CN218574504U - Equipment machine and alkali exhaust treatment device - Google Patents

Abstract

The utility model relates to an equipment board and alkali processing apparatus that airs exhaust. The alkali exhaust treatment device comprises: the air exhaust pipe body is used for receiving alkali gas discharged by a machine table of equipment, the spray assembly extends into the air exhaust pipe body and is used for spraying water towards the inner side wall of the air exhaust pipe body, the water and alkali crystals attached to the inner side wall of the air exhaust pipe body are fused and fused into crystalline liquid, the liquid discharge assembly is communicated with the air exhaust pipe body, and the liquid discharge assembly is used for discharging the crystalline liquid out of the air exhaust pipe body.

Description

Equipment machine and alkali exhaust treatment device

Technical Field

The utility model relates to a solar cell's technical field especially relates to equipment board and alkali exhaust treatment device.

Background

In the production process of semiconductor, photovoltaic cleaning and texturing, the requirement on acid-base exhaust inside a machine table is extremely high, after alkaline gas enters an exhaust pipeline, when the exhaust volume of the alkaline gas is greater than that of the exhaust pipeline, the exhaust pipeline cannot sufficiently exhaust the alkaline gas, so that the alkaline gas can be attached to the inner wall of the exhaust pipeline, crystals can be formed in the past to block the exhaust pipeline and fall back into a groove body of the machine table along the exhaust pipeline, and a plurality of hazards such as groove body pollution, crystallization ignition, exhaust failure and the like are caused.

SUMMERY OF THE UTILITY MODEL

In view of the above, it is necessary to provide an equipment base and an alkali exhaust air treatment device, which solve the problem of alkali crystallization occurring when the exhaust duct discharges alkali gas.

An alkali exhaust treatment device. The alkali exhaust air treatment device comprises: the air exhaust pipe body is used for receiving alkali gas discharged by a machine table of equipment, the spray assembly extends into the air exhaust pipe body and is used for spraying water towards the inner side wall of the air exhaust pipe body, the water and alkali crystals attached to the inner side wall of the air exhaust pipe body are fused and fused into crystalline liquid, the liquid discharge assembly is communicated with the air exhaust pipe body, and the liquid discharge assembly is used for discharging the crystalline liquid out of the air exhaust pipe body.

An alkaline exhaust treatment device, comprising: the exhaust device comprises an exhaust pipe body, a spraying assembly and a liquid drainage assembly, wherein the exhaust pipe body is used for receiving alkali gas discharged by a machine table of equipment, the spraying assembly extends into the exhaust pipe body, the spraying assembly is used for spraying steam to the inner side wall of the exhaust pipe body, the steam is used for contacting with the alkali gas in the exhaust pipe body and forming water drops, the liquid drainage assembly is communicated with the exhaust pipe body, and the liquid drainage assembly is used for discharging the water drops out of the exhaust pipe body.

An equipment machine comprises the alkali exhaust treatment device.

In one embodiment, the air exhaust pipe body comprises an air inlet pipe, an air outlet pipe and a water return bent pipe, one end of the water return bent pipe is communicated with one end of the air inlet pipe, the other end of the water return bent pipe is communicated with one end of the air outlet pipe, the other end of the air inlet pipe is used for receiving alkaline gas discharged by a machine table of equipment, the other end of the air outlet pipe is used for being communicated with a recovery pipeline, the spraying assembly is located in the air outlet pipe, and the liquid discharge assembly is communicated with the water return bent pipe.

In one embodiment, the side wall of the air outlet pipe is provided with a first mounting opening, and the spray assembly is matched with the air outlet pipe through the first mounting opening in a mounting manner.

In one embodiment, the spray assembly comprises a spray pipe and a water inlet pipe, the spray pipe is communicated with the water inlet pipe, the spray pipe extends into the air outlet pipe through the first mounting opening, and one end of the water inlet pipe is positioned outside the air outlet pipe; or the spraying assembly comprises a spraying pipe and an air inlet pipe, the spraying pipe is communicated with the air inlet pipe, the spraying pipe passes through the first mounting port and extends into the air outlet pipe, and one end of the air inlet pipe is located outside the air outlet pipe.

In one embodiment, the spray pipe is arranged in the air outlet pipe along the axial extension of the air outlet pipe, and a plurality of spray ports are arranged on the side wall of the spray pipe along the axial direction of the spray pipe.

In one embodiment, one end of the water inlet pipe, which is positioned outside the air outlet pipe, is provided with a first control valve; or a second control valve is arranged at one end, positioned outside the air outlet pipe, of the air inlet pipe.

