CN218383250U - Measuring device for CUSP magnetic field zero magnetic surface and magnetic field intensity of single crystal furnace - Google Patents
Measuring device for CUSP magnetic field zero magnetic surface and magnetic field intensity of single crystal furnace Download PDFInfo
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- CN218383250U CN218383250U CN202222633719.1U CN202222633719U CN218383250U CN 218383250 U CN218383250 U CN 218383250U CN 202222633719 U CN202222633719 U CN 202222633719U CN 218383250 U CN218383250 U CN 218383250U
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Abstract
The utility model provides a zero magnetic surface in single crystal growing furnace CUSP magnetic field and magnetic field intensity's measuring device can set up in single crystal furnace body up end top, including supporting component and scale pole, the supporting component sets up on the single crystal furnace body up end, the vertical setting of scale pole with supporting component swing joint, the scale pole can reciprocate and can follow single crystal furnace body up end radial movement, scale pole bottom is equipped with the gaussmeter probe. The beneficial effects of the utility model are that realized that the accurate measurement of magnetic field intensity on the accurate positioning of single crystal growing furnace CUSP magnetic field zero magnetic surface and the zero magnetic surface, improved measurement accuracy, guaranteed the realization of drawing single crystal technology, be favorable to promoting the single crystal quality, simple structure simple operation.
Description
Technical Field
The utility model belongs to the technical field of the monocrystalline silicon drawing, especially, relate to a measuring device of zero magnetic surface in single crystal growing furnace CUSP magnetic field and magnetic field intensity.
Background
In the process of producing single crystals by the Czochralski method, due to temperature gradient, gravity, autorotation of a crucible crystal bar and the like, complicated convection exists in a melt in a crucible, and the convection is more severe in a large-diameter single crystal furnace. The thermal convection causes the axial and radial nonuniformity of the single crystal rod during crystallization, causes the nonuniform resistivity of the single crystal rod and even defects, and simultaneously causes the high oxygen content of the single crystal rod, thus being not satisfactory. The magnetic field is added in the crystal growth process to effectively inhibit thermal convection. At present, a more advanced non-uniform magnetic field, namely a CUSP magnetic field (CUSP magnetic field), is used in a large-diameter single crystal furnace. In the magnetic field structure of CUSP, there is a zero magnetic plane where the longitudinal component of the magnetic field is substantially zero and only the transverse magnetic field component. For different CUSP magnetic fields and different drawn products, the positions of the zero magnetic surfaces in the silicon solution and the magnetic field intensity on the zero magnetic surfaces can influence the convection of the silicon solution, thereby influencing the oxygen content of the single crystal, RRV/ORG and other quality parameters.
In the prior art, when a gaussmeter is used for testing the magnetic field intensity of the CUSP, the height of a zero magnetic surface and the magnetic field intensity on the zero magnetic surface are usually measured in a handheld mode, the accurate positioning of the zero magnetic surface and the accurate measurement of the magnetic field intensity on the zero magnetic surface cannot be realized, the measurement error is large, the feasibility of the process cannot be guaranteed, and the problem of influencing the quality of single crystals is caused.
SUMMERY OF THE UTILITY MODEL
In order to solve the technical problem, the utility model provides a zero magnetic surface in single crystal growing furnace CUSP magnetic field and magnetic field intensity's measuring device, the effectual zero magnetic surface in single crystal growing furnace CUSP magnetic field height of having solved and the big problem of magnetic field intensity measuring error have overcome prior art's not enough.
The utility model adopts the technical proposal that: the utility model provides a measuring device of zero magnetic surface in single crystal growing furnace CUSP magnetic field and magnetic field intensity, can set up in single crystal furnace body up end top, includes supporting component and scale pole, supporting component sets up on the single crystal furnace body up end, the vertical setting of scale pole with supporting component swing joint, the scale pole can reciprocate and can follow single crystal furnace body up end radial movement, scale pole bottom is equipped with the gaussmeter probe.
Furthermore, the supporting component comprises a supporting piece, the supporting piece is arranged above the upper end face of the single crystal furnace body, a sliding rail is arranged on the supporting piece, a scale bar is arranged along the length of the sliding rail, and the scale bar can move along the sliding rail.
Furthermore, the slide rail is provided with a strip hole, and the scale rod penetrates through the strip hole and can move along the strip hole.
