CN218414611U - LED chip ITO etching belt cleaning device - Google Patents
LED chip ITO etching belt cleaning device Download PDFInfo
- Publication number
- CN218414611U CN218414611U CN202221923642.5U CN202221923642U CN218414611U CN 218414611 U CN218414611 U CN 218414611U CN 202221923642 U CN202221923642 U CN 202221923642U CN 218414611 U CN218414611 U CN 218414611U
- Authority
- CN
- China
- Prior art keywords
- bottom plate
- box body
- led chip
- water
- cleaning device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Images
Landscapes
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The utility model discloses a LED chip ITO etching belt cleaning device, comprises a workbench, the material loading position has set gradually along length direction on the workstation, etching solution tank, no. two etching solution tanks, a QDR pure water flushing tank, no. two QDR pure water flushing tanks, the unloading position, still including being used for transporting the basket that is located material loading on the material loading position in proper order to etching solution tank, a QDR pure water flushing tank, lower material level or transporting in proper order to No. two etching solution tanks, no. two QDR pure water flushing tanks, the manipulator of material level down, the material level is an upper end open-ended box body that is used for placing the basket down, the box body is fixed on the workstation, still include to the water supply installation of water injection in the box body.
Description
Technical Field
The utility model belongs to the ITO etching cleaning technology, concretely relates to LED chip ITO etching belt cleaning device.
Background
In the prior art, as shown in fig. 1, a cleaning device for a wet etching process of an LED chip product is provided, wherein a working table in a housing is sequentially provided with a station in the length direction: 1. loading material before product process operation; 2. a first etching solution tank; 3. a second etching solution tank; 4. a QDR pure water washing tank of the first etching process; 5. a QDR pure water washing tank of the second etching process; 6. and (5) a blanking position after the product process operation is finished. Wherein, the material discharging position is a table top of the workbench.
The ITO cleaning method comprises the following specific steps:
wherein, the product is exposed in the air when the product is placed to the blanking position in the step 1, and the product can be attached to the particles in the air
in the daily production process, as the chip operation is finished in the step 2 and waiting time is provided until a person takes the chip away, the product at the blanking position is always exposed in the air, and the longer the waiting time is, the longer the exposure time is, and the more serious the condition that the product is adhered to particles in the air is.
Therefore, in the prior art, a series of technical problems that tiny particles and impurity ions in the air can be attached to the surface of an LED product, and further, the LED product is subjected to electric leakage, breakdown, severe performance aging and the like exist.
For making tiny particle and foreign ion can not adhere to LED product surface as far as possible in the air now, improve the unloading position, designed the utility model discloses.
Disclosure of Invention
The utility model discloses to prior art's shortcoming, a LED chip ITO etching belt cleaning device has been designed, provide a water supply installation through changing the unloading position into the box body, thereby make when the LED chip is transported to the box body, dip in pure water and preserve, before getting into down one process, can effectively reduce the tiny particle in the air and adhere to the product surface, promote product surface cleanliness factor, thereby reduce the factor that influences the formation and the electrical characteristic of next process geometric features, can promote LED product yield.
The utility model discloses a technical scheme as follows: an LED chip ITO etching and cleaning device comprises a workbench, wherein a feeding position, a first etching solution tank, a second etching solution tank, a first QDR pure water flushing tank, a second QDR pure water flushing tank and a discharging position are sequentially arranged on the workbench along the length direction,
also comprises a manipulator which is used for transferring the lifting basket loaded with the LED chip on the loading position to a first etching solution tank, a first QDR pure water washing tank and a discharging position in turn or transferring the lifting basket to a second etching solution tank, a second QDR pure water washing tank and a discharging position in turn,
the feeding position is a box body with an opening at the upper end and used for placing a lifting basket, the box body is fixed on the workbench,
and the water supply device is used for injecting water into the box body.
On the basis of the above scheme, as preferred, water supply installation is including setting up outlet, the water inlet on the box body, the box body include the bottom plate and with this bottom plate fixed connection's cyclic annular curb plate all around, the bottom plate includes upper plate, lower plate, has the interval between upper plate and the lower plate, has the through-hole that a plurality of water supply drenches the upper plate top on the upper plate, the water inlet is located the upper plate, the cyclic annular curb plate between the lower plate, the delivery port is located the lower plate.
On the basis of the scheme, as the optimization, the water inlet is connected with a water source through a water inlet pipeline, and the water outlet is provided with a drain valve.
On the basis of above-mentioned scheme, as preferred, the both sides fixed mounting of unloading position has the sensor that is used for detecting whether the unloading position has the hand-basket, sensor electric connection pilot lamp.
On the basis of the scheme, preferably, the workbench is positioned in the casing, the rear side of the blanking position is a window which is arranged on the casing and is used for manually extracting the lifting basket, and the indicating lamps are fixedly arranged on the casing on two sides of the window.
On the basis of the above scheme, preferably, the sensor is an infrared sensor, and two sensors are symmetrically and fixedly arranged on the carriers at two sides of the blanking position.
