CN208076248U - A kind of pretreating device for detecting trace impurity in trichlorosilane - Google Patents
A kind of pretreating device for detecting trace impurity in trichlorosilane Download PDFInfo
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- CN208076248U CN208076248U CN201820272109.4U CN201820272109U CN208076248U CN 208076248 U CN208076248 U CN 208076248U CN 201820272109 U CN201820272109 U CN 201820272109U CN 208076248 U CN208076248 U CN 208076248U
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Abstract
The utility model is related to production of polysilicon intermediate product trichlorosilane defects inspecting pretreating device, more particularly to a kind of pretreating devices for detecting trace impurity in trichlorosilane.The pretreating device for detecting trace impurity in trichlorosilane provided in the embodiments of the present invention.Nitrogen (inert gas) enters sample bottle by air inlet pipe, purging volatilization is carried out to trichlorosilane, mixed gas is discharged by exhaust pipe, air inflow and capacity is adjusted in setting air inlet adjustment valve and exhaust regulating valve, realize nitrogen stablizes the stable discharge entered with mixed gas, it is stable, reduce the labor intensity of personnel.The electric heating cover to match with sample bottle is set and is electrically connected with control device, electric heating cover homogeneous heating and realization automatic start-stop shorten working hours, improve working efficiency.Sealing ring is set between bottle and bottle cap, not only ensure that leakproofness, but also is played the role of clean.
Description
Technical field
The utility model is related to production of polysilicon intermediate product trichlorosilane defects inspecting pretreating device, more particularly to one
Pretreating device of the kind for detecting trace impurity in trichlorosilane.
Background technology
Trichlorosilane is the intermediate product of improved Siemens production of polysilicon, be by being supervised to the detection of its impurity content
The entire production of control, and then ensure product quality.The detection of impurity content belongs to trace analysis in trichlorosilane, and technology requires height,
Sample preparation procedure is easy to be contaminated.Therefore, how to avoid polluting in sample handling processes, be preferably enriched with boron, phosphorus member
Element becomes the problem studied both at home and abroad.Trichlorosilane sample-pretreating method is varied, but there are no unified standards so far.
Standard No. is GB/T29056-2012《Measurement-electricity of silicon epitaxy trichlorosilane chemical analysis method impurity content
Feel coupled plasma mass》, clamp pot with platinum when introducing sample treatment in the method, and sample when volatilizing in open-like shape
Under state, the method may introduce impurity in sample long-time volatilization process, be had an impact to testing result, and before this
Testing result under treatment conditions is less reproducible, and stability is also bad.
Therefore, it to be not only preferably enriched with boron, phosphorus in sample pretreatment process, but also better safeguard measure is taken to keep away
Exempt to pollute.
Utility model content
To solve the above problem in the prior art, the purpose of this utility model is to provide one kind for detecting trichlorine hydrogen
The pretreating device of trace impurity in silicon.Solves the problems, such as easy to pollute, guarantor in the trace impurity analysis sample making course to sample
The reliability of analysis result is demonstrate,proved.
What the embodiments of the present invention were realized in：
A kind of pretreating device for detecting trace impurity in trichlorosilane comprising sample bottle, sample bottle include bottle
Body, bottle cap and the sealing ring being arranged between bottle and bottle cap；Multiple bottle holder for placing sample bottle, the setting of bottle holder bottom
There is gravity sensor, the electric heating cover to match with sample bottle is provided in bottle holder；Air inlet for being passed through from gas to sample bottle
Pipe, air inlet pipe are provided with air inlet switch valve and air inlet adjustment valve, and air inlet pipe is connected to sample bottle；For by the gas in sample bottle
The exhaust pipe of body discharge, exhaust pipe are provided with exhaust switch valve and exhaust regulating valve, and exhaust pipe is connected to sample bottle；Control dress
Set, control device is electrically connected with gravity sensor, and control device is electrically connected with electric heating cover, control device and air inlet switch valve with
And exhaust switch valve electrical connection；Control device is electrically connected with air inlet adjustment valve and exhaust regulating valve.
