CN218531005U

CN218531005U - Gas phase method silane coupling experimental apparatus

Info

Publication number: CN218531005U
Application number: CN202222442505.6U
Authority: CN
Inventors: 蒋陆一
Original assignee: Ningbo Jumo New Material Technology Co ltd
Current assignee: Ningbo Jumo New Material Technology Co ltd
Priority date: 2022-09-15
Filing date: 2022-09-15
Publication date: 2023-02-28
Anticipated expiration: 2032-09-15

Abstract

The utility model relates to a chemistry experiment instrument field discloses a gas phase method silane coupling experimental apparatus, and it includes experiment table and nitrogen cylinder, and the nitrogen cylinder setting is provided with the reaction box in one side of experiment table on the experiment table, is provided with air inlet pipeline and air outlet pipeline on the reaction box. The beneficial effects of the utility model are that: after the device is used for processing the silicon wafer, follow-up chemical analysis and deep chemical inspection analysis are facilitated, the quality problem in product application is reduced to the maximum extent, meanwhile, modification processing is carried out in a mode that the reaction monomer and the reaction substrate are used for separating a cavity (a three-mouth bottle and a reaction box), and the problem that reaction is excessive due to the fact that the reaction monomer and the reaction substrate are in the same cavity is effectively avoided.

Description

Gas phase method silane coupling experimental apparatus

Technical Field

The utility model relates to a chemistry experiment instrument field, especially a vapor phase method silane coupling experimental apparatus.

Background

The silane coupling agent is commonly used for treating inorganic fillers such as silicon dioxide, carbon black and the like, plays a role of an active agent, a coupling agent, a cross-linking agent and a reinforcing agent in polymers such as rubber, silicon rubber and the like, has a special function as a metal surface antirust agent, and effectively improves the corrosion resistance and the oxidation resistance of the surface and increases the adhesion of the surface with polymer materials such as resin and the like by treating the metal surface with the silane coupling agent.

In the existing industrial production of silicon wafers, an experimental device is lacked to process the silicon wafers, then chemical analysis and deep chemical inspection analysis are carried out, so that the quality problem in product application is reduced to the maximum extent, and the analysis and detection values are kept.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a vapor phase method silane coupling experimental apparatus to overcome prior art's shortcoming.

The purpose of the utility model is realized through the following technical scheme: the utility model provides a gas phase method silane coupling experimental apparatus, including experiment table and nitrogen cylinder, the nitrogen cylinder sets up the one side at the experiment table, be provided with the reaction box on the experiment table, be provided with air inlet pipeline and air outlet pipeline on the reaction box, the air inlet pipeline includes the flowmeter, the A valve, wooden plug sealed three-port bottle, the B valve, three-way pipe and A flow valve, the first bottleneck at three-port bottle is installed to the A valve, the second bottleneck at three-port bottle is installed to the B valve, the air inlet at the reaction box is installed to the A flow valve, the nitrogen cylinder passes through A pipe connection with the A valve, the flowmeter is installed on the A pipeline, the A flow valve passes through B pipe connection with the B valve, the three-way pipe is installed on the B pipeline, the third end of three-way pipe passes through C pipe connection with the drinking cup, the air outlet pipeline includes B flow valve, cold trap and vacuum pump 13, the gas outlet at the reaction box is installed to the B flow valve, the B flow valve passes through the cold trap with vacuum pump 13 and is connected.

Preferably, the laboratory table is including carrying the thing board, two pairs of bracing pieces and installing frame, the installing frame sets firmly subaerial, two pairs of bracing pieces are located the both sides of carrying the thing board respectively, every X type of constituteing by A pole and B pole to the bracing piece, A pole and B pole are articulated each other, both ends that are located X type right side rotate respectively and install on carrying the thing board and the installing frame, be located the left both ends of X type slidable mounting respectively on carrying the thing board and on the installing frame, the locating hole has been seted up to the tank bottom of the spout that carries the thing board, the locating lever has been inserted in the locating hole, the locating lever runs through the slider on the A pole that corresponds.

