CN218394493U - Vacuum-pumping treatment device for leftover material liquid in curtain coating - Google Patents
Vacuum-pumping treatment device for leftover material liquid in curtain coating Download PDFInfo
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- CN218394493U CN218394493U CN202222480295.XU CN202222480295U CN218394493U CN 218394493 U CN218394493 U CN 218394493U CN 202222480295 U CN202222480295 U CN 202222480295U CN 218394493 U CN218394493 U CN 218394493U
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Abstract
The utility model discloses a curtain-type coating rim charge feed liquid vacuum-pumping treatment device, which is used for automatically and continuously extracting rim charge feed liquid in a vacuum state and comprises a vacuum tank, a vacuum-pumping pump and a material-pumping pump, wherein the vacuum-pumping pump is connected to the top end of the vacuum tank through a pumping pipeline and is communicated with a cavity at the upper side inside the vacuum tank for pumping air to form a negative pressure cavity; the material pumping pump is connected to the bottom end of the vacuum tank through a material pumping pipeline; the top end of the vacuum tank is also connected with a negative pressure pipe, the lower end of which extends into the tank body and is used for adsorbing and collecting the material liquid under negative pressure, and the lower end of the negative pressure pipe is connected with a guide pipe, the discharge port of which is close to the inner wall surface of the vacuum tank, in an extending way; through the honeycomb duct during the rim charge feed liquid gets into the internal feed liquid of jar along jar internal wall unhurried current, prevent that the direct whereabouts of rim charge feed liquid from splashing in the internal feed liquid of jar to the vacuum tank and initiate the bubble to block up or damage the evacuation pump, effectively guarantee the reliable continuous operation of coating production.
Description
[ technical field ] A method for producing a semiconductor device
The utility model relates to a guide technique of feed liquid in the coating machine especially relates to a vacuum pumping processing apparatus of leftover bits feed liquid in curtain-type coating.
[ background of the invention ]
In the production and processing process of the coating machine, the marginal material liquid (generally adopting glue) on two sides of a curtain type coating head on the coating machine needs to be guided and led away in time; namely, when the liquid level reaches a high liquid level, the material pumping pump starts to pump materials, and when the liquid level reaches a low liquid level, the material pumping pump stops pumping materials.
In the coating process, the level of the material surface in the vacuum tank must be controlled well, because when the liquid level in the vacuum tank is too high, the material liquid and the air can be pumped out by the vacuum pump, so that the centrifugal fan blade of the vacuum pump is blocked and overloaded, and then the vacuum pump is stopped by alarming.
In addition, when present rim charge feed liquid inhales the vacuum tank, because go into the jar in the time liquid directly inhale spout on following material liquid level, this just leads to the charge level because splash impact, form more water material papaw, and water material papaw can not be obtained by level sensor response, leads to water material papaw to gush up to the face always, and is taken away by the evacuation pump, can cause the material sediment to get into the evacuation pump in the same way, and then the centrifugal impeller of card dead pump leads to the pump to overload and reports to the police and arouse that whole coating machine shuts down.
Therefore, there is an urgent need for improvement of the rim charge liquid supply system in the existing curtain coater to ensure reliable and normal coating production.
[ Utility model ] content
The utility model provides a vacuum pumping processing apparatus of rim charge feed liquid in curtain-type coating adopts many gradient liquid level control, effectively prevents the internal foaming of vacuum tank and blocks up the evacuation pump, improves the reliability and the stability of production.
