an exhaust pipe; 3. filtering with a screen; 4. an air pump; 5. a through hole; 6. a first fixing plate; 7. a motor; 8. a rotating shaft; 9. a turntable; 10. a first mounting sleeve; 11. a second mounting sleeve; 12. a connecting rod; 13. mounting blocks; 14. grinding the sheets; 15. a first electric pneumatic cylinder; 16. a top plate; 17. a first clip piece; 18. a second clip; 19. a second fixing plate; 20. a control panel; 21. a second electric pneumatic cylinder; 22. a connecting plate; 23. a first slide assembly; 24. a third electric pneumatic cylinder; 25. a first guide slider; 26. connecting blocks; 27. a port; 28. a second guide slider; 29. a second slide assembly; 30. installing an inner rod; 31. a third sliding assembly; 32. a third guide slider; 33. a tension spring; 34. a push-pull rod.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides an embodiment: a polishing device for processing silicon rods comprises a dust collection box 1, a rotary table 9 and a first installation sleeve 10, wherein a first fixing plate 6 is installed at one end of the top of the dust collection box 1, a second fixing plate 19 is installed at the other end of the top of the dust collection box 1, a motor 7 is installed at one end, far away from the second fixing plate 19, of the first fixing plate 6, the model of the motor 7 can be Y90S-2, a rotary shaft 8 is installed at the output end of the motor 7, the rotary shaft 8 penetrates through the first fixing plate 6, the rotary table 9 is installed at one end, far away from the motor 7, of the rotary table 8, a third electric pneumatic cylinder 24 is installed at the middle position of one end, far away from the rotary shaft 8, of the rotary table 9, the model of the third electric pneumatic cylinder 24 can be J64RT2UNIVER, a connecting block 26 is installed at the output end of the third electric pneumatic cylinder 24, a group of push-pull rods 34 are symmetrically hinged to the outer side of the connecting block 26, and one end, far away from the connecting block 26, of the push-pull rods 34 is hinged to the first installation sleeve 10, the connecting rods 12 are all installed inside the first installation sleeve 10, the end, far away from the push-pull rod 34, of the first installation sleeve 10 is provided with the through opening 27, the end, far away from the rotary table 9, of the connecting rods 12 is provided with the installation block 13, the end, near the third electric pneumatic cylinder 24, of the installation block 13 is provided with the polishing disc 14, the top, near the first fixing plate 6, of the second fixing plate 19 is provided with the second clamping plate 18, the top of the second fixing plate 19 is provided with the top plate 16, the top of the top plate 16 is provided with the first electric pneumatic cylinder 15, the model of the first electric pneumatic cylinder 15 can be J64RT2UNIVER, the output end of the first electric pneumatic cylinder 15 penetrates through the top plate 16, the output end of the first electric pneumatic cylinder 15 is provided with the first clamping plate 17, the outer side of the rotary table 9 is symmetrically provided with a group of connecting plates 22, and the end, far away from the second fixing plate 19, of the connecting plates 22 is provided with the second electric pneumatic cylinder 21, here, the type of the second electric pneumatic cylinder 21 may be J64RT2 universal, the output end of the second electric pneumatic cylinder 21 all passes through the connecting plate 22, and the output end of the second electric pneumatic cylinder 21 is all installed with the second installation sleeve 11, the top of the dust box 1 near one end of the first fixing plate 6 is installed with the air pump 4, here, the type of the air pump 4 may be VCH1028, and the input end of the air pump 4 is installed with the exhaust tube 2 extending to the inside of the dust box 1, the top of the dust box 1 far away from one end of the air pump 4 is installed with the control panel 20, the output end of the control panel 20 is respectively electrically connected with the air pump 4 through a wire, the motor 7, the first electric pneumatic cylinder 15, the input ends of the second electric pneumatic cylinder 21 and the third electric pneumatic cylinder 24.

In this implementation:

further, pole 30 in the installation is all installed to the inside of second installation sleeve pipe 11, and pole 30 all passes through opening 27 in the installation, and the pole 30 one end of keeping away from second installation sleeve pipe 11 in the installation all is connected with connecting rod 12, and second electric pneumatic cylinder 21 promotes or stimulates second installation sleeve pipe 11 to move, can drive connecting rod 12 and remove, can remove polishing piece 14 to the different positions departments in the silicon rod outside and polish.

