CN218548371U

CN218548371U - Excimer lamp with air cooling structure

Info

Publication number: CN218548371U
Application number: CN202222663160.7U
Authority: CN
Inventors: 马文杰; 吴霞; 林若沙
Original assignee: Guangdong Junrui Optoelectronics Technology Co ltd
Current assignee: Guangdong Junrui Optoelectronics Technology Co ltd
Priority date: 2022-10-10
Filing date: 2022-10-10
Publication date: 2023-02-28
Anticipated expiration: 2032-10-10

Abstract

The utility model discloses a take air-cooled structure's excimer lamp, including the outer tube and arrange the inside inner tube of outer tube in, the one end of outer tube is fixed with head before the lamp, still include air-cooled mechanism, air-cooled mechanism includes choke valve and hollow tube at least, the both ends of hollow tube are equipped with the opening respectively, the inside of inner tube is arranged in to the hollow tube, be equipped with air outlet channel between hollow tube and the inner tube, the inner electrode is fixed in on the air outlet channel, the choke valve is fixed in on the head before the lamp, the one end outer wall and the head before lamp sealing connection of hollow tube, inlet port and the inside inlet channel that forms of hollow tube on the choke valve, the overhead exhaust hole that is equipped with of head before the lamp, air outlet channel communicates with each other with the exhaust hole. The utility model discloses can cool off the excimer lamp, and because gaseous have good insulating nature and need not handle insulating problem, even have slight revealing can not influence the working property of whole forced air cooling structure yet.

Description

Excimer lamp with air cooling structure

Technical Field

The utility model relates to an ultraviolet lamp technical field, more specifically say, a take excimer lamp of forced air cooling structure.

Background

In the patent numbers CN202122248941.5 and CN202111087255.2, which are filed by the present applicant, an excimer lamp structure is disclosed, which comprises an outer tube and an inner tube disposed in the outer tube, and is characterized in that one end of the inner tube is welded to one end of the outer tube to form a whole, so that the inner tube and the outer tube are tightly connected. The single side of the inner tube can slide along the axis in the shaft shoulder of the outer tube, thereby avoiding the damage of the lamp tube caused by the generation of cracks due to the uneven stress caused by the thermal deformation of the inner tube and the outer tube during the manufacturing and the use. However, when the power of the quasi-division lamp is high, the glass inner tube and the inner electrode of the lamp are sealed in the lamp tube, so that the generated heat cannot be diffused out quickly, the temperature is too high, and the photoelectric conversion efficiency of the lamp tube is obviously reduced.

In order to avoid the situation that the temperature inside the lamp tube is too high, the lamp tube needs to be cooled and radiated, and the current common cooling methods include two schemes of air cooling and water cooling. Wherein, adopt the water-cooling scheme and need construct the hydrologic cycle pipeline for electrified structure still needs to handle insulating problem, and whole structure can not have any and reveal, and it is very complicated to realize the structure.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a take excimer lamp of forced air cooling structure can cool off the excimer lamp, and because gas has good insulating nature and need not handle insulating problem, even have slight revealing also can not influence the working property of whole forced air cooling structure.

The technical scheme is as follows:

the utility model provides a take excimer lamp of forced air cooling structure, include the outer tube and arrange the inside inner tube of outer tube in, the one end of outer tube is fixed with head before, still include forced air cooling mechanism, forced air cooling mechanism includes choke valve and hollow tube at least, the both ends of hollow tube are equipped with the opening respectively, the inside of inner tube is arranged in to the hollow tube, be equipped with air outlet channel between hollow tube and the inner tube, the inner electrode is fixed in on the air outlet channel, the choke valve is fixed in on the head before, the one end outer wall and the head before sealing connection of hollow tube, the inlet port on the choke valve forms inlet channel with the hollow tube is inside, the overhead exhaust hole that is equipped with of head before, air outlet channel communicates with each other with the exhaust hole.

