CN218435929U

CN218435929U - Sputtering coating jig

Info

Publication number: CN218435929U
Application number: CN202222563838.4U
Authority: CN
Inventors: 李胜彪; 汪凯; 王利维; 许伟; 郝杰; 张贤祝
Original assignee: Lixin Technology Kunshan Co ltd
Current assignee: Lixin Technology Kunshan Co ltd
Priority date: 2022-09-27
Filing date: 2022-09-27
Publication date: 2023-02-03
Anticipated expiration: 2032-09-27

Abstract

The utility model belongs to the technical field of sputter coating, a sputter coating tool is disclosed, including chassis, two supporting seats and tray, be provided with the installation face on the chassis, the solid setting of supporting seat, two supporting seat detachably symmetry are installed on the installation face, and the terminal surface that the supporting seat deviates from the installation face is provided with supports the groove, and the tray clamps in supporting the groove, and one side that the tray deviates from the supporting seat is the loading end, and the loading end on a supporting seat is along the direction that deviates from another supporting seat, keeps away from the installation face gradually. The utility model discloses in, the solid setting of supporting seat has avoided forming the space between tray and the chassis for go on under vacuum condition, the supporting seat can transmit the heat more high-efficiently, and because there is not the space between tray and the chassis, avoided the invalid loss of electric thick liquid when electric thick liquid washs, thereby reduced the energy consumption, guaranteed the quality of product.

Description

Sputtering coating jig

Technical Field

The utility model relates to a sputter coating technical field especially relates to a sputter coating tool.

Background

Sputtering coating is a technique of bombarding the surface of a target material by using charged particles in vacuum to deposit the bombarded particles on a substrate. Specifically, argon or other inert gas with the pressure of 0.1-10Pa is introduced into a vacuum chamber, a cathode target is made of a coating material, an anode is loaded with an object to be coated, in the sputtering process, the cathode is pressurized, and the voltage applied to the cathode is negative relative to the anode, so that free argon ions impact the target at high speed to knock out metal particles on the surface of the target, and then the sputtered metal particles are deposited on a coated substrate to form a metal film.

In the prior art, a tray single-point support for supporting a substrate to be plated is arranged on a chassis in a vacuum chamber, a gap is formed between the tray and the chassis, sputtering coating is performed under a vacuum condition, heat cannot be conducted in time when the tray is suspended, the temperature of a substrate product is overhigh, partial plasma can be consumed by the gap between the tray and the chassis when plasma is cleaned, the bias voltage value cannot reach the bias voltage value required by a manufacturing process when cleaning is caused, the quality of the product is influenced, and the product is invalid.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a sputter coating tool when supporting the substrate product, can carry out the heat conduction high-efficiently to avoid the invalid consumption of electric thick liquid.

To achieve the purpose, the utility model adopts the following technical proposal:

sputter coating tool includes:

the chassis is provided with a mounting surface;

the two supporting seats are arranged in a solid manner, the two supporting seats are detachably and symmetrically arranged on the mounting surface, and supporting grooves are formed in the end surfaces of the supporting seats, which are far away from the mounting surface;

the tray is clamped in the supporting groove, one side of the tray, which deviates from the supporting seats, is a bearing surface, and the bearing surface on one supporting seat gradually keeps away from the mounting surface along the direction of deviating from the other supporting seat.

Preferably, the supporting seat is provided with a plurality of supporting grooves, the supporting grooves are sequentially arranged along a first direction, the two supporting seats are arranged side by side along a second direction, the first direction is perpendicular to the second direction, and the first direction and the second direction are both parallel to the mounting surface.

Preferably, the supporting seat deviates from the end face of the mounting face and is further provided with an avoiding groove, one side of the avoiding groove is communicated with the side wall of the supporting seat, and the tray is clamped in the supporting groove and covers the notch of the avoiding groove.

Preferably, the avoiding groove on one of the supporting seats is located on one side of the supporting groove departing from the other supporting seat.

Preferably, the supporting seat comprises a supporting plate, a first retaining wall, a second retaining wall and a plurality of middle retaining walls, wherein the first retaining wall, the second retaining wall and the middle retaining walls are arranged on the supporting plate, the first retaining wall and the second retaining wall are parallel to each other and are arranged at intervals, a plurality of middle retaining walls are parallel to each other and are arranged at intervals in sequence, and a clamp is arranged between the first retaining wall and the second retaining wall, the first retaining wall, the second retaining wall and two adjacent middle retaining walls are arranged on the supporting plate in a surrounding mode to form one supporting groove.

