CN218561581U - Porous material vapor deposition device - Google Patents

Abstract

The utility model belongs to the technical field of new material preparation, and relates to a porous material vapor deposition device; the problem of uneven deposition inside and outside the porous material in the vapor deposition process is solved; the device comprises a vapor deposition furnace, wherein a reaction thermal field structure is arranged in the furnace, a porous prefabricated material is placed in a working area of the reaction thermal field structure, and a heating element is arranged in the porous prefabricated material; heating the porous preform from the inside of the porous preform to gradually reduce the temperature of the porous preform from the inside to the outside to form a temperature gradient; carrying out vapor deposition under the temperature gradient to prepare a coating layer by layer from inside to outside of the porous prefabricated body or realize densification; the utility model is used for prepare high performance coating, porous prefabricated body inside at pending material surface and carry out technological links such as pyrolysis deposit.

Description

Porous material vapor deposition device

Technical Field

The utility model belongs to the technical field of the new material preparation, a porous material vapor deposition device is related to.

Background

Porous preform materials include, but are not limited to, carbon fiber soft/hard felt, silicon carbide fiber soft/hard felt, and the like; the inorganic fiber with beta-silicon carbide structure is prepared with organosilicon compound as material and through spinning, carbonization or vapor deposition. Vapor deposition is a process of forming functional or decorative metallic, non-metallic or compound coatings on the surface of a workpiece by using physical and chemical processes occurring in the vapor phase. The vapor deposition techniques can be classified into chemical vapor deposition, physical vapor deposition, and plasma vapor deposition according to a film formation mechanism.

In the links of preparing a coating or densifying and the like by a porous material through physical or chemical vapor deposition, the obvious condition of internal and external unevenness exists due to high background temperature; the source gas of the coating or the densified material is decomposed in a large amount in the background, the coating or the densified material is preferentially attached to the outside of the porous material to form a dense layer, so that the coating or the densified material cannot or slightly reaches the inside of the porous material, and the coating or densified preparation process is ineffective.

SUMMERY OF THE UTILITY MODEL

The utility model overcomes the defects of the prior art and provides a porous material vapor deposition device. The problem of uneven deposition inside and outside the porous material in the vapor deposition process is solved.

In order to achieve the above purpose, the present invention is achieved by the following technical solutions.

The device for the porous material vapor deposition method comprises a vapor deposition furnace, wherein a reaction thermal field structure is arranged in the vapor deposition furnace, a porous prefabricated material is placed in a working area of the reaction thermal field structure, and a heating element is arranged in the porous prefabricated material.

Further, a heating element is disposed in the center of the inside of the porous preform material.

Further, the heat generating element is in direct contact with the porous preform material or is placed inside the inner tube in indirect contact with the porous preform material.

Further, the reaction thermal field structure comprises an outer pipe, an inner pipe and a sealing flange; the inner pipe is sleeved in the outer pipe, and the outer pipe is connected with two ends of the inner pipe through sealing flanges; the outer pipe, the inner pipe and the sealing flange jointly form a working area.

Further, the sealing flange is connected with a gas passage.

Furthermore, the outer wall of the inner pipe and the sealing flange, and the inner wall of the outer pipe and the sealing flange are sealed through sealing rings.

Furthermore, the outer wall of the outer pipe is provided with a heat insulation layer.

Furthermore, the inner pipe is made of corrosion-resistant materials; the outer tube is made of quartz or stainless steel.

Furthermore, the heating element is a resistive heating element or an inductive heating element.

The utility model discloses produced beneficial effect for prior art does:

the utility model discloses a mode that generates heat inside porous material establishes porous material from inside to outside temperature gradient, realizes porous material from inside to outside gradual coating preparation or the purpose of densification.

The utility model discloses an interior hot type thermal field, inside the realization of porous material from inside to outside evenly prepare the coating or densify, solve obvious inside and outside inhomogeneous problem under CVD or the PVD mode.