Furthermore, an extension spring 33 is installed at one end of the installation inner rod 30 close to the second installation sleeve 11, and one end of the extension spring 33 far from the installation inner rod 30 is connected with the second installation sleeve 11, so that the installation inner rod 30 can be accommodated inside the second installation sleeve 11 when the push-pull rod 34 pushes the first installation sleeve 10 to move under the elastic action of the installation inner rod 30.

Further, third sliding assembly 31 is all installed at the inside both ends of second installation sleeve 11, and the one end that third sliding assembly 31 is close to pole 30 in the installation all slidable mounting have third direction slider 32, and the one end that third sliding assembly 31 was kept away from to third direction slider 32 all is connected with pole 30 in the installation, and it is spacing to pole 30 in the installation through third direction slider 32 for pole 30 in the installation can only follow third direction slider 32 and follow rectilinear movement together.

Furthermore, a set of first sliding assembly 23 is symmetrically installed at the end, far away from the rotating shaft 8, of the rotating disc 9, a first guide sliding block 25 is installed at the end, far away from the rotating disc 9, of the first sliding assembly 23, one end, far away from the first sliding assembly 23, of the first guide sliding block 25 is connected with the first installation sleeve 10, the first installation sleeve 10 is limited through the first guide sliding block 25, and therefore the first installation sleeve 10 can only move along a straight line along with the first guide sliding block 25.

Further, a second sliding assembly 29 is mounted at one end of the inside of the first mounting sleeve 10 close to the third electric pneumatic cylinder 24, a second guiding slider 28 is mounted at one end of the second sliding assembly 29 far from the third electric pneumatic cylinder 24, one end of the second guiding slider 28 far from the second sliding assembly 29 is connected with the connecting rod 12, and the connecting rod 12 is limited by the second guiding slider 28, so that the connecting rod 12 can only move along a straight line along with the second guiding slider 28.

Further, the internally mounted of dust collection box 1 has filter screen 3, and the top of dust collection box 1 evenly is provided with through-hole 5, and the dust that produces of polishing is followed gaseous through-hole 5 inside being sucked dust collection box 1, and filter screen 3 can filter the dust in the gas, can collect the dust in dust collection box 1 inside, can avoid the dust to cause the pollution, and the device uses environmental protection more.

The working principle is as follows:

when the device is used, the device is powered on, one end of the silicon rod is placed at the top of the second clamping piece 18, the first electric pneumatic cylinder 15 is started through the control panel 20, the first electric pneumatic cylinder 15 pushes the first clamping piece 17 to move downwards, one end of the silicon rod can be firmly clamped through the first clamping piece 17 and the second clamping piece 18, and then the silicon rod can be fixed;

a worker can start the third electric pneumatic cylinder 24 through the control panel 20, so that the third electric pneumatic cylinder 24 pushes or pulls the connecting block 26 to move, the connecting block 26 drives the two groups of push-pull rods 34 to move together, the push-pull rods 34 push or pull the first mounting sleeves 10 to move under stress, and the distance between the two groups of first mounting sleeves 10 can be adjusted, so that the distance between the two groups of polishing sheets 14 can be adjusted, and the polishing sheets 14 can be tightly attached to the outer side of the silicon rod;

after the adjustment is finished, the worker can start the motor 7 through the control panel 20, the motor 7 drives the turntable 9 to rotate through the rotating shaft 8, the two groups of polishing sheets 14 can be driven to rotate, and the silicon rod can be polished through the polishing sheets 14;

in the polishing process, a worker can start the second electric pneumatic cylinder 21 through the control panel 20, the second electric pneumatic cylinder 21 pushes or pulls the second mounting sleeve 11 to move, the connecting rod 12 can be driven to move, and the polishing sheet 14 can be moved to different positions outside the silicon rod for polishing;

simultaneously, staff's accessible control panel 20 starts air pump 4, and air pump 4 takes out the inside gas of dust collection box 1 through exhaust tube 2 for the dust that the production of polishing is followed gas and is passed through-hole 5 and is sucked inside dust collection box 1, and filter screen 3 can filter the dust in the gas, can collect the dust inside dust collection box 1, can avoid the dust to cause the pollution, and the device uses environmental protection more.

It is obvious to a person skilled in the art that the invention is not restricted to details of the above-described exemplary embodiments, but that it can be implemented in other specific forms without departing from the spirit or essential characteristics of the invention. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference sign in a claim should not be construed as limiting the claim concerned.

