CN217819483U - Nitrogen atmosphere type ultrapure water sampler - Google Patents
Nitrogen atmosphere type ultrapure water sampler Download PDFInfo
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- CN217819483U CN217819483U CN202221412860.2U CN202221412860U CN217819483U CN 217819483 U CN217819483 U CN 217819483U CN 202221412860 U CN202221412860 U CN 202221412860U CN 217819483 U CN217819483 U CN 217819483U
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Abstract
The utility model provides a nitrogen atmosphere type ultrapure water sampler can effectively wash the advantage of sampling bottle when having isolated air pollution, taking a sample, finally can make the ultrapure water of getting more be close actual quality of water, improves and detects the accuracy. It includes sampling case, sampling bottle, has seted up water inlet, delivery port, operation window on the sampling case, and operation window is used for putting into, taking out the sampling bottle and is used for connecting operation gloves, its characterized in that: the sampling box is internally provided with a perforated clapboard, the clapboard and the bottom of the sampling box are arranged at intervals and used for forming a water seal layer, the sampling box is also connected with a nitrogen inlet and an exhaust port, and the water outlet is connected with a trap.
Description
Technical Field
The utility model relates to a liquid sampler technical field specifically is a nitrogen atmosphere type ultrapure water sampler.
Background
Ultrapure water is widely used in semiconductor production, and the water quality of the ultrapure water has direct influence on the yield of products. The ultrapure water preparation system is provided with an online instrument to monitor water quality, detection indexes comprise resistivity, total organic matters, boron, silicon, dissolved oxygen, particles and the like, but in order to ensure the production safety of semiconductors, the ultrapure water preparation system also needs to periodically sample and inspect indexes such as metal ions, inorganic anions, bacteria and the like. However, the sampling process of the existing ultrapure water sampler is not standard, and air pollution or sampling bottle pollution is easily introduced, so that the detection result is inaccurate.
The patent (patent number: ZL 201220130408.7) of Beijing east photoelectric technology Limited company adopts an inverted bell-mouth bottleneck, so that a washing dead angle is avoided, the washing force of ultrapure water washing a sampling bottle is enhanced, the sampling success rate of ultrapure water is improved, but after the sampling bottle is filled with washing water, the bottleneck is small and difficult to flow out, the washing water is mixed with detection water, the detection water is polluted, and the detection precision is low; the patent (patent number: ZL 201920862319.3) of Xinjiang Xinneng special energy material detection center Limited company adopts a sampling bottle covered with an isolating membrane to prevent contact between ultrapure water and carbon dioxide in the sampling process, so that the detection accuracy is improved, but the sampling bottle cannot be washed by ultrapure water on line, so that the possibility of pollution of the sampling bottle exists; the patent (patent number: ZL 202120551773.4) of Xinjiang Changyuan research institute of Water science, inc. adopts a threaded connection mode to prevent ultrapure water from contacting with carbon dioxide in the sampling process, so that the detection accuracy is improved, but the sampling bottle cannot be effectively washed.
SUMMERY OF THE UTILITY MODEL
To the problem that current ultrapure water sampler easily pollutes, the utility model provides a ultrapure water sampler of nitrogen atmosphere type can effectively wash the advantage of sampling bottle when having isolated air pollution, taking a sample, finally can make the ultrapure water of getting more be close actual quality of water, improves and detects the accuracy.
The technical scheme is as follows: the utility model provides an ultrapure water sampler of nitrogen atmosphere type, its includes sampling box, sampling bottle, has seted up water inlet, delivery port, operation window on the sampling box, and operation window is used for putting into, taking out the sampling bottle and is used for connecting operation gloves, its characterized in that: the sampling box is internally provided with a perforated clapboard, the clapboard and the bottom of the sampling box are arranged at intervals and used for forming a water seal layer, the sampling box is also connected with a nitrogen inlet and an exhaust port, and the water outlet is connected with a trap.
