CN218440396U - Active and passive compound vibration isolation platform with two degrees of freedom - Google Patents

Abstract

The utility model discloses an active passive compound vibration isolation platform of two degrees of freedom relates to vibration isolation device technical field, specifically is an active passive compound vibration isolation platform of two degrees of freedom, including the bottom sprag seat, the last fixed surface of bottom sprag seat is connected with the backup pad, and the quantity of backup pad is a plurality of, and a plurality of backup pad evenly distributed is in the edge of bottom sprag seat upper surface, and the top fixedly connected with top buffering ring of backup pad, and the inside of top buffering ring is pegged graft and is had the platform that shakes. This two-degree-of-freedom active and passive composite vibration isolation platform sets up through the cooperation of bottom sprag seat, backup pad, top buffer ring, vibration isolation platform, annular shock attenuation gasbag and perpendicular supporting pad, and the elasticity of annular shock attenuation gasbag self when the vibration of horizontal direction appears in the in-process of using, and the repulsion between horizontal vibration isolation spring and the permanent magnet that sets up in the cooperation can slow down the vibration, reduces the vibration that transmits the vibration isolation bench, guarantees the steady of vibration isolation platform.

Description

Active and passive compound vibration isolation platform with two degrees of freedom

Technical Field

The utility model relates to a vibration isolation device technical field specifically is two degree of freedom owner passive compound vibration isolation platforms.

Background

At present, the semiconductor industry is rapidly developed, the precision requirement of semiconductor production equipment is higher and higher, the requirement of the equipment on environments such as micro-vibration is more and more sensitive, a little micro-vibration can reduce the yield of the equipment, and even the equipment can not work normally, so that the isolation of the micro-vibration becomes more and more important.

The micro-vibration caused by the vibration of the external environment and the reaction force inside the equipment is one of the key factors restricting the measurement precision of the ultra-precision instrument and the manufacturing precision of the ultra-precision machining equipment, and the high-performance precise isolation micro-vibration technology becomes a core key technology in the fields of precision engineering, ultra-precision manufacturing and the like, and has important practical significance and application value for the research of the technology. The vibration control part is the core of the vibration isolation platform, and passive vibration isolation is adopted for medium-high frequency vibration, so that the passive vibration isolation structure is simple, the work is reliable, the power supply is not relied on, and the medium-high frequency vibration interference can be effectively isolated. Aiming at low frequency vibration or even ultra-low frequency vibration, active vibration isolation is adopted mostly, pneumatic active vibration isolation has good adaptivity, low frequency vibration is counteracted through the reverse force output by an actuator, and the pneumatic active vibration isolation has excellent low frequency or ultra-low frequency vibration isolation performance. The environment that precision instruments are located is not single high frequency vibrations or low frequency vibration, is the complicated vibrations environment of multiple frequency, and present vibration isolation platform is mostly to single high frequency or low frequency vibration, and is relatively poor to the vibration isolation ability of complicated vibration environment.

SUMMERY OF THE UTILITY MODEL

Technical problem to be solved

The utility model provides a not enough to prior art, the utility model provides a two degree of freedom owner passive compound vibration isolation platforms has solved the problem that proposes in the above-mentioned background art.

(II) technical scheme

In order to achieve the above purpose, the utility model discloses a following technical scheme realizes: the utility model provides a two degree of freedom owner passive compound vibration isolation platform, includes the bottom sprag seat, the last fixed surface of bottom sprag seat is connected with the backup pad, the quantity of backup pad is a plurality of, a plurality of backup pad evenly distributed is in the edge of bottom sprag seat upper surface, the top fixedly connected with top buffering ring of backup pad, the inside of top buffering ring is pegged graft and is had the vibration isolation platform, the annular side parcel of vibration isolation platform has annular shock attenuation gasbag, the perpendicular supporting pad of bottom fixedly connected with of vibration isolation platform, the bottom fixedly connected with connecting seat of perpendicular supporting pad, the bottom fixedly connected with shock attenuation loop bar of bottom sprag seat, the top of shock attenuation loop bar is pegged graft and is had the shock attenuation inserted bar, the central point of bottom sprag seat upper surface puts and is equipped with the power supply, the top of power supply is equipped with the controller.