Preferably, the first retaining wall of one of the supporting seats is located on one side, away from the other supporting seat, of the second retaining wall, the distance between the end, away from the mounting surface, of the first retaining wall and the mounting surface is H1, the distance between the end, away from the mounting surface, of the second retaining wall and the mounting surface is H2, and H1 is larger than H2.

Preferably, the thickness of the supporting plate of one supporting seat gradually increases along the direction departing from the other supporting seat.

Preferably, the support plate is provided with a fixing and mounting hole.

Preferably, the chassis includes:

the bottom plate, one side face of the bottom plate is the said installation face;

two spacing strips, parallel to each other and set up with interval in on the installation face, the supporting seat is located two between the spacing strip.

Preferably, the bottom plate is provided with a positioning and mounting hole.

The utility model has the advantages that:

the solid setting of supporting seat has avoided forming the space between tray and the chassis for go on under vacuum condition, the supporting seat can transmit the heat more high-efficiently, and because there is not the space between tray and the chassis, avoided electric thick liquid's ineffective loss when electric thick liquid washs, thereby reduced the energy consumption, guaranteed the quality of product.

Drawings

Fig. 1 is a top view of the chassis and two supporting seats according to the embodiment of the present invention;

fig. 2 is a top view of a chassis according to an embodiment of the present invention;

fig. 3 is a top view of a support base according to an embodiment of the present invention;

fig. 4 is a sectional view of a sputtering coating jig according to an embodiment of the present invention.

In the figure:

1. a chassis;

11. positioning the mounting hole; 101. a base plate; 102. a limiting strip;

2. a supporting seat;

21. a support groove; 22. an avoidance groove; 23. fixing the mounting hole; 201. a support plate; 202. a first retaining wall; 203. a second retaining wall; 204. a middle retaining wall;

3. a tray;

301. a disc main body; 302. and (5) supporting ears.

Detailed Description

Reference will now be made in detail to the embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar parts throughout, or parts having the same or similar functions. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, unless otherwise expressly specified or limited, the terms "connected," "connected," and "fixed" are to be construed broadly and can include, for example, fixed or removable connections, mechanical or electrical connections, direct connections, indirect connections through an intermediary, communication between two elements, or an interaction between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In the description of the present invention, unless otherwise expressly specified or limited, the first feature "on" or "under" the second feature may include both the first and second features being in direct contact, and may also include the first and second features being in contact, not in direct contact, but with another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.

The technical solution of the present invention is further explained by the following embodiments with reference to the accompanying drawings.

As shown in fig. 1-4, the utility model provides a sputtering coating jig, which comprises a chassis 1, two supporting seats 2 and a tray 3. Wherein, be provided with the installation face on the

chassis

1, 2 solid settings of supporting seat, two 2 detachably symmetry of supporting seat are installed on the installation face, and the terminal surface that supporting seat 2 deviates from the installation face is provided with and supports groove 21, and tray 3 clamps in supporting groove 21, and one side that tray 3 deviates from supporting seat 2 is the loading end, and the loading end on one supporting seat 2 is along deviating from the direction of another supporting seat 2, keeps away from the installation face gradually.

The utility model discloses in, 2 solid settings of supporting seat have avoided forming the space between tray 3 and the chassis 1 for go on under the vacuum condition, supporting seat 2 can transmit the heat more high-efficiently, and because there is not the space between tray 3 and the chassis 1, avoided the invalid loss of electric thick liquid when electric thick liquid washs, thereby reduced the energy consumption, guaranteed the quality of product.

In this embodiment, the substrate product to be sputtered is fixed on the carrying surface of the tray 3 by a double-sided tape.

Specifically, a plurality of supporting grooves 21 are arranged on the supporting seat 2, the supporting grooves 21 are sequentially arranged along a first direction, the two supporting seats 2 are arranged side by side along a second direction, the first direction is perpendicular to the second direction, and the first direction and the second direction are both parallel to the mounting surface. Through set up a plurality of support grooves 21 on supporting seat 2 for supporting seat 2 can bear a plurality of trays 3, thereby can improve the processing production efficiency when sputter coating.

More specifically, the end face of the support seat 2 departing from the mounting face is further provided with an avoiding groove 22, one side of the avoiding groove 22 is communicated with the side wall of the support seat 2, and the tray 3 covers the notch of the avoiding groove 22 when being clamped in the support groove 21. By providing the escape groove 22, it is possible to facilitate the operator to take out the tray 3 from the support groove 21.