In one embodiment, the liquid discharge assembly comprises a liquid discharge pipe and a funnel base, one end of the liquid discharge pipe is communicated with the water return elbow through the funnel base, and the other end of the liquid discharge pipe is used for discharging the crystallization liquid or the water drops.

In one embodiment, one end of the drain pipe for discharging the crystallization liquid or the water droplets is provided with a third control valve.

Above-mentioned alkali exhaust treatment device is when using, through the produced alkali gas of the body receiving arrangement board of airing exhaust to discharge alkali gas along with the body of airing exhaust, because the change of alkali gas emission volume, alkali gas can form the alkali crystallization at the inside wall of the body of airing exhaust, at this moment, through stretching into spray assembly to the body of airing exhaust, spray assembly sprays water, for example: depending on the nature of the alkali crystals, the water sprayed may be hot water, which more effectively fuses with the alkali crystals and ultimately melts the alkali crystals into a crystalline liquid. And finally, the liquid drainage component is communicated with the air exhaust component, and the crystallized liquid generated in the air exhaust pipe body can be guided out of the air exhaust pipe body along with the liquid drainage component. Therefore, the alkali exhaust treatment device can avoid retention or formation of alkali crystals on the exhaust pipe body, and ensures the exhaust effect of the exhaust pipe body.

Or when the alkali exhaust treatment device is used, the alkali gas generated by the equipment machine table is received through the exhaust pipe body, and is exhausted along with the exhaust pipe body. In this process, steam is sprayed towards the exhaust pipe body by means of a spraying assembly, for example: according to the characteristics of the alkali crystals, the sprayed water vapor can be hot water vapor, so that the alkali gas in the exhaust pipe body is difficult to form the alkali crystals on the inner wall of the exhaust pipe body, meanwhile, the water vapor is changed into water drops after contacting with the alkali gas, and the water drops in the exhaust pipe body can be guided out of the exhaust pipe body by the liquid drainage component. Therefore, the alkali exhaust treatment device can avoid retention or alkali crystallization on the exhaust pipe body, and ensures the exhaust effect of the exhaust pipe body.

When the equipment machine table is used, the alkali exhaust treatment device can avoid retention or alkali crystallization on the exhaust pipe body, and the exhaust effect of the exhaust pipe body is guaranteed.

Drawings

FIG. 1 is a schematic view of the overall structure of an alkaline exhaust treatment apparatus;

fig. 2 is a schematic view of the internal structure of the alkali exhaust treatment device.

100. The air exhaust device comprises an air exhaust pipe body, 110, an air inlet pipe, 120, an air outlet pipe, 130, a water return bent pipe, 200, a spray assembly, 210, a spray pipe, 211, a spray opening, 220, a water inlet pipe, 221, a first control valve, 230, an air inlet pipe, 231, a second control valve, 300, a liquid discharge assembly, 310, a liquid discharge pipe, 311, a third control valve, 320 and a funnel seat.

Detailed Description

In order to make the above objects, features and advantages of the present invention more comprehensible, embodiments of the present invention are described in detail below with reference to the accompanying drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The invention may be embodied in many other forms different from those described herein and similar modifications may be made by those skilled in the art without departing from the spirit and scope of the invention and, therefore, the invention is not to be limited to the specific embodiments disclosed below.

In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", and the like, indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of the feature. In the description of the present invention, "a plurality" means at least two, e.g., two, three, etc., unless specifically limited otherwise.

In the present invention, unless otherwise explicitly specified or limited, the terms "mounted," "connected," "secured," and the like are to be construed broadly, e.g., as being fixedly connected, detachably connected, or integrated; can be mechanically or electrically connected; they may be directly connected or indirectly connected through intervening media, or they may be connected internally or in any other suitable relationship, unless expressly stated otherwise. The specific meaning of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.

In the present application, unless expressly stated or limited otherwise, the first feature may be directly on or directly under the second feature or indirectly via intermediate members. Also, a first feature "on," "over," and "above" a second feature may be directly or diagonally above the second feature, or may simply indicate that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature may be directly under or obliquely under the first feature, or may simply mean that the first feature is at a lesser elevation than the second feature.

It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. As used herein, the terms "vertical," "horizontal," "upper," "lower," "left," "right," and the like are for purposes of illustration only and do not denote a single embodiment.