On the basis of above-mentioned scheme, as preferred, fixed mounting has level sensor on the lateral wall in the box body, level sensor with install control valve electric connection on the inlet channel.
Compared with the prior art, the utility model discloses following beneficial effect has:
through changing the unloading position into the box body and providing a water supply installation to when making in the LED chip transports to the box body, soak the pure water and preserve, before getting into next process, can effectively reduce the tiny particle in the air and adhere to the product surface, promote product surface cleanliness factor, thereby reduce the factor that influences the formation and the electrical characteristics of next process geometric characteristics, can promote LED product yield.
Drawings
FIG. 1 is a schematic view of a cleaning apparatus;
fig. 2 is a schematic structural diagram of the present invention.
Detailed Description
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following description will refer to the accompanying drawings to describe specific embodiments of the present invention. It is obvious that the drawings in the following description are only examples of the invention, and that for a person skilled in the art, other drawings and embodiments can be obtained from these drawings without inventive effort.
As shown in FIG. 2, an ITO etching and cleaning device for LED chips comprises a worktable 10, wherein a feeding position 1, an etching solution tank 2, an etching solution tank 3, a QDR pure water flushing tank 4, a QDR pure water flushing tank 5 and a discharging position 6 are sequentially arranged on the worktable along the length direction,
also comprises a manipulator which is used for transferring the lifting basket loaded with the LED chip on the loading position to a first etching solution tank, a first QDR pure water washing tank and a discharging position in turn or transferring the lifting basket to a second etching solution tank, a second QDR pure water washing tank and a discharging position in turn,
the feeding position is a box body with an opening at the upper end and used for placing a lifting basket, the box body is fixed on the workbench,
the water-saving box also comprises a water supply device for injecting water into the box body.
Through changing the unloading position into the box body and providing a water supply installation to when making in the LED chip transports to the box body, soak the pure water and preserve, before getting into next process, can effectively reduce the tiny particle in the air and adhere to the product surface, promote product surface cleanliness factor, thereby reduce the factor that influences the formation and the electrical characteristics of next process geometric characteristics, can promote LED product yield.
The water supply device can be an independent water source, water is injected into the box body through the pump, and the water source is pure water.
The water supply installation also can be the mixed structure who directly is connected with the box body, it is concrete, water supply installation is including setting up outlet 11 on the box body, water inlet 12, the box body include the bottom plate and with this bottom plate fixed connection's cyclic annular curb plate all around, the bottom plate includes upper plate 13, lower plate 14, the interval has between upper plate and the lower plate, the through-hole 15 that a plurality of supplied water was gone up to the upper plate top has on the upper plate, the water inlet is located the upper plate, cyclic annular curb plate between the lower plate, the delivery port is located the lower plate, the water inlet passes through the inlet channel and connects the water source, set up the control valve on the inlet channel, delivery port installation drain valve.
The bottom plate is composed of an upper bottom plate and a lower bottom plate which are arranged at intervals, and the water inlet is positioned on the annular side plate between the upper bottom plate and the lower bottom plate. Pure water can only permeate above the upper bottom plate from the through hole in an overflow mode, and water is prevented from splashing out of the box body during water injection.
The control valve and the drain valve can be controlled manually or automatically.
Wherein, automated control, it is specific, the both sides fixed mounting of unloading material level has the sensor that is used for detecting whether there is the hand-basket in the unloading position, sensor electric connection pilot lamp.
The workstation is located the casing, and the rear side of unloading material level is for setting up the window that supplies the manual work to draw the hand-basket on the casing, and pilot lamp fixed mounting is on the casing of window both sides.
The sensor 16 is an infrared sensor, and two sensors are symmetrically and fixedly arranged on the carriers at two sides of the blanking position.
And a liquid level sensor 17 is fixedly mounted on the side wall in the box body, and the liquid level sensor is electrically connected with a control valve mounted on the water inlet pipeline.
Under initial state, the drain valve is closed, and the control valve is opened, to the water injection in the box body, level sensor detects the water level, reaches predetermined water level, closes the control valve, arranges the hand-basket in the box body after manipulator, and infrared sensor detects that the blanking position has the hand-basket, and transmission signal to pilot lamp, pilot lamp are bright, remind (reputation warning) operating personnel to draw the hand-basket. After an operator draws the lifting basket, the infrared sensor transmits a signal to the indicating lamp according to a detection result, the indicating lamp is turned off, the signal is transmitted to the drain valve, the drain valve is opened, water is drained, the drain valve is closed, the signal is transmitted to the control valve, the control valve is opened, water is injected into the box body, the liquid level is detected, a preset water level is reached, next time of placing a basket by the manipulator, manually taking the basket and performing reciprocating circulation.
The two sides of the box body are provided with ear plates 18 which are fixedly connected with the workbench through bolts.
It should be noted that the above embodiments can be freely combined as necessary. The foregoing is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, a plurality of modifications and decorations can be made without departing from the principle of the present invention, and these modifications and decorations should also be regarded as the protection scope of the present invention.