The pretreating device for detecting trace impurity in trichlorosilane provided in the embodiments of the present invention.Sample
Bottle is put into bottle holder, which is passed to control device by gravity sensor, control device activate to open air inlet switch valve and
Exhaust switch valve, control device start electric heating cover and are heated to sample bottle.Nitrogen (inert gas) is entered by air inlet pipe
Sample bottle carries out purging volatilization to trichlorosilane, and mixed gas is discharged by exhaust pipe, and air inlet adjustment valve is arranged and exhaust is adjusted
Air inflow and capacity is adjusted in valve, realizes the discharge of stablizing entered with mixed gas of stablizing of nitrogen, stable,
Reduce the labor intensity of personnel.The electric heating cover to match with sample bottle is set and is electrically connected with control device, electric heating cover
Homogeneous heating and realization automatic start-stop, shorten working hours, improve working efficiency.Sealing ring is set between bottle and bottle cap,
Not only it ensure that leakproofness, but also play the role of clean.What is provided in the embodiments of the present invention is used to detect trace in trichlorosilane
The pretreating device of amount impurity solves the problems, such as that the trace impurity of sample is analyzed and is easily stain in sample making course, ensure that analysis knot
The reliability of fruit works at the same time efficient, stable and high degree of automation.
In one embodiment of the utility model：
It is above-mentioned for detect the pretreating device of trace impurity in trichlorosilane to include pedestal, bottle holder is set on pedestal.
In one embodiment of the utility model：
It is above-mentioned for detect the pretreating device of trace impurity in trichlorosilane to further include upper bracket corresponding with pedestal,
Upper bracket offers bottle cap mouth corresponding with bottle cap；Upper bracket is connected with driving device, for driving upper bracket separate or leaning on
Nearly pedestal, driving device are electrically connected with control device；Air inlet pipe and exhaust pipe are the pipeline being opened on upper bracket, air inlet pipe
Air inlet be arranged in the edge of upper bracket, air inlet pipe is provided with air inlet switch valve and air inlet adjustment at bottle cap mouth
Valve；The exhaust outlet of exhaust pipe is arranged in the edge of upper bracket, exhaust pipe be provided at bottle cap mouth exhaust switch valve and
Exhaust regulating valve.
In one embodiment of the utility model：
Above-mentioned driving device is set as hydraulic cylinder.
In one embodiment of the utility model：
Above-mentioned bottle cap mouth is provided with sealing buckle close to sample bottle one end.
In one embodiment of the utility model：
The above-mentioned pretreating device for detecting trace impurity in trichlorosilane includes absorption plant, absorption plant and exhaust
The exhaust outlet of pipe connects.
In one embodiment of the utility model：
The above-mentioned pretreating device for detecting trace impurity in trichlorosilane includes inlet air flow gauge, inlet air flow gauge with
Air inlet pipe connects, for measuring the gas flow in air inlet pipe；Inlet air flow gauge is electrically connected with control device.
In one embodiment of the utility model：
The above-mentioned pretreating device for detecting trace impurity in trichlorosilane includes exhaust flow-meter, exhaust flow-meter with
Exhaust pipe connects, for measuring the gas flow in exhaust pipe；Exhaust flow-meter is electrically connected with control device.
In one embodiment of the utility model：
The above-mentioned pretreating device for detecting trace impurity in trichlorosilane includes inert gas tank, inert gas tank with
The air inlet of air inlet pipe connects.
In one embodiment of the utility model：
Above-mentioned sample bottle, air inlet pipe and exhaust pipe are all made of anti-corrosion acid resisting material and are made.
The advantageous effect of the utility model embodiment is：
The pretreating device for detecting trace impurity in trichlorosilane provided in the embodiments of the present invention.Sample
Bottle is put into bottle holder, which is passed to control device by gravity sensor, control device activate to open air inlet switch valve and
Exhaust switch valve, control device start electric heating cover and are heated to sample bottle.Nitrogen (inert gas) is entered by air inlet pipe
Sample bottle carries out purging volatilization to trichlorosilane, and mixed gas is discharged by exhaust pipe, and air inlet adjustment valve is arranged and exhaust is adjusted
Air inflow and capacity is adjusted in valve, realizes the discharge of stablizing entered with mixed gas of stablizing of nitrogen, stable,
Reduce the labor intensity of personnel.The electric heating cover to match with sample bottle is set and is electrically connected with control device, electric heating cover
Homogeneous heating and realization automatic start-stop, shorten working hours, improve working efficiency.Sealing ring is set between bottle and bottle cap,
Not only it ensure that leakproofness, but also play the role of clean.What is provided in the embodiments of the present invention is used to detect trace in trichlorosilane
The pretreating device of amount impurity solves the problems, such as that the trace impurity of sample is analyzed and is easily stain in sample making course, ensure that analysis knot
The reliability of fruit works at the same time efficient, stable and high degree of automation.