Optionally, an annular side wall of the annular damping air bag abuts against a side wall of the inner surface of the top buffer ring, a plurality of horizontal vibration isolation springs are arranged inside the annular damping air bag, and the horizontal vibration isolation springs are distributed in an annular array.

Optionally, permanent magnets are arranged at two ends of the annular damping air bag, which are located at the horizontal vibration isolation springs, and magnetic poles of opposite ends of the two corresponding permanent magnets are the same.

Optionally, the inside of the vertical support pad is filled with a non-newtonian liquid, the bottom of the inner surface of the vertical support pad is fixedly connected with a plurality of vertical damping springs, the plurality of vertical damping springs are uniformly distributed, and the tops of the plurality of vertical damping springs abut against the top of the inner surface of the vertical support pad.

Optionally, an annular sliding cavity is arranged inside the connecting seat, an annular connecting plate is connected inside the annular sliding cavity in a sliding mode, a connecting opening is formed in the bottom of the annular sliding cavity, and a connecting inserted rod is fixedly connected to the bottom of the annular connecting plate.

Optionally, the diameter of the connection opening is smaller than that of the annular connection plate, a connection slot is formed in the top of the shock absorption inserted bar, the connection inserted bar penetrates through the connection opening and is inserted into the connection slot, and the connection slot is in clearance fit with the connection inserted bar.

Optionally, a piezoresistor is arranged at the bottom of the inner surface of the damping sleeve rod, an insulating blocking ring is fixedly connected to the side wall of the inner surface of the damping sleeve rod above the piezoresistor, and an energizing spring is fixedly connected to the upper surface of the insulating blocking ring.

Optionally, the top fixed connection of circular telegram spring is at the lower surface of shock attenuation inserted bar, the bottom fixedly connected with elasticity depression bar of shock attenuation inserted bar, the bottom butt of elasticity depression bar is at piezo-resistor's upper surface, piezo-resistor passes through the wire respectively with controller and circular telegram spring electric connection, the controller passes through the wire and is connected with the distribution source electrical property.

(III) advantageous effects

The utility model provides a two degree of freedom owner passive compound vibration isolation platforms possesses following beneficial effect:

1. this two-degree-of-freedom active and passive composite vibration isolation platform, through the bottom sprag seat, a supporting plate, the top buffering ring, the platform shakes apart, the cooperation setting of annular shock attenuation gasbag and perpendicular supporting pad, the elasticity of annular shock attenuation gasbag self when the vibration of horizontal direction appears in the in-process of using, repulsion force between the horizontal vibration isolation spring that sets up and the permanent magnet in the cooperation can slow down the vibration, reduce the vibration that transmits to the vibration isolation bench, guarantee the steady of platform shakes apart, because the non-Newtonian liquid in the lower perpendicular supporting pad of frequency of vibration can keep liquid when the vibration of the vertical direction of lower frequency appears, perpendicular vibration isolation spring in the perpendicular supporting pad can cushion the vibration of vertical direction and guarantee the stationarity on the vibration isolation bench this moment, the passive buffering of two-degree-of-freedom has been realized.

2. This two degree of freedom owner passive compound vibration isolation platform, through the bottom sprag seat, a supporting plate, the vibration isolation platform, the connecting seat, the shock attenuation loop bar, the shock attenuation inserted bar, the cooperation setting of distribution source and controller, in-process annular connecting plate can slide in annular sliding cavity, avoid causing the influence to the shock attenuation inserted bar when horizontal vibration appears, and the diameter of annular connecting plate is greater than the diameter of connecting the opening diameter, can guarantee that annular connecting plate can not drop, when the vertical direction vibration of high frequency appears, because the frequency of vibration is higher, non-Newton's liquid can be regarded as solid-state this moment, the vibration of vibration vertical direction drives the trend that the shock attenuation inserted bar appears rising or descends, the trend that the shock attenuation inserted bar appears rises all can change the pressure that the elasticity depression bar applyed on the piezo-resistor, when pressure reduces the resistance of piezo-resistor, make the electric current that passes through on the circular telegram spring of electric connection with it increase, the magnetic force that each circle of circular telegram spring produced increases, thereby the power of its shrink is reduced to its vibration of vibration attenuation inserted bar's own power of the power that produces the power of the perpendicular spring that produces the shock attenuation inserted bar that pulls down to its, thereby the power of the electric connection of the shock attenuation inserted bar that the power generation has reduced on the power of the spring that the power of the power generation is realized that the perpendicular of the shock attenuation inserted bar voluntarily, thereby.