Preferably, the laboratory table is including carrying the thing board, two pairs of bracing pieces and installing frame, the installing frame sets firmly subaerial, two pairs of bracing pieces are located the both sides of carrying the thing board respectively, every X type of constituteing by A pole and B pole to every bracing piece, A pole and B pole are articulated each other, the both ends that are located X type right side rotate respectively and install on carrying the thing board and on the installing frame, be located the left both ends of X type slidable mounting respectively on carrying the thing board and on the installing frame, the inboard of A pole articulates there is the locating lever, the stopping groove has been seted up on the B pole, the locating lever card is gone into in the stopping groove.

Preferably, the laboratory table is including carrying the thing board, two pairs of bracing pieces and installing frame, the installing frame sets firmly on the interior bottom of box, two pairs of bracing pieces are located the both sides of carrying the thing board respectively, every pair X type of constituteing by A pole and B pole to the bracing piece, A pole and B pole pass through bolt connection, pinhole on the A pole and the pinhole on the B pole are a plurality ofly, the both ends of A pole are rotated respectively and are installed on carrying the thing board and the installing frame, the one end of B pole is rotated and is installed on carrying the thing board, the other end slidable mounting of B pole is on the installing frame.

Preferably, the retaining grooves are distributed along the length direction of the B rod.

Preferably, the reaction chamber is made of a transparent material.

Compared with the prior art, the beneficial effects of the utility model are that:

after the device is used for processing the silicon wafer, follow-up chemical analysis and deep chemical inspection analysis are facilitated, the quality problem in product application is reduced to the maximum extent, meanwhile, modification processing is carried out in a mode that the reaction monomer and the reaction substrate are used for separating a cavity (a three-mouth bottle and a reaction box), and the problem that reaction is excessive due to the fact that the reaction monomer and the reaction substrate are in the same cavity is effectively avoided.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a first schematic structural diagram of the laboratory table;

FIG. 3 is a schematic structural diagram II of the laboratory table;

FIG. 4 is a third schematic structural view of the laboratory table;

in the figure, 1-bolt, 2-nitrogen cylinder, 3-reaction box, 4-flowmeter, 5-A valve, 6-three-mouth bottle, 7-B valve, 8-three-way pipe, 9-A flow valve, 10-water cup, 11-B flow valve, 12-cold trap, 13-vacuum pump, 14-loading plate, 15-supporting rod, 16-mounting frame, 17-positioning rod, 18-backstop groove and 19-positioning pin.

Detailed Description

To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined to clearly and completely describe the technical solutions of the embodiments of the present invention, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It should be noted that the embodiments and features of the embodiments of the present invention may be combined with each other without conflict.

It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined or explained in subsequent figures.

In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship which the products of the present invention are conventionally placed in use, or the position or positional relationship which the skilled person conventionally understand, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element to which the reference is made must have a specific position, be constructed in a specific orientation, and be operated, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," and the like are used merely to distinguish one description from another, and are not to be construed as indicating or implying relative importance.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

As shown in fig. 1, a gas phase method silane coupling experimental device, including experiment table and nitrogen cylinder 2, nitrogen cylinder 2 is set up in one side of experiment table, be provided with reaction box 3 on the experiment table, be provided with inlet line and air outlet pipeline on reaction box 3, the inlet line includes flowmeter 4, a valve 5, wooden plug sealed three-port bottle 6, B valve 7, three-way pipe 8 and a flow valve 9, a valve 5 is installed at the first bottleneck of three-port bottle 6, B valve 7 is installed at the second bottleneck of three-port bottle 6, a flow valve 9 is installed at the air inlet of reaction box 3, nitrogen cylinder 2 and a valve 5 pass through a pipe connection, flowmeter 4 is installed on a pipeline, a flow valve 9 and B valve 7 pass through B pipe connection, three-way pipe 8 is installed on B pipeline, the third end of three-way pipe 8 passes through C pipe connection with 10, the air outlet pipeline includes B flow valve 11, cold trap 12 and vacuum pump 13, B11 is installed at the air outlet of reaction box 3, B11 and vacuum pump 13 pass through cold trap 12, cold trap 12 and vacuum pump 12, thereby the gas outlet pipeline is installed at the gas outlet pipeline of the gas flow valve is installed at the reaction box 3, the gas analysis and the problem of the chemical industry is avoided because the effective reaction tank and the reaction tank is carried out the follow-up to the reaction tank, the problem of the modified reaction tank, the reaction tank is avoided, the most, the reaction tank and the reaction tank is carried out the reaction tank.