Further, a slide block is arranged on the scale rod and detachably connected with the scale rod, the scale rod can move up and down and axially rotate, a rotating handle is arranged at the top of the scale rod, and the slide block can move along the slide rail.
Further, a first positioning device is arranged on the sliding block and used for fixing the scale rod.
Further, a fixing plate is arranged at the bottom of the scale rod, and the gaussmeter probe is arranged on the fixing plate.
Further, the gauss meter comprises a first gauss meter and a second gauss meter, the measuring plane of the probe of the first gauss meter is horizontally arranged, the measuring plane of the probe of the second gauss meter is vertically arranged, and the measuring ends of the probe of the first gauss meter and the probe of the second gauss meter are at the same height.
Further, the measuring plane of the gauss meter probe is horizontally arranged, and the fixing plate can drive the gauss meter probe to rotate around the measuring end of the probe on a vertical plane.
Further, the bottom of the scale rod is provided with a second positioning device, and the second positioning device can fix the measuring plane of the gaussmeter probe in the horizontal direction and the vertical direction.
Furthermore, a leveling device is arranged on the supporting component and used for adjusting the levelness of the supporting component
The utility model has the advantages and positive effects that: by adopting the technical scheme, the precise positioning of the zero magnetic surface of the CUSP magnetic field of the single crystal furnace and the accurate measurement of the magnetic field intensity on the zero magnetic surface are realized, the measurement precision is improved, the realization of a single crystal pulling process is ensured, the single crystal quality is favorably improved, and the single crystal pulling device is simple in structure and convenient to operate.
Drawings
FIG. 1 is a schematic structural diagram of a measuring device for a CUSP magnetic field zero magnetic surface and magnetic field intensity of a single crystal furnace in an embodiment of the invention.
FIG. 2 is a side view of the single crystal furnace CUSP magnetic field zero magnetic surface and magnetic field intensity measuring device of the utility model, which is connected with a fixed plate and a scale rod.
FIG. 3 is a front view of the single crystal furnace CUSP magnetic field zero magnetic surface and the measuring device of the magnetic field intensity, which is connected with the fixed plate and the scale rod.
FIG. 4 is a schematic view of the installation of the gauss meter probe and the fixing plate of the measuring device for the magnetic field zero magnetic surface and the magnetic field strength of the CUSP of the single crystal furnace in the embodiment of the present invention.
FIG. 5 is a schematic view of the whole installation of a device for measuring the magnetic field intensity and the zero magnetic surface of the CUSP magnetic field of the single crystal furnace.
In the figure:
10. measuring device 11, scale rod 12, support piece
13. Slide rail 14, rectangular hole 15, slider
16. Positioning pin 17, fixing plate 18 and gaussmeter probe
19. Rotating shaft 20 and spring 21 fixture block
22. First groove 23, second groove 24, horizontal bubble
25. Leveling bolt 26, first gauss meter probe 27, second gauss meter probe
28. Measuring end 30, crucible 40, CUSP magnetic field
50. Single crystal furnace body
Detailed Description
The embodiment of the utility model provides a measuring device of zero magnetic surface in single crystal growing furnace CUSP magnetic field and magnetic field intensity, it explains to combine the attached drawing below the embodiment of the utility model.
As shown in FIG. 1, the embodiment of the utility model provides a measuring device for zero magnetic surface height in single crystal furnace CUSP magnetic field and magnetic field intensity can set up in single crystal furnace 50 up end top, including supporting component and scale pole 11, the supporting component level is placed on single crystal furnace 50 up end, and the vertical setting of scale pole 11, with supporting component swing joint, scale pole 11 can reciprocate and can follow the radial movement of single crystal furnace 50 up end, and scale pole 11 bottom is equipped with the gauss meter probe. After the height of the zero magnetic surface is determined by driving the gauss meter probe to move up and down by the scale rod 11, the scale rod 11 moves along the radial direction of the upper end surface of the single crystal furnace body 50 at a position close to the edge of the crucible 30 at the height, the closer to the CUSP magnetic field 40, the higher the magnetic field intensity is, and when the scale rod 11 reaches the inner wall of the crucible 30, the scale rod 11 is rotated to adjust the measuring surface of the gauss meter probe, so that the measuring surface is perpendicular to the magnetic induction line, and the maximum intensity of the zero magnetic surface magnetic field is measured.