Description of the drawings
It is to be used attached to being needed in embodiment below for the clearer technical solution for illustrating the utility model embodiment
Figure is briefly described.It should be appreciated that the following drawings illustrates only the certain embodiments of the utility model, it is not construed as pair
The limitation of the scope of the utility model.To those skilled in the art, without creative efforts, Neng Gougen
Other accompanying drawings are obtained according to these attached drawings.
Fig. 1 is used to detect the pretreating device of trace impurity in trichlorosilane for what the utility model embodiment 1 provided
Overall structure diagram；
Fig. 2 is used to detect the pretreating device of trace impurity in trichlorosilane for what the utility model embodiment 1 provided
The structural schematic diagram of upper bracket and absorption plant；
Fig. 3 is used to detect the pretreating device of trace impurity in trichlorosilane for what the utility model embodiment 1 provided
The structural schematic diagram of sample bottle and pedestal；
Fig. 4 is used to detect the pretreating device of trace impurity in trichlorosilane for what the utility model embodiment 1 provided
The structural schematic diagram of sample bottle.
Icon：10- is used to detect the pretreating device of trace impurity in trichlorosilane；100- sample bottles；120- is sealed
Circle；200- bottle holder；220- pedestals；300- electric heating covers；400- upper brackets；410- air inlet pipe；412- air inlet switch valves；414- into
Gas port；416- air intake levers；420- exhaust pipes；422- exhaust switch valves；424- exhaust outlets；430- bottle cap mouths；500- absorption plants.
Specific implementation mode
To keep the purpose, technical scheme and advantage of the utility model embodiment clearer, below in conjunction with attached drawing, to this
Technical solution in utility model embodiment carries out clear, complete description.Obviously, described embodiment is the utility model
A part of the embodiment, instead of all the embodiments.
Therefore, this claimed practicality is not intended to limit newly to the detailed description of the embodiments of the present invention below
The range of type, but it is merely representative of the section Example of the utility model.Based on the embodiments of the present invention, this field is general
The every other embodiment that logical technical staff is obtained without creative efforts belongs to the utility model guarantor
The range of shield.
It should be noted that in the absence of conflict, feature in the embodiments of the present invention and embodiment and
Technical solution can be combined with each other.
It should be noted that：Similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined, then it further need not be defined and explained in subsequent attached drawing in a attached drawing.
In the description of the present invention, it should be noted that term " first ", " second " etc. are only used for distinguishing description,
It is not understood to indicate or imply relative importance.
Embodiment 1：
Fig. 1 to Fig. 4 is please referred to, the present embodiment provides a kind of pretreating devices for detecting trace impurity in trichlorosilane
10 comprising sample bottle 100, sample bottle 100 include bottle, bottle cap (not shown) and be arranged between bottle and bottle cap
Sealing ring 120；Multiple bottle holder 200 for placing sample bottle 100,200 bottom of bottle holder is provided with gravity sensor (in figure
It is not shown), the electric heating cover 300 to match with sample bottle 100 is provided in bottle holder 200；For being passed through gas to sample bottle 100
The air inlet pipe 410 of body, air inlet pipe 410 are provided with air inlet switch valve 412 and air inlet adjustment valve (not shown), air inlet pipe
410 are connected to sample bottle 100；For by the exhaust pipe 420 of the gas discharge in sample bottle 100, exhaust pipe 420 to be provided with exhaust
Switch valve 422 and exhaust regulating valve (not shown), exhaust pipe 420 are connected to sample bottle 100；Control device is (in figure not
Show), control device is electrically connected with gravity sensor, and control device is electrically connected with electric heating cover 300, control device and INO Intake Open
It closes valve 412 and exhaust switch valve 422 is electrically connected；Control device is electrically connected with air inlet adjustment valve and exhaust regulating valve.
