CN218509671U - Vacuum-pumping device - Google Patents
Vacuum-pumping device Download PDFInfo
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- CN218509671U CN218509671U CN202222318753.XU CN202222318753U CN218509671U CN 218509671 U CN218509671 U CN 218509671U CN 202222318753 U CN202222318753 U CN 202222318753U CN 218509671 U CN218509671 U CN 218509671U
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- evacuation
- pipeline
- valve
- vacuumizing
- vacuum pump
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Abstract
The utility model discloses an evacuating device, include: a first evacuation unit for carrying out the evacuation to loading chamber, a second evacuation unit for carrying out the evacuation to unloading chamber, and be used for communicateing the intercommunication pipeline of first evacuation unit and second evacuation unit, first evacuation unit includes the first pneumatic valve that connects gradually by the evacuation pipeline, first isolation valve, and first vacuum pump, second evacuation unit includes the second pneumatic valve that connects gradually by the evacuation pipeline, isolated valve of second, and second vacuum pump, the one end of intercommunication pipeline is linked together with the evacuation pipeline between first pneumatic valve and the first isolation valve, the other end and the evacuation pipeline between second pneumatic valve and the isolated valve of second of intercommunication pipeline are linked together. Through using this evacuating device, can avoid current because of the vacuum pump breaks down and leads to the unable problem of operation of whole equipment platform.
Description
Technical Field
The utility model relates to an evacuation field, concretely relates to evacuating device.
Background
In the existing equipment platform of the plasma decoupling equipment or the plasma processing equipment, a loading cavity and an unloading cavity of the existing equipment platform are respectively and correspondingly provided with a vacuum pump, and each vacuum pump is independently used when the loading cavity or the unloading cavity is vacuumized.
Disclosure of Invention
The embodiment of the application provides a vacuum pumping device to solve the problem that the whole equipment platform cannot operate due to the fact that a vacuum pump breaks down at present.
The embodiment of the application provides an evacuating device, includes: the first vacuumizing unit is used for vacuumizing the loading cavity, the second vacuumizing unit is used for vacuumizing the unloading cavity, and the communication pipeline is used for communicating the first vacuumizing unit with the second vacuumizing unit, the first vacuumizing unit comprises a first pneumatic valve, a first isolation valve and a first vacuum pump which are sequentially connected through a vacuumizing pipeline, the second vacuumizing unit comprises a second pneumatic valve, a second isolation valve and a second vacuum pump which are sequentially connected through a vacuumizing pipeline, one end of the communication pipeline is communicated with the first pneumatic valve and the vacuumizing pipeline between the first isolation valves, and the other end of the communication pipeline is communicated with the second pneumatic valve and the vacuumizing pipeline between the second isolation valves.
Optionally, the gas used inside the loading chamber and the unloading chamber is the same.
Optionally, the first vacuum pumping unit further comprises a first pressure gauge, and the first pressure gauge is arranged between the first pneumatic valve and the first isolation valve.
Optionally, the second vacuum unit further includes a second pressure gauge, and the second pressure gauge is disposed between the second pneumatic valve and the second isolation valve.
Optionally, the communication pipe is a corrugated pipe.
Compared with the prior art, the utility model has the advantages of it is following:
the evacuating device that this application embodiment provided includes: a first evacuation unit for carrying out the evacuation to loading chamber, a second evacuation unit for carrying out the evacuation to unloading chamber, and be used for communicateing the intercommunication pipeline of first evacuation unit and second evacuation unit, first evacuation unit includes the first pneumatic valve that connects gradually by the evacuation pipeline, first isolation valve, and first vacuum pump, second evacuation unit includes the second pneumatic valve that connects gradually by the evacuation pipeline, isolated valve of second, and second vacuum pump, the one end of intercommunication pipeline is linked together with the evacuation pipeline between first pneumatic valve and the first isolation valve, the other end and the evacuation pipeline between second pneumatic valve and the isolated valve of second of intercommunication pipeline are linked together. This evacuating device is through addding first isolated valve and second isolated valve on the evacuation pipeline that loading chamber and uninstallation chamber correspond at present respectively to add the intercommunication pipeline between above-mentioned two evacuation pipelines, can promote evacuation efficiency when loading the second vacuum pump that the first vacuum pump that the chamber corresponds or the chamber corresponds of uninstallation normally work, and can be when loading the first vacuum pump that the chamber corresponds or the second vacuum pump that the chamber corresponds of uninstallation breaks down, through the closure of adjusting first isolated valve or second isolated valve, in order to realize the sharing of vacuum pump, thereby guarantee equipment platform normal operating.