Specifically, the supporting component comprises a supporting piece 12, the supporting piece is horizontally placed above the upper end face of the single crystal furnace body 50, a sliding rail 13 is fixedly connected to the supporting piece 12, the sliding rail 13 penetrates through the central horizontal supporting piece of the upper end face of the single crystal furnace body, and the sliding rail is fixed with the supporting piece 12. The scale bar 11 is horizontally movable along a slide rail 13. The shape of the support member 12 is not limited, and may be a ring or a rod. In some embodiments, the support 12 may be configured to be foldable for storage. The slide rail 13 is provided with a scale strip, the central position of the slide rail 13 is an initial scale, and when the scale rod 11 moves towards the crucible wall along the slide rail 13, the specific position of the scale rod can be recorded according to the scale on the slide rail 13.
Specifically, a strip hole 14 is formed in the plane of the sliding rail 13, and the scale rod 11 vertically penetrates through the strip hole 14 and can horizontally move along the strip hole 14.
Specifically, the slide block 15 is arranged on the scale rod 11, the slide block 15 is detachably connected with the scale rod 11, the scale rod 11 can move up and down and can axially rotate, the rotating handle is arranged at the top of the scale rod 11, and the slide block 15 is arranged on the upper portion of the slide rail 13 and can drive the scale rod 11 to move along the slide rail 13. In some embodiments, a through hole is formed in the middle of the sliding block 15, the scale rod 11 vertically penetrates through the sliding block 15, the scale rod 11 is in clearance fit with the through hole, the scale rod 11 can axially rotate, in order to rotate the scale rod 11, a T-shaped cross rod is arranged at the top of the scale rod, the sliding block 15 is placed on the upper portion of the sliding rail 13, and a groove is formed in the bottom of the sliding block 15 and matched with the sliding rail 13. The scale rod 11 vertically passes through the strip hole 14 on the slide rail 13, the scale rod 11 is provided with scales, the scale rod 11 is detachably connected with the slide block 15, the scale rod 11 can move up and down, the height position of a zero magnetic surface can be determined through the scales on the scale rod 11, and meanwhile, the slide block 15 can drive the scale rod 11 to move along the slide rail 13 at the height position. The shape of the slider 15 is not limited and may be circular or quadrangular.
Specifically, in order to fix the gauss meter probe at the target height, a first positioning device is arranged on the sliding block 15, the scale rod 11 is moved up and down according to the height of the zero magnetic surface required by the process and the scale on the scale rod 11, so that the gauss meter probe is fixed at the height of the zero magnetic surface, and the first positioning device is used for fixing the scale rod 11. In some embodiments, the first positioning device is a positioning pin 16, which is a bolt disposed on a side surface of the sliding block 15, and the sliding block 15 and the positioning rod are fixed by the bolt. In some embodiments, the first positioning device may also be a gear and rack engaging structure, the rack is fixedly connected to the scale rod, and the gear is rotated to drive the rack to move up and down, so as to drive the scale rod to move up and down.
Specifically, in order to facilitate installation of the gauss meter probe at the bottom of the scale rod 11, the fixing plate 17 is installed at the bottom of the scale rod 11, and the shape of the fixing plate 17 is not limited and can be circular or square.
Specifically, as shown in fig. 4, in some embodiments, the fixing plate 17 is vertically disposed, and two gaussmeter probes are fixed on the fixing plate 17, which is not limited in fixing manner, and may use a buckle or a bolt. A first gauss meter probe 26 and a second gauss meter probe 27, the measuring plane of the first gauss meter probe 26 is horizontally arranged, the measuring plane of the second gauss meter probe 27 is vertically arranged, and the measuring ends 28 of the first gauss meter probe 26 and the second gauss meter probe 27 are at the same height. The first gauss meter probe 26 is used to determine the height position of the zero-magnetic surface. A second gauss meter probe 27 is used to measure the magnetic field strength at the same elevation position.
Specifically, as shown in fig. 1, in some embodiments, the fixing plate 17 is vertically disposed, a gauss meter probe 18 is fixed on the fixing plate 17, the measurement plane of the gauss meter probe 18 is horizontally disposed, a rotating shaft 19 is disposed on the fixing plate 17 near the measurement end 28 of the probe, the rotating shaft 19 is fixed to the scale rod 11, and the fixing plate 17 can drive the gauss meter probe 18 to rotate around the rotating shaft 19 on the vertical plane.
