CN218459029U - Tail gas treatment device for polycrystalline silicon slag slurry process - Google Patents
Tail gas treatment device for polycrystalline silicon slag slurry process Download PDFInfo
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- CN218459029U CN218459029U CN202221970285.8U CN202221970285U CN218459029U CN 218459029 U CN218459029 U CN 218459029U CN 202221970285 U CN202221970285 U CN 202221970285U CN 218459029 U CN218459029 U CN 218459029U
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- tail gas
- hollow shaft
- liquid
- motor
- chamber
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- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 title claims abstract description 11
- 239000002002 slurry Substances 0.000 title claims abstract description 9
- 239000002893 slag Substances 0.000 title abstract description 4
- 239000007788 liquid Substances 0.000 claims abstract description 34
- 238000003756 stirring Methods 0.000 claims abstract description 33
- 238000006386 neutralization reaction Methods 0.000 claims abstract description 21
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 15
- 239000007921 spray Substances 0.000 claims abstract description 11
- 230000007062 hydrolysis Effects 0.000 claims description 27
- 238000006460 hydrolysis reaction Methods 0.000 claims description 27
- 238000000926 separation method Methods 0.000 claims description 14
- 239000004744 fabric Substances 0.000 claims description 8
- 229920005591 polysilicon Polymers 0.000 claims description 6
- 238000007789 sealing Methods 0.000 claims description 6
- 238000005516 engineering process Methods 0.000 claims description 4
- 239000013049 sediment Substances 0.000 claims description 4
- 239000007787 solid Substances 0.000 claims description 3
- 230000003472 neutralizing effect Effects 0.000 claims description 2
- 239000007789 gas Substances 0.000 abstract description 53
- 239000000428 dust Substances 0.000 abstract description 40
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 abstract description 11
- 229910000041 hydrogen chloride Inorganic materials 0.000 abstract description 11
- IXCSERBJSXMMFS-UHFFFAOYSA-N hydrogen chloride Substances Cl.Cl IXCSERBJSXMMFS-UHFFFAOYSA-N 0.000 abstract description 11
- 239000000779 smoke Substances 0.000 abstract description 4
- 150000001335 aliphatic alkanes Chemical class 0.000 abstract description 3
- 238000002156 mixing Methods 0.000 abstract description 3
- 238000005507 spraying Methods 0.000 abstract description 2
- 239000003054 catalyst Substances 0.000 description 8
- 239000005046 Chlorosilane Substances 0.000 description 6
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 6
- 239000000463 material Substances 0.000 description 4
- 239000000376 reactant Substances 0.000 description 4
- 239000002912 waste gas Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 239000001257 hydrogen Substances 0.000 description 3
- 229910052739 hydrogen Inorganic materials 0.000 description 3
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 2
- 244000309464 bull Species 0.000 description 2
- 238000004090 dissolution Methods 0.000 description 2
- 238000011010 flushing procedure Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 239000003595 mist Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 150000002431 hydrogen Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 230000008929 regeneration Effects 0.000 description 1
- 238000011069 regeneration method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
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Abstract
The utility model discloses a polycrystalline silicon slag slurry process tail gas processing apparatus relates to the tail gas treatment field. The utility model discloses a room and neutralization chamber hydrolyze, the internally mounted of room of hydrolysising has the hollow shaft, the top of hollow shaft is connected with communicating pipe through rotary joint, the surface of hollow shaft is provided with the shower respectively, break up pole and stirring leaf, the utility model discloses a be provided with the hollow shaft, the suction pump, the stirring leaf, shower and break up the pole, tail gas through removing dust fills into in liquid alkane liquid, the hollow shaft is rotatory to be made the stirring leaf rotatory, the stirring leaf drives liquid and tail gas and carries out the intensive mixing, partial tail gas can the up-motion, the suction pump takes out communicating pipe with liquid, again from the shower blowout, the hollow shaft is rotatory to be made the shower rotate and sprays, break up the pole and can break up the liquid that sprays and be water smoke, and then improved the area of spraying, the gas that the liquid smoke that sprays can rise once more mixes, has improved the sufficiency that hydrogen chloride dissolves.
Description
Technical Field
The utility model relates to a tail gas treatment field specifically is polycrystalline silicon sediment thick liquid technology tail gas processing apparatus.
