CN218556829U - Tool jig suitable for semiconductor equipment parts - Google Patents

Tool jig suitable for semiconductor equipment parts Download PDF

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Publication number
CN218556829U
CN218556829U CN202222842528.6U CN202222842528U CN218556829U CN 218556829 U CN218556829 U CN 218556829U CN 202222842528 U CN202222842528 U CN 202222842528U CN 218556829 U CN218556829 U CN 218556829U
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CN
China
Prior art keywords
base
guide
semiconductor equipment
fixed
semiconductor
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Application number
CN202222842528.6U
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Chinese (zh)
Inventor
张二飞
薛慧斌
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Kunshan Ketian Precision Machinery Co ltd
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Kunshan Ketian Precision Machinery Co ltd
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Priority to CN202222842528.6U priority Critical patent/CN218556829U/en
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Publication of CN218556829U publication Critical patent/CN218556829U/en
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Abstract

The utility model belongs to the machining field, concretely relates to frock tool suitable for semiconductor equipment spare part has solved and has had the precision low, complex operation's problem among the prior art, including base and semiconductor workpiece, the middle part of base upper surface is provided with fixture, and there is symmetrical arrangement's guide holder, two at the top of base through the fix with screw the inside of guide holder all slides and is equipped with the guide arm, two the top of guide arm all has the connecting block through the fix with screw, through the setting of adjustment mechanism, guard shield, locating hole and through hole isotructure, the work piece is arranged in on the frock tool after, and the accessible guard shield comes the adjustment to shelter from the position, will not need or the part that finishes of processing shelters from to avoid the mistake processing, the locating component that can cooperate one side comes to fix a position the processing position in addition, locks the processing position, thereby improves the machining precision.

