CN218443730U

CN218443730U - Sputtering target vision measuring mechanism

Info

Publication number: CN218443730U
Application number: CN202222057994.3U
Authority: CN
Inventors: 石煜; 黄剑; 刘玉奇; 朱永涯
Original assignee: Wuhu Yingri Technology Co ltd
Current assignee: Wuhu Yingri Technology Co ltd
Priority date: 2022-08-05
Filing date: 2022-08-05
Publication date: 2023-02-03
Anticipated expiration: 2032-08-05

Abstract

The utility model discloses a sputter target vision measuring mechanism, its technical scheme main points are: the sputtering target comprises a bottom plate, wherein supporting rods are fixedly mounted at four corners of the top surface of the bottom plate, a top plate is arranged on the top surface of the bottom plate, the bottom surface of the top plate and the top ends of the supporting rods are fixedly mounted, and a sputtering target body is arranged on the top surface of the bottom plate; the measuring component, the measuring component sets up the bottom surface of roof is used for the target body is sputtered in the measurement, through setting up driving motor, drives the gear rotation through driving motor to control under gear and rack mesh effect drive OCD camera and remove, circle wall fixed cover is equipped with the spliced pole in the interior circle through the bearing inner ring, thereby can rotate the rack and change OCD camera moving direction, thereby can carry out the camera shooting at no dead angle to sputtering the target body, after the completion of making a video recording, can acquire measured data through the image that uses the shooting of computer electrical connection image acquisition card analysis OCD camera.

Description

Sputtering target vision measuring mechanism

Technical Field

The utility model relates to a technical field is measured to the target, concretely relates to sputter target vision measuring mechanism.

Background

Various types of sputtered thin film materials are widely used in the fields of semiconductor integrated circuits (VLSI), optical disks, flat panel displays, and surface coatings for workpieces. Sputtering is one of the main techniques for preparing thin film materials, the sputtering technique utilizes ions generated by an ion source to form ion beams with high-speed energy through accelerated aggregation in vacuum, the ion beams bombard the surface of a target material, and due to the momentum transfer principle, atoms on the target material are sputtered out of the target surface with high kinetic energy to fly to a substrate, so that a film is deposited on the substrate.

After the target is used for a long time, sputtering channels are formed on the surface of the target due to the separation of atoms, the sputtering channels are in an annular wavy shape due to the characteristic of magnetic field distribution, and when the maximum depth of the sputtering channels exceeds a limit value, the use of the target is required to be stopped; after recycling the target used by a customer, a target manufacturer also needs to obtain data of a sputtering channel to form a sputtering utilization rate, a sputtering curve and the like, so that the product quality, the process condition of the customer, the magnetic field of sputtering and the like are analyzed, the subsequent process improvement and the production efficiency improvement are facilitated, and therefore, the accurate measurement of the data of the sputtering channel of the target after use is very important.

SUMMERY OF THE UTILITY MODEL

The utility model provides a not enough to prior art, the utility model provides a sputter target vision measuring mechanism has solved modes such as current general adoption three-coordinate measuring apparatu or laser survey, but these equipment are bulky, operate complicacy, and the expensive unsuitable many times of cost is equipped with, and the problem that high frequency used.

The above technical purpose of the present invention can be achieved by the following technical solutions:

a visual measurement mechanism for a sputtering target, comprising: the sputtering target comprises a bottom plate, supporting rods are fixedly mounted at four corners of the top surface of the bottom plate, a top plate is arranged on the top surface of the bottom plate, the bottom surface of the top plate and the top ends of the supporting rods are fixedly mounted, and a sputtering target body is arranged on the top surface of the bottom plate; and the measuring component is arranged on the bottom surface of the top plate and is used for measuring the sputtering target body.

By adopting the technical scheme, the sputtering channel on the surface of the sputtering target body can be quickly measured by the measuring component through the measuring component, and compared with equipment such as a traditional three-coordinate measuring instrument, the device is simple in measurement, small in size and low in component price.