In this embodiment, as shown in fig. 2, the experiment table is the liftable, make things convenient for the personnel of different heights to use, the experiment table of first liftable is including carrying thing board 14, two pairs of bracing pieces 15 and installing frame 16, installing frame 16 sets firmly subaerial, two pairs of bracing pieces 15 are located the both sides of carrying thing board 14 respectively, every X type of constituteing by A pole and B pole to bracing piece 15, A pole and B pole are articulated each other, the both ends that are located X type right side rotate respectively and install on carrying thing board 14 and installing frame 16, be located the left both ends of X type and slide mounting respectively on carrying thing board 14 and installing frame 16, the locating hole has been seted up to the tank bottom of the spout of carrying thing board 14, locating pin 19 has been inserted in the locating hole, locating pin 19 runs through the slider on the A pole that corresponds.

In this embodiment, as shown in fig. 3, the second experiment table includes a carrying plate 14, two pairs of supporting rods 15 and a mounting frame 16, the mounting frame 16 is fixedly disposed on the ground, the two pairs of supporting rods 15 are respectively located on two sides of the carrying plate 14, each pair of supporting rods 15 is formed by an a rod and a B rod into an X shape, the a rod and the B rod are hinged to each other, two ends located on the right side of the X shape are respectively rotatably mounted on the carrying plate 14 and the mounting frame 16, two ends located on the left side of the X shape are respectively slidably mounted on the carrying plate 14 and the mounting frame 16, a positioning rod 17 is hinged to the inner side of the a rod, a retaining groove 18 is formed in the B rod, the retaining grooves 18 are multiple, the retaining grooves 18 are distributed along the length direction of the B rod, and the positioning rod 17 is clamped into the retaining groove 18.

In this embodiment, as shown in fig. 4, the third experiment table includes a carrying plate 14, two pairs of supporting rods 15 and a mounting frame 16, the mounting frame 16 is fixedly disposed on the inner bottom of the box body, the two pairs of supporting rods 15 are respectively disposed on two sides of the carrying plate 14, each pair of supporting rods 15 is formed into an X shape by a rod a and a rod B, the rod a and the rod B are connected by a pin 1, pin holes on the rod a and pin holes on the rod B are multiple, two ends of the rod a are respectively rotatably mounted on the carrying plate 14 and the mounting frame 16, one end of the rod B is rotatably mounted on the carrying plate 14, and the other end of the rod B is slidably mounted on the mounting frame 16.

In this embodiment, as shown in fig. 1, the reaction chamber 3 is made of a transparent material, so that the color of the substrate in the reaction chamber 3 can be observed conveniently, the reaction process can be judged, and the situation that the coupling agent self-polycondensation occurs on the surface of the substrate due to unknown reaction degree is effectively alleviated.

The operation steps when the device is used are as follows:

1. connecting instruments and lofting: the instrument is connected as shown in figure 1 and a substrate to be treated (e.g. a silicon wafer) is placed in the chamber of the reaction chamber.

2. And (3) discharging a cavity of the reaction box and three bottles of air: the a, B valves were opened and the tee was connected to the water section (isolated from the chamber of the reaction box), which was the left half. And on the right half part, opening the flow valves A and B, adjusting the tee joint to connect the cavity of the reaction box with the cold trap, opening the pump at the moment, vacuumizing for about 15 minutes, closing the flow valves A and B after vacuumizing, and closing the pump.

3. Adding a medicine: the nitrogen pressure reducing valve (< 0.1 MPa) was opened, the flow meter was adjusted to about 100, and nitrogen was introduced for about 2 minutes (bubbles were visible in the water). At this time, about 0.5ml of the solution was injected into a three-necked flask, and the nitrogen gas and the A and B valves were closed.

4. Introducing a medicine into a cavity of the reaction box: and opening a nitrogen cylinder to adjust the flow to about 100, and opening the valves A and B to connect the three-way pipe with the cavity part of the reaction box. And then slowly opening the flow valve A to ensure that the medicine steam in the three-neck flask is introduced into the cavity of the reaction box along with the nitrogen to react on the surface of the substrate, and introducing the nitrogen for about 5 minutes.

