CN214667945U - Sampling device of chlorosilane - Google Patents
Sampling device of chlorosilane Download PDFInfo
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- CN214667945U CN214667945U CN202120776982.9U CN202120776982U CN214667945U CN 214667945 U CN214667945 U CN 214667945U CN 202120776982 U CN202120776982 U CN 202120776982U CN 214667945 U CN214667945 U CN 214667945U
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Abstract
The utility model relates to a sampling device of chlorosilane, include: a container having a hollow interior, the container having a displacement chamber and a sampling chamber disposed in an up-down manner; the sampling port is arranged in the sampling chamber; the inserting part for inserting the sampling needle is arranged at the top of the replacement chamber and the sampling chamber; the first pipeline comprises a first inlet end communicated with the inert gas and a first outlet end for discharging gas, the first pipeline is communicated with the sampling chamber, and the first inlet end and the first outlet end are positioned on two opposite sides of the sampling chamber; and the second pipeline comprises a second inlet end communicated with the inert gas and a second outlet end for discharging gas, the second pipeline is communicated with the replacement chamber, and the second inlet end and the second outlet end are positioned on two opposite sides of the replacement chamber. The utility model discloses replace the air of sampling room, replacement indoor portion, avoided in sampling process, replacement process because chlorosilane and moisture contact take place hydrolysis reaction and influence the problem of the analysis degree of accuracy.
Description
Technical Field
The utility model relates to a chlorosilane field indicates a sampling device of chlorosilane especially.
Background
Chlorosilanes are widely used as raw materials for silicone resins, surface treatment agents, silicon wafers, and raw materials for polycrystalline silicon used in solar cells. The quality of chlorosilane is particularly important, and an important parameter for representing the quality index of chlorosilane is purity. Purity analysis methods there are many analysis methods and analysis equipment at home and abroad, and it is important to prevent the chlorosilane samples from being polluted in the sampling process for purity analysis.
Chlorosilane itself is a very readily accessible material to hydrolysis reactions with moisture. At present, most manufacturers adopt a glass bottle or a PFA bottle to sample on site, open a chlorosilane liquid valve on site, collect samples by using the glass bottle or the PFA bottle, obtain the samples in a short time, close the samples by using a cover, bring the samples back to an analysis chamber, transfer the samples to a small sample injection micro-bottle by using a dropper, and sample injection analysis by using a sample injection needle.
However, the chlorosilane is more or less contacted with moisture in the air in the whole sampling process and has the influence of human factors, so that a large analysis error is brought to the result of gas chromatography analysis.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to overcome prior art's defect, provide a sampling device of chlorosilane, solve among the prior art problem that more or less contact moisture and the human factor influence in the air of chlorosilane in the sampling process.
The technical scheme for realizing the purpose is as follows:
the utility model provides a sampling device of chlorosilane, include:
a container having a hollow interior, said container having a displacement chamber and a sampling chamber disposed in an up-down arrangement;
the sampling port is arranged in the sampling chamber;
the inserting part is used for inserting the sampling needle and is arranged at the top parts of the replacement chamber and the sampling chamber;
the first pipeline comprises a first inlet end communicated with inert gas and a first outlet end for discharging gas, the first pipeline is communicated with the sampling chamber, and the first inlet end and the first outlet end are positioned on two opposite sides of the sampling chamber;
and the second pipeline comprises a second inlet end communicated with the inert gas and a second outlet end for discharging gas, the second pipeline is communicated with the replacement chamber, and the second inlet end and the second outlet end are positioned at two opposite sides of the replacement chamber.
The utility model discloses sampling device of chlorosilane's further improvement lies in, and first pipeline includes:
a first tube having a first inlet end and a first outlet end, communicating with the sampling chamber;
locate second valve, third valve, fourth valve of first body, the second valve is close to first inlet end, the third valve be located the second valve with between the sampling chamber, the fourth valve be located the sampling chamber with between the first outlet end.
The utility model discloses sampling device of chlorosilane's further improvement lies in, still including the sampling pipe that has the introduction port, the sampling pipe communicate in first body, and intercommunication department are located the second valve with between the third valve, the sampling pipe is equipped with and is close to the first valve of introduction port.
The utility model discloses sampling device of chlorosilane's further improvement lies in, and the second pipeline includes:
a second tube having a second inlet end and a second outlet end, communicating with said displacement chamber;
and the fifth valve is close to the second inlet end, the sixth valve is positioned between the fifth valve and the displacement chamber, and the seventh valve is positioned between the displacement chamber and the second outlet end.
The utility model discloses sampling device of chlorosilane's further improvement lies in, still including communicate in the fluid-discharge tube of sampling chamber bottom, the fluid-discharge tube has the row mouth, the fluid-discharge tube is equipped with the eighth valve.