The utility model relates to an internal heating formula thermal field, when porous material inside preparation coating or densification, coating or densification material source process gas just reach decomposition temperature at the position that is close to the deposit of planning, have effectively improved the utilization ratio by decomposition process gas on the one hand, and the process gas recycling degree of difficulty that is not decomposed on the other hand reduces, is favorable to cost control.

The utility model relates to an internal heating formula thermal field is favorable to preparing high density combined material based on porous material, like carbon-carbon combined material, carbon pottery combined material etc. is favorable to expanding the application of combined material based on porous material at novel, the higher requirement occasion.

Drawings

FIG. 1 is a schematic view of the thermal field structure of the present invention;

in the figure: 1 is a heating element, 2 is an inner tube, 3 is a porous preform material, 4 is an outer tube, and 5 is a sealing flange.

Detailed Description

In order to make the technical problem, technical scheme and beneficial effect that the utility model will solve clearer and more obvious, combine embodiment and attached drawing, it is right to go on further detailed description the utility model discloses. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention. The technical solution of the present invention is described in detail below with reference to the embodiments and the accompanying drawings, but the scope of protection is not limited thereto.

As shown in fig. 1, this embodiment discloses an apparatus for a vapor deposition method of a porous material, which is suitable for a process of preparing a coating or densifying the porous material. The thermal field involved is mainly composed of: heating element 1, inner tube 2, porous preform material 3, outer tube 4 and sealing flange 5 constitute, in addition because non the utility model core such as temperature measurement, furnace chamber pressure measurement, technology/protective gas passageway, mechanism support etc. so do not show explicitly in the schematic diagram, this does not represent and does not need these non-core spare parts in the utility model discloses the implementation.

Wherein: the heating element 1 used for generating heat inside the workpiece to be processed includes, but is not limited to, resistive heating (such as silicon carbide rod, silicon molybdenum rod, resistance wire, graphite heating, etc., but not limited to the resistive heating), inductive heating (central induction component such as graphite, metal, etc.), and other heating methods. The inner tube 2 can be made of corrosion-resistant materials such as quartz; the porous preform material 3 to be treated includes, but is not limited to, carbon fiber soft/hard felt, silicon carbide fiber soft/hard felt, and the like; the outer tube 4 can be made of various materials such as quartz, stainless steel, etc.

The structure of the thermal field described in this embodiment is shown in fig. 1, in which:

1) The heating element 1 is disposed in the central portion of the porous preform material 3, and the heating element 1 and the porous preform material 3 are isolated by the inner tube 2.

2) The inner wall of the inner tube 2 can be sealed or not sealed, and filled or not filled with protective gas according to the use requirements of different heating elements 1.

3) The outer wall of the inner pipe 2, the inner wall of the outer pipe 4 and the sealing flange 5 form a core working area of the thermal field, the outer wall of the inner pipe 2, the sealing flange 5 and the inner wall of the outer pipe 4 and the sealing flange 5 are sealed through sealing rings, and a process/protective gas channel, a thermocouple channel and a furnace chamber pressure measuring channel are established through being located at a specific position of the sealing flange 5, so that the control of the temperature, the pressure, the gas flow and the like of the core working area of the thermal field is realized.

4) Porous prefabricated body material 3 adheres to in the outer wall of inner tube 2, is located the inner tube 2 outer wall and forms the core workspace of this thermal field with outer tube 4 inner wall, sealing flange 5, and through the design of structure, the gas passage who establishes from sealing flange 5 can be preferentially through porous prefabricated body material 3, promotes process gas's effective utilization.

5) The outer wall of the outer tube 4 is provided with a heat preservation layer, so that secondary disasters caused by overhigh temperature outside the thermal field due to thermal radiation are avoided.

The thermal field structure controls the pressure in the cavity through air inlet and outlet; the temperature range of the thermal field structure is 100 to 1200 ℃; in the embodiment, the internal heating element of the workpiece is connected with the workpiece through the inner pipe, and heat transfer is realized in a radiation and contact heat conduction mode; the internal workpiece heating element may be in direct contact with the workpiece.