5. Discharging residual medicines in the cavity of the reaction box: closing the nitrogen pressure reducing valve and the main valve, closing the flow meter, closing the A valve and the B valve, adjusting the tee joint to connect the cavity of the reaction box with the cold hydrazine, opening the pump, opening the B flow valve, and completely opening the A flow valve to completely discharge residual medicines in the cavity of the reaction box out of the cavity of the reaction box for about 20 minutes.

6. Taking out the substrate: and closing the flow valve B and the pump. And connecting the three-way pipe with the right side and the atmosphere to change the pressure of the cavity of the reaction box to be 0, and opening the cavity of the reaction box to take out the substrate.

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.

Claims

1. The utility model provides a gas phase method silane coupling experimental apparatus, includes experiment table and nitrogen cylinder (2), and nitrogen cylinder (2) set up in one side of experiment table, its characterized in that: be provided with reaction box (3) on the laboratory table, be provided with air inlet pipeline and air outlet pipeline on reaction box (3), air inlet pipeline includes flowmeter (4), A valve (5), wooden plug sealed three-port bottle (6), B valve (7), three-way pipe (8) and A flow valve (9), the first bottleneck at three-port bottle (6) is installed in A valve (5), the second bottleneck at three-port bottle (6) is installed in B valve (7), the air inlet at reaction box (3) is installed in A flow valve (9), nitrogen gas bottle (2) pass through A pipe connection with A valve (5), flowmeter (4) are installed on the A pipeline, A flow valve (9) pass through B pipe connection with B valve (7), three-way pipe (8) are installed on the B pipeline, the third end of three-way pipe (8) passes through C pipe connection with drinking cup (10), air outlet pipeline includes B flow valve (11), cold trap (12) and vacuum pump (13), the gas outlet at reaction box (3) is installed in B flow valve (11), B flow valve (11) and vacuum pump (13) pass through cold trap (12) and are connected.

2. The gas-phase silane coupling experimental device according to claim 1, wherein: experiment table is including carrying thing board (14), two pairs of bracing pieces (15) and installing frame (16), installing frame (16) set firmly subaerial, two pairs of bracing pieces (15) are located the both sides of carrying thing board (14) respectively, every X type of constituteing by A pole and B pole to bracing piece (15), A pole and B pole are articulated each other, both ends that are located X type right side rotate respectively to be installed on carrying thing board (14) and installing frame (16), be located the left both ends of X type and slide mounting respectively on carrying thing board (14) and installing frame (16), the locating hole has been seted up to the tank bottom of the spout of carrying thing board (14), locating pin (19) have been inserted in the locating hole, slider on the A pole that corresponds is run through in locating pin (19).

3. The gas-phase silane coupling experimental device according to claim 1, wherein: experiment table is including carrying thing board (14), two pairs of bracing pieces (15) and installing frame (16), installing frame (16) set firmly subaerial, two pairs of bracing pieces (15) are located the both sides of carrying thing board (14) respectively, every X type of constituteing by A pole and B pole to bracing piece (15), A pole and B pole are articulated each other, both ends that are located X type right side rotate respectively to be installed on carrying thing board (14) and installing frame (16), be located the left both ends of X type and slide mounting respectively on carrying thing board (14) and installing frame (16), the inboard of A pole articulates there is locating lever (17), stopping groove (18) have been seted up on the B pole, locating lever (17) card is gone into in stopping groove (18).

4. The gas-phase silane coupling experimental device according to claim 1, wherein: experiment table is including carrying thing board (14), two pairs of bracing pieces (15) and installing frame (16), installing frame (16) set firmly on the interior bottom of box (1), two pairs of bracing pieces (15) are located the both sides of carrying thing board (14) respectively, every X type of constituteing by A pole and B pole to bracing piece (15), the A pole passes through the bolt connection with the B pole, pinhole on the A pole is a plurality of with the pinhole on the B pole, the both ends of A pole are rotated respectively and are installed on carrying thing board (14) and installing frame (16), the one end of B pole is rotated and is installed on carrying thing board (14), the other end slidable mounting of B pole is on installing frame (16).

5. The gas-phase silane coupling experimental device according to claim 3, wherein: the retaining grooves (18) are distributed along the length direction of the B rod.

6. The gas-phase silane coupling experimental device according to claim 1, wherein: the reaction box (3) is made of transparent material.