Background
Polycrystalline silicon is a raw material for preparing semiconductor devices and solar cells, is a cornerstone of the global electronic industry and photovoltaic industry, the most important method for preparing polycrystalline silicon is the Siemens method at present, a large amount of waste gas is generated in the production process of polycrystalline silicon, the main components of the waste gas comprise hydrogen, hydrogen chloride and chlorosilane, and the waste gas must be treated because the waste gas is discharged to pollute the environment.
The prior art discloses an application number is CN 201921827613.7's an environment-friendly tail gas processing apparatus for polycrystalline silicon production, including hydrolysis tank and condensing tower, the top of hydrolysis tank is provided with the condensing tower, the left side of condensing tower is provided with the intake pipe, the amount intermediate position of hydrolysis tank inside is provided with the bull stick, a plurality of first pipelines have been seted up to the equidistance from the top down to the bull stick, and seted up a plurality of gas pockets on first pipeline, this utility model is provided with the condensing tower in the top of hydrolysis tank, and is provided with first pipeline in the hydrolysis tank, cools down the processing to tail gas in the condensing tower to let in microthermal tail gas to in the hydrolysis tank, utilize the liquid chlorosilane in the hydrolysis tank to dissolve the hydrogen chloride in the tail gas completely, make tail gas and liquid chlorosilane fully contact through first pipeline, improved the dissolution efficiency of hydrogen chloride, hydrogen and hydrogen chloride separate completely, the treatment effect of tail gas is better.
But can smuggle the dust secretly in tail gas, the dust of enrichment blocks up this tail gas processing apparatus's pipeline easily, the efficiency of tail gas treatment has been influenced, secondly the device fills tail gas to the hydrolysis indoor, make tail gas hydrogen chloride can be dissolved in liquid chlorosilane through the stirring, but the tail gas of complete dissolution can drift out and break away from out the liquid level, and then make the mode of hydrolysis abundant inadequately, secondly, the device is adding the catalyst and is carrying out the neutralization reaction, the device stirring vane only drives the solution and is the vortex form rotation, solution and catalyst itself do not have obvious effective mixing, and then the neutralization effect has been reduced, the treatment effect of tail gas has been influenced.
SUMMERY OF THE UTILITY MODEL
Based on this, the utility model aims at providing a polycrystalline silicon sediment thick liquid technology tail gas processing apparatus to solve inconvenient interception and the not enough technical problem of tail gas treatment of dust.
In order to achieve the above object, the utility model provides a following technical scheme: polycrystalline silicon sediment thick liquid technology tail gas processing apparatus, including hydrolysis chamber and neutralization chamber, the internally mounted of hydrolysis chamber has the hollow shaft, the top of hollow shaft is connected with communicating pipe through rotary joint, the surface of hollow shaft is provided with the shower respectively, breaks up pole and stirring leaf, the internally mounted of hydrolysis chamber has the suction pump, the outlet end of suction pump is linked together through raceway and communicating pipe, the internally mounted of neutralization chamber has the drive shaft, the surface of drive shaft is fixed with cloth dish, stirring plate and second initiative awl tooth respectively, the inner wall of neutralization chamber is fixed with the mount, the internally mounted of mount has the connecting axle, the one end of connecting axle is connected with the driven awl tooth of second, the surface of connecting axle is provided with turns over the stirring board, one side of hydrolysis chamber is connected with solid-gas separation subassembly through the breather pipe, solid-gas separation subassembly is including the separator box, the inside of separator box is provided with closing plate and through-hole board, install the dust bag between closing plate and the through-hole board, the axis of rotation is installed at the through-hole top, the bottom of axis of rotation is connected with the sprocket, the surface of chain is provided with the chain wheel, the outer surface of axis of rotation is connected with through the bump ball through the connecting rope.
Furthermore, an air pump is arranged on one side of the separation box, and the output end of the air pump is connected with a blowback pipe extending into the separation box.
By adopting the technical scheme, the air pump carries out back flushing on the dust filter bag through the back flushing pipe, so that the dust filter bag can be thoroughly cleaned, and the recycling of the dust filter bag is realized.
