CN218462213U

CN218462213U - Clamping jaw device for substrate conveying

Info

Publication number: CN218462213U
Application number: CN202221628531.1U
Authority: CN
Inventors: 佘奕
Original assignee: JIAXING JINGYAN INTELLIGENT EQUIPMENT TECHNOLOGY CO LTD
Current assignee: JIAXING JINGYAN INTELLIGENT EQUIPMENT TECHNOLOGY CO LTD
Priority date: 2022-06-28
Filing date: 2022-06-28
Publication date: 2023-02-10
Anticipated expiration: 2032-06-28

Abstract

The utility model relates to a chip detects and handles technical field, discloses a base plate removes and send clamping jaw device, including sharp drive unit and clamping jaw unit, sharp drive unit drive clamping jaw unit carries out linear motion, the clamping jaw unit is including setting up the fixed block on the slider on sharp drive unit, two cylinder block and a pivot about the front end of fixed block is connected set up first cylinder on the lower cylinder block, set up the second cylinder on the last cylinder block, the pivot sets up the place ahead at two cylinder block, set up punch holder and lower plate in the pivot, the front end of punch holder is last clamping jaw, the front end of lower plate is the lower clamping jaw, when the rear end of punch holder and lower plate is turned by first cylinder and second cylinder respectively, the punch holder folds to the centre with the lower clamping jaw, carries out the centre gripping to the base plate. The utility model discloses the realization is to the two-way centre gripping of base plate, the volume of equipment that has significantly reduced to the precision that can realize the clamping jaw is adjusted.

Description

Clamping jaw device for substrate conveying

Technical Field

The utility model relates to a chip detects and handles and equips technical field, especially relates to a base plate removes and send clamping jaw device.

Background

In a semiconductor back-end sealing apparatus, a substrate needs to be transported. Most of the current substrate transport mechanisms use an electromagnet type of gripper. The electro-magnet is single-acting on the market at present, and the clamping jaw add to hold only can be singly adding, and the effect of transport is not good, and the debugging degree of difficulty increases moreover, and the electro-magnet of double-acting needs the customization, and the cost is more expensive.

A cylinder clamping jaw mechanism (patent number: CN 201720343344) of a Chinese patent semiconductor packaging machine discloses a clamping jaw mechanism, wherein an upper clamping jaw is driven to move by a cylinder and is matched with a fixed lower clamping jaw to complete clamping movement. The clamping jaw is also single clamping, so that the substrate is deviated when being clamped, and the clamping force at two sides of the substrate is different, so that the clamping effect is not ideal.

SUMMERY OF THE UTILITY MODEL

The utility model aims at solving the above problem, providing a base plate removes and send clamping jaw device, realize the two-way centre gripping to the base plate, the volume of equipment that has significantly reduced to the precision that can realize the clamping jaw is adjusted.

The utility model adopts the technical proposal that:

a clamping jaw device for carrying a substrate is characterized by comprising a linear driving unit and a clamping jaw unit, wherein the linear driving unit drives the clamping jaw unit to perform linear motion, the clamping jaw unit comprises a fixed block arranged on a sliding block on the linear driving unit, the front end of the fixed block is connected with an upper cylinder seat, a lower cylinder seat and a rotating shaft, a first cylinder is arranged on the lower cylinder seat, a second cylinder is arranged on the upper cylinder seat, the rotating shaft is arranged in front of the two cylinder seats, an upper clamping plate and a lower clamping plate are arranged on the rotating shaft, the rear end of the upper clamping plate is matched with the first cylinder and is pushed by a first cylinder piston to turn upwards, the rear end of the lower clamping plate is matched with the second cylinder and is pushed by a second cylinder piston to turn downwards, the front end of the upper clamping plate is an upper clamping jaw, the front end of the lower clamping plate is a lower clamping jaw, and when the rear ends of the upper clamping plate and the lower clamping plate are respectively driven by the first cylinder and the second cylinder, the upper clamping jaw and the lower clamping jaw are folded towards the middle to clamp jaw to clamp the substrate.