In this embodiment, each support groove 21 is configured with one and dodges groove 22, is provided with a plurality of grooves 22 of dodging on the supporting seat 2 and sets gradually along the first direction, and the groove 22 of dodging on one supporting seat 2 is located one side that support groove 21 deviates from another supporting seat 2. The avoidance groove 22 is arranged outside the support groove 21, so that the operation convenience of operators is further improved.

Specifically, the supporting seat 2 includes a supporting plate 201, a first retaining wall 202, a second retaining wall 203 and a plurality of intermediate retaining walls 204, the first retaining wall 202, the second retaining wall 203 and the intermediate retaining walls 204 are all disposed on the supporting plate 201, the first retaining wall 202 and the second retaining wall 203 are parallel to each other and are disposed at intervals, the plurality of intermediate retaining walls 204 are parallel to each other and are disposed at intervals in sequence, the supporting seat is clamped between the first retaining wall 202 and the second retaining wall 203, and the first retaining wall 202, the second retaining wall 203 and two adjacent intermediate retaining walls 204 are enclosed on the supporting plate 201 to form a supporting groove 21. Above-mentioned setting for the assembly structure of supporting seat 2 is simpler, has reduced the manufacturing cost of supporting seat 2.

More specifically, the first retaining wall 202 of one support seat 2 is located on one side of the second retaining wall 203 departing from the other support seat 2, the distance between the end of the first retaining wall 202 departing from the mounting surface and the mounting surface is H1, the distance between the end of the second retaining wall 203 departing from the mounting surface and the mounting surface is H2, and H1 is greater than H2. The above arrangement enables the tray 3 to be safely and reliably inclined with the support of the first retaining wall 202 and the second retaining wall 203.

In this embodiment, the avoiding groove 22 is disposed on the first retaining wall 202, the tray 3 includes a tray main body 301 and a supporting lug 302 connected to each other, the tray main body 301 is clamped in the supporting groove 21, the supporting lug 302 is connected to a side wall of the tray main body 301, is located outside the supporting groove 21, is erected on the first retaining wall 202 and the second retaining wall 203, and blocks a notch of the avoiding groove 22 on the first retaining wall 202.

Specifically, the thickness of the support plate 201 of one support seat 2 gradually increases in a direction away from the other support seat 2. With the above arrangement, the bottom of the support groove 21 is inclined, so that the tray 3 can be more reliably supported.

More specifically, the support plate 201 is provided with a fixing mounting hole 23. The fastener can wear to locate in fixed mounting hole 23, fastens connection backup pad 201 and chassis 1.

In this embodiment, the first retaining wall 202 and the second retaining wall 203 extend in the first direction, and four intermediate retaining walls 204 are provided on each support seat 2, so that three support grooves 21 are formed in each support seat 2.

Specifically, the chassis 1 includes a bottom plate 101 and two stopper bars 102. Wherein, one side face of bottom plate 101 is the installation face, and two spacing strips 102 are parallel to each other and set up on the installation face at interval, and supporting seat 2 is located between two spacing strips 102. By the arrangement, the assembly structure of the chassis 1 is simpler, and the preparation cost of the chassis 1 is reduced.

More specifically, the bottom plate 101 is provided with a positioning installation hole 11. The fastener can wear to locate in the location mounting hole 11, and the fastening connection supporting seat 2 and bottom plate 101. The positioning and mounting holes 11 on the bottom plate 101 can be suitable for supporting seats 2 of various dimensions, so that the supporting seats 2 required by the chassis 1 can be replaced according to actual requirements.

In this embodiment, two spacing strips 102 are located at two end edges of the installation surface, the fixing mounting hole 23 and the positioning mounting hole 11 are both threaded holes, and the fastening member is screwed in the fixing mounting hole 23 and the positioning mounting hole 11 to fasten and connect the supporting seat 2 and the chassis 1.

In a specific design, the two support bases 2 are made of aluminum alloy plate, wherein the height of H1 is 22mm in the direction perpendicular to the mounting surface, the height of H2 is 17mm, the size of the support groove 21 is determined by the size of the tray main body 301 in the tray 3, in this embodiment, the depth of the support groove 21 is 15mm, the size in the first direction is 232mm, and the size in the second direction is 252mm, so that an acupuncture point corresponding to the size of the bottom of the tray main body 301 in the tray 3 can be formed.

The bottom plate 101 of chassis 1 is a steel sheet, and two spacing 102 are the billet, and bottom plate 101 and two spacing 102 pass through the mode combination of screw fixation together, and processing M4's the through-going screw hole on the steel sheet is as location mounting hole 11, and open phi 4.5 mm's through-hole on the supporting seat 2 on corresponding position can be with two firm fixes of supporting seat 2 on chassis 1 through the screw.