Preferably, the air cooling mechanism further comprises an insulating inner sleeve, the insulating inner sleeve is mounted inside the front lamp cap, the outer wall of one end of the hollow tube is hermetically connected with the inner wall of the insulating inner sleeve, an air inlet guide groove and an air outlet guide groove are formed in the insulating inner sleeve, the air inlet guide groove is respectively communicated with an air inlet of the throttle valve and the inside of the hollow tube, and the air outlet guide groove is respectively communicated with the air outlet channel and the air outlet hole.

Preferably, the air inlet and guide groove is an annular groove arranged along the outer peripheral surface of the insulating inner sleeve, and a plurality of air guide holes leading to the axial inner hole of the insulating inner sleeve along the radial direction are arranged on the air inlet and guide groove.

Preferably, the insulating endotheca has air inlet portion and the assembly portion that links to each other with air inlet portion, and the hole diameter of assembly portion is less than the hole diameter of air inlet portion, the external diameter of hollow tube and the internal diameter phase-match of assembly portion.

Preferably, one end of the hollow pipe is in a bell mouth shape, and the hollow pipe is connected with the inner wall of the insulating sleeve in a sealing mode through the outer peripheral surface of the bell mouth shape.

Preferably, the outer diameter of the assembling portion is matched with the inner diameter of the inner tube, the insulating inner sleeve is connected with the inner tube in a sealing mode through the assembling portion, the air outlet and guide groove is arranged along the axial direction of the assembling portion, and the exhaust holes are arranged along the radial direction of the front lamp cap.

Preferably, the air cooling mechanism further comprises a front stop block and a rear stop block, the inner diameters of the inner holes of the front stop block and the rear stop block are matched with the outer diameter of the hollow tube, the front stop block and the rear stop block are respectively sleeved on the hollow tube, and the inner electrode is fixed between the front stop block and the rear stop block.

Preferably, a plurality of air outlet grooves are formed in the outer circular surfaces of the front stop block and the rear stop block, and the air outlet grooves are located on the air outlet channel.

Preferably, the outer diameters of the front stop block and the rear stop block are provided with external threads, the two ends of the inner electrode are provided with internal threads, and the two ends of the inner electrode are connected with the front stop block and the rear stop block through the internal threads and the external threads.

Preferably, a rubber ring groove is formed in the outer circular surface of the insulating inner sleeve, a sealing rubber ring is installed in the rubber ring groove, the insulating inner sleeve is connected with the front lamp head in a sealing mode through the sealing rubber ring, and the sealing rubber ring is located between the throttle valve and the exhaust hole.

The advantages or principles of the present invention are explained below:

an air inlet channel is formed between an air inlet of a throttle valve on the excimer lamp and the interior of the hollow tube, an air outlet channel is communicated with an air outlet hole, and the throttle valve can be connected with compressed air through a hose. When the excimer lamp needs to be cooled, compressed air enters the interior of the hollow tube through the air inlet of the throttle valve and one end of the hollow tube, and the compressed air enters the air outlet channel after being conveyed to the other end of the hollow tube due to the fact that the two ends of the hollow tube are provided with the opening parts, and is discharged through the air outlet hole after passing through the air outlet channel. Because the inner electrode is arranged on the air outlet channel, the compressed air can cool the inner electrode and the inner tube when passing through the air outlet channel, and the heat generated by the inner electrode is effectively taken away by the flowing air, so that the inner electrode can realize higher power density and better photoelectric conversion efficiency, and the service life of the inner electrode is prolonged. Because the gas has good insulating property and does not need to deal with the insulating problem, the working performance of the whole air cooling structure cannot be influenced even if slight leakage exists.