Preferably, the measuring assembly comprises: the rack, the rack sets up the bottom surface of roof, the bottom surface of rack is provided with the gear, the gear with rack mesh, the bottom surface of gear is provided with the connecting block, the drive hole has been seted up to one side of connecting block, one side fixed mounting of connecting block has driving motor, the one end of driving motor drive shaft is passed the drive hole with one side fixed mounting of gear, the bottom surface fixed mounting of connecting block has the OCD camera, the swivelling chute has been seted up to the top surface of connecting block, the fixed cover in inside of swivelling chute is equipped with the bearing, the interior round wall fixed mounting of bearing inner ring is equipped with the spliced pole, the top of spliced pole with the bottom surface fixed mounting of roof, the top surface fixed mounting of roof has image acquisition card.

Through adopting above-mentioned technical scheme, through setting up driving motor, it is rotatory to drive the gear through driving motor, and control under the meshing effect of gear and rack drive OCD camera, interior round wall fixed cover through the bearing inner ring is equipped with the spliced pole, thereby can rotate the rack and change OCD camera moving direction, thereby can carry out the camera shooting at no dead angle to sputtering target body, after the completion of making a video recording, the image of the shooting of OCD camera through using computer analysis image acquisition card to gather can acquire measured data, compare equipment such as traditional three-coordinate measuring apparatu and measure simplely, the device is small, the part low price.

Preferably, the inside front and back both sides of connecting block all fixed mounting have a joint piece, the joint groove has all been seted up to both sides around the rack, the joint piece with joint groove slip joint.

Through adopting above-mentioned technical scheme, through setting up the joint piece with joint groove slip joint, thereby through the joint piece with joint groove slip joint makes connecting block and rack joint.

Preferably, the top surface of the rack is fixedly provided with an adsorption column, the bottom surface of the top plate is fixedly provided with an adsorption ring, and the adsorption column and the adsorption ring are adsorbed.

Through adopting above-mentioned technical scheme, through setting up the adsorption column, adsorb mutually with the adsorption ring through the adsorption column to make the staff behind rotatory rack, the rack is restricted, prevents to making the rack position take place the skew when OCD camera removes.

Preferably, the bottom surface of the top plate is connected with two lighting blocks in a hinge mode, and the bottom surfaces of the lighting blocks are fixedly provided with lamp belts.

Through adopting above-mentioned technical scheme, through setting up the lamp area, can shine the surface of sputtering target body through the lamp area to prevent that light from too dark and influencing the shooting of OCD camera.

Preferably, two the propelling movement mouth has all been seted up to one side of illumination piece, the inside fixed mounting of propelling movement mouth has the promotion post, the bottom surface fixed mounting of roof has two fixed blocks, two the equal fixed mounting in both sides that the fixed block is close to each other has electric putter, the one end fixed mounting of electric putter's telescopic link has the propelling movement ring, the propelling movement ring with the promotion post movable sleeve is established.

Through adopting above-mentioned technical scheme, through setting up electric putter, establish with promotion post movable sleeve through the last propelling movement ring of electric putter to make electric putter can promote the illumination piece, change the illumination angle in lamp area, can come dynamic adjustment according to the position that the OCD camera removed.

To sum up, the utility model discloses mainly have following beneficial effect:

through setting up driving motor, it is rotatory to drive the gear through driving motor, and control under the meshing effect of gear and rack drive OCD camera, circle wall fixed cover in the interior through the bearing inner ring is equipped with the spliced pole, thereby can rotate the rack and change OCD camera moving direction, thereby can carry out the camera shooting at no dead angle to sputtering target body, the back is accomplished in making a video recording, the image of the shooting through OCD camera that uses computer analysis image acquisition card to gather can acquire measured data, compare equipment such as more traditional three-coordinate measuring apparatu and measure simplely, the device is small, the part low price.

Through setting up the joint piece with joint groove slip joint, thereby through the joint piece with joint groove slip joint makes connecting block and rack joint, through setting up the adsorption column, adsorbs mutually with the adsorption ring through the adsorption column to make the staff behind rotatory rack, the rack is restricted and lives, prevents to making the rack position take place the skew when the OCD camera removes.

Drawings

Fig. 1 is a schematic perspective view of the present invention;

fig. 2 is a schematic view of the split structure of the present invention;

FIG. 3 is a schematic view of the structure of the rotary trough of the present invention;

fig. 4 is a schematic view of the fixing block structure of the present invention.