Referring to fig. 1 and 2, in one embodiment, the alkaline exhaust treatment device comprises: the exhaust air pipe comprises an exhaust air pipe body 100, a spraying assembly 200 and a liquid drainage assembly 300, wherein the exhaust air pipe body 100 is used for receiving alkali gas discharged by a machine table of equipment, the spraying assembly 200 extends into the exhaust air pipe body 100, the spraying assembly 200 is used for spraying water towards the inner side wall of the exhaust air pipe body 100, the water and alkali crystals attached to the inner side wall of the exhaust air pipe body 100 are fused and fused into crystallized liquid, the liquid drainage assembly 300 is communicated with the exhaust air pipe body 100, and the liquid drainage assembly 300 is used for discharging the crystallized liquid out of the exhaust air pipe body 100.

Above-mentioned alkali exhaust treatment device is when using, through the produced alkali gas of the body 100 receiving equipment board of airing exhaust to discharge alkali gas along with the body 100 of airing exhaust, because the change of alkali gas emission volume, alkali gas can form the alkali crystallization at the inside wall of the body 100 of airing exhaust, at this moment, through stretching into the body 100 of airing exhaust with spray set 200 in, spray set 200 sprays water, for example: depending on the nature of the alkali crystals, the water sprayed may be hot water, which more effectively fuses with the alkali crystals and ultimately melts the alkali crystals into a crystalline liquid. Finally, the liquid discharge assembly 300 is communicated with the air exhaust assembly, and the crystallized liquid generated in the air exhaust pipe body 100 can be guided out of the air exhaust pipe body 100 along with the liquid discharge assembly 300. Therefore, the alkali exhaust treatment device can avoid the retention or formation of alkali crystals on the exhaust pipe body 100, and ensure the exhaust effect of the exhaust pipe body 100.

Referring to fig. 1 and 2, in one embodiment, the alkaline exhaust treatment device comprises: the exhaust air pipe comprises an exhaust air pipe body 100, a spraying assembly 200 and a liquid drainage assembly 300, wherein the exhaust air pipe body 100 is used for receiving alkali gas discharged by an equipment machine, the spraying assembly 200 extends into the exhaust air pipe body 100, the spraying assembly 200 is used for spraying water vapor towards the inner side wall of the exhaust air pipe body 100, the water vapor is used for contacting the alkali gas in the exhaust air pipe body 100 and forming water drops, the liquid drainage assembly 300 is communicated with the exhaust air pipe body 100, and the liquid drainage assembly 300 is used for discharging the water drops out of the exhaust air pipe body 100.

When the alkali exhaust treatment device is used, the alkali gas generated by the equipment machine table is received through the exhaust pipe body 100, and is exhausted along with the exhaust pipe body 100. During this process, steam is sprayed toward the exhaust duct body 100 by the shower assembly 200, for example: the water vapor sprayed may be hot water vapor according to the characteristics of the alkali crystals, so that the alkali gas in the exhaust duct body 100 is difficult to form the alkali crystals on the inner wall of the exhaust duct body 100, and the water vapor is changed into water droplets after contacting the alkali gas, so that the water droplets in the exhaust duct body 100 can be guided out of the exhaust duct body 100 by the drain assembly 300. Therefore, the alkali exhaust treatment device can avoid the retention or formation of alkali crystals on the exhaust pipe body 100, and ensure the exhaust effect of the exhaust pipe body 100.

Referring to fig. 1 and 2, in an embodiment, the exhaust duct 100 includes an air inlet duct 110, an air outlet duct 120, and a water return bent duct 130, one end of the water return bent duct 130 is communicated with one end of the air inlet duct 110, the other end of the water return bent duct 130 is communicated with one end of the air outlet duct 120, the other end of the air inlet duct 110 is used for receiving alkaline gas discharged from a machine station, the other end of the air outlet duct 120 is used for being communicated with a recovery pipeline, the spray assembly 200 is located in the air outlet duct 120, and the liquid discharge assembly 300 is communicated with the water return bent duct 130. Specifically, the air inlet pipe 110, the air outlet pipe 120 and the return water elbow 130 may be integrally formed or spliced. Further, the air outlet pipe 120 belongs to a portion where the alkaline gas is easily crystallized according to the flowing condition of the alkaline gas in the air outlet pipe 120. Therefore, the spraying assembly 200 is located in the air outlet pipe 120, and according to actual conditions, the spraying assembly 200 can be selected to spray hot water to fuse alkali crystals on the air outlet pipe 120, or the spraying assembly 200 can be used to spray hot water steam on the inner side wall of the air outlet pipe 120, so as to prevent alkali crystals from being generated on the inner side wall of the air outlet pipe 120 by alkali gas. Both of the above-mentioned two ways can drain the crystallization liquid or the water droplets through the drainage assembly 300. Furthermore, the crystallized liquid or water drops flow into the return water elbow 130 under the action of their own gravity and are collected, so that the crystallized liquid or water drops in the exhaust duct body 100 can be more easily discharged by connecting the liquid discharge assembly 300 with the return water elbow 130.

