CN218538475U

CN218538475U - Transmission system for silicon wafer sorting machine

Info

Publication number: CN218538475U
Application number: CN202223025641.1U
Authority: CN
Inventors: 吴亮亮; 王栋
Original assignee: Suzhou Gcl Photovoltaic Technology Co ltd
Current assignee: Suzhou Gcl Photovoltaic Technology Co ltd
Priority date: 2022-11-15
Filing date: 2022-11-15
Publication date: 2023-02-28
Anticipated expiration: 2032-11-15

Abstract

The utility model discloses a transmission system for a silicon wafer sorting machine, which comprises a plurality of transmission devices corresponding to different detection devices of the silicon wafer sorting machine, wherein the transmission devices are correspondingly arranged end to end and are level in height; each transmission device comprises a belt, a belt positioning support, a driving belt wheel, a driven belt wheel and a guide supporting structure, wherein the belt positioning support, the driving belt wheel, the driven belt wheel and the guide supporting structure are fixedly arranged on the silicon wafer sorting machine; the belt is a flat belt. The belt positioning support is provided with an upper positioning hole and a lower positioning hole, and limiting belt wheels for supporting any side surface of the belt are arranged in the positioning holes. The utility model utilizes the flat belt structure to increase the contact area with the silicon wafer so as to lead the transportation to be stable and adapt to the large-size silicon wafer; the flat belt can have different tightness according to requirements by utilizing a plurality of positioning holes for installing the limiting belt wheels at the upper part and the lower part of the belt positioning bracket, and the belt can run more stably and reliably by utilizing the guide supporting structure; can be applied to a large-size silicon wafer sorting machine.

Description

Transmission system for silicon wafer sorting machine

Technical Field

The utility model relates to a transmission system especially relates to a transmission system for silicon chip sorter.

Background

The HE-WI-04 type silicon wafer sorting machine is integrated detection equipment for detecting the external dimensions, the electrical properties and the external defects of silicon wafers on line, and the equipment arranges all detection modules in a detection area and drives the silicon wafers to detect through all the detection modules through a transmission system. In order to ensure the detection accuracy, the requirement on the stability degree of the silicon wafer during transmission is higher. The existing transmission system is provided with a circular belt with the diameter of 3mm, and has the advantages of stability and reduction of the area of a shielded silicon wafer when a silicon wafer with the edge width not larger than 156mm × 156mm is detected, but when a silicon wafer with the size not smaller than 182mm × 182mm (hereinafter referred to as a large-size silicon wafer for short) is detected, the silicon wafer shakes in the transmission process due to the fact that the conventional thickness of the silicon wafer is 150 μm-160 μm, the thickness of the silicon wafer is thin, the size of the silicon wafer is large, and the contact area of the circular belt is small, so that the detection effect is influenced.

Therefore, the HE-WI-04 type silicon wafer sorting machine for detecting large-size silicon wafers needs to replace a conveying belt with a flat belt with the width of 8 mm-10 mm from a round belt so as to increase the contact area of the silicon wafers in the transmission process and enhance the stability of the silicon wafers in the transmission process. However, because the appearances of the round belt and the flat belt are completely different, the structural components of the old round belt transmission system cannot be matched with the flat belt, and the existing silicon wafer sorting machine is lack of a transmission system matched with the flat belt.

SUMMERY OF THE UTILITY MODEL

Utility model purpose: the utility model aims at providing a transmission system of steady transportation, can adjust the elasticity, be used for silicon chip sorter.

The technical scheme is as follows: the utility model provides a transmission system for a silicon wafer sorting machine, which comprises a plurality of transmission devices corresponding to different detection devices of the silicon wafer sorting machine, wherein the transmission devices are correspondingly arranged end to end, are highly parallel and level and run in the same direction under the driving of corresponding driving devices; each transmission device comprises a belt, and a belt positioning bracket, a driving belt wheel and a driven belt wheel which are fixedly arranged on the silicon wafer sorting machine; the belt is a flat belt; the belt positioning bracket is provided with a limiting belt wheel which can adjust the position and change the tightness of the belt, and the limiting belt wheel is supported on the lower half ring of the belt.

Preferably, the belt positioning support is provided with an upper positioning hole and a lower positioning hole, and the limiting belt wheel is installed in any positioning hole.

Preferably, the belt positioning support is of an L-shaped structure, one end of the belt positioning support is provided with a long circular hole, and the belt positioning support is installed on the upper surface of the sorting machine through the long circular hole.

Preferably, the belt positioning brackets are arranged at two ends of the transmission device, which are close to the driving pulley and the driven pulley, the number of the belt positioning brackets at one end is two, the belt positioning brackets are arranged on one side of the belt in a combined mode, and the adjustment range and the level of the belt are expanded in the combined use mode.

Preferably, two belt locating support of same end set up relatively, and install in an inboard spacing band pulley, install in an outside spacing band pulley utilizes different hole sites to make the belt have different elasticity, can adjust as required.