Reference numerals: 1. a base plate; 2. a support bar; 3. a top plate; 4. sputtering the target material body; 5. a rack; 6. a gear; 7. connecting blocks; 8. an OCD camera; 9. a drive motor; 10. a rotating tank; 11. a bearing; 12. connecting columns; 13. an image acquisition card; 14. a clamping block; 15. a clamping groove; 16. an adsorption column; 17. an adsorption ring; 18. an illumination block; 19. a light strip; 20. pushing the port; 21. pushing the column; 22. a fixed block; 23. an electric push rod; 24. a push ring; 25. a drive aperture.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1, 2, 3 and 4, a visual measurement mechanism for a sputtering target comprises a bottom plate 1, support rods 2 are fixedly mounted at four corners of the top surface of the bottom plate 1, a top plate 3 is disposed on the top surface of the bottom plate 1, the bottom surface of the top plate 3 is fixedly mounted on the top ends of the support rods 2, a sputtering target body 4 is disposed on the top surface of the bottom plate 1, the sputtering target body 4 is of a conventional structure and is not described herein, a measurement assembly is disposed on the bottom surface of the top plate 3 and is used for measuring the sputtering target body 4, the measurement assembly comprises a rack 5, the rack 5 is of a conventional structure and is not described herein, the rack 5 is disposed on the bottom surface of the top plate 3, a gear 6 is disposed on the bottom surface of the rack 5, the gear 6 is not described herein for the conventional structure, the gear 6 is engaged with the rack 5, a connecting block 7 is disposed on the bottom surface of the gear 6, a driving hole 25 is disposed on one side of the connecting block 7, a driving motor 9 is fixedly installed on one side of the connecting block 7, the existing structure of the driving motor 9 is not described herein, one end of a driving shaft of the driving motor 9 passes through the driving hole 25 and is fixedly installed on one side of the gear 6, an OCD camera 8 is fixedly installed on the bottom surface of the connecting block 7, the existing structure of the OCD camera 8 is not described herein, the top surface of the connecting block 7 is provided with a rotating groove 10, a bearing 11 is fixedly sleeved inside the rotating groove 10, the existing structure of the bearing 11 is not described herein, a connecting column 12 is fixedly sleeved on the inner circular wall surface of an inner ring of the bearing 11, the top end of the connecting column 12 is fixedly installed on the bottom surface of the top plate 3, an image acquisition card 13 is fixedly installed on the top surface of the top plate 3, the image acquisition card 13 is electrically connected with the OCD camera 8, the existing structure of the image acquisition card 13 is not described herein, the gear 6 is driven to rotate by the driving motor 9, and the gear 6 and the rack 5 are meshed to drive the OCD camera 8 to move left and right, the inner circle wall surface of the inner ring of the bearing 11 is fixedly sleeved with the connecting column 12, so that the rack 5 can be rotated to change the moving direction of the OCD camera 8, the sputtering target material body 4 can be shot without dead angles, and after the shooting is finished, the shot image of the OCD camera 8 collected by the image collection card 13 can be analyzed by a computer to obtain measurement data.

Referring to fig. 1, fig. 2, fig. 3 and fig. 4, equal fixed mounting in both sides has joint piece 14 around the inside of connecting block 7, joint groove 15 has all been seted up to both sides around rack 5, joint piece 14 and joint groove 15 slip joint, the top surface fixed mounting of rack 5 has adsorption column 16, adsorption column 16 is the cylindrical structure of metal system, the bottom surface fixed mounting of roof 3 has adsorption ring 17, adsorption ring 17 is the circular ring structure of magnet system, adsorption column 16 adsorbs with adsorption ring 17 mutually, the bottom surface hinge connection of roof 3 has two illumination blocks 18, the bottom surface fixed mounting of illumination block 18 has lamp area 19, lamp area 19 does not do repeated description here for existing structure, push port 20 has all been seted up to one side of two illumination blocks 18, push port 20's inside fixed mounting has push post 21, the bottom surface fixed mounting of roof 3 has two fixed blocks 22, the equal fixed mounting in both sides that two fixed blocks 22 are close to each other has electric putter 23, electric putter 23 does not do no repeated description here for existing structure, the one end fixed mounting of the telescopic link of electric putter 23 has push ring 24, push ring 24 and the movable sleeve of push post 21, set up the movable sleeve sets up push rod 23, thereby can change the dynamic push rod 23 according to the OCD that electric putter 23 shines the dynamic camera angle adjustment piece 18.

