CN218435923U

CN218435923U - Vacuum electron beam evaporation coating machine

Info

Publication number: CN218435923U
Application number: CN202222722912.2U
Authority: CN
Inventors: 吴平
Original assignee: Anhui Jiashuo Vacuum Technology Co ltd
Current assignee: Anhui Jiashuo Vacuum Technology Co ltd
Priority date: 2022-10-17
Filing date: 2022-10-17
Publication date: 2023-02-03
Anticipated expiration: 2032-10-17

Abstract

The utility model relates to a vacuum electron beam evaporation coating machine, it includes quick-witted case, quick-witted incasement is provided with vacuum cavity and equipment chamber, be provided with loading mechanism in the vacuum cavity, loading mechanism includes the work piece dish, be provided with the base material board in the work piece dish, and the articulated electron gun of installing on one side inner wall of vacuum cavity, fixedly connected with expansion bracket on the bottom inner wall of vacuum cavity, be provided with the crucible on the expansion bracket, and be provided with adjustment mechanism on the expansion bracket, adjustment mechanism is including adjusting the thread section of thick bamboo, adjusting thread section of thick bamboo fixed connection is in the bottom of expansion bracket, and adjustment mechanism still includes adjusting screw, adjusting screw rotates and sets up in the vacuum cavity, and adjusts thread section of thick bamboo thread adapter sleeve and establish on adjusting screw, and in this application, through setting up the work piece dish, can conveniently load the base material board, can promote the expansion bracket through adjusting the thread section of thick bamboo simultaneously and slide the position of being convenient for adjusting the crucible from top to bottom, convenient and electron gun cooperation, hot melt evaporation coating medicinal material.

Description

Vacuum electron beam evaporation coating machine

Technical Field

The application relates to the technical field of evaporation coating machines, in particular to a vacuum electron beam evaporation coating machine.

Background

The electron beam evaporation coating machine is a universal coating machine and is used for coating various single-layer films and multi-layer films. Various hard films and metal films can be plated. The electron beam evaporation coating machine adopts an electron gun evaporation mode, can evaporate any coating material, firstly puts the coating material in a crucible during working, makes an evaporation source into a filament shape, adopts a special control cabinet, applies a strong current and a high voltage to the filament, can generate heat due to the fact that the filament is made of tungsten, can emit electrons at last, adopts a certain magnetic field to gather the filament into a certain shape and pulls the filament onto the crucible, so that an electron beam is formed, and can melt any coating medicinal material due to the fact that the temperature of the electron beam is very high.

However, when the existing electron beam evaporation coating machine adopts different coating medicinal materials, the angle of the electron gun and the height position of the crucible need to be correspondingly adjusted, a plurality of driving systems need to be operated simultaneously, and the operation is troublesome. Accordingly, a vacuum electron beam evaporation coater is provided by those skilled in the art to solve the above problems in the background art.

SUMMERY OF THE UTILITY MODEL

In order to solve the problems in the background art, the application provides a vacuum electron beam evaporation coating machine.

The application provides a vacuum electron beam evaporation coating machine adopts following technical scheme:

the utility model provides a vacuum electron beam evaporation coating machine, includes quick-witted case, quick-witted incasement is provided with vacuum cavity and equipment chamber, be provided with loading mechanism in the vacuum cavity, loading mechanism includes the work piece dish, be provided with the substrate board in the work piece dish, and the articulated electron gun of installing on one side inner wall of vacuum cavity, fixedly connected with expansion bracket on the bottom inner wall of vacuum cavity, be provided with the crucible on the expansion bracket, and be provided with adjustment mechanism on the expansion bracket, adjustment mechanism includes an adjusting thread section of thick bamboo, an adjusting thread section of thick bamboo fixed connection is in the bottom of expansion bracket.

Through adopting above-mentioned technical scheme, through setting up the work piece dish, can conveniently load the substrate board, can promote the expansion bracket through adjusting a screw section of thick bamboo simultaneously and slide the position of being convenient for adjust the crucible from top to bottom, convenient and electron gun cooperation, hot melt evaporation coating film medicinal material.

Preferably, adjustment mechanism still includes adjusting screw, adjusting screw rotates and sets up in the vacuum cavity, and adjusts screw thread section of thick bamboo thread connection cover and establish on adjusting screw, still fixedly connected with slide rail in the vacuum cavity, it is provided with the stopper to slide in the slide rail, the stopper cooperatees with the electron gun, and is provided with the spring between the top inner wall of electron gun and vacuum cavity.

By adopting the technical scheme, the limiting block is arranged, so that the electron gun can be pushed to slide up and down in the sliding rail, and the inclination angle of the electron gun can be conveniently adjusted.

Preferably, the bottom fixedly connected with of stopper triggers a screw thread section of thick bamboo, it is equipped with the trigger screw to trigger screw thread section of thick bamboo thread connection cover, the trigger screw rotates and sets up in the vacuum chamber, fixed mounting has adjusting motor on one side inner wall of vacuum chamber.