Preferably, each transmission device further comprises a guide supporting structure arranged in the middle of the belt, and the guide supporting structure is fixedly arranged on the silicon wafer sorting machine through an L-shaped support and used for supporting the material conveying part of the belt to play a supporting and guiding role, so that the belt runs more stably and reliably.

Preferably, the guide support structure is a guide rail structure or a support plate.

Preferably, the number of the belts of each transmission device is a plurality, and the belts are sleeved outside the driving belt wheel and the driven belt wheel in parallel.

The working principle is as follows: utilize flat belt to increase in silicon chip area of contact and make the transportation stable, utilize the locating hole of the spacing band pulley of a plurality of installations about the belt locating support, make flat belt have different elasticity, utilize the layer board to make the belt operation more stable, reliable.

Has the advantages that: compared with the prior art, the utility model, have following advantage: 1. the flat belt is adopted, the contact area with the silicon wafer is large, the flat belt is suitable for large-size silicon wafers, the whole transmission process is stable, and the detection accuracy and stability are improved; 2. the belt positioning support is provided with an upper positioning hole and a lower positioning hole, the positioning holes are matched with the limiting belt wheels, and the plurality of belt positioning supports can be combined for use, so that the flat belt has different tightness and can be adjusted as required; 3. the belt guide rail and the supporting plate are arranged, so that the belt runs more stably and reliably; 4. a four-section structure is adopted, and the operation space of the silicon wafer sorting machine is reserved; the transmission system carries an original power motor of the silicon wafer sorting machine through a driving shaft of the driving belt wheel, can trigger and attach the whole operation and the original equipment operation, can synchronize the operation adjustment of the silicon wafer sorting machine, and can match the operation and trigger the trigger operation of a detection module of the silicon wafer sorting machine.

Drawings

FIG. 1 is a front view of the structure of the present invention;

fig. 2 is a top view of the structure of the present invention;

FIG. 3 is a schematic view of the structure A of the present invention;

FIG. 4 is a schematic structural diagram of the present invention B;

fig. 5 is a schematic structural diagram of the present invention C;

fig. 6 is a schematic view of the structure D of the present invention.

Detailed Description

The technical solution of the present invention will be further explained with reference to the accompanying drawings.

As shown in fig. 1 and 2, a transmission system for a silicon wafer sorting machine comprises a first transmission device 1, a second transmission device 2, a third transmission device 3 and a fourth transmission device 4. All the transmission devices are correspondingly arranged end to end, are parallel and level in height and run in the same direction.

As shown in fig. 3, the first transmission device 1 is disposed at the start end of the detection area, and includes a first driving pulley 11, a first driven pulley 12, and two first belts 13 disposed in parallel, where the first belts 13 are flat belts. The belt conveyor further comprises three groups of first belt positioning brackets 14, wherein two groups of the first belt positioning brackets are arranged at positions close to the first driven belt wheel 12 and are provided with an upper first positioning hole 141 and a lower first positioning hole 141, and a first limiting belt wheel 142 is arranged in any one positioning hole 141; the first positioning hole 141 is formed at a position close to the first driving pulley 11, and the first limiting pulley 142 is installed in the positioning hole 141. The first belt 13 is further provided with a first guide rail 15 for supporting the belt in the middle. Each first belt 13 is supported and tightened by the first driving pulley 11, the first driven pulley 12, the three first limiting pulleys 142, and the first guide rail 15. The first driving belt wheels 11 of the two first belts 13 are sleeved on the same driving shaft. The first driving pulley 11, the first driven pulley 12, the first belt positioning bracket 14 and the first guide rail 15 are all fixedly mounted on the sorting machine.

As shown in fig. 4, the second transmission device 2, which is disposed in the middle front detection area, includes a second driving pulley 21, a second driven pulley 22 and two second belts 23 disposed in parallel, and the second belts 23 are flat belts; the belt conveyor further comprises two groups of second belt positioning supports 24 which are respectively arranged at two sides of the second belt 23 and close to the second driving belt wheel 21 and the second driven belt wheel 22. The second belt positioning bracket 24 is provided with an upper second positioning hole 241 and a lower second positioning hole 241, and a second limiting belt wheel 242 is installed in any one positioning hole 241. The middle part of the second belt 23 is also provided with a second guide support plate 25 for supporting the belt. Each of the second belts 23 is supported and tightened by the second driving pulley 21, the second driven pulley 22, the two second limiting pulleys 242, and the second guide support plate 25. The second driving pulleys 21 of the two second belts 23 are sleeved on the same driving shaft. The second driving pulley 21, the second driven pulley 22, the second belt positioning bracket 24 and the second guide rail 25 are all fixedly mounted on the sorting machine.