Referring to fig. 1 and fig. 2, in an embodiment, a first mounting opening is formed in a sidewall of the air outlet pipe 120, and the spray assembly 200 is mounted and matched with the air outlet pipe 120 through the first mounting opening. The spray assembly 200 comprises a spray pipe 210 and a water inlet pipe 220, the spray pipe 210 is communicated with the water inlet pipe 220, the spray pipe 210 extends into the air outlet pipe 120 through the first mounting port, and one end of the water inlet pipe 220 is positioned outside the air outlet pipe 120; or the spraying assembly 200 comprises a spraying pipe 210 and an air inlet pipe 230, the spraying pipe 210 is communicated with the air inlet pipe 230, the spraying pipe 210 extends into the air outlet pipe 120 through the first mounting opening, and one end of the air inlet pipe 230 is positioned outside the air outlet pipe 120. Specifically, the opening position of the first mounting opening on the side wall of the air outlet pipe 120 is determined according to actual conditions. With spray set 200 adoption shower 210 and the mode that inlet tube 220 is connected, shower 210 stretches into out the tuber pipe 120 in, the one end of inlet tube 220 is located out the tuber pipe 120 outside, above-mentioned this kind of embodiment has guaranteed on the one hand that shower 210 is to the spraying effect of play tuber pipe 120 inside wall, on the other hand, is located out the outside one end of tuber pipe 120 through inlet tube 220 and links to each other with water supply equipment for spray set 200's the intaking is more convenient.

In another embodiment, the spraying pipe 210 extends into the air outlet pipe 120, and one end of the air inlet pipe 230 is located outside the air outlet pipe 120, so that on one hand, the spraying effect of the spraying pipe 210 on the inner side wall of the air outlet pipe 120 is ensured, and on the other hand, the end located outside the air outlet pipe 120 through the air inlet pipe 230 is connected with the air supply device, so that the air inlet of the spraying assembly 200 is more convenient.

Referring to fig. 1 and fig. 2, in an embodiment, the spraying pipe 210 is disposed inside the air outlet pipe 120 and extends along an axial direction of the air outlet pipe 120, and a plurality of spraying ports 211 are disposed on a side wall of the spraying pipe 210 along the axial direction of the spraying pipe 210. Specifically, the above embodiment can effectively improve the spraying efficiency of the spraying pipe 210, and can also ensure the spraying coverage effect of the spraying pipe 210 on the inner side wall of the air outlet pipe 120.

Referring to fig. 1 and 2, in one embodiment, a first control valve 221 is disposed at one end of the water inlet pipe 220 located outside the air outlet pipe 120; or, a second control valve 231 is arranged at one end of the air inlet pipe 230, which is located outside the air outlet pipe 120. Specifically, when it is desired to deliver hot water to the shower pipe 210 through the inlet pipe 220, the first control valve 221 is opened; when it is desired to stop the feed of the feed tube 220 to the shower pipe 210, the first control valve 221 is closed.

In another embodiment, when it is desired to deliver hot water vapor to the shower pipe 210 through the inlet pipe 220, the second control valve 231 is opened; when it is desired to stop the feed of the feed tube 220 to the shower pipe 210, the second control valve 231 is closed.

Referring to fig. 1 and 2, in one embodiment, the drainage assembly 300 includes a drainage pipe 310 and a funnel base 320, one end of the drainage pipe 310 is communicated with the water return elbow 130 through the funnel base 320, and the other end of the drainage pipe 310 is used for draining the crystallization liquid or the water drops. Specifically, the hopper base 320 may be integrally formed or spliced with the recovery elbow pipe, and then the discharge end of the hopper base 320 is connected to the drain pipe 310. Alternatively, the funnel base 320 and the drain pipe 310 are integrally formed or spliced, and the feeding end of the funnel base 320 is communicated with the recovery elbow. Further, the crystallized liquid or water droplets in the return water elbow 130 can be made to flow into the drain pipe 310 more efficiently by the funnel seat 320.

Referring to fig. 1 and 2, in one embodiment, the drain pipe 310 is provided with a third control valve 311 at one end for draining the crystallization liquid or the water droplets. Specifically, the opening or closing of the drain pipe 310 is controlled by the third control valve 311.

In one embodiment, the equipment table comprises the alkali exhaust air treatment device.

When the equipment machine platform is used, the alkali exhaust treatment device can avoid the retention or formation of alkali crystals on the exhaust pipe body 100, and the exhaust effect of the exhaust pipe body 100 is ensured.