Preferably, the water inlet is located the sample case top, and the delivery port is located the sample case bottom, and diaphragm valve is installed to water inlet department.
Preferably, the highest point of the trapway is level with the baffle.
Preferably, the nitrogen gas inlet is positioned at the upper part of one side of the sampling box, the exhaust port is positioned at the lower part of the opposite side of the nitrogen gas inlet, the exhaust port is higher than the highest point of the trap, and the pressure stabilizing valve is installed at the nitrogen gas inlet.
Preferably, a micro-pressure meter is also arranged in the sampling box.
Preferably, the operating window is located in the middle of the sampling box.
Has the beneficial effects that: 1. air pollution is isolated. The sampling box is filled with clean nitrogen by filling nitrogen into the nitrogen inlet, and a water seal layer can be formed at the bottom of the box after ultrapure water is introduced through the trap, so that the pollution of air to ultrapure water detection is effectively prevented.
2. Prevent the pollution of the sampling bottle. The operating handle cover that can connect through the operation window fully rinses the sample bottle before the sample, and the sparge water flows completely, prevents effectively that sample bottle self from polluting.
Drawings
FIG. 1 is a front view of the present invention;
FIG. 2 is a schematic view of the right side of the sampling chamber;
fig. 3 is a rear view of the sampling box.
Detailed Description
The nitrogen atmosphere type ultrapure water sampler as shown in fig. 1-3 comprises a sampling box 10 and a sampling bottle, wherein the sampling box 10 is provided with a water inlet 1, a water outlet 11 and an operation window 4, the operation window 4 is positioned in the middle of the sampling box 10, the diameter of the window is preferably 15 to 20cm, the window is used for placing and taking out the sampling bottle and is used for fixing an operation glove after the sampling bottle is placed or before the sampling bottle is taken out, an open-hole partition plate 5 (the opening rate is 10% to 20%, and the diameter of a small hole is 5 to 15mm) is arranged in the sampling box 10, the partition plate 5 and the bottom of the sampling box 10 are spaced at a distance of 5 to 10cm, the partition plate is used for forming a water seal layer 12 after ultrapure water is introduced, the sampling box 10 is further connected with a nitrogen inlet 3 and an exhaust port 8, a water trap 9 is connected to the water outlet 11, the height of the water trap 9 is preferably 5 to 10cm, and in order to enable the water level in the water seal layer 12 to be flush with the height of the partition plate 5, the highest point of the partition plate 5 is kept flush with the highest point of the water trap 9.
Specifically, water inlet 1 is located sampling case 10 tops, and delivery port 11 is located sampling case bottom, and the manual diaphragm valve 2 of polytetrafluoroethylene is installed to water inlet 1 department, and water inlet 1 connects to ultrapure water storage device, and the connecting tube is the polytetrafluoroethylene hose.
The nitrogen gas inlet 3 is positioned at the upper part of one side of the sampling box 10 and is connected with a clean nitrogen gas storage device, the nitrogen gas purity is not lower than 99.999 percent (volume) at the upper part of the front surface in the embodiment, the nitrogen gas pressure is 0.5 to 0.7MPa, the exhaust port 8 is positioned at the lower part of the opposite side of the nitrogen gas inlet 3, the exhaust port 8 is positioned at the lower part of the back surface in the embodiment, the exhaust port 8 is higher than the highest point of the trap 9, preferably 2 to 5cm higher than the highest point of the trap 9 so as to avoid water from being exhausted from the exhaust port 8, the pressure stabilizing valve 7 is arranged at the nitrogen gas inlet 3, the pressure stabilizing valve 7 is provided with the pressure of 20 to 50Kpa, the micro-pressure gauge 6 is further arranged in the sampling box 10, the range of the micro-pressure gauge is preferably 0 to 100Kpa, the pressure in the sampling box 10 is kept positive, and the nitrogen gas atmosphere in the sampling box 10 is ensured.