In the present embodiment, the pretreating device 10 for detecting trace impurity in trichlorosilane includes pedestal 220, bottle holder
200 are set on pedestal 220.Bottle holder 200 is set on pedestal 220, convenient for the placement to sample bottle 100, convenient for arranging.Tool
Body, in the present embodiment, bottle holder 200 is specifically configured to the groove being opened on pedestal 220.It should be noted that here not
The concrete form of bottle holder 200 is defined, it is possible to understand that, it, can also be according to the need of user in other specific embodiments
It asks, sets bottle holder 200 to other structures, such as bottle holder 200 is convexly equipped on pedestal 220.Specifically, in the present embodiment,
It is opened up on pedestal 220 there are six bottle holder 200, six bottle holder 200 are arranged at two rows, do not arrange three bottle holder 200 of setting, multiple bottles
Seat 200 is equidistantly arranged.It should be noted that not being defined here to the particular number of bottle holder 200, it is possible to understand that
's.In other specific embodiments, can also according to the demand of user, by the quantity of bottle holder 200 be set as four, five or
Eight etc..Explanation is also needed to, also the specific arrangement mode of bottle holder 200 is not defined here, it is possible to understand that, at other
In specific embodiment, can also according to the demand of user, using other arrangement modes, such as bottle holder 200 be set at circular ring shape
It sets.
In the present embodiment, the pretreating device 10 for detecting trace impurity in trichlorosilane further includes and pedestal 220
Corresponding upper bracket 400, upper bracket 400 offer bottle cap mouth corresponding with bottle cap 430；Upper bracket 400 is connected with driving
Device (not shown), for driving upper bracket 400 separate or close to pedestal 220；Driving device is electrically connected with control device
It connects；Air inlet pipe 410 and exhaust pipe 420 are the pipeline being opened on upper bracket 400, and the setting of air inlet 414 of air inlet pipe 410 exists
The edge of upper bracket 400, air inlet pipe 410 are provided with air inlet switch valve 412 and air inlet adjustment valve at bottle cap mouth 430；
The exhaust outlet 424 of exhaust pipe 420 is arranged in the edge of upper bracket 400, the row of being provided at bottle cap mouth 430 of exhaust pipe 420
Exhaust switch valve 422 and exhaust regulating valve.Upper bracket 400 is set convenient for accepting air inlet pipe 410 and exhaust pipe 420, while just
It carries out the work in multiple sample bottles 100.Setting driving device, which is easy to implement, drives upper bracket 400 separate or close pedestal 220,
And then realize the connection of air inlet pipe 410 and exhaust pipe 420 and sample bottle 100.Air inlet 414 is being provided with air inlet switch
Valve 412 and air inlet adjustment valve；Exhaust pipe 420 is arranged with respect to exhaust outlet 424 is provided at bottle cap mouth 430 close to exhaust outlet 424
There are exhaust switch valve 422 and exhaust regulating valve, can effectively ensure that sample is not contaminated, to the air inlet pipe 410 of sample bottle 100
And exhaust pipe 420 individually automatically controls, and avoids cross-infection between each other.
Specifically, in the present embodiment, driving device is set as hydraulic cylinder.
In the present embodiment, bottle cap mouth 430 is provided with sealing buckle (not shown) close to 100 one end of sample bottle.If
Set sealing buckle, it is ensured that be fully sealed between upper bracket 400 and sample bottle 100, ensure sample in prolonged volatilization process
It is not contaminated, by 100 mouthfuls of sealings of sample bottle, when avoiding being passed through nitrogen (inert gas) in open sample bottle 100, volatilization
Trichlorosilane meets air, and a large amount of silica is made to be attached to 100 outer wall of sample bottle, and low boiling mixture content is high especially in material
When, analysis bottle inside and outside wall can have a large amount of silica crystalline.
In order to ensure that a large amount of mixed gas shot do not cause damages and pollute the environment to health, will mix
Gas imports absorption plant 500 by exhaust pipe 420.In the present embodiment, the preceding place for detecting trace impurity in trichlorosilane
It includes absorption plant 500 to manage device 10, and absorption plant 500 is connect with the exhaust outlet 424 of exhaust pipe 420.
In the present embodiment, the pretreating device 10 for detecting trace impurity in trichlorosilane includes inlet air flow gauge
(not shown), inlet air flow gauge are connect with air inlet pipe 410, for measuring the gas flow in air inlet pipe 410；Charge flow rate
Meter is electrically connected with control device.Inlet air flow gauge is set, and inlet air flow gauge is electrically connected with control device, is convenient for control device tune
Whole regulating valve makes the gas in air inlet pipe 410 be in metastable range, and then ensures that nitrogen is stablized and enter sample bottle
In 100.