Through adopting above-mentioned technical scheme, through setting up the trigger screw rod, can cooperate with triggering the thread section of thick bamboo to promote the stopper and slide from top to bottom.

Preferably, the output shaft of the adjusting motor, the adjusting screw and the trigger screw are fixedly sleeved with chain wheels, and the three chain wheels are in transmission connection with the same chain.

Through adopting above-mentioned technical scheme, through setting up the chain, can rotate three sprocket in step.

Preferably, the loading mechanism further comprises a fixing bolt, the base material plate is sleeved on the fixing bolt, a threaded connecting sleeve at the bottom end of the fixing bolt is provided with a threaded sleeve, the top of the workpiece disc is further fixedly connected with a driving motor, and the driving motor is fixedly installed on the inner wall of the top of the vacuum cavity.

Through adopting above-mentioned technical scheme, through setting up driving motor, can rotate the work piece dish, cooperate through gim peg and swivel nut, can fix the substrate board in the work piece dish for the substrate board rotates along with the work piece dish.

To sum up, the application comprises the following beneficial technical effects:

1. through the chain that sets up, can be so that three sprocket synchronous rotation, and then can rotate adjusting screw and trigger screw through accommodate motor, cooperate through trigger screw and trigger thread section of thick bamboo, can promote the stopper and slide in the slide rail, through stopper and spring to the extrusion of electron gun, can conveniently adjust the inclination of electron gun, cooperate through adjusting screw and regulation thread section of thick bamboo simultaneously, can promote the expansion bracket and slide from top to bottom, conveniently adjust the position of crucible, can conveniently cooperate with the electron gun, evaporate coating film medicinal material hot melt.

2. Can rotate the work piece dish through driving motor to cooperate with the swivel nut through the gim peg in the work piece dish, can load the substrate board in the work piece dish, make the substrate board follow the work piece dish and together rotate, make things convenient for the even condensation of coating medicinal material molecule to form the cladding material on the substrate board.

Drawings

FIG. 1 is a schematic structural diagram of the front appearance of a vacuum electron beam evaporation coater in the embodiment of the present application;

FIG. 2 is a schematic structural view of an internal cross section of a vacuum electron beam evaporation coater according to an embodiment of the present invention;

FIG. 3 is an enlarged view of the portion A of FIG. 2 of a vacuum electron beam evaporation coater according to an embodiment of the present application;

FIG. 4 is an enlarged view of the structure of part B in FIG. 2 of a vacuum electron beam evaporation coater according to an embodiment of the present application.

Description of the reference numerals: 1. a chassis; 2. a vacuum chamber; 3. an equipment chamber; 4. a workpiece tray; 5. a substrate board; 6. an electron gun; 7. a telescopic frame; 8. a crucible; 9. adjusting the threaded cylinder; 10. adjusting the screw rod; 11. a slide rail; 12. a limiting block; 13. a spring; 14. triggering the threaded cylinder; 15. triggering the screw; 16. adjusting the motor; 17. a sprocket; 18. a chain; 19. a fixing bolt; 20. a threaded sleeve; 21. the motor is driven.

Detailed Description

The present application is described in further detail below with reference to figures 1-4.

The embodiment of the application discloses a vacuum electron beam evaporation coating machine. Referring to fig. 1-4, a vacuum electron beam evaporation coating machine comprises a machine case 1, a vacuum cavity 2 and an equipment cavity 3 are arranged in the machine case 1, a loading mechanism is arranged in the vacuum cavity 2 and comprises a workpiece disc 4, a base material plate 5 is arranged in the workpiece disc 4, an electron gun 6 is hinged to the inner wall of one side of the vacuum cavity 2, an expansion bracket 7 is fixedly connected to the inner wall of the bottom of the vacuum cavity 2, a crucible 8 is arranged on the expansion bracket 7, an adjusting mechanism is arranged on the expansion bracket 7 and comprises an adjusting threaded cylinder 9, the adjusting threaded cylinder 9 is fixedly connected to the bottom of the expansion bracket 7, the base material plate 5 can be conveniently loaded by arranging the workpiece disc 4, the expansion bracket 7 can be pushed by the adjusting threaded cylinder 9 to slide up and down, the position of the crucible 8 can be conveniently adjusted, the expansion bracket can be conveniently matched with the electron gun 6, and medicinal materials can be subjected to hot melting evaporation coating.

In this application, adjustment mechanism still includes adjusting screw 10, adjusting screw 10 rotates and sets up in vacuum cavity 2, and adjust the threaded connection cover of a screw thread section of thick bamboo 9 and establish on adjusting screw 10, still fixedly connected with slide rail 11 in vacuum cavity 2, it is provided with stopper 12 to slide in the slide rail 11, stopper 12 cooperatees with electron gun 6, and be provided with spring 13 between the top inner wall of electron gun 6 and vacuum cavity 2, through setting up stopper 12, can promote electron gun 6 and slide from top to bottom in slide rail 11, be convenient for adjust the inclination of electron gun 6.