The sampling device of the chlorosilane of the utility model is further improved in that,
the top of the replacement chamber is opened and is blocked by an embedded first rubber plug;
the top of the sampling chamber is opened and is plugged by an embedded second rubber plug;
the first rubber stopper and the second rubber stopper are provided with the inserting part.
The utility model discloses sampling device of chlorosilane's further improvement lies in, inert gas is nitrogen gas.
The utility model discloses sampling device of chlorosilane's further improvement lies in, the height of replacement room is 30mm ~ 50 mm.
The utility model discloses sampling device of chlorosilane's further improvement lies in, the volume of container is 100ml ~ 1000 ml.
The utility model discloses sampling device of chlorosilane's further improvement lies in, first pipeline with the diameter of second pipeline is 6mm ~ 15 mm.
The utility model discloses sampling device of chlorosilane's beneficial effect:
the utility model discloses replace sampling chamber, the inside air of replacement room, avoided in sampling process, replacement process because chlorosilane and moisture contact take place hydrolysis and influence the problem of the analysis degree of accuracy, can prevent that chlorosilane from taking a sample, advance the pollution that the in-process brought with natural environment, artificial environmental contact, whole process is accomplished in the closed utensil after the nitrogen gas replacement, has improved the credibility of sample, the accuracy of analysis.
Drawings
Fig. 1 is a schematic structural diagram of the sampling device for chlorosilane of the present invention.
Detailed Description
The invention will be further explained with reference to the drawings and the specific embodiments.
Referring to fig. 1, a schematic structural diagram of a sampling device for chlorosilane according to the present invention is shown. As shown in fig. 1, the sampling device of chlorosilane of the present invention comprises:
a container 10 having a hollow interior, the container 10 having a replacement chamber 11 and a sampling chamber 12 provided in the upper and lower sides thereof;
a sample inlet arranged in the sampling chamber 12;
an insertion part for inserting the sampling needle 13, which is provided on the top of the replacement chamber 11 and the sampling chamber 12;
a first pipeline 20, including a first inlet end communicated with the inert gas and a first outlet end for discharging gas, the first pipeline 20 being communicated with the sampling chamber 12, and the first inlet end and the first outlet end being located at two opposite sides of the sampling chamber 12;
and a second pipeline 30 including a second inlet end communicated with the inert gas and a second outlet end for discharging the gas, wherein the second pipeline 30 is communicated with the displacement chamber 11, and the second inlet end and the second outlet end are positioned at two opposite sides of the displacement chamber 11.
Referring to fig. 1, the container 10 has a bottle-shaped structure with an open top, and is preferably made of PFA. Typically, the volume of the container 10 is from 100ml to 1000 ml. The large volume of the container causes waste of samples and easy pollution to the environment, and the small volume of the container causes insufficient sampling amount and confirmation of repeatability and reproducibility of sample analysis results.
Further, the top of the replacement chamber 11 is opened and blocked by the first rubber stopper 50 embedded therein; the top of the sampling chamber 12 is opened and is sealed by an embedded second rubber plug 51; first rubber buffer 50 and second rubber buffer 51 all have and insert the portion of establishing, and when being convenient for sample needle 13 was vertically inserted and is established, can vertically run through first rubber buffer 50 and second rubber buffer 51 to get into sampling chamber 12 and take a sample. In this embodiment, the displacement chamber 11 is a cylindrical plexiglass displacement chamber.
Specifically, by adding the replacement chamber 11, the air remaining in the sampling needle 13 is replaced by the inert gas nitrogen to remove the air in the sampling needle 13. The sampling needle 13 performs the pumping of the needle rod in the replacement chamber 11 after being inserted into the first rubber plug 50 of the replacement chamber 11 to discharge the air remained in the needle tube and the needle head of the sampling needle 13, thereby avoiding the influence of the moisture in the air brought by the sampling needle 13 during sampling; after the replacement in the replacement chamber 11 is completed, the sampling needle 13 is further moved downward to insert the second rubber stopper 51 in the lower part of the replacement chamber 11 to perform the sampling work inside the sampling chamber 12.
Further, the height of the replacement chamber 11 is 30mm to 50 mm. Specifically, too large a height of the replacement chamber 11 may cause the length of the sampling needle 13 to be insufficient to be inserted into the sampling chamber 12 below the replacement chamber 11; too small a height of the displacement chamber 11 may result in insufficient displacement of residual air inside the needle tube of the injection needle 13, thereby affecting the analysis accuracy of the sample.