The height difference between H1 and H2 is determined according to the process requirement, the angle formed by the height difference can be controlled between 1 degree and 3 degrees, and the supporting seat 2 is integrally processed, so that the consistency of the inclination angle of the tray 3 can be effectively ensured, the uniformity of the film thickness of the product can be ensured, the height difference between the left side and the right side and the middle can be ensured to be consistent, and the defect that the film thickness of the side walls at the two sides is lower than that of the side wall in the middle due to the sputtering characteristic can be overcome.

The tray 3 is placed in the supporting groove 21, so that the displacement in the operation process can be effectively prevented, the uniformity of the sputtering film thickness of the product can be improved, and the shielding performance of the product can be improved.

The supporting seat 2 is a solid inclined plane structure, the tray 3 can always keep a certain angle on the chassis 1 through the structure of the supporting seat 2, and meanwhile, the defect that a suspension space is formed between the tray 3 and the chassis 1 when the tray 3 forms an angle can be avoided.

It is obvious that the above embodiments of the present invention are only examples for clearly illustrating the present invention, and are not intended to limit the embodiments of the present invention. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. Any modification, equivalent replacement or improvement made within the spirit and principle of the present invention should be included in the protection scope of the claims of the present invention.

Claims

1. Sputter coating tool, its characterized in that includes:

the chassis (1), there are installation surfaces on the said chassis (1);

the supporting device comprises two supporting seats (2), wherein the supporting seats (2) are arranged in a solid manner, the two supporting seats (2) are detachably and symmetrically arranged on the mounting surface, and a supporting groove (21) is formed in the end surface of each supporting seat (2) deviating from the mounting surface;

the tray (3) is clamped in the supporting groove (21), one side, deviating from the supporting seats (2), of the tray (3) is a bearing surface, and the bearing surface on one supporting seat (2) gradually keeps away from the mounting surface along the direction deviating from the other supporting seat (2).

2. The sputter coating fixture according to claim 1, characterized in that a plurality of supporting grooves (21) are arranged on said supporting base (2), a plurality of said supporting grooves (21) are arranged in sequence along a first direction, two of said supporting bases (2) are arranged side by side along a second direction, said first direction is perpendicular to said second direction, and said first direction and said second direction are both parallel to said mounting surface.

3. The sputtering coating jig according to claim 1, characterized in that an avoiding groove (22) is further provided on an end surface of the supporting base (2) facing away from the mounting surface, one side of the avoiding groove (22) penetrates through the side wall of the supporting base (2), and the notch of the avoiding groove (22) is covered when the tray (3) is clamped in the supporting groove (21).

4. The sputter coating tool according to claim 3, characterized in that said avoiding groove (22) of one of said support seats (2) is located on a side of said support groove (21) facing away from the other of said support seats (2).

5. The sputter coating jig according to claim 1, wherein the support seat (2) comprises a support plate (201), a first retaining wall (202), a second retaining wall (203) and a plurality of intermediate retaining walls (204), the first retaining wall (202), the second retaining wall (203) and the intermediate retaining walls (204) are all arranged on the support plate (201), the first retaining wall (202) and the second retaining wall (203) are parallel to each other and arranged at intervals, the intermediate retaining walls (204) are parallel to each other and arranged at intervals in sequence, and the first retaining wall (202) and the second retaining wall (203) are clamped between, and the first retaining wall (202), the second retaining wall (203) and two adjacent intermediate retaining walls (204) are arranged on the support plate (201) to form one support groove (21).

6. The sputter coating fixture according to claim 5, wherein said first retaining wall (202) of one said support seat (2) is located on a side of said second retaining wall (203) facing away from another said support seat (2), a distance between an end of said first retaining wall (202) facing away from said mounting surface and said mounting surface is H1, a distance between an end of said second retaining wall (203) facing away from said mounting surface and said mounting surface is H2, and said H1 is greater than said H2.

7. The sputter coating tool according to claim 5, characterized in that the thickness of the supporting plate (201) of one of the supporting seats (2) is gradually increased in a direction away from the other supporting seat (2).

8. The sputter coating tool according to claim 5, characterized in that the supporting plate (201) is provided with a fixing mounting hole (23).

9. A sputter coating fixture according to any one of claims 1-8, characterized in that said base plate (1) comprises:

the bottom plate (101), one side face of the bottom plate (101) is the installation face;

the two limiting strips (102) are arranged on the mounting surface in parallel at intervals, and the supporting seat (2) is positioned between the two limiting strips (102).

10. The sputter coating tool according to claim 9, characterized in that the bottom plate (101) is provided with positioning and mounting holes (11).