Drawings

FIG. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a front sectional view of the present invention;

FIG. 3 is a front sectional view of the connecting seat of the present invention;

FIG. 4 is a schematic sectional view of the shock-absorbing sleeve rod of the present invention;

fig. 5 is the structural schematic diagram of the vertical supporting pad in front view and section.

In the figure: 1. a bottom support base; 2. a support plate; 3. a top buffer ring; 4. a vibration isolation table; 5. an annular shock-absorbing air bag; 501. a horizontal vibration isolation spring; 502. a permanent magnet; 6. a vertical support pad; 601. a vertical damping spring; 7. a connecting seat; 701. an annular sliding cavity; 702. an annular connecting plate; 703. a connection opening; 704. connecting the inserted link; 8. a shock-absorbing loop bar; 801. a voltage dependent resistor; 802. an insulating baffle ring; 803. a power-on spring; 9. a shock absorbing inserted link; 901. connecting the slots; 902. an elastic pressure lever; 10. distributing a power supply; 11. and a controller.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments.

Example 1

Referring to fig. 1, fig. 2 and fig. 5, the present invention provides a technical solution: two-degree-of-freedom active and passive composite vibration isolation platform, including bottom sprag seat 1, bottom sprag seat 1's last fixed surface is connected with backup pad 2, backup pad 2's quantity is a plurality of, the edge of a plurality of backup pad 2 evenly distributed at bottom sprag seat 1 upper surface, backup pad 2's top fixedly connected with top buffering ring 3, top buffering ring 3's inside is pegged graft and is had vibration isolation platform 4, vibration isolation platform 4's annular side parcel has annular shock attenuation gasbag 5, annular shock attenuation gasbag 5's annular lateral wall butt is on the lateral wall of top buffering ring 3 internal surface, annular shock attenuation gasbag 5's inside is equipped with a plurality of horizontal vibration isolation springs 501, a plurality of horizontal vibration isolation springs 501 are distributed in annular array, the both ends that annular shock attenuation gasbag 5's inside is located a plurality of horizontal vibration isolation springs 501 all are equipped with permanent magnet 502, and the magnetic pole of two corresponding permanent magnet 502 opposite one end is the same, the bottom fixedly connected with vertical support pad 6 of vibration isolation platform 4, vertical support pad 6's inside is filled with non-Newtonian liquid, a plurality of vertical vibration isolation springs 601 of vertical support pad 6's bottom fixedly connected with, a plurality of vertical vibration isolation springs 601 evenly distributed, a plurality of vertical vibration attenuation springs 601, and the top butt at vertical support pad 6 internal surface.

In use, when the vibration of the horizontal direction occurs, the elastic force of the annular damping air bag 5 per se is matched with the repulsion force between the horizontal vibration isolation spring 501 and the permanent magnet 502 arranged in the horizontal vibration isolation air bag to slow down the vibration, the vibration transmitted to the vibration isolation table 4 is reduced, the stability of the vibration isolation table 4 is ensured, when the vibration of the lower frequency in the vertical direction occurs, the non-Newton liquid in the vertical supporting pad 6 with the lower frequency of the vibration can be kept in a liquid state, at the moment, the vertical damping spring 601 in the vertical supporting pad 6 can buffer the vibration in the vertical direction to ensure the stability on the vibration isolation table 4, and the passive buffering with two degrees of freedom is realized.