Drawings
FIG. 1 is a schematic structural diagram of a vacuum extractor provided in an embodiment of the present application;
reference is made to the accompanying drawings in which:
the device comprises a loading cavity 1, an unloading cavity 2, a first pneumatic valve 3, a second pneumatic valve 4, a first pressure gauge 5, a second pressure gauge 6, a first vacuum pump 7, a second vacuum pump 8, a first isolation valve 9, a second isolation valve 10, a communication pipeline 11, a first vacuumizing unit 100 and a second vacuumizing unit 200
Detailed Description
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The present invention can be implemented in many different ways than those herein described and one skilled in the art can do so without departing from the spirit and scope of the present invention, which is not limited to the specific implementations disclosed below.
For a vacuum pumping scenario of an equipment platform of an existing plasma decoupling device or plasma processing device, in order to solve a problem that the whole equipment platform cannot operate due to a failure of a vacuum pump, an embodiment of the present application provides a vacuum pumping device, please refer to fig. 1 to understand the embodiment, and fig. 1 is a schematic structural diagram of the vacuum pumping device provided in this embodiment.
As shown in fig. 1, the vacuum extractor provided in this embodiment includes: the vacuum-pumping device comprises a first vacuum-pumping unit 100 for vacuumizing a loading cavity 1, a second vacuum-pumping unit 200 for vacuumizing an unloading cavity 2 and a communication pipeline 11 for communicating the first vacuum-pumping unit 100 with the second vacuum-pumping unit 200, wherein the gases used in the loading cavity 1 and the unloading cavity 2 are the same.
The first vacuum pumping unit 100 further comprises a first pressure gauge 5, wherein the first pressure gauge 5 is arranged between the first pneumatic valve 3 and the first isolation valve 9 and is used for measuring the pressure on one side of the first vacuum pumping unit.
The second vacuum pumping unit 200 further includes a second pressure gauge 6, and the second pressure gauge 6 is disposed between the second air-operated valve 4 and the second isolation valve 10, and is used for measuring a pressure at one side of the second vacuum pumping unit.
The vacuum-pumping device provided by the embodiment can be used in the vacuum-pumping process of the loading chamber and the unloading chamber of equipment with a plurality of loading chambers and unloading chambers, such as nitrogen plasma decoupling equipment. The working principle of the nitrogen plasma decoupling device is as follows: and generating high-density nitrogen plasma by adopting an inductive coupling plasma mode, diffusing the high-density nitrogen plasma to the surface of the wafer gate oxide layer through surface potential, and doping nitrogen into the silicon oxide film. In the process, the wafer needs to be transmitted, and the process of transmitting the wafer needs to be realized by depending on the loading cavity and the unloading cavity, which specifically comprises the following steps: the loading chamber and the unloading chamber achieve the purpose of transferring the wafer by constantly changing the pressure state (vacuum/atmosphere), wherein the loading chamber is used for transferring the wafer to the transfer module, and the unloading chamber transfers the wafer from the transfer module to the atmosphere. The loading chamber and the unloading chamber can be replaced with each other under the support of software.
One end of the communicating pipeline is communicated with the vacuumizing pipeline between the first pneumatic valve and the first isolation valve, the other end of the communicating pipeline is communicated with the vacuumizing pipeline between the second pneumatic valve and the second isolation valve, the vacuum pumps can be shared in the vacuumizing process of the loading cavity and the unloading cavity, for example, when the loading cavity is vacuumized, the first pneumatic valve 3, the first isolation valve 9 and the second isolation valve 10 are opened, the second pneumatic valve is closed, the communicating pipeline 11 is connected with the vacuumizing pipelines of the loading cavity 1 and the unloading cavity 2, the first vacuum pump 7 and the second vacuum pump 8 vacuumize simultaneously, and the vacuumizing speed of the loading cavity 1 can be accelerated; when the first vacuum pump 7 is disabled due to a fault, the first isolation valve 9 is closed, the evacuation pipeline corresponding to the unloading chamber 2 is connected through the communication pipeline 11, and the loading chamber 1 is evacuated by the second vacuum pump 8. Similarly, when the unloading cavity is vacuumized, the second pneumatic valve 4, the first isolation valve 9 and the second isolation valve 10 are opened, the first pneumatic valve 3 is closed, the communication pipeline 11 is connected with the vacuumizing pipelines of the loading cavity 1 and the unloading cavity 2, and the first vacuum pump 7 and the second vacuum pump 8 are vacuumized simultaneously, so that the vacuumizing speed of the unloading cavity 2 can be accelerated; when the second vacuum pump 8 is disabled due to a fault, the second isolation valve 10 is closed, the evacuation pipe corresponding to the loading chamber 1 is connected through the communication pipe 11, and the unloading chamber 1 is evacuated by the first vacuum pump 7.