Furthermore, a third motor is installed on the inner wall of the separation box, and the output end of the third motor is connected with the end part of the rotating shaft.
Through adopting above-mentioned technical scheme, the third motor can provide power for the axis of rotation, and the third motor is rotatory promptly to make the axis of rotation rotatory.
Furthermore, a first motor is installed at the top of the hydrolysis chamber, the output end of the first motor is connected with a first driving bevel gear, a first driven bevel gear is arranged on the outer surface of the hollow shaft, and the first driving bevel gear is meshed with the first driven bevel gear.
Through adopting above-mentioned technical scheme, first motor is rotatory to make first initiative awl tooth rotatory to this makes first driven awl tooth rotatory, makes the hollow shaft rotatory then.
Furthermore, a second motor and a feed inlet are installed at the top of the neutralization chamber, a sealing cover is arranged at the top of the feed inlet, and the output end of the second motor is connected with a driving shaft.
Through adopting above-mentioned technical scheme, sealed lid avoids gaseous follow charge door discharge, and the second motor rotation can make the drive shaft rotatory.
Furthermore, one end of the communicating pipe is communicated with the neutralizing chamber, and two groups of valves are arranged on the outer surface of the communicating pipe.
Through adopting above-mentioned technical scheme, after the completion of hydrolysising, the staff opens and closes a set of valve, then opens another set of valve, and then makes liquid enter into the inside of neutralization chamber.
To sum up, the utility model discloses mainly have following beneficial effect:
1. the utility model discloses a be provided with solid gas separation subassembly, before handling tail gas, tail gas is filled into to the separator box, the great dust of granule drops downwards in the tail gas, and less dust and tail gas can the upward movement, the dust bag separates the dust in the tail gas, and then can reach and intercept the dust, be convenient for retrieve the dust, after using for a period, the surface of dust bag can adhere to a layer of dust, then the staff starts the third motor, the third motor rotation makes axis of rotation and sprocket rotation, so that make the multiunit axis of rotation rotatory, and then make the connecting rope drive the collision ball rotatory, the collision ball rotation can collide dust bag, and then can shake the attached dust, avoid dust bag jam and influence the air output, after finishing using, the air pump carries out the blowback to dust bag through the blowback pipe, and then can thoroughly clear up dust bag, the recycle of dust bag has been realized;
2. the utility model discloses a be provided with the hollow shaft, the suction pump, the stirring leaf, the shower and break up the pole, tail gas through removing dust fills into in liquid alkane liquid, the hollow shaft is rotatory to be makeed the stirring leaf rotatory, the stirring leaf drives liquid and tail gas and carries out the intensive mixing, partial tail gas can the up-motion, the suction pump takes out liquid communicating pipe, again from the shower blowout, the hollow shaft is rotatory to be made the shower rotate and sprays, break up the pole and can break up the liquid that sprays and be water smoke, and then improved and sprayed the area, the gas that the liquid smoke that sprays can rise once more mixes, the sufficiency that hydrogen chloride dissolves has been improved.
3. The utility model discloses a be provided with the cloth dish, second initiative awl tooth, the driven awl tooth of second, the connecting axle stirs the board with stirring, the staff adds reactant and catalyst on the cloth dish, the cloth dish rotates can be with the even cloth of reactant and catalyst in with indoor, the drive shaft is rotatory to make second initiative awl tooth rotatory, make this that the driven awl tooth of second drives the connecting axle rotatory, the connecting axle is rotatory to be made to stir the board and to stir from top to bottom, and stir the board and control to liquid and stir, make liquid and catalyst can fully react fast, and then the hydrogen chloride that will dissolve in liquid chlorosilane separates, and the treatment effeciency is improved.
Drawings
FIG. 1 is a schematic view of the present invention;
fig. 2 is a schematic top view of the cloth disc of the present invention;
FIG. 3 is a schematic top view of the sprocket of the present invention;
fig. 4 is a schematic view of the structure of the rotating shaft of the present invention.
