CN218350157U - X-ray capillary lens - Google Patents

Abstract

The utility model is suitable for an optics technical field provides an X ray capillary lens, including the lens main part and set up the optic fibre in the lens main part, the lens main part is used for receiving, conducting the X ray, and with X ray convergence or parallel output, optic fibre is used for receiving, conducting, exports visible light, the visible light of exporting through optic fibre is located the light beam that X ray exported through the lens main part formed; the optical fiber is provided with one or more optical fibers; a plurality of optical fibers are gathered to form an optical fiber bundle; or the optical fibers are arranged along a preset curve to form an arc structure or an annular structure; alternatively, the plurality of optical fibers form a cross-shaped structure. The utility model provides an X ray capillary lens not only has X ray transmission function, still has X ray light path calibration function.

Description

X-ray capillary lens

Technical Field

The utility model belongs to the technical field of optics, especially, relate to an X ray capillary lens.

Background

X-ray capillary lenses are widely used in the fields of X-ray diffraction, fluorescence analysis, stress analysis, etc., and are generally formed by drawing millions or tens of millions or millions of hollow glass tubes with diameters of several micrometers or even sub-micrometers. The X-ray capillary lens mainly plays a role in focusing, paralleling or paralleling and then focusing rays emitted by the X-ray point light source in a light path. The traditional X-ray capillary lens is mainly used for transmitting X-rays and has a single function.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide an X ray capillary lens aims at solving among the prior art technical problem of X ray capillary lens function singleness.

The utility model discloses a realize like this, an X ray capillary lens, including the lens main part and set up in optic fibre in the lens main part, the lens main part is used for receiving, conduction X ray, and will X ray convergence or parallel output, optic fibre is used for receiving, conduction, output visible light, warp the visible light of optic fibre output is located the warp in the light beam that the X ray of lens main part output formed.

In an alternative embodiment, the optical fiber is provided with one, the optical fiber being located in the central region of the lens body.

In an alternative embodiment, the optical fiber is provided with a plurality of fibers.

In an alternative embodiment, a plurality of said optical fibers are arranged in a bundle to form a bundle.

In an alternative embodiment, the plurality of optical fibers are arranged along a predetermined curve to form an arc-shaped structure or a ring-shaped structure.

In an alternative embodiment, a plurality of said optical fibers form a cross-shaped structure.

In an optional embodiment, a first light limiting piece is arranged on the light incident side of the assembly composed of the lens body and the optical fiber, the first light limiting piece is provided with a first area corresponding to the light incident area of the optical fiber and a second area corresponding to the light incident area of the lens body, the first area is used for the visible light to pass through, and the second area is used for the X-ray to pass through and block the visible light.

In an optional embodiment, a light-emitting side of the assembly of the lens body and the optical fiber is provided with a second light limiting member, the second light limiting member has a third region corresponding to the light-emitting region of the optical fiber and a fourth region corresponding to the light-emitting region of the lens body, the third region is used for the visible light to pass through, and the fourth region is used for the X-ray to pass through and block the visible light.

In an optional embodiment, the first light-limiting piece and the second light-limiting piece have the same structure and both include a beryllium plate, and the first region or the third region of the beryllium plate is provided with a hole penetrating through the beryllium plate in the thickness direction.

In an optional embodiment, the X-ray capillary lens further includes a housing, the housing is a cylindrical structure with two open ends, the lens body is mounted in the housing, the first light limiting member is mounted at a light inlet of the housing, and the second light limiting member is mounted at a light outlet of the housing.

In an optional embodiment, all surfaces of the outer surface of the optical fiber except the light incident surface and the light emergent surface are plated with a reflecting layer.

In an alternative embodiment, the X-ray capillary lens is a converging lens or a parallel beam lens.

The utility model discloses technical effect for prior art is: the embodiment of the utility model provides an X ray capillary lens, including the lens main part, and set up the optic fibre in the lens main part, and optic fibre and lens main part can focus on visible light and X ray in same light beam respectively, consequently can be through observing the position of shining of visible light, judge and reachs the X ray and shine the position, whether the accessible is observed visible light and is shone to the sample when so using, judge and reachs whether X ray shines to the sample on, can pass through the utility model provides an X ray capillary lens calibrates X ray light path, like this the embodiment of the utility model provides an X ray capillary lens not only has X ray transmission function, still has X ray light path calibration function, can improve the adoption greatly the utility model provides an X ray capillary lens's X ray analytical equipment's detection precision and speed.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings required to be used in the embodiments of the present invention or the description of the prior art will be briefly described below, it is obvious that the drawings described below are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the drawings without creative efforts.

Fig. 1 is a schematic structural diagram of an X-ray capillary lens according to an embodiment of the present invention;

fig. 2 is a schematic structural diagram of an X-ray capillary lens according to an embodiment of the present invention, in which a dotted line represents an optical fiber and a thin solid line represents a capillary;

FIG. 3 is a schematic diagram of a side view of the X-ray capillary lens of FIG. 2;

fig. 4 is a schematic structural diagram of an X-ray capillary lens according to another embodiment of the present invention, in which a dotted line represents an optical fiber and a thin solid line represents a capillary;

FIG. 5 is a schematic diagram of a side view of the X-ray capillary lens of FIG. 4;

fig. 6 is a schematic structural diagram of an X-ray capillary lens according to another embodiment of the present invention, in which a dotted line represents an optical fiber and a thin solid line represents a capillary;