When the device is used for sampling, the first step is as follows: a sampling bottle is placed through the operation window 4, and the operation window 4 is closed and fixed by a butyronitrile glove.
The second step is that: connecting clean nitrogen to a nitrogen gas inlet 3, adjusting the pressure of a pressure stabilizing valve 7 to 20 to 50KPa, monitoring the pressure of the sampling box through a micro-pressure meter 6, ensuring the micro-positive pressure in the sampling box 10, discharging obvious gas from an exhaust port 8, and maintaining for 5 to 10min.
The third step: ultrapure water is connected to the water inlet 1, the polytetrafluoroethylene manual diaphragm valve 2 is opened, the sampling bottle is fully rinsed by the ultrapure water for the butyronitrile glove from the operation window 4 through the polytetrafluoroethylene hose, then sampling is carried out, the ultrapure water overflows and flows out, the partition plate 5 is penetrated, a water seal layer 12 is formed at the bottom of the box, and the ultrapure water flows out from the trap 9.
The fourth step: and after overflowing for 5 to 10min, enabling the detected water in the sampling bottle to be the same as the water quality of the ultrapure water, covering a bottle cap of the sampling bottle through the butyronitrile gloves from the operation window 4, closing the clean nitrogen and the ultrapure water, taking down the butyronitrile gloves, and taking out the sampling bottle.
To sum up, the utility model provides a nitrogen atmosphere type ultrapure water sampler has isolated air pollution, prevents advantages such as sampling bottle pollution, finally can make the ultrapure water of getting more be close actual quality of water, improves and detects the accuracy.
The above description is only a preferred embodiment of the present invention, but the scope of the present invention is not limited thereto, and any changes or substitutions that can be easily conceived by a person skilled in the art within the technical scope of the present invention should be covered within the scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the protection scope of the claims.
Claims (6)
1. The utility model provides an ultrapure water sampler of nitrogen atmosphere type, its includes sampling box, sampling bottle, water inlet, delivery port, operation window have been seted up on the sampling box, operation window is used for putting into, taking out the sampling bottle is and be used for connecting operation gloves, its characterized in that: the sampling box is characterized in that a perforated partition plate is arranged in the sampling box, the partition plate and the bottom of the sampling box are spaced to form a water seal layer, the sampling box is further connected with a nitrogen gas inlet and an exhaust port, and a trap is connected to the water outlet.
2. A nitrogen atmosphere type ultrapure water sampler according to claim 1, characterized in that: the water inlet is located sample case top, the delivery port is located sample case bottom, water inlet department installs the diaphragm valve.
3. A nitrogen atmosphere type ultrapure water sampler as recited in claim 1, wherein: the highest point of the trap is level with the baffle.
4. A nitrogen atmosphere type ultrapure water sampler according to any one of claims 1 to 3 wherein: the device comprises a sampling box, a nitrogen inlet, an exhaust port, a trap and a pressure stabilizing valve, wherein the nitrogen inlet is positioned at the upper part of one side of the sampling box, the exhaust port is positioned at the lower part of the opposite side of the nitrogen inlet, the exhaust port is higher than the highest point of the trap, and the pressure stabilizing valve is installed at the nitrogen inlet.
5. A nitrogen atmosphere type ultrapure water sampler according to claim 4 wherein: and a micro-pressure meter is also arranged in the sampling box.
6. A nitrogen atmosphere type ultrapure water sampler according to claim 1, characterized in that: the operation window is located in the middle of the sampling box.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221049442 | 2022-05-05 | ||
| CN2022210494421 | 2022-05-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN217819483U true CN217819483U (en) | 2022-11-15 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221412860.2U Active CN217819483U (en) | 2022-05-05 | 2022-06-08 | Nitrogen atmosphere type ultrapure water sampler |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN217819483U (en) |
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2022
- 2022-06-08 CN CN202221412860.2U patent/CN217819483U/en active Active
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