As a preferred embodiment of the sampling device of the chlorosilane modules of the present invention, the first pipeline 20 includes: a first tube 21 having a first inlet end and a first outlet end, communicating with the sampling chamber 12; and a second valve 22, a third valve 23 and a fourth valve 24 which are arranged on the first pipe body 21, wherein the second valve 22 is close to the first inlet end, the third valve 23 is positioned between the second valve 22 and the sampling chamber 12, and the fourth valve 24 is positioned between the sampling chamber 12 and the first outlet end. The opening and closing state of the pipeline is controlled by the second valve 22, the third valve 23 and the fourth valve 24.
In this embodiment, the first tube 21 includes two unit sections diagonally communicating with opposite sides of the upper portion of the sampling chamber 12. In order to facilitate connection with the sampling chamber 12 and convenience in operation, the diameter of the first tube 21 is 6mm to 15 mm.
Specifically, the first inlet end of first body 21 and the gas bottle 70 intercommunication that holds inert gas to replace in leading-in sampling chamber 12 of inert gas through first body 21, realize the inside remaining air of discharge line and container, prevent the influence of the moisture of air to the sample, and the first outlet end of first body 21 through the sampling chamber 12 opposite side communicates in negative pressure harm removal pipeline 71, with the waste gas of discharging in the harm removal pipeline 71 of negative pressure, collect and handle waste gas. In this example, the inert gas is nitrogen.
As a preferred embodiment of the sampling device of chlorosilane of the present invention, the present invention further includes a sample inlet tube 60 having a sample inlet, the sample inlet tube 60 is connected to the first tube 21 and the connection portion is located between the second valve 22 and the third valve 23, and the sample inlet tube 60 is provided with a first valve 61 close to the sample inlet.
Specifically, the first valve 61 is opened, and chlorosilane is transported into the sample inlet pipe 60 through the sample inlet, and a part of the first pipe 21 is introduced into the sampling chamber 12 for collection.
As a preferred embodiment of the sampling device of the chlorosilane modules of the present invention, the second pipeline 30 includes: a second tubular body 31 having a second inlet end and a second outlet end, communicating with the displacement chamber 11; a fifth valve 32, a sixth valve 33, and a seventh valve 34 disposed in the second tube 31, the fifth valve 35 being disposed near the second inlet end, the sixth valve 33 being disposed between the fifth valve 32 and the displacement chamber 11, and the seventh valve 34 being disposed between the displacement chamber 11 and the second outlet end. The opening and closing state of the pipeline is controlled by the fifth valve 32, the sixth valve 33 and the seventh valve 34.
In this embodiment, the second pipe 31 includes two unit sections horizontally communicating with opposite sides of the replacement room 11. In order to facilitate connection with the sampling chamber 12 and convenience of operation, the diameter of the second pipeline is 6 mm-15 mm.
As a preferred embodiment of the sampling device of chlorosilane of the present invention, the present invention further comprises a drain pipe 40 connected to the bottom of the sampling chamber 12, wherein the drain pipe 40 has a drain outlet, and the drain pipe 40 is provided with an eighth valve 41.
The following specifically explains the operation of the sampling device of chlorosilane of the utility model:
opening the fourth valve; on the premise that the first valve is closed, the second valve and the third valve are opened in sequence, nitrogen is introduced from the first inlet end of the first pipeline for purging, and the inside of the sampling chamber is fully replaced (generally for about 10 times, and dew point detection and judgment can be performed) by closing and opening the fourth valve, so that the replacement operation of the inside of the sampling chamber is completed. And after the replacement is finished, closing the second valve, the third valve and the fourth valve in sequence.
Opening the seventh valve; the fifth valve and the sixth valve are opened to introduce nitrogen gas into the second inlet end of the second pipeline for purging, and the inside of the exchange chamber is replaced with nitrogen gas (generally, about 10 times, and dew point detection and judgment can be performed) by closing and opening the seventh valve, so that the replacement operation of the inside of the exchange chamber is completed. And after the replacement is finished, closing the seventh valve, the sixth valve and the fifth valve in sequence, so that a certain amount of nitrogen is reserved in the replacement chamber, and the air of the sampling needle inserted in the replacement chamber can be replaced later.
Then, the sampling device which completes the replacement operation performs the following sampling operations:
and opening the fourth valve, controlling the pressure in the sampling chamber, opening the first valve and the third valve for sampling, wherein the sampling amount is about 70-90% of the volume, and closing the first valve, the third valve and the fourth valve after sampling.
The sampling needle is inserted into the first rubber plug of the replacement chamber, and after the air replacement of the needle tube and the needle head is performed (generally, 3 times or more) by using the nitrogen in the replacement chamber, the sampling needle is continuously inserted into the sampling chamber to perform sampling.