In order to which gas preferably purges the trichlorosilane in sample bottle 100, in the present embodiment, air inlet pipe 410
100 one end of sample bottle is provided with air intake lever 416.
In the present embodiment, the pretreating device 10 for detecting trace impurity in trichlorosilane includes exhaust flow-meter
(not shown), exhaust flow-meter are connect with exhaust pipe 420, for measuring the gas flow in exhaust pipe 420；Extraction flow
Meter is electrically connected with control device.Exhaust flow-meter is set, and exhaust flow-meter is electrically connected with control device, is convenient for control device tune
Whole regulating valve makes the gas in exhaust pipe 420 be in metastable range, and then ensures that mixed gas stablizes discharge sample
Bottle 100.
In the present embodiment, the pretreating device 10 for detecting trace impurity in trichlorosilane includes inert gas tank
(not shown), inert gas tank are connect with the air inlet 414 of air inlet pipe 410.Inert gas tank is set, convenient for storage inertia
Gas is convenient for being passed through gas into sample bottle 100 in turn.
In the present embodiment, sample bottle 100, air inlet pipe 410 and exhaust pipe 420 are all made of anti-corrosion acid resisting material and are made.
Specifically, in the present embodiment, sample bottle 100, air inlet pipe 410 and exhaust pipe 420 are all made of the acidproof plastic material system of anti-corrosion
At.
In conclusion the pre-treatment for detecting trace impurity in trichlorosilane provided in the embodiments of the present invention
Device 10.Sample bottle 100 is put into bottle holder 200, which is passed to control device by gravity sensor, and control device startup is beaten
Drive exhaust switch valve 412 and exhaust switch valve 422 into, control device starts electric heating cover 300 and heated to sample bottle 100.
Nitrogen (inert gas) enters sample bottle 100 by air inlet pipe 410, carries out purging volatilization to trichlorosilane, mixed gas is by arranging
Tracheae 420 is discharged, and air inlet adjustment valve is arranged and air inflow and capacity is adjusted in exhaust regulating valve, realizes nitrogen
Stablize the discharge of stablizing entered with mixed gas, it is stable, reduce the labor intensity of personnel.Setting and 100 phase of sample bottle
It identical electric heating cover 300 and is electrically connected with control device, 300 homogeneous heating of electric heating cover and realizes automatic start-stop, shorten work
Make the time, improves working efficiency.Sealing ring 120 is set between bottle and bottle cap, not only ensure that leakproofness, but also play clean work
With.The pretreating device 10 for detecting trace impurity in trichlorosilane provided in the embodiments of the present invention solves examination
The problem of easily staiing in the trace impurity analysis sample making course of sample, ensure that the reliability of analysis result, work at the same time it is efficient,
Stable and high degree of automation.
Obviously, above-described embodiment of the utility model is used for the purpose of clearly illustrating the utility model example, and
It is not the restriction to the embodiment of the utility model.For those of ordinary skill in the art, in above description
On the basis of can also make other variations or changes in different ways.There is no need and unable to give all embodiments
It is exhaustive.All any modification, equivalent and improvement made within the spirit and principle of the present invention etc., should be included in
Within the protection domain of the utility model claims.
Claims (10)
1. a kind of pretreating device for detecting trace impurity in trichlorosilane, which is characterized in that including：
Sample bottle, the sample bottle include bottle, bottle cap and the sealing ring being arranged between the bottle and the bottle cap；
Multiple bottle holder for placing the sample bottle, the bottle holder bottom are provided with gravity sensor, are arranged in the bottle holder
There is the electric heating cover to match with the sample bottle；
Air inlet pipe for being passed through from gas to the sample bottle, the air inlet pipe are provided with air inlet switch valve and air inlet adjustment
Valve, the air inlet pipe are connected to the sample bottle；
For by the exhaust pipe of the gas discharge in the sample bottle, the exhaust pipe to be provided with exhaust switch valve and exhaust is adjusted
Valve is saved, the exhaust pipe is connected to the sample bottle；
Control device, the control device are electrically connected with the gravity sensor, the control device and electric heating cover electricity
Connection, the control device are electrically connected with the air inlet switch valve and the exhaust switch valve；The control device with it is described
Air inlet adjustment valve and exhaust regulating valve electrical connection.
2. the pretreating device according to claim 1 for detecting trace impurity in trichlorosilane, which is characterized in that institute
It includes pedestal to state the pretreating device for detecting trace impurity in trichlorosilane, and the bottle holder is set on the pedestal.