In the figure: 1. a hydrolysis chamber; 102. a water pump; 103. a water delivery pipe; 104. a communicating pipe; 105. a hollow shaft; 106. breaking up the rods; 107. a shower pipe; 108. a first motor; 109. a first driving bevel gear; 110. a first driven bevel gear; 111. stirring blades; 2. a neutralization chamber; 201. a second motor; 202. a feed inlet; 203. a material distribution disc; 204. a stirring plate; 205. a second driving bevel gear; 206. a fixed mount; 207. a connecting shaft; 208. turning over the stirring plate; 209. a second driven bevel gear; 210. a drive shaft; 3. a solid-gas separation component; 301. a separation box; 302. a sealing plate; 303. a dust filter bag; 304. an air pump; 305. a blowback pipe; 306. a through hole plate; 307. a rotating shaft; 308. connecting ropes; 309. bumping balls; 310. a sprocket; 311. a chain; 312. a third motor; 4. a vent pipe.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention. The embodiments described below with reference to the drawings are exemplary only for the purpose of explaining the present invention, and should not be construed as limiting the present invention.
Next, an embodiment of the present invention will be described with reference to the overall structure thereof.
The tail gas treatment device for the polysilicon slag slurry process is shown in fig. 1-4, and comprises a hydrolysis chamber 1 and a neutralization chamber 2, wherein a hollow shaft 105 is installed inside the hydrolysis chamber 1, the top end of the hollow shaft 105 is connected with a communicating pipe 104 through a rotary joint, the outer surface of the hollow shaft 105 is respectively provided with a spray pipe 107, a scattering rod 106 and a stirring blade 111, a water suction pump 102 is installed inside the hydrolysis chamber 1, the water outlet end of the water suction pump 102 is communicated with the communicating pipe 104 through a water conveying pipe 103, a driving shaft 210 is installed inside the neutralization chamber 2, the outer surface of the driving shaft 210 is respectively fixed with a cloth plate 203, a stirring plate 204 and a second driving conical tooth 205, the inner wall of the neutralization chamber 2 is fixed with a fixing frame 206, a connecting shaft 207 is installed inside the fixing frame 206, one end of the connecting shaft 207 is connected with a second driven conical tooth 209, the outer surface of the connecting shaft 207 is provided with a stirring plate 208, the top of the neutralization chamber 2 is provided with a second motor 201 and a feed inlet 202, the top of the feed inlet 202 is provided with a sealing cover, the output end of the second motor 201 is connected with the driving shaft 210, gas is prevented from being discharged from the feed inlet 202, the second motor 201 can rotate, and one side of the hydrolysis chamber 1 is connected with a gas separation component 3 through a vent pipe 3.
Specifically, solid-gas separation component 3 includes separator box 301, inside of separator box 301 is provided with sealing plate 302 and through-hole board 306, install dust filter bag 303 between sealing plate 302 and through-hole board 306, rotation axis 307 is installed at through-hole board 306 top, the bottom of rotation axis 307 is connected with sprocket 310, the surface of sprocket 310 is provided with chain 311, the surface of rotation axis 307 is connected with collision ball 309 through connecting rope 308, one side of separator box 301 is provided with air pump 304, the output of air pump 304 is connected with the blowback pipe 305 that extends to inside of separator box 301, air pump 304 carries out the blowback to dust filter bag 303 through blowback pipe 305, and then can thoroughly clean dust filter bag 303, the regeneration of dust filter bag 303 has been realized, third motor 312 is installed to the inner wall of separator box 301, the output of third motor 312 is connected with the tip of a set of rotation axis 307, third motor 312 can provide power for rotation axis 307, that third motor 312 rotates and makes the rotation axis 307 rotate.
Referring to fig. 1, a first motor 108 is installed at the top of the hydrolysis chamber 1, an output end of the first motor 108 is connected with a first driving bevel gear 109, a first driven bevel gear 110 is arranged on an outer surface of the hollow shaft 105, the first driving bevel gear 109 is engaged with the first driven bevel gear 110, and the first motor 108 rotates to enable the first driving bevel gear 109 to rotate, so that the first driven bevel gear 110 rotates, and then the hollow shaft 105 rotates.
Referring to fig. 1, one end of the communicating pipe 104 is communicated with the neutralization chamber 2, two sets of valves are disposed on the outer surface of the communicating pipe 104, and after the hydrolysis is completed, the worker opens and closes one set of valves and then opens the other set of valves, so that the liquid enters the neutralization chamber 2.