The utility model discloses the technical scheme that at least one embodiment adopted is:
the embodiment of the utility model provides a vacuum pumping treatment device for a leftover material liquid in curtain coating, which is used for automatically and continuously pumping the leftover material liquid in a vacuum state and comprises a vacuum tank, a vacuum pumping pump and a material pumping pump;
the vacuum pumping pump is connected to the top end of the vacuum tank through an air pumping pipeline and is communicated with the cavity on the upper side inside the vacuum tank to pump air to form a negative pressure cavity;
the material pumping pump is connected to the bottom end of the vacuum tank through a material pumping pipeline and pumps and discharges the rim charge liquid collected at the lower side in the vacuum tank;
the top end of the vacuum tank is also connected with a negative pressure pipe, the lower end of the negative pressure pipe extends into the tank body, the negative pressure pipe is used for conducting negative pressure adsorption and collection on the material liquid on two sides in curtain coating through a negative pressure cavity and then automatically leading in the material liquid, the lower end of the negative pressure pipe is connected with a guide pipe, the hard rigid pipe body is adopted in the extending connection, the phenomenon that the rim charge liquid directly falls into the material liquid in the tank body of the vacuum tank to splash and cause bubbles is prevented, the discharge port is arranged close to the inner wall surface of the vacuum tank, and the guide pipe is convenient for guiding the rim charge liquid and then slowly flowing into the material liquid in the tank body along the inner wall of the tank body;
the vacuum tank is internally provided with a low liquid level probe, a high liquid level probe and an ultrahigh liquid level alarm probe in sequence from low to high along the height direction, the vacuum tank is internally provided with the low liquid level probe, the high liquid level probe and the ultrahigh liquid level alarm probe in sequence from low to high along the height direction, when the rim charge liquid collected by negative pressure in the vacuum tank is positioned at the high liquid level probe, the material pumping pump automatically and continuously discharges materials, and when the rim charge liquid collected by negative pressure in the vacuum tank is lower than the detection liquid level of the low liquid level probe, the material pumping pump stops discharging materials; and when the rim charge liquid collected by the negative pressure in the vacuum tank is higher than the liquid level height detected by the ultrahigh liquid level alarm probe, alarming and stopping.
Preferably, the discharge port at the lower end of the flow guide pipe is higher than the liquid level corresponding to the ultrahigh liquid level alarm probe.
Preferably, the draft tube is an arc-shaped bent tube made of a copper tube.
Preferably, the upper end of the flow guide pipe is connected with a movable pipe joint in a sleeved and buckled manner, and a threaded pipe matched with the movable pipe joint is arranged at the corresponding extending end of the negative pressure pipe extending into the vacuum tank.
Preferably, the discharge hole at the lower end of the flow guide pipe is an inclined opening, the pipe orifice is obliquely arranged, the lower side of the pipe orifice is tightly attached to the inner wall surface of the vacuum tank, and the upper side of the pipe orifice is far away from the inner wall surface of the vacuum tank, so that negative pressure conduction and rim charge liquid outflow are facilitated.
Preferably, the negative pressure pipe is a stainless steel pipe made of SUS304 or SUS316, and the connection part of the negative pressure pipe and the top end of the vacuum tank is fixed by welding.
The beneficial effects of the utility model are that:
because the low liquid level probe, the high liquid level probe and the ultrahigh liquid level alarm probe are arranged in the vacuum tank along the height direction, the three liquid level probes are respectively matched with the material pumping pump and the vacuum pumping pump, the liquid level of the rim charge material liquid collected by negative pressure in the vacuum tank is effectively controlled, and the situation that the vacuum pumping pump is damaged to damage the material liquid and cannot work normally is prevented.
In addition, a diversion pipe made of a hard rigid pipe body extends in the vacuum tank body at the lower end of the negative pressure pipe, a discharge port at the lower end of the diversion pipe is arranged close to the inner wall surface of the vacuum tank, and after the diversion guiding is carried out on the material liquid, the material liquid slowly flows along the inner wall of the tank body and enters the material liquid in the tank body, so that the phenomenon that the material liquid directly falls into the material liquid to splash to cause bubbles is effectively prevented, the phenomenon that the material liquid bubbles are pumped away to the inside of a centrifugal impeller by a vacuum pump to cause blocking overload alarm and halt is avoided, and the vacuum pump is caused to suck material slag to influence normal work.
[ description of the drawings ]
Fig. 1 is a schematic front view of an embodiment of the present invention;
FIG. 2 is a schematic view of a portion of the enlarged structure of FIG. 1;
reference numerals:
1. a vacuum tank; 2. a vacuum pump is pumped; 3. a material pumping pump; 4. an air extraction pipeline; 5. a negative pressure chamber; 6. a material pumping pipeline; 7. a negative pressure tube; 70. a threaded pipe; 8. a flow guide pipe; 80. a discharge port; 9. a low liquid level probe; 10. a high liquid level probe; 11. an ultra-high liquid level alarm probe; 12. a movable pipe joint.
[ detailed description ] embodiments
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.