Example 2

Referring to fig. 1 to 4, the present invention provides a technical solution: a double-freedom-degree active and passive composite vibration isolation platform comprises a bottom supporting seat 1, wherein the upper surface of the bottom supporting seat 1 is fixedly connected with supporting plates 2, the number of the supporting plates 2 is a plurality, the supporting plates 2 are uniformly distributed at the edge of the upper surface of the bottom supporting seat 1, the top of each supporting plate 2 is fixedly connected with a top buffering ring 3, a vibration isolation table 4 is inserted into the top buffering ring 3, the bottom of each vibration isolation table 4 is fixedly connected with a vertical supporting pad 6, the bottom of each vertical supporting pad 6 is fixedly connected with a connecting seat 7, an annular sliding cavity 701 is arranged inside each connecting seat 7, an annular connecting plate 702 is slidably connected inside each annular sliding cavity 701, a connecting opening 703 is arranged at the bottom of each annular sliding cavity 701, a connecting inserted rod 704 is fixedly connected at the bottom of each annular connecting plate 702, a damping sleeve rod 8 is fixedly connected at the bottom of the bottom supporting seat 1, and a piezoresistor 801 is arranged at the bottom of the inner surface of each damping sleeve rod 8, an insulating baffle ring 802 is fixedly connected to the upper side of the piezoresistor 801 on the side wall of the inner surface of the shock absorption sleeve rod 8, an energizing spring 803 is fixedly connected to the upper surface of the insulating baffle ring 802, a shock absorption inserted rod 9 is inserted into the top of the shock absorption sleeve rod 8, the diameter of the connecting opening 703 is smaller than that of the annular connecting plate 702, a connecting slot 901 is formed in the top of the shock absorption inserted rod 9, the connecting inserted rod 704 is inserted into the connecting slot 901 through the connecting opening 703, the connecting slot 901 is in clearance fit with the connecting inserted rod 704, a power supply 10 is arranged at the central position of the upper surface of the bottom support base 1, a controller 11 is arranged at the top of the power supply 10, the top of the energizing spring 803 is fixedly connected to the lower surface of the shock absorption inserted rod 9, an elastic pressure rod 902 is fixedly connected to the bottom of the shock absorption inserted rod 9, the bottom of the elastic pressure rod 902 abuts against the upper surface of the piezoresistor 801, and the piezoresistor 801 is electrically connected with the controller 11 and the energizing spring 803 through a lead respectively, the controller 11 is electrically connected to the power distribution source 10 through a wire.

In use, the annular connecting plate 702 can slide in the annular sliding cavity 701, so that the shock absorption inserted rod 9 is prevented from being affected when horizontal vibration occurs, the diameter of the annular connecting plate 702 is larger than that of the connecting opening 703, so that the annular connecting plate 702 can be prevented from falling off, when high-frequency vertical vibration occurs, due to the fact that the frequency of vibration is high, the non-newtonian liquid can be regarded as a solid state, the vibration in the vertical vibration direction drives the shock absorption inserted rod 9 to tend to rise or fall, the pressure exerted on the piezoresistor 801 by the elastic pressure rod 902 can be changed when the shock absorption inserted rod 9 tends to rise or fall, when the pressure is reduced, the resistance of the piezoresistor 801 is reduced, so that the current passing through the energizing spring 803 electrically connected with the piezoresistor is increased, the magnetic force generated by each circle of the energizing spring 803 is increased, the contraction force generated by each circle of the shock absorption inserted rod 9 is reduced, otherwise, the resistance of the piezoresistor 801 is increased, so that the current passing through the energizing spring 803 electrically connected with the energizing spring is reduced, the elastic force generated by each circle of the energizing spring 803 is reduced, and the elastic force of the energizing spring 803 actively generates the upward thrust of the shock absorption inserted rod 9, thereby realizing the upward thrust of the vertical vibration absorption inserted rod 9.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims (8)