3. the pretreating device according to claim 2 for detecting trace impurity in trichlorosilane, which is characterized in that institute
It further includes upper bracket corresponding with the pedestal to state the pretreating device for detecting trace impurity in trichlorosilane, it is described on
Holder offers bottle cap mouth corresponding with the bottle cap；The upper bracket is connected with driving device, for driving the upper branch
Frame is separate or close to the pedestal, and the driving device is electrically connected with the control device；
The air inlet pipe and the exhaust pipe are the pipeline being opened on the upper bracket, the air inlet setting of the air inlet pipe
In the edge of upper bracket, the air inlet pipe is provided with the air inlet switch valve and described into controlled atmosphere at the bottle cap mouth
Save valve；The exhaust outlet of the exhaust pipe is arranged in the edge of upper bracket, and the exhaust pipe is provided at the bottle cap mouth
The exhaust switch valve and the exhaust regulating valve.
4. the pretreating device according to claim 3 for detecting trace impurity in trichlorosilane, which is characterized in that institute
It states driving device and is set as hydraulic cylinder.
5. the pretreating device according to claim 3 for detecting trace impurity in trichlorosilane, which is characterized in that institute
It states bottle cap mouth and described sample bottle one end is provided with sealing buckle.
6. the pretreating device according to claim 1 for detecting trace impurity in trichlorosilane, which is characterized in that institute
It includes absorption plant to state the pretreating device for detecting trace impurity in trichlorosilane, the absorption plant and the exhaust pipe
Exhaust outlet connection.
7. the pretreating device according to claim 1 for detecting trace impurity in trichlorosilane, which is characterized in that institute
It includes inlet air flow gauge to state the pretreating device for detecting trace impurity in trichlorosilane, the inlet air flow gauge with it is described into
Tracheae connects, for measuring the gas flow in the air inlet pipe；The inlet air flow gauge is electrically connected with the control device.
8. the pretreating device according to claim 1 for detecting trace impurity in trichlorosilane, which is characterized in that institute
It includes exhaust flow-meter to state the pretreating device for detecting trace impurity in trichlorosilane, the exhaust flow-meter and the row
Tracheae connects, for measuring the gas flow in the exhaust pipe；The exhaust flow-meter is electrically connected with the control device.
9. the pretreating device according to claim 1 for detecting trace impurity in trichlorosilane, which is characterized in that institute
It includes inert gas tank to state the pretreating device for detecting trace impurity in trichlorosilane, the inert gas tank with it is described into
The air inlet of tracheae connects.
10. the pretreating device according to claim 1 for detecting trace impurity in trichlorosilane, which is characterized in that
The sample bottle, the air inlet pipe and the exhaust pipe are all made of anti-corrosion acid resisting material and are made.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820272109.4U CN208076248U (en) | 2018-02-26 | 2018-02-26 | A kind of pretreating device for detecting trace impurity in trichlorosilane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201820272109.4U CN208076248U (en) | 2018-02-26 | 2018-02-26 | A kind of pretreating device for detecting trace impurity in trichlorosilane |
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| Publication Number | Publication Date |
|---|---|
| CN208076248U true CN208076248U (en) | 2018-11-09 |
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ID=64039286
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| CN201820272109.4U Active CN208076248U (en) | 2018-02-26 | 2018-02-26 | A kind of pretreating device for detecting trace impurity in trichlorosilane |
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| CN (1) | CN208076248U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114324213A (en) * | 2021-12-30 | 2022-04-12 | 宁波南大光电材料有限公司 | Method and kit for determining ultra-trace metal impurities in high-silicon matrix solvent |
-
2018
- 2018-02-26 CN CN201820272109.4U patent/CN208076248U/en active Active
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114324213A (en) * | 2021-12-30 | 2022-04-12 | 宁波南大光电材料有限公司 | Method and kit for determining ultra-trace metal impurities in high-silicon matrix solvent |
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| CP03 | Change of name, title or address |
Address after: 810007 No.1, Jinsi Road, Chengdong economic and Technological Development Zone, Xining City, Qinghai Province Patentee after: Asia silicon (Qinghai) Co.,Ltd. Address before: 810007 Qinghai city of Xining Province Economic and Technological Development Zone No. 1 gold Guilu Patentee before: ASIA SILICON (QINGHAI) Co.,Ltd. |
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| CP03 | Change of name, title or address |