In this application, stopper 12's bottom fixedly connected with triggers a screw section of

thick bamboo

14, and 14 internal thread connection covers of a trigger screw 15, and trigger screw 15 rotates to set up in vacuum cavity 2, and fixed mounting has adjusting motor 16 on one side inner wall of vacuum cavity 2, through setting up trigger screw 15, can cooperate with a trigger screw section of thick bamboo 14 to promote stopper 12 and slide from top to bottom.

In this application, all fixed the cover is equipped with sprocket 17 on adjusting motor 16's output shaft, adjusting screw 10 and the trigger screw 15, and the transmission is connected with same chain 18 on three sprocket 17, through setting up chain 18, can be so that three sprocket 17 synchronous rotation.

In this application, loading mechanism still includes

gim peg

19, 5 covers of base material board are established on gim peg 19, and the bottom thread connection cover of gim peg 19 is equipped with swivel nut 20, fixedly connected with driving motor 21 is still gone back at the top of work piece dish 4, and driving motor 21 fixed mounting is on the top inner wall of vacuum cavity 2, through setting up driving motor 21, can rotate work piece dish 4, cooperate with swivel nut 20 through gim peg 19, can fix base material board 5 in work piece dish 4, make base material board 5 follow work piece dish 4 and rotate.

The application principle of the vacuum electron beam evaporation coating machine in the embodiment of the application is as follows: during the use, place the coating film medicinal material in crucible 8 earlier, evacuate the air in the vacuum cavity 2 through the evacuation system after that, then start adjusting motor 16, through the chain 18 that sets up, can make three sprocket 17 rotate in step, and then can rotate adjusting screw 10 and trigger screw 15 through adjusting motor 16, cooperate with trigger screw 14 through trigger screw 15, can promote stopper 12 and slide in slide rail 11, through stopper 12 and the extrusion of spring 13 to electron gun 6, can conveniently adjust the inclination of electron gun 6, cooperate with adjusting screw 9 through adjusting screw 10 simultaneously, can promote expansion bracket 7 and slide from top to bottom, conveniently adjust the position of crucible 8, can conveniently cooperate with electron gun 6, evaporate the hot melt of coating film medicinal material, can rotate work piece dish 4 through driving motor 21 simultaneously, and cooperate with swivel nut 20 through the gim peg 19 in the work piece dish 4, can load base material board 5 in work piece dish 4, make base material board 5 follow work piece dish 4 and rotate together, the even condensation of coating film material molecule is convenient on base board 5, form the cladding material.

The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: equivalent changes in structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims

1. The utility model provides a vacuum electron beam evaporation coating machine, includes quick-witted case (1), its characterized in that, be provided with vacuum cavity (2) and equipment chamber (3) in quick-witted case (1), be provided with loading mechanism in vacuum cavity (2), loading mechanism includes work piece dish (4), be provided with substrate board (5) in work piece dish (4), and articulated on one side inner wall of vacuum cavity (2) install electron gun (6), fixedly connected with expansion bracket (7) on the bottom inner wall of vacuum cavity (2), be provided with crucible (8) on expansion bracket (7), and be provided with adjustment mechanism on expansion bracket (7), adjustment mechanism includes adjusting thread section of thick bamboo (9), adjusting thread section of thick bamboo (9) fixed connection is in the bottom of expansion bracket (7).

2. The vacuum electron beam evaporation coater according to claim 1, wherein: adjustment mechanism still includes adjusting screw (10), adjusting screw (10) are rotated and are set up in vacuum cavity (2), and adjust a screw thread section of thick bamboo (9) threaded connection cover and establish on adjusting screw (10), still fixedly connected with slide rail (11) in vacuum cavity (2), it is provided with stopper (12) to slide in slide rail (11), stopper (12) cooperate with electron gun (6), and is provided with spring (13) between the top inner wall of electron gun (6) and vacuum cavity (2).

3. The vacuum electron beam evaporation coater according to claim 2, wherein: the bottom fixedly connected with of stopper (12) triggers a screw thread section of thick bamboo (14), it is equipped with trigger screw rod (15) to trigger screw thread section of thick bamboo (14) internal connection cover, trigger screw rod (15) rotate to set up in vacuum cavity (2), fixed mounting has adjusting motor (16) on one side inner wall of vacuum cavity (2).

4. The vacuum electron beam evaporation coater according to claim 3, wherein: the output shaft of the adjusting motor (16), the adjusting screw (10) and the trigger screw (15) are all fixedly sleeved with chain wheels (17), and the three chain wheels (17) are in transmission connection with the same chain (18).

5. The vacuum electron beam evaporation coater according to claim 1, wherein: loading mechanism still includes gim peg (19), base material board (5) cover is established on gim peg (19), and the bottom thread connection cover of gim peg (19) is equipped with swivel nut (20), fixedly connected with driving motor (21) is still gone back at the top of work piece dish (4), and driving motor (21) fixed mounting is on the top inner wall of vacuum cavity (2).