1. The utility model provides a two degree of freedom owner passive compound vibration isolation platforms, includes bottom sprag seat (1), its characterized in that: the utility model discloses a vibration damping support device, including bottom sprag seat (1), upper surface fixedly connected with backup pad (2), the quantity of backup pad (2) is a plurality of, a plurality of backup pad (2) evenly distributed is in the edge of bottom sprag seat (1) upper surface, the top fixedly connected with top buffer ring (3) of backup pad (2), peg graft in the inside of top buffer ring (3) and have vibration isolation platform (4), the annular side parcel of vibration isolation platform (4) has annular shock attenuation gasbag (5), the bottom fixedly connected with perpendicular supporting pad (6) of vibration isolation platform (4), the bottom fixedly connected with connecting seat (7) of perpendicular supporting pad (6), the bottom fixedly connected with shock attenuation loop bar (8) of bottom sprag seat (1), the top of shock attenuation loop bar (8) is pegged graft and is had shock attenuation inserted bar (9), the central point of bottom sprag seat (1) upper surface puts and is equipped with power distribution source (10), the top of power distribution source (10) is equipped with controller (11).

2. The two-degree-of-freedom active and passive composite vibration isolation platform according to claim 1, characterized in that: the annular side wall of the annular damping air bag (5) abuts against the side wall of the inner surface of the top buffering ring (3), a plurality of horizontal vibration isolation springs (501) are arranged inside the annular damping air bag (5), and the horizontal vibration isolation springs (501) are distributed in an annular array.

3. The two-degree-of-freedom active and passive composite vibration isolation platform according to claim 2, characterized in that: the two ends of the annular damping air bag (5), which are positioned at the horizontal vibration isolation springs (501), are provided with permanent magnets (502), and the magnetic poles of the opposite ends of the two corresponding permanent magnets (502) are the same.

4. The two-degree-of-freedom active and passive composite vibration isolation platform according to claim 1, characterized in that: the non-Newtonian liquid is filled in the vertical supporting pad (6), the bottom of the inner surface of the vertical supporting pad (6) is fixedly connected with a plurality of vertical damping springs (601), the vertical damping springs (601) are uniformly distributed, and the tops of the vertical damping springs (601) are abutted to the tops of the inner surface of the vertical supporting pad (6).

5. The two-degree-of-freedom active and passive composite vibration isolation platform according to claim 1, characterized in that: the connecting device is characterized in that an annular sliding cavity (701) is arranged inside the connecting seat (7), an annular connecting plate (702) is connected inside the annular sliding cavity (701) in a sliding mode, a connecting opening (703) is formed in the bottom of the annular sliding cavity (701), and a connecting inserted rod (704) is fixedly connected to the bottom of the annular connecting plate (702).

6. The two-degree-of-freedom active and passive composite vibration isolation platform according to claim 5, wherein: the diameter of the connecting opening (703) is smaller than that of the annular connecting plate (702), the top of the shock absorption inserted bar (9) is provided with a connecting slot (901), the connecting inserted bar (704) penetrates through the connecting opening (703) to be inserted into the connecting slot (901), and the connecting slot (901) is in clearance fit with the connecting inserted bar (704).

7. The two-degree-of-freedom active and passive composite vibration isolation platform according to claim 1, characterized in that: the bottom of the internal surface of shock attenuation loop bar (8) is equipped with piezo-resistor (801), the top fixedly connected with that lies in piezo-resistor (801) on the lateral wall of shock attenuation loop bar (8) internal surface keeps off ring (802), the last fixed surface of keeping off ring (802) is connected with circular telegram spring (803).

8. The two-degree-of-freedom active and passive composite vibration isolation platform according to claim 7, characterized in that: the top fixed connection of circular telegram spring (803) is at the lower surface of shock attenuation inserted bar (9), the bottom fixed connection of shock attenuation inserted bar (9) has elasticity depression bar (902), the bottom butt of elasticity depression bar (902) is at piezo-resistor (801) upper surface, piezo-resistor (801) pass through the wire respectively with controller (11) and circular telegram spring (803) electric connection, controller (11) pass through the wire and join in marriage power supply (10) electric connection.

Images