As shown in fig. 2 and 3, the scale bar 11 is provided with a second positioning device which can fix the measuring plane of the gauss meter probe 18 in the horizontal direction and the vertical direction. In some embodiments, a spring 20 is disposed at one end of the scale bar 11 close to the fixing plate 17, a block 21 is disposed on the spring 20, a first groove 22 is disposed at a position opposite to the other side of the fixing plate 17 where the gauss meter probe is mounted, a second groove 23 is further disposed at a side of the fixing plate 17 where the first groove 22 is disposed, an included angle between a line connecting the first groove 22 and the rotation axis 19 and a line connecting the second groove 23 and the rotation axis 19 is 90 °, and a distance from the first groove 22 to the rotation axis 19 is the same as a distance from the second groove 23 to the rotation axis 19. The shapes of the first groove 22, the second groove 23 and the latch 21 are adapted, and the latch 21 can be latched in the first groove 22 and the second groove 23. The shape of the latch 21 may be spherical or ellipsoidal. The fixing plate 17 rotates around the rotating shaft 19, and is clamped with the clamping block 21 through the first groove 22 and the second groove 23, so that the measuring plane of the gauss meter probe 18 can be fixed in the horizontal direction and the vertical direction, and the height of the measuring end 28 of the gauss meter probe 18 is ensured to be unchanged.
Specifically, in order to ensure the accuracy of measurement, a leveling device is arranged on the supporting component. In certain embodiments, the leveling device includes a leveling bulb 24 and a leveling bolt 25. A level bubble 24 is embedded in the upper part of the sliding rail 13 for indicating the levelness of the supporting component. Three leveling bolts 25 are uniformly arranged on the support member 12, the three leveling bolts 25 support the whole support assembly to be placed on the upper end surface of the single crystal furnace body 50, and the levelness of the whole support assembly is adjusted by adjusting the heights of the bolts.
The first embodiment is as follows: as shown in figures 1-3, a measuring device for measuring the zero magnetic surface height and the magnetic field strength of a CUSP magnetic field of a single crystal furnace can be arranged above the upper end surface of a single crystal furnace body 50 and comprises a supporting component and a scale rod 11. The supporting component comprises a supporting piece 12, the supporting piece 12 is of a circular ring structure and can be horizontally placed above the upper end face of the single crystal furnace body 50, a leveling bolt 25 is arranged on the supporting piece 12, a sliding rail 13 is fixedly connected to the supporting piece 12, the sliding rail 13 is arranged along the diameter direction of the supporting piece 12, and two ends of the sliding rail are fixed with the supporting piece 12. The plane of the slide rail 13 is provided with a long hole 14. The scale rod 11 is vertically placed, a T-shaped cross rod serving as a rotating handle is arranged at the top of the scale rod 11, a sliding block 15 is arranged on the scale rod 11, a through hole is formed in the center of the sliding block 15, and the scale rod 11 penetrates through the sliding block 15 and is fixed with the sliding block 15 through a positioning pin 16. The scale bar 11 passes vertically through the elongated hole 14 of the slide rail 13, and the slider 15 is placed above the slide rail 13. The slide block 15 can drive the scale rod 11 to move along the slide rail 13. The fixed plate 17 is arranged at the bottom of the scale rod 11, in the embodiment, the fixed plate 17 is circular, a rotating shaft 19 is arranged at the center of the circle, the fixed plate 17 is vertically arranged, the rotating shaft 19 is perpendicular to the scale rod 11, and the fixed plate 17 can rotate around the rotating shaft 19. A gauss meter probe 18 is fixed to the fixed plate 17 in the radial direction, and a measuring end 28 of the probe is disposed at the center of the circle. The fixed plate 17 rotates to drive the gauss meter probe 18 to rotate, and meanwhile, the height of the measuring end 28 is guaranteed to be unchanged. A positioning device is arranged on one side of the fixing plate 17, which is not provided with the gaussmeter probe, so that the measuring plane of the probe can be positioned in the horizontal direction and the vertical direction. A spring 20 is arranged at one end, close to the fixing plate 17, of the scale rod 11, a clamping block 21 is arranged on the spring 20, a first groove 22 is formed in the opposite position of the other face, on which the gauss meter probe is mounted, of the fixing plate 17, a second groove 23 is further formed in the face, on which the first groove 22 is formed, of the fixing plate 17, an included angle formed by a connecting line between the first groove 22 and the rotating shaft 19 and a connecting line between the second groove 23 and the rotating shaft 19 is 90 degrees, and the distance from the first groove 22 to the rotating shaft 19 is the same as the distance from the second groove 23 to the rotating shaft 19. The shapes of the first groove 22, the second groove 23 and the latch 21 are adapted, and the latch 21 can be latched in the first groove 22 and the second groove 23. The latch 21 may be spherical in shape. The fixing plate 17 rotates around the rotating shaft 19, and is clamped with the fixture block 21 through the first groove 22 and the second groove 23, so that the measuring plane of the gauss meter probe can be fixed in the horizontal direction and the vertical direction, and the height of the measuring end 28 of the probe is ensured to be unchanged.