Description

Tool jig suitable for semiconductor equipment parts
Technical Field
The utility model relates to a machining technical field specifically is a frock tool suitable for semiconductor equipment spare part.
Background
Currently, semiconductor components can be divided into five major categories: power and radio frequency control, gas delivery, vacuum control, temperature control, and conveyor. The power supply and the radio frequency control comprise a radio frequency generator, a matcher, a direct current/alternating current power supply and the like. The gas delivery class mainly includes flow controllers, pneumatic components, gas filters, and the like. The vacuum control class comprises various vacuum pumps such as a dry pump, a cold pump, a molecular pump and the like, various valve elements such as a control valve, a pendulum valve and the like, a pressure gauge and an O-Ring sealing Ring. The temperature control class includes heating plates/electrostatic chucks, heat exchangers, and lift assemblies. The class of conveyors includes robots, EFEM, bearings, precision rails, stepper motors, etc.
The frock tool of semiconductor equipment spare part among the prior art all is direct fixes the part on the tool, then relies on manual observation to carry out some processing, equipment processing, handles such as sticker, drilling, only relies on manual observation to have great error or maloperation, and then influences the precision of product, all adopts the screw thread mode of feeding fixed, centre gripping complex operation at present in addition.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a frock tool suitable for semiconductor equipment spare part has solved the low, complex operation's of precision problem.
In order to achieve the above purpose, the utility model provides a following technical scheme: a tool jig suitable for semiconductor equipment parts comprises a base and a semiconductor workpiece, wherein a clamping mechanism is arranged in the middle of the upper surface of the base, guide seats which are symmetrically arranged are fixed at the top of the base through screws, guide rods are slidably assembled in the two guide seats, connecting blocks are fixed at the tops of the two guide rods through screws, a protective cover is fixed between the two connecting blocks through screws, and the centers of the protective cover and the clamping mechanism are on the same axis;
the adjusting mechanism is used for driving the shield to ascend and descend so as to shield the part of the semiconductor workpiece.
Preferably, the top of the base is fixed with a side support plate through a sunk screw, the side support plate is provided with through holes arranged in an array manner, and one side of the connecting block close to the side support plate is provided with a positioning hole corresponding to the through hole.
Preferably, fixture include two slidable mounting in the grip slipper at base top, two splint, two all weld in one side of grip slipper the top of splint all is provided with integrated into one piece and is the oblique baffle of slope form.
Preferably, the middle part of the upper surface of the base is provided with a supporting hole, the top of the base is further provided with symmetrically arranged sliding grooves, the two clamping seats are respectively in sliding connection with the corresponding sliding grooves, and springs are fixedly connected between the side walls of the sliding grooves and the corresponding clamping seats.
Preferably, the adjusting mechanism comprises a support fixed on one side of the top of the base, a rotating shaft is rotatably connected to the support in a damping mode, a curved rod and a knob are fixed to two ends of the rotating shaft respectively through screws, a connecting rod is movably hinged to the other end of the curved rod, and the other end of the connecting rod is movably hinged to one of the connecting blocks.
Preferably, a guide hole is formed in the guide seat, and the guide rod is nested in the guide hole.
Compared with the prior art, the beneficial effects of the utility model are as follows:
1. the utility model discloses a setting of adjustment mechanism, guard shield, locating hole and through hole isotructure, back on the frock tool is arranged in to the work piece, and the accessible guard shield comes the adjustment to shelter from the position, and the part that will not need or have processed and finish shelters from to avoid the mistake processing, the locating component that can cooperate one side in addition comes to fix a position the processing position, locks the processing position, thereby improves the machining precision.
2. The utility model discloses a setting of spring, grip slipper and oblique baffle isotructure, during the fixed work piece, can directly insert the work piece from the top, can dial two splint automatically, utilize the pressure centre gripping of spring, centre gripping convenient and fast.
Drawings
Fig. 1 is a front view of the present invention;
FIG. 2 is a partial schematic view of the adjusting mechanism of the present invention;
fig. 3 is a schematic view of the overall structure of the present invention.
In the figure: 1. a base; 2. an adjustment mechanism; 21. a support; 22. a rotating shaft; 23. a knob; 24. a curved bar; 25. a connecting rod; 3. a shield; 4. a through groove; 5. connecting blocks; 6. positioning holes; 7. a side support plate; 8. a through hole; 9. a guide seat; 10. a guide bar; 11. a clamping seat; 12. a support hole; 13. a splint; 14. an inclined guide plate; 15. a chute; 16. a spring; 100. a semiconductor workpiece.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.
Referring to fig. 1-3, a tooling jig suitable for semiconductor equipment components comprises a base 1 and a semiconductor workpiece 100, wherein a clamping mechanism is arranged in the middle of the upper surface of the base 1, guide seats 9 which are symmetrically arranged are fixed on the top of the base 1 through screws, guide rods 10 are arranged in the two guide seats 9 in a sliding manner, connecting blocks 5 are fixed on the tops of the two guide rods 10 through screws, a shield 3 is fixed between the two connecting blocks 5 through screws, and the centers of the shield 3 and the clamping mechanism are on the same axis; still include adjustment mechanism 2, thereby adjustment mechanism 2 is used for driving the part that guard shield 3 goes up and down to shelter from semiconductor workpiece 100, through adjustment mechanism 2, guard shield 3, the setting of locating hole 6 and through hole 8 isotructures, the back on the frock tool is arranged in to the work piece, accessible guard shield 3 comes the adjustment to shelter from the position, the part that will not need or has finished processing shelters from, thereby avoid the mistake to process, the locating component that can cooperate one side in addition comes to fix a position the processing position, lock the processing position, thereby improve the machining precision.
Referring to fig. 1, a side supporting plate 7 is fixed to the top of the base 1 through a countersunk screw, through holes 8 arranged in an array are formed in the side supporting plate 7, and a positioning hole 6 corresponding to the through hole 8 is formed in one side of the connecting block 5 close to the side supporting plate 7.
Referring to fig. 1, the clamping mechanism includes two clamping bases 11 slidably mounted on the top of the base 1, clamping plates 13 welded to one side of each of the two clamping bases 11, and inclined guide plates 14 integrally formed and inclined on the top of each of the two clamping plates 13.
Referring to fig. 1, a supporting hole 12 is formed in the middle of the upper surface of a base 1, symmetrically arranged sliding grooves 15 are further formed in the top of the base 1, two clamping seats 11 are slidably connected with the corresponding sliding grooves 15, springs 16 are fixedly connected between the side walls of the sliding grooves 15 and the corresponding clamping seats 11, and through the arrangement of the springs 16, the clamping seats 11, the inclined guide plates 14 and the like, when a workpiece is fixed, the workpiece can be directly inserted from the top, two clamping plates 13 can be automatically pulled away, and the workpiece can be clamped by the aid of pressure of the springs 16, so that the clamping is convenient and rapid.
Referring to fig. 2, the adjusting mechanism 2 includes a bracket 21 fixed on one side of the top of the base 1, a rotating shaft 22 is rotatably connected to the bracket 21 in a damping manner, a curved rod 24 and a knob 23 are respectively fixed to two ends of the rotating shaft 22 through screws, the other end of the curved rod 24 is movably hinged to a connecting rod 25, and the other end of the connecting rod 25 is movably hinged to one of the connecting blocks 5.
Referring to fig. 1, a guide hole is formed in the guide base 9, and the guide rod 10 is embedded in the guide hole.
The utility model discloses the concrete implementation process as follows: during operation, a semiconductor workpiece 100 is inserted from above and passes through the through groove 4 to enter between the two clamping plates 13, the two clamping seats 11 are pushed away by the bottom end of the semiconductor workpiece 100 under the guide of the inclined guide plate 14, and after a semiconductor part is inserted into the supporting hole 12 at the bottom, the clamping plates 13 are clamped and fixed under the pressure of the spring 16;
further, the workpiece needs to be processed step by step, the knob 23 on one side is rotated, the crank connecting rod 25 mechanism consisting of the knob 23, the curved rod 24 and the connecting rod 25 enables the connecting block 5 to drive the shield 3 in the middle to move, when a certain position is moved, the positioning hole 6 is aligned with the through hole 8, a person inserts a bolt into the two holes to enable the bolt to penetrate through the two holes to be positioned, the shield 3 shields the part of the semiconductor part and processes the semiconductor part immediately, the semiconductor part can be processed after the operation is repeated, and the semiconductor workpiece 100 can be directly pulled out after the processing is completed.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims (6)