Further, the two cylinder blocks are formed on a special-shaped block, the special-shaped block comprises a connecting portion at the rear end and a rotating shaft hole at the front end, the connecting portion is fixedly connected with the fixing block, the rotating shaft is arranged in the rotating shaft hole, and the upper cylinder block and the lower cylinder block are formed on the left side and the right side of the special-shaped block respectively.

Furthermore, the rear ends of the upper clamping plate and the lower clamping plate are provided with tension springs.

Furthermore, the two tension springs are respectively arranged on two sides of the middle position of the upper clamping plate and the lower clamping plate.

Furthermore, the upper clamping plate and the lower clamping plate are matched with a cylinder piston in position and are provided with connecting holes, the cylinder piston is arranged in the connecting holes through a jackscrew, and the maximum jacking height of the cylinder piston is adjusted through height adjustment of the jackscrew.

Furthermore, the upper clamping jaw can be detachably arranged at the front end of the upper clamping plate, and the lower clamping jaw can be detachably arranged at the front end of the lower clamping plate.

Furthermore, the side edges of the upper clamping plate and the lower clamping plate are provided with sensor supports, optical fiber sensors are arranged on the sensor supports, and the optical fiber sensors are located on the same straight line of the clamping positions of the upper clamping jaw and the lower clamping jaw.

Further, the sensor support is arranged on the side of the special-shaped seat.

Further, the linear driving unit comprises a linear motor stator installed on the motor installation plate, the sliding block is a rotor connection plate for installing a linear motor rotor, and the linear motor stator realize linear driving of the sliding block.

Furthermore, the number of the sliding blocks is multiple, each sliding block is connected with one clamping jaw unit, and the clamping jaw units carry the substrate.

The beneficial effects of the utility model are that:

(1) The double cylinders have double functions and perform bidirectional clamping force on the substrate;

(2) The abrasion of the base plate and the clamping jaw is reduced;

(3) The structure is smaller, and the occupied space is less;

(4) The clamping force clamping accuracy of the clamping jaw can be accurately adjusted.

Drawings

FIG. 1 is a schematic perspective view of the present invention;

FIG. 2 is a perspective view of a jaw unit;

FIG. 3 is a schematic perspective view of the upper clamping plate of the clamping jaw unit after being transparent;

FIG. 4 is a schematic perspective view of a lower plate of the jaw unit after being transparentized;

FIG. 5 is a schematic perspective view of the special-shaped seat;

FIG. 6 is a schematic perspective view of another perspective of the profile base;

FIG. 7 is a schematic sectional view of the position of the rotating shaft;

FIG. 8 is a sectional view of the connecting position of the piston rod of the cylinder and the clamping plate;

FIG. 9 is a schematic view of the tension spring connected with the upper and lower clamping plates at the rear end of the special-shaped seat.

The reference numbers in the drawings are respectively:

1. a linear drive unit; a jaw unit;

3. a linear motor; 4, sliding blocks;

5. a fixed block; 6, a lower cylinder seat;

7. an upper cylinder seat; 8, a rotating shaft;

9. a first cylinder; 10. A second cylinder;

11. an upper splint; 12, a lower splint;

13. an upper clamping jaw; a lower jaw;

15. a substrate; a profiled seat;

17. a connecting portion; 18, a rotating shaft hole;

19. a sensor holder; an optical fiber sensor;

21. carrying out top thread; a tension spring.

Detailed Description

The following describes in detail a specific embodiment of the substrate transport gripper apparatus according to the present invention with reference to the drawings.

Referring to fig. 1, the utility model discloses a base plate removes and send clamping jaw device includes linear drive unit 1 and clamping jaw unit 2, linear drive unit 1 drive clamping jaw unit 2 carries out linear motion, linear drive unit 1 is installed on the runner mounting panel, linear drive unit 1 is including installing linear electric motor 3 on the motor mounting panel, set up the track on the runner mounting panel, set up slider 4 on the track, slider 4 is connected with linear electric motor 3's active cell, for installing linear electric motor 3's active cell connecting plate, linear electric motor 3's stator and linear electric motor 3's active cell realize the linear drive of slider 4.