The utility model provides an evacuating device is including being used for carrying out the first evacuation unit of evacuation to loading chamber, a second evacuation unit for carrying out the evacuation to uninstallation chamber, and be used for communicateing the intercommunication pipeline of first evacuation unit and second evacuation unit, first evacuation unit includes the first pneumatic valve that connects gradually by the evacuation pipeline, first isolation valve, and first vacuum pump, second evacuation unit includes the second pneumatic valve that connects gradually by the evacuation pipeline, the isolation valve of second, and the second vacuum pump, the one end and the evacuation pipeline between first pneumatic valve and the first isolation valve of intercommunication pipeline are linked together, the other end and the evacuation pipeline between second pneumatic valve and the isolation valve of second of intercommunication pipeline are linked together. This evacuating device is through addding first isolated valve and second isolated valve respectively on the evacuation pipeline that current loading chamber and uninstallation chamber correspond, and add the intercommunication pipeline between above-mentioned two evacuation pipelines, can promote evacuation efficiency when loading the first vacuum pump that the chamber corresponds or the second vacuum pump that the chamber corresponds of uninstallation normally works, and can be when loading the first vacuum pump that the chamber corresponds or the second vacuum pump that the chamber corresponds of uninstallation breaks down, through the closure of adjusting first isolated valve or second isolated valve, in order to realize the sharing of vacuum pump, thereby guarantee equipment platform normal operating.
For example, when the loading cavity is vacuumized, the first pneumatic valve 3, the first isolation valve 9 and the second isolation valve 10 are opened, the second pneumatic valve is closed, the communication pipeline 11 is connected with the vacuumizing pipelines of the loading cavity 1 and the unloading cavity 2, the first vacuum pump 7 and the second vacuum pump 8 are vacuumized simultaneously, and the vacuumizing speed of the loading cavity 1 can be accelerated; when the first vacuum pump 7 is disabled due to a fault, the first isolation valve 9 is closed, the corresponding evacuation pipe of the unloading chamber 2 is connected through the communication pipe 11, and the loading chamber 1 is evacuated by the second vacuum pump 8. Similarly, when the unloading cavity is vacuumized, the second pneumatic valve 4, the first isolation valve 9 and the second isolation valve 10 are opened, the first pneumatic valve 3 is closed, the communication pipeline 11 is connected with the vacuumizing pipelines of the loading cavity 1 and the unloading cavity 2, and the first vacuum pump 7 and the second vacuum pump 8 are vacuumized simultaneously, so that the vacuumizing speed of the unloading cavity 2 can be accelerated; when the second vacuum pump 8 is disabled due to a fault, the second isolation valve 10 is closed, the evacuation pipe corresponding to the loading chamber 1 is connected through the communication pipe 11, and the unloading chamber 1 is evacuated by the first vacuum pump 7.
It should be noted that the above-mentioned preferred embodiments of the present invention are disclosed herein, but the present invention is not limited thereto, and that various changes and modifications can be made by those skilled in the art without departing from the spirit and scope of the present invention.
Claims (5)
1. An evacuation device, comprising: the first vacuumizing unit is used for vacuumizing the loading cavity, the second vacuumizing unit is used for vacuumizing the unloading cavity, and the communication pipeline is used for communicating the first vacuumizing unit with the second vacuumizing unit, the first vacuumizing unit comprises a first pneumatic valve, a first isolation valve and a first vacuum pump which are sequentially connected through a vacuumizing pipeline, the second vacuumizing unit comprises a second pneumatic valve, a second isolation valve and a second vacuum pump which are sequentially connected through a vacuumizing pipeline, one end of the communication pipeline is communicated with the first pneumatic valve and the vacuumizing pipeline between the first isolation valves, and the other end of the communication pipeline is communicated with the second pneumatic valve and the vacuumizing pipeline between the second isolation valves.
2. The evacuation device of claim 1, wherein the same gas is used inside the loading chamber and the unloading chamber.
3. The evacuation device of claim 1, wherein the first evacuation unit further comprises a first pressure gauge disposed between the first pneumatic valve and a first isolation valve.
4. The evacuation device of claim 1, wherein the second evacuation unit further comprises a second pressure gauge disposed between the second pneumatic valve and a second isolation valve.
5. The evacuation device of claim 1, wherein the communication conduit is a bellows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222318753.XU CN218509671U (en) | 2022-08-31 | 2022-08-31 | Vacuum-pumping device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222318753.XU CN218509671U (en) | 2022-08-31 | 2022-08-31 | Vacuum-pumping device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218509671U true CN218509671U (en) | 2023-02-21 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222318753.XU Active CN218509671U (en) | 2022-08-31 | 2022-08-31 | Vacuum-pumping device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218509671U (en) |
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2022
- 2022-08-31 CN CN202222318753.XU patent/CN218509671U/en active Active
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