A curtain type coating offcut feed liquid vacuumizing treatment device is shown in figures 1 and 2 and is used for automatically and continuously sucking the offcut feed liquid in a vacuum state and comprises a vacuum tank 1, a vacuumizing pump 2 and a material sucking pump 3; the vacuum pumping pump 2 is connected to the top end of the vacuum tank 1 through an air pumping pipeline 4 and is communicated with a cavity on the upper side inside the vacuum tank 1 for pumping air to form a negative pressure cavity 5; the material pumping pump 3 is connected to the bottom end of the vacuum tank 1 through a material pumping pipeline 6 and pumps and discharges the rim charge liquid collected at the lower side inside the vacuum tank 1.
As shown in fig. 1 and fig. 2, the top end of the vacuum tank 1 is further connected with a negative pressure pipe 7, the lower end of which extends into the tank body and automatically leads in after the negative pressure adsorption and collection of the feed liquid on the two sides in curtain coating through a negative pressure cavity, the lower end of the negative pressure pipe 7 is connected with a guide pipe 8, the guide pipe adopts a rigid pipe body, the phenomenon that the edge feed liquid directly falls into the feed liquid in the tank body of the vacuum tank 1 to splash and cause bubbles is prevented, the discharge port is arranged close to the inner wall surface of the vacuum tank 1, and the guide pipe facilitates the guiding and guiding of the edge feed liquid and then slowly flows along the inner wall of the tank body to enter the feed liquid in the tank body; the vacuum tank 1 is also sequentially provided with a low liquid level probe 9, a high liquid level probe 10 and an ultrahigh liquid level alarm probe 11 from low to high along the height direction.
When the vacuum tank works, when the rim charge liquid collected by negative pressure in the vacuum tank 1 is lower than the detection liquid level of the low liquid level probe 9, the material pumping pump 3 stops discharging; when the rim charge liquid collected by the negative pressure in the vacuum tank 1 is positioned at the high liquid level probe 10, the material pumping pump 3 automatically and continuously discharges materials, and when the rim charge liquid collected by the negative pressure in the vacuum tank 1 is lower than the detection liquid level of the low liquid level probe 9, the material pumping pump 3 stops discharging materials; when the rim charge liquid collected by the negative pressure in the vacuum tank 1 is higher than the liquid level height detected by the ultrahigh liquid level alarm probe 11, the alarm is stopped.
As shown in fig. 1 and 2, the negative pressure pipe 7 is a stainless steel pipe made of SUS304 or SUS316, and is fixed by welding at the connection point with the top end of the vacuum tank 1. The discharge hole at the lower end of the flow guide pipe 8 is arranged higher than the liquid level corresponding to the ultrahigh liquid level alarm probe 11, wherein the flow guide pipe 8 is an arc-shaped bent pipe made of a copper pipe; the upper end of the draft tube 8 is also connected with a movable tube joint 12 in a sleeved and buckled manner, and the extending end of the corresponding negative pressure tube 7 extending into the vacuum tank 1 is provided with a threaded tube 70 matched with the movable tube joint 12. The discharge port 80 at the lower end of the flow guide tube 8 is an inclined opening with a tube opening inclined, the lower side of the tube opening clings to the inner wall surface of the vacuum tank 1, and the upper side of the tube opening is far away from the inner wall surface of the vacuum tank 1, so that negative pressure conduction and rim charge liquid outflow are facilitated.
Because the lower extreme of negative pressure pipe 7 is connected with honeycomb duct 8 that adopts the rigid body to make, through the discharge gate near vacuum tank 1 internal face setting of honeycomb duct 8 lower extreme, carry out the drainage direction back edge jar internal wall slow flow entering jar internal feed liquid to the side material feed liquid, effectively prevent that the side material feed liquid from directly falling to splashing and initiating the bubble in the feed liquid, effectively prevent that evacuation pump 2 from inhaling the material sediment and influencing normal work, effectively guarantee the normal work of curtain formula coating.
In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", etc. indicate the position or positional relationship based on the position or positional relationship shown in the drawings, or the position or positional relationship that the utility model is usually placed when using, and are only for convenience of describing the present invention and simplifying the description, but do not indicate or imply that the device or element referred to must have a specific position, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention.