Drawings

FIG. 1 is a sectional view of an excimer lamp of the present embodiment;

FIG. 2 is a schematic structural diagram of the insulating inner sleeve of the present embodiment;

FIG. 3 is a schematic structural view of the front baffle of the present embodiment;

FIG. 4 is a schematic structural view of the front plastic base of the present embodiment;

description of the reference numerals:

10. an outer tube; 20. an inner tube; 30. a front plastic lamp cap; 40. a front metal lamp cap; 50. a rear plastic lamp cap; 60. a throttle valve; 70. a hollow tube; 80. an air outlet channel; 31. mounting holes; 90. an air intake passage; 32. an exhaust hole; 100. an insulating inner sleeve; 101. an air inlet and guide groove; 102. an air outlet and guide groove; 103. an air intake portion; 104. an assembling portion; 105. an air vent; 110. a front stop block; 120. a rear stop block; 130. an inner electrode; 111. a connecting portion; 112. an air outlet groove; 113. an external thread; 106. a rubber ring groove; 107. sealing the rubber ring; 140. a high voltage cable; 150. a cable lock head; 160. a mesh-shaped outer electrode.

Detailed Description

In the description of the present invention, it is to be understood that the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "center", "inner", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore, should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate a number of the indicated technical features. Thus, a feature defined as "first," "second," etc. may explicitly or implicitly include one or more of that feature. In the description of the present invention, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood by those of ordinary skill in the art through specific situations.

The following description of the preferred embodiments of the present invention will be provided with reference to the accompanying drawings, so that the advantages and features of the present invention can be easily understood by those skilled in the art, and the scope of the present invention can be clearly and clearly defined.

As shown in fig. 1 to 4, the present embodiment discloses an excimer lamp with an air cooling structure, which includes an outer tube 10 and an inner tube 20 disposed inside the outer tube 10, wherein a front lamp holder is fixed at one end of the outer tube 10. The front lamp head comprises a front plastic lamp head 30 and a front metal lamp head 40, wherein the front plastic lamp head 30 is connected with the front metal lamp head 40, and the front metal lamp head 40 is fixed on the outer tube 10. The other end of the outer tube 10 is also fixed with a rear plastic lamp cap 50. The outer tube 10 and the inner tube 20 of the present embodiment have the same structure as the outer tube and the inner tube of the patent CN202111087255.2, and are not described again.

In order to realize the heat dissipation of the excimer lamp, the excimer lamp also comprises an air cooling mechanism. The air cooling mechanism at least comprises a throttle valve 60 and a hollow pipe 70, wherein the two ends of the hollow pipe 70 are respectively provided with an opening part, and the hollow pipe 70 is a metal pipe. The hollow tube 70 is arranged in the inner tube 20, an air outlet channel 80 is arranged between the hollow tube 70 and the inner wall of the inner tube 20, and the inner electrode 130 is fixed on the air outlet channel 80. The front plastic lamp holder 30 is provided with a mounting hole 31 which penetrates through the front plastic lamp holder in the radial direction towards the inside, and the throttle valve 60 is fixedly mounted on the front plastic lamp holder 30 through the mounting hole 31. The outer wall of one end of the hollow pipe 70 is hermetically connected with the front plastic lamp holder 30, an air inlet hole on the throttle valve 60 and the interior of the hollow pipe 70 form an air inlet channel 90, the front plastic lamp holder 30 is provided with an air outlet hole 32, and the air outlet channel 80 is communicated with the air outlet hole 32.

When cooling of the excimer lamp is required, as shown by the arrow in fig. 1, the compressed air enters the interior of the hollow tube 70 through the air inlet hole of the throttle valve 60 and one end of the hollow tube 70, and since both ends of the hollow tube 70 are provided with the opening parts, the compressed air is delivered to the other end of the hollow tube 70, enters the air outlet channel 80, and is discharged through the air outlet hole 32 after passing through the air outlet channel 80. Since the inner electrode 130 is disposed on the air outlet passage 80, the compressed air cools the inner electrode 130 and the inner tube 20 while passing through the air outlet passage 80, the heat generated by the inner electrode 130 is effectively taken away through the flowing air, so that higher power density and better photoelectric conversion efficiency can be realized, and the service life of the photoelectric conversion device is prolonged. Because the gas has good insulating property and does not need to deal with the insulating problem, the working performance of the whole air cooling structure cannot be influenced even if slight leakage exists.