The working principle is as follows: referring to fig. 1-4, when in use, by arranging the sputtering target body 4, the sputtering target body 4 is placed on the top surface of the bottom plate 1, then the OCD camera 8 and the image acquisition card 13 are started, the computer is electrically connected with the image acquisition card 13, then the driving motor 9 is started, the driving motor 9 drives the gear 6 to rotate, and drives the OCD camera 8 to move left and right under the meshing action of the gear 6 and the rack 5, the connecting column 12 is fixedly sleeved on the inner circular wall surface of the inner ring of the bearing 11, then the rack 5 is manually rotated to change the moving direction of the OCD camera 8, so that the sputtering target body 4 can be shot without dead angles, the adsorption column 16 and the adsorption ring 17 are adsorbed together after rotation, then the electric push rod 23 is started, and the electric push rod 23 pushes the illumination block 18, so that the irradiation position of the lamp strip 19 is consistent with the shooting position of the OCD camera 8.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. A sputtering target vision measuring mechanism is characterized by comprising: the sputtering target comprises a bottom plate (1), wherein supporting rods (2) are fixedly mounted at four corners of the top surface of the bottom plate (1), a top plate (3) is arranged on the top surface of the bottom plate (1), the bottom surface of the top plate (3) is fixedly mounted with the top ends of the supporting rods (2), and a sputtering target body (4) is arranged on the top surface of the bottom plate (1); a measuring assembly arranged on the bottom surface of the top plate (3) for measuring the sputtering target body (4).

2. The visual measurement mechanism of claim 1, wherein the measurement assembly comprises: rack (5), rack (5) set up the bottom surface of roof (3), the bottom surface of rack (5) is provided with gear (6), gear (6) with rack (5) mesh mutually, the bottom surface of gear (6) is provided with connecting block (7), drive hole (25) have been seted up to one side of connecting block (7), one side fixed mounting of connecting block (7) has driving motor (9), the one end of driving motor (9) drive shaft is passed drive hole (25) with one side fixed mounting of gear (6), the bottom surface fixed mounting of connecting block (7) has OCD camera (8), swivelling chute (10) have been seted up to the top surface of connecting block (7), the fixed cover of inside of swivelling chute (10) is equipped with bearing (11), the interior round wall fixed mounting of bearing (11) inner ring is equipped with spliced pole (12), the top of spliced pole (12) with the bottom surface fixed mounting of roof (3), the top surface fixed mounting of roof (3) has image acquisition card (13).

3. The visual measuring mechanism for the sputtering target according to claim 2, wherein clamping blocks (14) are fixedly mounted on the front side and the rear side of the inside of the connecting block (7), clamping grooves (15) are formed in the front side and the rear side of the rack (5), and the clamping blocks (14) are in sliding clamping connection with the clamping grooves (15).

4. The visual measurement mechanism for the sputtering target according to claim 2, wherein an adsorption column (16) is fixedly installed on the top surface of the rack (5), an adsorption ring (17) is fixedly installed on the bottom surface of the top plate (3), and the adsorption column (16) and the adsorption ring (17) are adsorbed.

5. The visual measuring mechanism for the sputtering target according to claim 1, wherein two illuminating blocks (18) are hinged to the bottom surface of the top plate (3), and a lamp strip (19) is fixedly mounted on the bottom surface of each illuminating block (18).

6. The visual measuring mechanism for the sputtering target according to claim 5, wherein a pushing opening (20) is formed in each of two illuminating blocks (18), a pushing column (21) is fixedly mounted inside the pushing opening (20), two fixing blocks (22) are fixedly mounted on the bottom surface of the top plate (3), electric push rods (23) are fixedly mounted on two sides, close to each other, of the two fixing blocks (22), a pushing ring (24) is fixedly mounted at one end of a telescopic rod of each electric push rod (23), and the pushing ring (24) is movably sleeved with the pushing column (21).