The working principle is as follows:

after the porous prefabricated material 3 is loaded in place, a core working area formed by the outer wall of the inner pipe 2, the inner wall of the outer pipe 4 and the sealing flange 5 is vacuumized to the limit vacuum through a vacuum system, then protective gas is filled through a gas channel reserved on the sealing flange 5, meanwhile, the heating element 1 heats the system, when the preset process temperature is reached, process gas enters the core working area through the gas channel reserved on the sealing flange 5 according to the set flow and pressure, coating preparation or densification is realized after decomposition through the porous prefabricated material 3, and decomposed byproducts and undecomposed process gas are discharged from the core working area through the sealing flange 5. This process is continued until the porous preform material 3 meets the set process requirements. And then, the process air inlet is closed, and the heating system is cooled according to the process requirement. After the set temperature is reached, the evacuation system initiates evacuation of the core region to a limit vacuum.

The process gas includes but is not limited to carbon source simple substance or mixed gas such as methane, acetylene and the like; the protective gas includes but is not limited to inert simple substance or mixed gas such as argon, nitrogen and the like; the temperature of the porous prefabricated body is gradually reduced from inside to outside, and the temperature gradient can be adjusted according to the material to be deposited or pyrolyzed; the internal heating mode of the workpiece is realized, and the temperature gradually decreases along with the distance from the body center of the workpiece; and preparing a coating layer from the inside to the outside of the porous prefabricated body layer by layer or realizing densification.

Thermal field structure, through the mode that generates heat in pending material is inside, realize technological process such as pending material preparation coating, pyrolysis, deposit for prepare high performance coating, porous prefabricated body inside at pending material surface and carry out technological links such as pyrolysis deposit.

The device is suitable for thermal equipment for preparing coatings and depositing pyrolysis substances on the surfaces of porous preforms under the conditions of vertical/horizontal type, high temperature, positive pressure/negative pressure and process gas/protective gas.

The above description is further detailed for the present invention with reference to specific preferred embodiments, and it is not considered that the specific embodiments of the present invention are limited thereto, and it will be understood by those skilled in the art that the present invention can be implemented by a plurality of simple deductions or substitutions without departing from the scope of the present invention, and all of them should be considered as belonging to the present invention, which is determined by the appended claims.

Claims (9)

1. A porous material vapor deposition device comprises a vapor deposition furnace, wherein a reaction thermal field structure is arranged in the furnace, and a porous prefabricated material is placed in a working area of the reaction thermal field structure.

2. A porous material vapor deposition apparatus according to claim 1, wherein the heat generating element is disposed at the center inside the porous preform.

3. A porous material vapor deposition apparatus according to claim 1, wherein the heat generating element is in direct contact with the porous preform material or is placed inside the inner tube in indirect contact with the porous preform material.

4. The porous material vapor deposition apparatus according to claim 1, wherein the reaction thermal field structure comprises an outer tube, an inner tube, and a sealing flange; the inner pipe is sleeved in the outer pipe, and the outer pipe is connected with two ends of the inner pipe through sealing flanges; the outer pipe, the inner pipe and the sealing flange jointly form a working area.

5. A porous material vapor deposition apparatus according to claim 4, wherein the sealing flange is connected with a gas passage.

6. The vapor deposition apparatus for porous material according to claim 4, wherein the outer wall of the inner tube and the sealing flange, and the inner wall of the outer tube and the sealing flange are sealed by sealing rings.

7. The vapor deposition apparatus for porous materials according to claim 4, wherein an insulating layer is disposed on the outer wall of the outer tube.

8. The vapor deposition apparatus for porous materials according to claim 4, wherein the inner tube is made of a corrosion-resistant material; the outer tube is made of quartz or stainless steel.

9. The porous material vapor deposition apparatus according to claim 1, wherein the heating element is a resistive heating element or an inductive heating element.

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