Referring to fig. 2, 3 and 4, the clamping jaw unit 2 includes a fixing block 5 disposed on a slider 4 on the linear driving unit 1, the front end of the fixing block 5 is connected to an upper cylinder seat, a lower cylinder seat and a rotating shaft 8, the lower cylinder seat 6 is provided with a first cylinder 9, the upper cylinder seat 7 is provided with a second cylinder 10, the rotating shaft 8 is disposed in front of the two cylinder seats, the rotating shaft 8 is provided with an upper clamping plate 11 and a lower clamping plate 12, the rear end of the upper clamping plate 11 is matched with the first cylinder 9 and is pushed by a piston of the first cylinder 9 to turn upwards, the rear end of the lower clamping plate 12 is matched with the second cylinder 10 and is pushed by a piston of the second cylinder 10 to turn downwards, the front end of the upper clamping plate 11 is an upper clamping jaw 13, the front end of the lower clamping plate 12 is a lower clamping jaw 14, and when the rear ends of the upper clamping plate 11 and the lower clamping plate 12 are respectively pushed by the first cylinder 9 and the second cylinder 10, the upper clamping jaw 13 and the lower clamping jaw 14 are folded towards the middle to clamp the base plate 15 to clamp.

The upper clamping jaw 13 is detachably arranged at the front end of the upper clamping plate 11, and the lower clamping jaw 14 is detachably arranged at the front end of the lower clamping plate 12. Different sizes of upper jaw 13 and lower jaw 14 may be exchanged to accommodate different substrate 15 grips.

Referring to fig. 5 and 6, two cylinder seats are formed on a special-shaped seat 16, the special-shaped seat 16 comprises a connecting part 17 at the rear end and a rotating shaft hole 18 at the front end, the connecting part 17 is fixedly connected with the fixed block 5, the rotating shaft 8 is arranged in the rotating shaft hole 18, and the left side and the right side of the special-shaped seat 16 are respectively provided with an upper cylinder seat and a lower cylinder seat. The shaped seat 16 is integrally formed with a plurality of mounting holes.

Referring to fig. 2, the sensor bracket 19 is arranged on the side of the upper clamping plate 11 and the lower clamping plate 12, the optical fiber sensor 20 is arranged on the sensor bracket 19, and the optical fiber sensor 20 is positioned on the same straight line of the clamping positions of the upper clamping jaw 13 and the lower clamping jaw 14. The sensor bracket 19 is fixed on the side of the profiled seat 16 by fasteners.

Referring to fig. 7, the rotating shaft 8 is installed in a rotating shaft hole 18 at the front end of the special-shaped seat 16, the front ends of the upper clamping plate 11 and the lower clamping plate 12 are sleeved on the rotating shaft 8, and the two ends are locked through nuts.

Referring to fig. 8, the upper and

lower clamping plates

11, 12 are provided with connecting holes at positions matched with the cylinder piston, the cylinder piston is arranged in the connecting hole through a jackscrew 21, and the maximum jacking height of the cylinder piston is adjusted through height adjustment of the jackscrew 21.

Referring to fig. 9, the rear ends of the upper and

lower jaws

11 and 12 are provided with a tension spring 22. Two tension springs 22 are respectively arranged at two sides of the middle position of the upper clamping plate 11 and the lower clamping plate 12. When the two cylinders retract the pistons, the upper clamping jaw 13 and the lower clamping jaw 14 are reset rapidly through the tension of the tension spring 22. Two tension springs 22 penetrate through the rear end through holes of the special-shaped seats 16. The rear ends of the upper clamping jaw 13 and the lower clamping jaw 14 are respectively provided with a hook of a tension spring 22.

The linear driving unit 1 can be provided with a plurality of clamping jaw units 2, one or a plurality of substrates 15 can be clamped and conveyed at the same time, the stator of the linear motor 3 of the linear driving unit 1 is shared, and each clamping jaw unit 2 can realize horizontal movement by using one mover.