In the description of the present invention, "a plurality" means two or more unless otherwise specified; the terms "upper", "lower", "left", "right", "inner", "outer", "front", "rear", "head", "tail", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

Claims (7)

1. The utility model provides a grinding device based on silicon rod processing usefulness, includes dust collection box (1), carousel (9) and first installation sleeve pipe (10), its characterized in that: a first fixing plate (6) is installed at one end of the top of the dust collection box (1), a second fixing plate (19) is installed at the other end of the top of the dust collection box (1), a motor (7) is installed at one end, far away from the second fixing plate (19), of the first fixing plate (6), a rotating shaft (8) is installed at the output end of the motor (7), the rotating shaft (8) penetrates through the first fixing plate (6), a rotating disc (9) is installed at one end, far away from the motor (7), of the rotating shaft (8), a third electric pneumatic cylinder (24) is installed at the middle position of the rotating disc (9), the output end of the third electric pneumatic cylinder (24) is provided with a connecting block (26), a group of push-pull rods (34) are symmetrically hinged to the outer side of the connecting block (26), a first installation sleeve (10) is hinged to one end, far away from the connecting block (26), connecting rods (12) are installed inside the first installation sleeve (10), one ends, far away from the push-pull rods (34), of the rotating disc (9) are provided with through holes (27), one ends of the grinding discs (13), and the grinding discs (13) are installed at one ends, and the grinding blocks (13) are installed at the ends of the first installation sleeve (10), second fixed plate (19) are close to the top of first fixed plate (6) one end and install second clamping piece (18), and roof (16) are installed at the top of second fixed plate (19), first electric pneumatic cylinder (15) are installed at the top of roof (16), roof (16) are passed to the output of first electric pneumatic cylinder (15), and first clamping piece (17) are installed to the output of first electric pneumatic cylinder (15), a set of connecting plate (22) are installed to the outside symmetry of carousel (9), and connecting plate (22) keep away from the one end of second fixed plate (19) and all install second electric pneumatic cylinder (21), the output of second electric pneumatic cylinder (21) all passes connecting plate (22), and second installation sleeve pipe (11) are all installed to the output of second electric pneumatic cylinder (21), air pump (4) are installed near the top of first fixed plate (6) one end to dust collection box (1), and the input of air pump (4) is installed and is extended to inside aspiration tube (2) of dust collection box (1), dust collection box (1) keep away from the top of air pump (4) one end and install control panel (20), air pump (7) and electric pneumatic cylinder (7) are through electric pneumatic cylinder (7) respectively, the input ends of the second electric pneumatic cylinder (21) and the third electric pneumatic cylinder (24) are electrically connected.

2. The polishing device for silicon rod processing according to claim 1, wherein: pole (30) in the installation all are installed to the inside of second installation sleeve pipe (11), pole (30) all pass through opening (27) in the installation, and the pole (30) is all connected with connecting rod (12) in the installation one end of keeping away from second installation sleeve pipe (11).

3. The polishing device for silicon rod processing according to claim 2, wherein: an extension spring (33) is installed at one end, close to the second installation sleeve (11), of the installation inner rod (30), and one end, far away from the installation inner rod (30), of the extension spring (33) is connected with the second installation sleeve (11).

4. The polishing device for silicon rod processing according to claim 2, wherein: third sliding component (31) are all installed at the inside both ends of second installation sleeve pipe (11), and third sliding component (31) are close to the equal slidable mounting of one end of pole (30) in the installation and have third direction slider (32), the pole (30) are all connected in the one end of third sliding component (31) is all kept away from in third direction slider (32) and the installation.

5. The polishing device for silicon rod processing as set forth in claim 1, wherein: a set of first slip subassembly (23) is installed to the one end symmetry that pivot (8) were kept away from in carousel (9), and first slip subassembly (23) keep away from the one end of carousel (9) and all slidable mounting have first direction slider (25), the one end that first slip subassembly (23) were kept away from in first direction slider (25) all is connected with first installation sleeve pipe (10).

6. The polishing device for silicon rod processing according to claim 1, wherein: inside one end that is close to third electric pneumatic cylinder (24) of first installation sleeve pipe (10) all installs second sliding subassembly (29), and second sliding subassembly (29) keep away from the one end of third electric pneumatic cylinder (24) and all slidable mounting have second direction slider (28), the one end that second sliding subassembly (29) were kept away from in second direction slider (28) all is connected with connecting rod (12).

7. The polishing device for silicon rod processing according to claim 1, wherein: the filter screen (3) is installed inside the dust collection box (1), and through holes (5) are uniformly formed in the top of the dust collection box (1).

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