1. The utility model provides a frock tool suitable for semiconductor equipment spare part, includes base (1) and semiconductor workpiece (100), its characterized in that: the middle of the upper surface of the base (1) is provided with a clamping mechanism, guide seats (9) which are symmetrically arranged are fixed at the top of the base (1) through screws, guide rods (10) are assembled inside the two guide seats (9) in a sliding mode, connecting blocks (5) are fixed at the tops of the two guide rods (10) through screws, a protective cover (3) is fixed between the two connecting blocks (5) through screws, and the centers of the protective cover (3) and the clamping mechanism are on the same axis;
the device also comprises an adjusting mechanism (2), wherein the adjusting mechanism (2) is used for driving the shield (3) to ascend and descend so as to shield the part of the semiconductor workpiece (100).
2. The tool jig applicable to the semiconductor equipment parts and components according to claim 1, characterized in that: the top of the base (1) is fixed with a side supporting plate (7) through a sunk screw, through holes (8) which are arranged in an array mode are formed in the side supporting plate (7), and positioning holes (6) corresponding to the through holes (8) are formed in one side, close to a connecting block (5) of the side supporting plate (7).
3. The tooling fixture applicable to the parts of the semiconductor equipment according to claim 1, characterized in that: fixture include two slidable mounting in holder (11) at base (1) top, two splint (13) have all been welded to one side of holder (11), two the top of splint (13) all is provided with integrated into one piece and is oblique baffle (14) of slope form.
4. The tooling fixture applicable to the parts of the semiconductor equipment according to claim 3, characterized in that: the middle of the upper surface of the base (1) is provided with a supporting hole (12), the top of the base (1) is further provided with symmetrically arranged sliding grooves (15), the two clamping seats (11) are respectively in sliding connection with the corresponding sliding grooves (15), and springs (16) are fixedly connected between the side walls of the sliding grooves (15) and the corresponding clamping seats (11).
5. The tool jig applicable to the semiconductor equipment parts and components according to claim 1, characterized in that: adjustment mechanism (2) is including being fixed in support (21) of base (1) top one side, the damping is rotated on support (21) and is connected with pivot (22), and the both ends of pivot (22) are respectively through the screw fixation have curved bar (24) and knob (23), the other end activity hinge joint of curved bar (24) has connecting rod (25), the other end and one of them of connecting rod (25) connecting block (5) activity hinge joint.
6. The tooling fixture applicable to the parts of the semiconductor equipment according to claim 1, characterized in that: guide holes are formed in the guide seats (9), and the guide rods (10) are nested in the guide holes.
CN202222842528.6U 2022-10-27 2022-10-27 Tool jig suitable for semiconductor equipment parts Active CN218556829U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202222842528.6U CN218556829U (en) 2022-10-27 2022-10-27 Tool jig suitable for semiconductor equipment parts

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202222842528.6U CN218556829U (en) 2022-10-27 2022-10-27 Tool jig suitable for semiconductor equipment parts

Publications (1)

Publication Number Publication Date
CN218556829U true CN218556829U (en) 2023-03-03

Family

ID=85319625

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202222842528.6U Active CN218556829U (en) 2022-10-27 2022-10-27 Tool jig suitable for semiconductor equipment parts

Country Status (1)

Country Link
CN (1) CN218556829U (en)

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