After the sample is analyzed, the eighth valve is opened under the condition of introducing nitrogen or other inert gases through the connection with the third valve pipeline, the residual chlorosilane liquid is discharged to the recoverable device, and the liquid discharging and replacing operation of the sampling chamber is completed through the purging of nitrogen.
The utility model discloses sampling device of chlorosilane's beneficial effect does:
the utility model discloses replace sampling chamber, the inside air of replacement room, avoided in sampling process, replacement process because chlorosilane and moisture contact take place hydrolysis and influence the problem of the analysis degree of accuracy, can prevent that chlorosilane from taking a sample, advance the pollution that the in-process brought with natural environment, artificial environmental contact, whole process is accomplished in the closed utensil after the nitrogen gas replacement, has improved the credibility of sample, the accuracy of analysis.
The present invention has been described in detail with reference to the embodiments shown in the drawings, and those skilled in the art can make various modifications to the present invention based on the above description. Therefore, certain details of the embodiments should not be construed as limitations of the invention, which are intended to be covered by the following claims.
Claims (10)
1. A chlorosilane sampling device is characterized by comprising:
a container having a hollow interior, said container having a displacement chamber and a sampling chamber disposed in an up-down arrangement;
the sampling port is arranged in the sampling chamber;
the inserting part is used for inserting the sampling needle and is arranged at the top parts of the replacement chamber and the sampling chamber;
the first pipeline comprises a first inlet end communicated with inert gas and a first outlet end for discharging gas, the first pipeline is communicated with the sampling chamber, and the first inlet end and the first outlet end are positioned on two opposite sides of the sampling chamber;
and the second pipeline comprises a second inlet end communicated with the inert gas and a second outlet end for discharging gas, the second pipeline is communicated with the replacement chamber, and the second inlet end and the second outlet end are positioned at two opposite sides of the replacement chamber.
2. A chlorosilane sampling apparatus as claimed in claim 1, wherein the first line comprises:
a first tube having a first inlet end and a first outlet end, communicating with the sampling chamber;
locate second valve, third valve, fourth valve of first body, the second valve is close to first inlet end, the third valve be located the second valve with between the sampling chamber, the fourth valve be located the sampling chamber with between the first outlet end.
3. The apparatus for sampling chlorosilane of claim 2, further comprising a sample inlet tube having a sample inlet, the sample inlet tube being in communication with the first tube and being in communication between the second valve and the third valve, the sample inlet tube having a first valve proximate the sample inlet.
4. A chlorosilane sampling apparatus as claimed in claim 1, wherein the second line comprises:
a second tube having a second inlet end and a second outlet end, communicating with said displacement chamber;
and the fifth valve is close to the second inlet end, the sixth valve is positioned between the fifth valve and the displacement chamber, and the seventh valve is positioned between the displacement chamber and the second outlet end.
5. The chlorosilane sampling device of claim 1, further comprising a drain pipe communicated with the bottom of the sampling chamber, wherein the drain pipe is provided with a drain port, and the drain pipe is provided with an eighth valve.
6. A chlorosilane sampling device as claimed in claim 1,
the top of the replacement chamber is opened and is blocked by an embedded first rubber plug;
the top of the sampling chamber is opened and is plugged by an embedded second rubber plug;
the first rubber stopper and the second rubber stopper are provided with the inserting part.
7. A chlorosilane sampling apparatus as claimed in claim 1, wherein the inert gas is nitrogen.
8. A chlorosilane sampling apparatus of claim 1, wherein the height of the displacement chamber is 30mm to 50 mm.
9. A chlorosilane sampling device as claimed in claim 1, wherein the container has a volume of 100ml to 1000 ml.
10. The chlorosilane sampling device of claim 1, wherein the first pipeline and the second pipeline have a diameter of 6mm to 15 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120776982.9U CN214667945U (en) | 2021-04-15 | 2021-04-15 | Sampling device of chlorosilane |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202120776982.9U CN214667945U (en) | 2021-04-15 | 2021-04-15 | Sampling device of chlorosilane |
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| Publication Number | Publication Date |
|---|---|
| CN214667945U true CN214667945U (en) | 2021-11-09 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202120776982.9U Active CN214667945U (en) | 2021-04-15 | 2021-04-15 | Sampling device of chlorosilane |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117330388A (en) * | 2023-11-30 | 2024-01-02 | 是高(北京)智能科技有限公司 | Pretreatment system for chlorosilane impurity detection |
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2021
- 2021-04-15 CN CN202120776982.9U patent/CN214667945U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117330388A (en) * | 2023-11-30 | 2024-01-02 | 是高(北京)智能科技有限公司 | Pretreatment system for chlorosilane impurity detection |
| CN117330388B (en) * | 2023-11-30 | 2024-01-26 | 是高(北京)智能科技有限公司 | Pretreatment system for chlorosilane impurity detection |
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