The using method comprises the following steps: as shown in fig. 5, when the height of the zero magnetic surface is adjusted, the supporting member 12 is placed on the upper end surface of the single crystal furnace body 50, the leveling device is used to horizontally place the whole supporting component, the scale rod 11 is placed at the position of the initial scale of the center of the slide rail, the horizontal arrangement of the measuring plane of the gaussmeter probe 18 is ensured, the height of the scale rod 11 is adjusted according to the position of the zero magnetic surface required by the process, and the positioning pin 16 is used to fix the scale rod 11. And adjusting the height of the CUSP magnetic field 40, wherein the measuring plane of the gaussmeter probe is horizontally arranged and is vertical to the magnetic induction line, and when the gaussmeter displays 0Gs field intensity, the height of the CUSP magnetic field 40 reaches the process requirement.
When the magnetic field intensity is adjusted, the fixing plate 17 is rotated, so that the measuring plane of the gaussmeter probe 18 is vertically placed and is parallel to the scale rod 11, the gaussmeter probe is fixed by the positioning device, the scale rod 11 is moved, the scale rod 11 drives the gaussmeter probe 18 to move towards the wall of the crucible 30 along the sliding rail 13, when the measuring plane is close to the wall of the crucible 30, the positioning pin 16 is loosened, the rotating handle on the scale rod 11 is rotated, the measuring plane is rotated, when the measuring plane is vertical to the magnetic induction line direction, the maximum magnetic field intensity of a zero magnetic surface is obtained, and the current of the CUSP magnetic field 40 is adjusted at the moment until the technological requirements are met.
Example two: in the first embodiment, a gauss meter probe 18 is arranged on the fixing plate 17, and the measuring plane is in a horizontal state and a vertical state through the rotation of the fixing plate 17. In the present embodiment, as shown in fig. 4, a first gauss meter probe 26 and a second gauss meter probe 27 are fixed on the fixing plate 17, the measuring plane of the first gauss meter probe is horizontally arranged, the measuring plane of the second gauss meter probe is vertically arranged, and the measuring end 28 of the first gauss meter probe and the measuring end 28 of the second gauss meter probe are at the same height. The first gauss meter probe 26 is used to determine the height position of the zero-magnetic surface. A second gauss meter probe 27 is used to measure the magnetic field strength at the same elevation position.
The using method comprises the following steps: unlike the first embodiment, the first gauss meter probe 26 is used to adjust the height of the zero magnetic surface, and the second gauss meter probe 27 is used to adjust the magnetic field strength, so that the fixed plate does not need to be rotated to enable the measuring plane to be in a horizontal state and a vertical state.
The utility model has the advantages and positive effects that:
1. the problem that the CUSP magnetic field intensity needs to be tested under the condition of ensuring the consistent height after the CUSP magnetic field is adjusted to the zero magnetic surface height is solved;
2. through setting up the scale pole, can be accurate fix a position zero magnetic surface height, can guarantee that technology realizes, ensure the quality of single crystal.
3. Simple structure, the simple operation compares manual test, and the degree of accuracy is high.
The above detailed description of the embodiments of the present invention is only for the purpose of describing the preferred embodiments of the present invention, and should not be construed as limiting the scope of the present invention. All the equivalent changes and improvements made according to the application scope of the present invention should still fall within the patent coverage of the present invention.