Claims (7)
1. An LED chip ITO etching and cleaning device comprises a workbench, wherein a feeding position, a first etching solution tank, a second etching solution tank, a first QDR pure water flushing tank, a second QDR pure water flushing tank and a discharging position are sequentially arranged on the workbench along the length direction,
also comprises a manipulator which is used for transferring the lifting basket loaded with the LED chip on the loading position to a first etching solution tank, a first QDR pure water washing tank and a discharging position in turn or transferring the lifting basket to a second etching solution tank, a second QDR pure water washing tank and a discharging position in turn,
it is characterized in that the material discharging position is a box body with an opening at the upper end and used for placing a lifting basket, the box body is fixed on a workbench,
and the water supply device is used for injecting water into the box body.
2. The LED chip ITO etching and cleaning device of claim 1, wherein the water supply device comprises a water outlet and a water inlet arranged on the box body, the box body comprises a bottom plate and an annular side plate fixedly connected with the periphery of the bottom plate, the bottom plate comprises an upper bottom plate and a lower bottom plate, a space is arranged between the upper bottom plate and the lower bottom plate, the upper bottom plate is provided with a plurality of through holes for supplying water to the upper part of the upper bottom plate, the water inlet is arranged on the annular side plate between the upper bottom plate and the lower bottom plate, and the water outlet is arranged on the lower bottom plate.
3. The LED chip ITO etching and cleaning device of claim 2, wherein the water inlet is connected to a water source through a water inlet pipe, and the water outlet is provided with a drain valve.
4. The LED chip ITO etching and cleaning device of claim 1, wherein sensors for detecting whether a basket exists at the blanking position are fixedly installed at two sides of the blanking position, and the sensors are electrically connected with indicator lamps.
5. The LED chip ITO etching and cleaning device of claim 4, wherein the worktable is located in the casing, the rear side of the blanking position is a window for manually extracting the basket, and the indicator lamps are fixedly installed on the casing on both sides of the window.
6. The LED chip ITO etching and cleaning device of claim 4, wherein the sensor is an infrared sensor, and two sensors are symmetrically and fixedly arranged on the carrier at two sides of the blanking position.
7. The LED chip ITO etching and cleaning device of claim 3, wherein a liquid level sensor is fixedly mounted on the side wall inside the box body, and the liquid level sensor is electrically connected with a control valve mounted on the water inlet pipeline.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202221923642.5U CN218414611U (en) | 2022-07-25 | 2022-07-25 | LED chip ITO etching belt cleaning device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN202221923642.5U CN218414611U (en) | 2022-07-25 | 2022-07-25 | LED chip ITO etching belt cleaning device |
Publications (1)
Publication Number | Publication Date |
---|---|
CN218414611U true CN218414611U (en) | 2023-01-31 |
Family
ID=85014549
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN202221923642.5U Active CN218414611U (en) | 2022-07-25 | 2022-07-25 | LED chip ITO etching belt cleaning device |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN218414611U (en) |
-
2022
- 2022-07-25 CN CN202221923642.5U patent/CN218414611U/en active Active
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN210632608U (en) | Glass cleaning and drying integrated machine | |
CN218414611U (en) | LED chip ITO etching belt cleaning device | |
CN204809245U (en) | Wet process insert machine that direct -furnish was washed by water | |
CN107587186B (en) | Automatic electroplating production line for vacuum aqueous solution | |
TWI752670B (en) | Vertical electroplating module for fan-out panel-level chip and electroplating method therefor | |
JP2001244233A (en) | Wet treatment device | |
CN210168303U (en) | Automatic device that adds of PCB board liquid medicine | |
CN103295940A (en) | Automatic liquid supplementing system of metal film stripping and cleaning equipment | |
CN215940881U (en) | Automatic cleaning machine for silicon carbide wafer paster | |
CN214916063U (en) | Sectional sampling reaction kettle | |
CN211697762U (en) | Oil field production water on-line monitoring device | |
CN112254898A (en) | Tap produces gas tightness testing arrangement | |
CN203884560U (en) | Fish sucking and conveying device | |
CN212874563U (en) | Auxiliary equipment for reworking of film-coated battery cell | |
CN220834886U (en) | Anti-overflow device for top tank of atomizer | |
CN214600615U (en) | A pulsation steam vacuum cleaning case for photoelectric parts | |
CN217217047U (en) | Full-automatic circuit board developing, etching and film-removing continuous production equipment | |
CN220800874U (en) | Window cleaning machine | |
CN220336082U (en) | Siphon drainage device suitable for in waste water station | |
CN215391356U (en) | Automatic cleaning device for aeration equipment | |
CN217735878U (en) | Ship unloaders tensioning hydraulic system | |
CN220367891U (en) | Overflow bubbling mechanism of degumming machine | |
CN217740480U (en) | Pure water recovery device of wafer wet method equipment | |
CN104095019A (en) | Fish pumping and conveying device | |
CN219745662U (en) | Cleaning assembly and cleaning equipment |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
GR01 | Patent grant | ||
GR01 | Patent grant |