The above-mentioned embodiments are only preferred embodiments of the present invention, not limiting the scope of the present invention, and all equivalent changes made by the shape, structure and principle of the present invention should be covered by the protection scope of the present invention.
Claims (6)
1. A curtain type vacuum pumping treatment device for leftover material liquid in coating is used for automatically and continuously pumping the leftover material liquid in a vacuum state and is characterized by comprising a vacuum tank, a vacuum pumping pump and a material pumping pump;
the vacuum pumping pump is connected to the top end of the vacuum tank through an air pumping pipeline and is communicated with the cavity on the upper side inside the vacuum tank to pump air to form a negative pressure cavity;
the material pumping pump is connected to the bottom end of the vacuum tank through a material pumping pipeline and pumps and discharges the rim charge liquid collected at the lower side inside the vacuum tank;
the top end of the vacuum tank is also connected with a negative pressure pipe, the lower end of the negative pressure pipe extends into the tank body, the negative pressure pipe is used for conducting negative pressure adsorption and collection on the material liquid on two sides in curtain coating through a negative pressure cavity and then automatically leading in, the lower end of the negative pressure pipe is connected with a guide pipe, the hard rigid pipe body is adopted in an extending mode, the phenomenon that the rim charge liquid directly falls into the material liquid in the tank body of the vacuum tank to splash and cause bubbles is prevented, the discharge port is arranged close to the inner wall surface of the vacuum tank, and the guide pipe is convenient for guiding the rim charge liquid and then slowly flowing into the material liquid in the tank body along the inner wall of the tank body;
a low liquid level probe, a high liquid level probe and an ultrahigh liquid level alarm probe are sequentially arranged in the vacuum tank from low to high along the height direction, when the rim charge liquid collected by negative pressure in the vacuum tank is positioned on the high liquid level probe, the material pumping pump automatically and continuously discharges materials, and when the rim charge liquid collected by negative pressure in the vacuum tank is lower than the detection liquid level of the low liquid level probe, the material pumping pump stops discharging materials; and when the rim charge liquid collected by the negative pressure in the vacuum tank is higher than the liquid level height detected by the ultrahigh liquid level alarm probe, alarming and stopping.
2. The vacuum-pumping treatment device for the edge-trim feed liquid in curtain coating according to claim 1, characterized in that: and the discharge port at the lower end of the flow guide pipe is higher than the liquid level corresponding to the ultrahigh liquid level alarm probe.
3. The vacuum-pumping treatment device for the edge-trim feed liquid in curtain coating according to claim 2, characterized in that: the honeycomb duct is an arc-shaped bent pipe made of copper pipes.
4. The vacuum-pumping treatment device for the edge-trim feed liquid in curtain coating according to claim 3, characterized in that: the upper end of the flow guide pipe is connected with a movable pipe joint in a sleeved and buckled mode, and a threaded pipe matched with the movable pipe joint is arranged at the corresponding extending end, extending into the vacuum tank, of the negative pressure pipe.
5. The apparatus for vacuum-pumping treatment of the edge-trim feed liquid in curtain coating according to claim 3, wherein: the discharge hole at the lower end of the flow guide pipe is an inclined opening, the pipe opening is obliquely arranged, the lower side of the pipe opening is tightly attached to the inner wall surface of the vacuum tank, and the upper side of the pipe opening is far away from the inner wall surface of the vacuum tank, so that negative pressure conduction and rim charge liquid outflow are facilitated.
6. The apparatus for vacuum-pumping treatment of the edge-trim feed liquid in curtain coating according to claim 1, wherein: the negative pressure pipe is a stainless steel pipe made of SUS304 or SUS316, and the joint of the negative pressure pipe and the top end of the vacuum tank is fixed by welding.
Priority Applications (1)
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CN202222480295.XU CN218394493U (en) | 2022-09-19 | 2022-09-19 | Vacuum-pumping treatment device for leftover material liquid in curtain coating |
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CN202222480295.XU CN218394493U (en) | 2022-09-19 | 2022-09-19 | Vacuum-pumping treatment device for leftover material liquid in curtain coating |
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CN218394493U true CN218394493U (en) | 2023-01-31 |
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CN202222480295.XU Active CN218394493U (en) | 2022-09-19 | 2022-09-19 | Vacuum-pumping treatment device for leftover material liquid in curtain coating |
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