Further, the air cooling mechanism further comprises an insulating inner sleeve 100, the insulating inner sleeve 100 is installed inside the front plastic lamp cap 30, and the outer wall of one end of the hollow tube 70 is hermetically connected with the inner wall of the insulating inner sleeve 100. The insulating inner sleeve 100 is provided with an air inlet guiding groove 101 and an air outlet guiding groove 102, the air inlet guiding groove 101 is respectively communicated with the air inlet of the throttle valve 60 and the interior of the hollow tube 70, and the air outlet guiding groove 102 is respectively communicated with the air outlet channel 80 and the air outlet 32. The compressed air enters the insulating inner sleeve 100 through the air inlet of the throttle valve 60 and the air inlet guide groove 101, then enters the hollow tube 70 through one end of the hollow tube 70, enters the air outlet channel 80 through the other end of the hollow tube 70, and is discharged to the outside of the excimer lamp through the air outlet guide groove 102 and the air outlet 32 after passing through the air outlet channel 80.

The insulating inner housing 100 has an air inlet 103 and a mounting portion 104 connected to the air inlet 103, and the insulating inner housing 100 is hermetically connected to the front plastic base 30 through the air inlet 103. The inner hole diameter of the assembling part 104 is smaller than that of the air inlet part 103, and the outer diameter of the hollow pipe 70 is matched with the inner diameter of the assembling part 104. In order to realize the installation and fixation of the hollow tube 70 and the insulating inner sleeve 100, one end of the hollow tube 70 is in a bell mouth shape, adhesive glue is coated on the outer peripheral surface of the bell mouth shape, and the outer peripheral surface of the bell mouth shape is adhered to the shaft shoulder of the inner hole of the insulating inner sleeve 100 through the adhesive glue to realize the sealing connection.

The air inlet and guide groove 101 on the insulating inner sleeve 100 is an annular groove arranged along the outer peripheral surface of the insulating inner sleeve 100, and a plurality of air guide holes 105 leading to the axial inner hole of the insulating inner sleeve 100 along the radial direction are arranged on the air inlet and guide groove 101. The compressed air enters the inner hole of the air intake portion 103 through the air guide hole 105. The outer diameter of the assembling portion 104 matches the inner diameter of the inner tube 20, the insulating inner sleeve 100 is hermetically connected with the inner tube 20 through the assembling portion 104, the air outlet and guide groove 102 is arranged along the axial direction of the assembling portion 104, and the air outlet hole 32 is arranged along the radial direction of the front plastic lamp cap 30.

Further, in order to fix the inner electrode 130 between the hollow tube 70 and the inner tube 20, the air cooling mechanism further includes a front stopper 110 and a rear stopper 120. In order to fix the front block 110 and the rear block 120 with the hollow tube 70, the inner diameters of the inner holes of the front block 110 and the rear block 120 are matched with the outer diameter of the hollow tube 70, and the front block 110 and the rear block 120 are respectively sleeved on the hollow tube 70. The front block 110 and the rear block 120 are further provided with a connecting portion 111, and the front block 110 and the rear block 120 are sleeved on the hollow tube 70 and welded to the hollow tube 70 by spot welding on the connecting portion 111. The front block 110 and the rear block 120 are connected to the hollow tube 70 and then disposed between the hollow tube 70 and the inner wall of the inner tube 20. The inner electrode 130 is fixed between the front stopper 110 and the rear stopper 120. The front block 110 and the rear block 120 are metal blocks.