As shown in fig. 5, the third transmission device 3 is provided in the middle rear detection region, is symmetrical to the front region, and includes a third driving pulley 31, a third driven pulley 32, and two third belts 33 arranged in parallel, and the third belts 33 are flat belts; and the two groups of third belt positioning brackets 34 are arranged at two sides of the third belt 33 and close to the third driving belt wheel 31 and the third driven belt wheel 32. The third belt positioning bracket 34 is provided with an upper third positioning hole 341 and a lower third positioning hole 341, and a third limiting belt wheel 342 is installed in any one of the positioning holes 341. The third belt 33 is further provided at a middle portion thereof with a third guide support plate 35 for supporting the belt. Each first belt 33 is supported and tightened by the first driving pulley 31, the first driven pulley 32, the two first limit pulleys 342, and the first guide support plate 35. The first driving pulleys 31 of the two first belts 33 are sleeved on the same driving shaft. The third driving pulley 31, the third driven pulley 32, the third belt positioning bracket 34 and the third guide rail 35 are all fixedly installed on the sorting machine.

As shown in fig. 6, the fourth transmission device 4 is disposed at the rear end of the detection area, and includes a fourth driving pulley 41, a fourth driven pulley 42, and two fourth belts 43 disposed in parallel, where the fourth belts 43 are flat belts. The belt conveyor further comprises three groups of fourth belt positioning brackets 44, wherein two groups of the fourth belt positioning brackets are arranged at positions close to the fourth driven belt wheel 42, are oppositely arranged and are provided with four upper and lower fourth positioning holes 441, and a fourth limiting belt wheel 442 is arranged in any one of the positioning holes 441; the set of the positioning holes is disposed near the fourth driving pulley 41, and a fourth positioning hole 441 is disposed in the positioning hole 441, and a fourth limiting pulley 442 is disposed in the positioning hole 441. The middle part of the fourth belt 43 is also provided with a fourth guide rail 45 for supporting the belt. Each of the fourth belts 43 is supported and tightened by the fourth driving pulley 41, the fourth driven pulley 42, the three fourth limiting pulleys 442, and the fourth guide rail 45. The fourth driving pulleys 41 of the two fourth belts 43 are sleeved on the same driving shaft. The fourth driving pulley 41, the fourth driven pulley 42, the fourth belt positioning bracket 44 and the fourth guide rail 45 are all fixedly mounted on the sorter.

Each belt positioning bracket of the utility model is of an L-shaped structure, one side of the belt positioning bracket is provided with a long circular hole, and the belt positioning bracket is arranged on the upper surface of the sorting machine through the long circular hole; the driving belt wheels and the driven belt wheels are arranged on the sorting machine through wheel shafts and supports, and the supports are vertically arranged or obliquely extend outwards.

The utility model discloses a four-period form structure, the reservation has the operation space of silicon chip sorter, and each driving pulley's driving shaft carries on the original motor power of silicon chip sorter, triggers whole operation and original equipment operation and laminates mutually, and the operation of synchronous silicon chip sorter is adjusted, matches the operation and triggers the trigger work of the detection module of silicon chip sorter.

During specific use, the limiting belt wheel is installed in a proper positioning hole according to the requirement of belt tension, and the belt sleeve is arranged on the periphery of the driving belt wheel, the driven belt wheel, the limiting belt wheel and the guide rail or the guide support plate. The belts synchronously rotate in the same direction to sequentially transmit and transfer the large-size silicon wafers, so that the large-size silicon wafers are detected and sorted by the detection modules.

Claims

1. A transmission system for a silicon wafer sorting machine is characterized by comprising a plurality of transmission devices corresponding to different detection devices of the silicon wafer sorting machine, wherein the transmission devices are arranged end to end correspondingly, are level in height and run in the same direction under the drive of corresponding drive devices; each transmission device comprises a belt, and a belt positioning bracket, a driving belt wheel and a driven belt wheel which are fixedly arranged on the silicon wafer sorting machine; the belt is a flat belt; the belt positioning support is provided with a limiting belt wheel with adjustable position and changeable belt tightness, and the limiting belt wheel is supported on the lower half circle of the belt.

2. The transmission system of claim 1, wherein the belt positioning bracket is provided with a plurality of positioning holes, and the limiting belt wheel is mounted in any one of the positioning holes.

3. The transmission system for the silicon wafer sorting machine according to claim 1, wherein the belt positioning support is of an L-shaped structure, one end of the belt positioning support is provided with an oblong hole, and the belt positioning support is installed on the upper surface of the sorting machine through the oblong hole.

4. The transmission system of claim 2, wherein the belt positioning brackets are arranged at two ends of the transmission device close to the driving pulley and the driven pulley, and the number of the belt positioning brackets at one end is two.

5. The transmission system for the silicon wafer sorting machine according to claim 4, wherein the two belt positioning brackets at the same end are oppositely arranged, one is provided with the limiting belt wheel at the inner side, and the other is provided with the limiting belt wheel at the outer side.

6. The transmission system for the silicon wafer sorting machine according to claim 1, wherein each transmission device further comprises a guide support structure arranged in the middle of the belt, and the guide support structure is fixedly arranged on the silicon wafer sorting machine through an L-shaped bracket.

7. The transmission system of claim 6, wherein the guide support structure is a guide rail structure or a support plate.

8. The transmission system of claim 1, wherein the plurality of belts of each transmission device are sleeved on the outer sides of the driving pulley and the driven pulley in parallel.