All possible combinations of the technical features of the above embodiments may not be described for the sake of brevity, but should be considered as within the scope of the present disclosure as long as there is no contradiction between the combinations of the technical features.

The above-mentioned embodiments only represent some embodiments of the present invention, and the description thereof is specific and detailed, but not to be construed as limiting the scope of the present invention. It should be noted that, for those skilled in the art, without departing from the concept of the present invention, several variations and modifications can be made, which all fall within the scope of the present invention. Therefore, the protection scope of the present invention should be subject to the appended claims.

Claims (10)

1. An alkaline exhaust air treatment device, characterized in that the alkaline exhaust air treatment device comprises: the air exhaust pipe body is used for receiving alkali gas discharged by a machine table of equipment, the spray assembly extends into the air exhaust pipe body and is used for spraying water towards the inner side wall of the air exhaust pipe body, the water and alkali crystals attached to the inner side wall of the air exhaust pipe body are fused and fused into crystalline liquid, the liquid discharge assembly is communicated with the air exhaust pipe body, and the liquid discharge assembly is used for discharging the crystalline liquid out of the air exhaust pipe body.

2. An alkaline exhaust treatment device, comprising: the air exhaust pipe body is used for receiving alkali gas discharged by a machine table of equipment, the spray assembly extends into the air exhaust pipe body and is used for spraying water vapor towards the inner side wall of the air exhaust pipe body, the water vapor is used for contacting the alkali gas in the air exhaust pipe body and forming water drops, the liquid discharge assembly is communicated with the air exhaust pipe body, and the liquid discharge assembly is used for discharging the water drops out of the air exhaust pipe body.

3. The alkali exhaust treatment device according to claim 1 or 2, wherein the exhaust pipe body comprises an air inlet pipe, an air outlet pipe and a water return elbow pipe, one end of the water return elbow pipe is communicated with one end of the air inlet pipe, the other end of the water return elbow pipe is communicated with one end of the air outlet pipe, the other end of the air inlet pipe is used for receiving alkali gas discharged by an equipment machine, the other end of the air outlet pipe is used for being communicated with a recovery pipeline, the spray assembly is located in the air outlet pipe, and the liquid discharge assembly is communicated with the water return elbow pipe.

4. The alkaline exhaust air treatment device according to claim 3, wherein a first mounting opening is formed in a side wall of the air outlet pipe, and the spray assembly is mounted and matched with the air outlet pipe through the first mounting opening.

5. The alkaline exhaust treatment device according to claim 4, wherein the spray assembly includes a spray pipe and a water inlet pipe, the spray pipe is communicated with the water inlet pipe, the spray pipe extends into the air outlet pipe through the first mounting port, and one end of the water inlet pipe is located outside the air outlet pipe; or

The spray assembly comprises a spray pipe and an air inlet pipe, the spray pipe is communicated with the air inlet pipe, the spray pipe passes through the first mounting port and stretches into the air outlet pipe, and one end of the air inlet pipe is located outside the air outlet pipe.

6. The alkaline exhaust treatment device according to claim 5, wherein the shower pipe extends in the axial direction of the outlet pipe inside the outlet pipe, and a plurality of shower openings are provided in a side wall of the shower pipe in the axial direction of the shower pipe.

7. Alkali exhaust treatment device according to claim 5, wherein a first control valve is provided at an end of the water inlet pipe outside the air outlet pipe; or a second control valve is arranged at one end, located outside the air outlet pipe, of the air inlet pipe.

8. The alkaline air-discharge treatment device according to claim 3, wherein the liquid discharge assembly includes a liquid discharge pipe and a funnel base, one end of the liquid discharge pipe is communicated with the water return elbow through the funnel base, and if the spray assembly is used for spraying water toward the inner side wall of the air-discharge pipe body, the other end of the liquid discharge pipe is used for discharging the crystallization liquid; if the spraying assembly is used for spraying steam to the inner side wall of the exhaust pipe body, the other end of the liquid discharge pipe is used for discharging the water drops.

9. The alkaline air-discharge treatment device according to claim 8, wherein if the spray assembly is used for spraying water toward the inner side wall of the air-discharge duct body, one end of the drain duct for discharging the crystallization liquid is provided with a third control valve;

if the spraying assembly is used for spraying steam towards the inner side wall of the exhaust pipe body, a third control valve is arranged at one end of the liquid discharge pipe, which is used for discharging the water drops.

10. An equipment stand, comprising the alkaline air-discharge treatment apparatus of any one of claims 1 to 9.

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