The outer circular surfaces of the front block 110 and the rear block 120 are provided with a plurality of air outlet grooves 112, and the plurality of air outlet grooves 112 are located on the air outlet channel 80. In order to realize the connection and fixation of the front block 110 and the rear block 120 with the inner electrode 130, the outer diameters of the front block 110 and the rear block 120 are provided with external threads 113, the two ends of the inner electrode 130 are provided with internal threads, and the two ends of the inner electrode 130 are connected with the front block 110 and the rear block 120 through the internal threads and the external threads 113. Preferably, the internal electrode 130 is a helical metal internal electrode.

In this embodiment, a rubber ring groove 106 is formed on an outer circumferential surface of the inner insulating sleeve 100, a sealing rubber ring 107 is installed in the rubber ring groove 106, and the inner insulating sleeve 100 is connected to the front plastic lamp cap 30 in a sealing manner through the sealing rubber ring 107. A sealing rubber ring 107 is located between the throttle valve 60 and the exhaust hole 32, thereby preventing the compressed air in the exhaust hole 32 from entering the intake passage 90.

In this embodiment, a high voltage cable 140 is welded to the bell mouth shape of the hollow tube 70, and the high voltage cable 140 is fixed to the front plastic lamp holder 30 through a cable lock 150. A mesh-shaped outer electrode 160 is provided on the outer circumferential surface of the outer tube 10.

The excimer lamp of this embodiment can be assembled by the method of CN202111087255.2, then the hollow tube 70 is inserted into the inner hole of the inner insulating sleeve 100, and the front block 110, the inner electrode 130 and the back block 120 are sequentially installed on the outer diameter of the hollow tube 70. The rear block 120 is spot-welded to an end of the hollow tube 70 far from the inner insulating sleeve 100, and both ends of the inner electrode 130 are respectively fixed to the front block 110 and the rear block 120 by threads, and then the front block 110 is spot-welded to an end of the hollow tube 70 near the inner insulating sleeve 100. The inner electrode 130 is axially positioned by the front block 110 and the rear block 120.

And then spot welding a high-voltage cable 140 on the hollow tube 70, smearing a spot of adhesive on the outer circular surface of the bell mouth shape of the hollow tube 70, pushing the hollow tube 70 into the insulating inner sleeve 100 until the bell mouth shape props against the shaft shoulder of the inner hole of the insulating inner sleeve 100, and realizing the connection of the hollow tube 70 and the insulating inner sleeve 100 through the adhesive.

Then, a sealing rubber ring 107 is installed in the rubber ring groove 106 of the inner insulating sleeve 100, the inner insulating sleeve 100 is pushed, the rear stopper 120 is inserted forward into the inner tube 20, the high voltage cable 140 is inserted through the axial hole of the front plastic base 30, and the front plastic base 30 is screwed to the front metal base 40. And then the high voltage cable 140 is fixed on the front plastic lamp cap 30 through the cable lock 150. The cable locking head 150 can seal the air inlet passage 90 in the axial direction and lock and fix the high voltage cable 140. The sealing rubber ring 107 installed on the insulating inner sleeve 100 is matched with the inner hole of the front plastic lamp cap 30 to separate the air inlet channel 90 from the air outlet channel 80, so that the cooling effect is better.

The high voltage cable 140 is communicated with the inner electrode 130 through the hollow tube 70, the front block 110 and the rear block 120, and the insulation of the mesh-shaped outer electrode 160 is realized through the front plastic lamp cap 30 and the insulating inner sleeve 100, so that the stability and the safety of the operation of the excimer lamp tube are ensured.

Generally, after the excimer lamp is installed on the device, a throttle valve 60 is installed on the front plastic lamp holder 30, and the throttle valve 60 can be used for adjusting the air volume of the compressed air.

The embodiment of the present invention is not limited to this, according to the above-mentioned content of the present invention, the common technical knowledge and the conventional means in the field are utilized, without departing from the basic technical idea of the present invention, the present invention can also make other modifications, replacements or combinations in various forms, all falling within the protection scope of the present invention.