The implementation principle of the embodiment is as follows: before the tail gas is treated, the tail gas is filled into the separation box 301, dust with larger particles in the tail gas falls downwards, smaller dust and the tail gas move upwards, the dust in the tail gas is separated by the dust filter bag 303, the dust can be intercepted, and the dust can be conveniently recovered, after the tail gas is used for a period of time, a layer of dust is attached to the outer surface of the dust filter bag 303, then a worker starts the third motor 312, the third motor 312 rotates to enable the rotating shafts 307 and the chain wheels 310 to rotate, so that the groups of the rotating shafts 307 rotate, the connecting ropes 308 drive the collision balls 309 to rotate, the collision balls 309 rotate to collide with the dust filter bag 303, the attached dust can be shaken off, the influence on ventilation volume caused by the blockage of the dust filter bag 303 is avoided, the tail gas after dust removal is filled into liquid alkane liquid, the hollow shaft 105 rotates to enable the stirring blades 111 to rotate, stirring leaf 111 drives liquid and tail gas to be fully mixed, partial tail gas can move upwards, liquid is pumped to communicating pipe 104 by water pump 102 and then is sprayed out from the spray pipe, hollow shaft 105 rotates to enable spray pipe 107 to spray in a rotating mode, scattering rod 106 can scatter the sprayed liquid into water mist, the spraying area is further increased, the sprayed water mist can rise again to mix with gas, the dissolving sufficiency of hydrogen chloride is improved, after hydrolysis is finished, the generated hydrogen is discharged and collected from a group of pipelines, a worker opens and closes a group of valves and then opens another group of valves, so that the liquid enters into neutralization chamber 2, the worker adds reactant and catalyst onto material distribution disc 203, material distribution disc 203 rotates to enable the reactant and catalyst to be uniformly distributed in neutralization chamber 2, drive shaft 210 rotates to enable second driving conical tooth 205 to rotate, therefore, the second driven bevel gear 209 drives the connecting shaft 207 to rotate, the connecting shaft 207 rotates to enable the stirring plate 208 to stir up and down, the stirring plate 204 stirs liquid left and right, the liquid and the catalyst can react sufficiently and quickly, hydrogen chloride dissolved in liquid chlorosilane is separated, and the separated hydrogen chloride is discharged and collected from the other group of pipelines.
Although embodiments of the present invention have been shown and described, it is intended that the present embodiments be illustrative only and not limiting to the invention, and that the particular features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples, and that modifications, substitutions, variations, and the like, which are not inventive in light of the above teachings, may be made to the embodiments by those skilled in the art without departing from the principles and spirit of the present invention, but are to be construed as broadly as the following claims.
Claims (6)
1. Polycrystalline silicon sediment thick liquid technology tail gas processing apparatus, including hydrolysis chamber (1) and neutralization chamber (2), its characterized in that: the hydrolysis device is characterized in that a hollow shaft (105) is mounted inside the hydrolysis chamber (1), the top end of the hollow shaft (105) is connected with a communicating pipe (104) through a rotary joint, a spray pipe (107), a scattering rod (106) and a stirring blade (111) are respectively arranged on the outer surface of the hollow shaft (105), a water suction pump (102) is mounted inside the hydrolysis chamber (1), the water outlet end of the water suction pump (102) is communicated with the communicating pipe (104) through a water conveying pipe (103), a driving shaft (210) is mounted inside the neutralization chamber (2), a cloth disc (203), a stirring plate (204) and a second driving bevel gear (205) are respectively fixed on the outer surface of the driving shaft (210), the inner wall of neutralization chamber (2) is fixed with mount (206), the internally mounted of mount (206) has connecting axle (207), the one end of connecting axle (207) is connected with the driven awl tooth of second (209), the surface of connecting axle (207) is provided with turns over stirs board (208), one side of room (1) of hydrolysising is connected with solid gas separable set (3) through breather pipe (4), solid gas separable set (3) are including separator box (301), the inside of separator box (301) is provided with closing plate (302) and through-hole board (306), install between closing plate (302) and through-hole board (306) and strain dirt bag (303) 303 ) The utility model discloses a collision ball (309), axis of rotation (307) are installed to through-hole board (306) top, the bottom of axis of rotation (307) is connected with sprocket (310), the surface of sprocket (310) is provided with chain (311), the surface of axis of rotation (307) is connected with collision ball (309) through connecting rope (308).