The utility model discloses a clamping jaw device carries out the process that base plate 15 sent and removes as follows:

the first air cylinder 9 and the second air cylinder 10 work to withdraw the pistons, the first clamping jaw and the second clamping jaw are slowly opened to enable the clamping jaws to be opened to a preset opening degree, the linear driving unit 1 moves the clamping jaw unit 2 to the position of the substrate 15 to enable the two clamping jaws to be located between the upper surface and the lower surface of the substrate 15, the two air cylinders eject the pistons to enable the two clamping jaws to clamp the upper surface and the lower surface of the substrate 15, the clamping force is preset and is determined by the ejection distance of the pistons, and after clamping, the linear motor 3 of the linear driving unit 1 drives the rotor to move to enable the clamping jaw unit 2 to clamp the substrate 15 and move to the preset position. The cylinders are then retracted to open the jaws and release the substrate 15.

The above is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of improvements and decorations can be made without departing from the principle of the present invention, and these improvements and decorations should also be regarded as the protection scope of the present invention.

Claims

1. A substrate carrying clamping jaw device is characterized in that: the clamping jaw unit comprises a fixed block arranged on a sliding block on the linear driving unit, the front end of the fixed block is connected with an upper cylinder seat, a lower cylinder seat and a rotating shaft, a first cylinder is arranged on the lower cylinder seat, a second cylinder is arranged on the upper cylinder seat, the rotating shaft is arranged in front of the two cylinder seats, an upper clamping plate and a lower clamping plate are arranged on the rotating shaft, the rear end of the upper clamping plate is matched with the first cylinder and is pushed by a first cylinder piston to turn upwards, the rear end of the lower clamping plate is matched with the second cylinder and is pushed by a second cylinder piston to turn downwards, the front end of the upper clamping plate is an upper clamping jaw, the front end of the lower clamping plate is a lower clamping jaw, and when the rear ends of the upper clamping plate and the lower clamping plate are respectively turned by the first cylinder and the second cylinder, the upper clamping jaw and the lower clamping jaw are folded towards the middle to clamp a substrate.

2. The substrate transport clamping jaw device according to claim 1, characterized in that: the two cylinder seats are formed on one special-shaped seat, the special-shaped seat comprises a connecting portion at the rear end and a rotating shaft hole at the front end, the connecting portion is fixedly connected with the fixing block, the rotating shaft is arranged in the rotating shaft hole, and the upper cylinder seat and the lower cylinder seat are formed on the left side and the right side of the special-shaped seat respectively.

3. The substrate handling jaw apparatus according to claim 2, characterized in that: and the rear ends of the upper clamping plate and the lower clamping plate are provided with tension springs.

4. The substrate handling jaw apparatus according to claim 3, characterized in that: the two tension springs are respectively arranged on two sides of the middle position of the upper clamping plate and the lower clamping plate.

5. The substrate handling jaw apparatus according to claim 1, characterized in that: the upper clamping plate and the lower clamping plate are matched with the air cylinder piston in position and are provided with connecting holes, the air cylinder piston is arranged in the connecting holes through jackscrews, and the maximum jacking height of the air cylinder piston is adjusted through height adjustment of the jackscrews.

6. The substrate handling jaw apparatus according to claim 1, characterized in that: the upper clamping jaw is detachably arranged at the front end of the upper clamping plate, and the lower clamping jaw is detachably arranged at the front end of the lower clamping plate.

7. The substrate handling jaw apparatus according to claim 2, characterized in that: the side edges of the upper clamping plate and the lower clamping plate are provided with sensor supports, optical fiber sensors are arranged on the sensor supports, and the optical fiber sensors are located on the same straight line of the clamping positions of the upper clamping jaw and the lower clamping jaw.

8. The substrate handling jaw apparatus according to claim 7, characterized in that: the sensor support is arranged on the side of the special-shaped seat.

9. The substrate handling jaw apparatus according to any one of claims 1 to 8, characterized in that: the linear driving unit comprises a linear motor stator installed on a motor installation plate, the sliding block is a rotor connection plate for installing a linear motor rotor, and the linear motor stator realize linear driving of the sliding block.

10. The substrate transport clamping jaw device according to claim 9, wherein: the clamping jaw unit is connected with the base plate, and the clamping jaw unit is connected with the base plate.