Claims

1. The utility model provides a take excimer lamp of forced air cooling structure, include the outer tube and arrange the inside inner tube of outer tube in, the one end of outer tube is fixed with preceding lamp holder, a serial communication port, still include air-cooled mechanism, air-cooled mechanism includes choke valve and hollow tube at least, the both ends of hollow tube are equipped with the opening respectively, the inside of inner tube is arranged in to the hollow tube, be equipped with air outlet channel between hollow tube and the inner tube, the inner electrode is fixed in on the air outlet channel, the choke valve is fixed in on the headlight, the one end outer wall and the headlight sealing connection of hollow tube, inlet port and the inside intake channel that forms of hollow tube on the choke valve, be equipped with the exhaust hole on the headlight, air outlet channel communicates with each other with the exhaust hole.

2. The excimer lamp with an air cooling structure as claimed in claim 1, wherein the air cooling mechanism further comprises an insulating inner sleeve, the insulating inner sleeve is mounted inside the front lamp cap, an outer wall of one end of the hollow tube is hermetically connected with an inner wall of the insulating inner sleeve, the insulating inner sleeve is provided with an air inlet guide groove and an air outlet guide groove, the air inlet guide groove is respectively communicated with an air inlet hole of the throttle valve and the inside of the hollow tube, and the air outlet guide groove is respectively communicated with the air outlet channel and the air outlet hole.

3. The excimer lamp with an air cooling structure as claimed in claim 2, wherein the air inlet/guide groove is an annular groove formed along the outer circumferential surface of the inner insulating sleeve, and the air inlet/guide groove is provided with a plurality of air guide holes radially opening into the axial inner hole of the inner insulating sleeve.

4. The excimer lamp with an air-cooling structure of claim 2, wherein the insulating inner sleeve has an air inlet portion and a fitting portion connected to the air inlet portion, an inner hole diameter of the fitting portion is smaller than that of the air inlet portion, and an outer diameter of the hollow tube matches an inner diameter of the fitting portion.

5. The excimer lamp with an air cooling structure as set forth in claim 4, wherein one end of the hollow tube has a bell mouth shape, and the hollow tube is hermetically connected to the inner wall of the insulating sleeve through the outer peripheral surface of the bell mouth shape.

6. The excimer lamp with an air cooling structure as claimed in claim 4, wherein the outer diameter of the fitting portion matches the inner diameter of the inner tube, the insulating inner sleeve is hermetically connected to the inner tube through the fitting portion, the air outlet guide groove is provided along the axial direction of the fitting portion, and the air outlet hole is provided along the radial direction of the front base.

7. The excimer lamp with an air cooling structure as claimed in any one of claims 1 to 6, wherein the air cooling mechanism further comprises a front block and a rear block, the inner diameter of the inner hole of the front block and the inner hole of the rear block match with the outer diameter of the hollow tube, the front block and the rear block are respectively sleeved on the hollow tube, and the inner electrode is fixed between the front block and the rear block.

8. The excimer lamp with an air cooling structure as claimed in claim 7, wherein a plurality of air outlet grooves are formed on the outer circumferential surfaces of the front and rear stoppers, and the plurality of air outlet grooves are located on the air outlet channel.

9. The excimer lamp with an air-cooling structure as defined in claim 7, wherein the front and rear stoppers are provided with external threads on the outer diameter thereof, and the inner electrode is provided with internal threads at both ends thereof, and both ends of the inner electrode are connected to the front and rear stoppers via the internal and external threads.

10. The excimer lamp with an air cooling structure as claimed in claim 2, wherein a rubber ring groove is formed on an outer circumferential surface of the inner insulating sleeve, a sealing rubber ring is installed in the rubber ring groove, the inner insulating sleeve is connected with the front lamp head in a sealing manner through the sealing rubber ring, and the sealing rubber ring is located between the throttle valve and the exhaust hole.