2. The polysilicon residue slurry process tail gas treatment device according to claim 1, characterized in that: an air pump (304) is arranged on one side of the separation box (301), and the output end of the air pump (304) is connected with a blowback pipe (305) extending into the separation box (301).
3. The polysilicon residue slurry process tail gas treatment device according to claim 1, characterized in that: and a third motor (312) is installed on the inner wall of the separation box (301), and the output end of the third motor (312) is connected with the end part of the group of rotating shafts (307).
4. The polysilicon residue slurry process tail gas treatment device according to claim 1, which is characterized in that: the top of hydrolysis chamber (1) is installed first motor (108), the output of first motor (108) is connected with first initiative awl tooth (109), the surface of hollow shaft (105) is provided with first driven awl tooth (110), first initiative awl tooth (109) and first driven awl tooth (110) interlock mutually.
5. The polysilicon residue slurry process tail gas treatment device according to claim 1, characterized in that: a second motor (201) and a feed inlet (202) are installed at the top of the neutralization chamber (2), a sealing cover is arranged at the top of the feed inlet (202), and the output end of the second motor (201) is connected with a driving shaft (210).
6. The polysilicon residue slurry process tail gas treatment device according to claim 1, which is characterized in that: one end of the communicating pipe (104) is communicated with the neutralizing chamber (2), and two groups of valves are arranged on the outer surface of the communicating pipe (104).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221970285.8U CN218459029U (en) | 2022-07-28 | 2022-07-28 | Tail gas treatment device for polycrystalline silicon slag slurry process |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221970285.8U CN218459029U (en) | 2022-07-28 | 2022-07-28 | Tail gas treatment device for polycrystalline silicon slag slurry process |
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| Publication Number | Publication Date |
|---|---|
| CN218459029U true CN218459029U (en) | 2023-02-10 |
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| CN202221970285.8U Active CN218459029U (en) | 2022-07-28 | 2022-07-28 | Tail gas treatment device for polycrystalline silicon slag slurry process |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116726687A (en) * | 2023-06-13 | 2023-09-12 | 山东蓝诺机械制造有限公司 | Multifunctional spraying device for organic waste gas treatment and treatment process thereof |
-
2022
- 2022-07-28 CN CN202221970285.8U patent/CN218459029U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116726687A (en) * | 2023-06-13 | 2023-09-12 | 山东蓝诺机械制造有限公司 | Multifunctional spraying device for organic waste gas treatment and treatment process thereof |
| CN116726687B (en) * | 2023-06-13 | 2024-05-03 | 山东蓝诺机械制造有限公司 | Multifunctional spraying device for organic waste gas treatment and treatment process thereof |
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| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Tail gas treatment device for polycrystalline silicon slurry process Effective date of registration: 20230330 Granted publication date: 20230210 Pledgee: Industrial Bank Co.,Ltd. Yinchuan Branch Pledgor: NINGXIA SHENGLAN CHEMICAL ENVIRONMENTAL PROTECTION TECHNOLOGY Co.,Ltd. Registration number: Y2023980036999 |
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| PC01 | Cancellation of the registration of the contract for pledge of patent right | ||
| PC01 | Cancellation of the registration of the contract for pledge of patent right |
Granted publication date: 20230210 Pledgee: Industrial Bank Co.,Ltd. Yinchuan Branch Pledgor: NINGXIA SHENGLAN CHEMICAL ENVIRONMENTAL PROTECTION TECHNOLOGY Co.,Ltd. Registration number: Y2023980036999 |
|
| PE01 | Entry into force of the registration of the contract for pledge of patent right | ||
| PE01 | Entry into force of the registration of the contract for pledge of patent right |
Denomination of utility model: Tail gas treatment device for polycrystalline silicon slurry process Granted publication date: 20230210 Pledgee: Industrial Bank Co.,Ltd. Yinchuan Branch Pledgor: NINGXIA SHENGLAN CHEMICAL ENVIRONMENTAL PROTECTION TECHNOLOGY Co.,Ltd. Registration number: Y2024980010536 |