Claims (10)
1. The utility model provides a measuring device of zero magnetic surface in single crystal growing furnace CUSP magnetic field and magnetic field intensity, can set up in single crystal furnace body up end top, its characterized in that: the single crystal furnace comprises a supporting component and a scale rod, wherein the supporting component is arranged on the upper end face of the single crystal furnace body, the scale rod is vertically arranged and movably connected with the supporting component, the scale rod can move up and down and can move along the radial direction of the upper end face of the single crystal furnace body, and a gaussmeter probe is arranged at the bottom of the scale rod.
2. The device for measuring the zero magnetic surface and the magnetic field intensity of the CUSP magnetic field of the single crystal furnace according to claim 1, characterized in that: the support component comprises a support piece, the support piece is arranged above the upper end face of the single crystal furnace body, a slide rail is arranged on the support piece, a scale bar is arranged along the length of the slide rail, and the scale bar can move along the slide rail.
3. The device for measuring the zero magnetic surface and the magnetic field strength of the CUSP magnetic field of the single crystal furnace according to claim 2, wherein: the slide rail is provided with a strip hole, and the scale rod penetrates through the strip hole and can move along the strip hole.
4. The device for measuring the zero magnetic surface and the magnetic field strength of the CUSP magnetic field of the single crystal furnace according to claim 2 or 3, wherein: the scale rod is provided with a sliding block, the sliding block is detachably connected with the scale rod, the scale rod can move up and down and can axially rotate, the top of the scale rod is provided with a rotating handle, and the sliding block can move along the sliding rail.
5. The device for measuring the zero magnetic surface and the magnetic field strength of the CUSP magnetic field of the single crystal furnace according to claim 4, wherein: and a first positioning device is arranged on the sliding block and used for fixing the scale rod.
6. The device for measuring the zero magnetic surface and the magnetic field strength of the CUSP magnetic field of the single crystal furnace according to any one of claims 1 to 3 and 5, wherein: the bottom of the scale rod is provided with a fixing plate, and the gaussmeter probe is arranged on the fixing plate.
7. The device for measuring the zero magnetic surface and the magnetic field strength of the CUSP magnetic field of the single crystal furnace according to claim 6, wherein: the gaussmeter comprises a first gaussmeter and a second gaussmeter, the measuring plane of the probe of the first gaussmeter is horizontally arranged, the measuring plane of the probe of the second gaussmeter is vertically arranged, and the measuring ends of the probe of the first gaussmeter and the probe of the second gaussmeter are positioned at the same height.
8. The device for measuring the zero magnetic surface and the magnetic field strength of the CUSP magnetic field of the single crystal furnace according to claim 6, wherein: the gaussmeter probe measuring plane is horizontally arranged, and the fixing plate can drive the gaussmeter probe to rotate on a vertical plane around the measuring end of the probe.
9. The device for measuring the zero magnetic surface and the magnetic field strength of the CUSP magnetic field of the single crystal furnace according to claim 8, wherein: the bottom of the scale rod is provided with a second positioning device, and the second positioning device can fix the measuring plane of the gaussmeter probe in the horizontal direction and the vertical direction.
10. The apparatus for measuring the zero magnetic surface and the magnetic field strength of the CUSP magnetic field of the single crystal furnace according to any one of claims 1 to 3, 5 and 7 to 9, wherein: and the support component is provided with a leveling device for adjusting the levelness of the support component.
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| CN202222633719.1U CN218383250U (en) | 2022-09-30 | 2022-09-30 | Measuring device for CUSP magnetic field zero magnetic surface and magnetic field intensity of single crystal furnace |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117831884A (en) * | 2024-03-05 | 2024-04-05 | 苏州八匹马超导科技有限公司 | Superconducting magnet device and method for adjusting superconducting magnet device |
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2022
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117831884A (en) * | 2024-03-05 | 2024-04-05 | 苏州八匹马超导科技有限公司 | Superconducting magnet device and method for adjusting superconducting magnet device |
| CN117831884B (en) * | 2024-03-05 | 2024-05-28 | 苏州八匹马超导科技有限公司 | Superconducting magnet device and method for adjusting superconducting magnet device |
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