FIG. 7 is a schematic diagram of a side view of the X-ray capillary lens of FIG. 6;

fig. 8 is a schematic side view of an X-ray capillary lens according to another embodiment of the present invention, in which the dotted line represents an optical fiber and the thin solid line represents a capillary;

fig. 9 is a schematic structural diagram of an X-ray capillary lens according to another embodiment of the present invention, in which a dotted line represents an optical fiber and a thin solid line represents a capillary;

FIG. 10 is a schematic diagram of a side view of the X-ray capillary lens of FIG. 9;

fig. 11 is a schematic structural diagram of an X-ray capillary lens according to another embodiment of the present invention, in which a dotted line represents an optical fiber and a thin solid line represents a capillary;

FIG. 12 is a schematic diagram of a side view of the X-ray capillary lens of FIG. 11;

fig. 13 is a schematic structural diagram of an X-ray capillary lens according to another embodiment of the present invention, in which a dotted line represents an optical fiber and a thin solid line represents a capillary;

FIG. 14 is a schematic diagram of a side view of the X-ray capillary lens of FIG. 13;

fig. 15 is a schematic side view of an X-ray capillary lens according to another embodiment of the present invention, in which the dotted line represents an optical fiber and the thin solid line represents a capillary tube;

fig. 16 is a schematic structural diagram of an X-ray capillary lens according to another embodiment of the present invention, in which a broken line indicates an optical fiber;

fig. 17 is a schematic structural diagram of an X-ray capillary lens according to another embodiment of the present invention;

fig. 18 is a schematic cross-sectional view of an optical fiber used in an embodiment of the present invention.

Description of reference numerals:

100. a lens body; 200. an optical fiber; 300. a first light-limiting member; 310. a first region; 320. a second region; 400. a second light-limiting member; 410. a third region; 420. a fourth region; 500. a reflective layer; 600. a housing.

Detailed Description

Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the drawings are exemplary and intended to be used for explaining the present invention, and should not be construed as limiting the present invention.

In the description of the present invention, it is to be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like indicate orientations or positional relationships based on those shown in the drawings, and are merely for convenience of description and simplicity of description, and do not indicate or imply that the device or element being referred to must have a particular orientation, be constructed and operated in a particular orientation, and thus, should not be construed as limiting the present invention.

Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.

In the present invention, unless otherwise expressly stated or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally formed; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.

In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention will be further described in detail with reference to the accompanying drawings and embodiments.

Referring to fig. 1, in an embodiment of the present invention, an X-ray capillary lens is provided, which includes a lens body 100 and an optical fiber 200 disposed in the lens body 100. The lens body 100 is used for receiving, guiding and converging or outputting the X-rays in parallel. The optical fiber 200 is used for receiving, transmitting and outputting visible light. The visible light output through the optical fiber 200 is positioned within the beam formed by the X-rays output through the lens body 100.

Specifically, the X-ray capillary lens in this embodiment may be a converging lens, and may also be a parallel beam lens. The optical fiber 200 may be installed in the lens body 100 of the X-ray capillary by replacing several capillaries in the X-ray capillary lens. When the X-ray capillary lens is a converging lens, the X-ray capillary lens is used for converging the diverging X-ray and visible light to a focus again, and has power density gain. When the X-ray capillary lens is a parallel beam lens, the X-ray capillary lens is used for constraining the divergent X-rays and visible light into a quasi-parallel beam with a divergence of several milliradians, and at this time, the cross-sectional size of a beam formed by the X-rays output by the lens body 100 is equivalent to the size of the light-emitting surface of the X-ray capillary lens.

More specifically, the lens body 100 is composed of a plurality of (may be millions, tens of millions, or another number set as needed) fine glass tubes (also referred to as capillaries), each of which is composed of a hollow glass tube having a diameter of several micrometers. The diameters of the fine glass tubes in the lens body 100 may be the same or different, and may be determined according to the requirements of the production process, the light extraction effect, and the like. The X-rays are transmitted in a single fine glass tube, as is the principle of visible light transmission in the optical fiber 200. The X-rays are continuously transmitted forward in a single fine glass tube by reflection. The X-ray wavelength can be screened by changing the material of the micro glass tube or adding a coating on the inner wall or the outer wall of the micro glass tube. By controlling the diameter of a single fine glass tube, the divergence angle of a single X-ray can be controlled. By changing the curvature of the fine glass tube, the characteristics of the X-ray output light can be controlled. The X-ray capillary lens in this embodiment is used to output the X-ray emitted from the X-ray source and the visible light generated by the visible light source into a very small focal point, which may have a diameter as small as several tens of micrometers by a micro-focusing technique.

The embodiment of the utility model provides an X ray capillary lens's theory of operation does:

the embodiment of the utility model provides an X ray capillary lens is applicable to X ray analytical equipment. The X-ray analysis device comprises an X-ray source, a visible light detection device and an X-ray detection device besides the X-ray capillary lens. The X-ray source and the visible light source are positioned on the light incidence side of the X-ray capillary lens, and the positions of the X-ray source and the visible light source are relatively fixed after the equipment is debugged; the visible light detection device and the X-ray detection device are positioned on the light outlet side of the X-ray capillary lens.

Because the embodiment of the utility model provides an optic fibre 200 and lens main part 100 among the X ray capillary lens can focus on visible light and X ray in same light beam respectively, consequently can judge through the position of shining who observes the visible light and draw the X ray and shine the position, and then can shine to the sample through observing whether the visible light shines on, judges and draw whether X ray shines to the sample.

When the X-ray analysis device is used for measuring a sample, the visible light source can be started to emit visible light, then the visible light is transmitted and irradiated to the sample through the optical fiber 200 in the X-ray capillary lens, and then whether the visible light is irradiated to the sample or not is observed through the visible light detection device. If the visible light beam irradiates on the sample, the calibration is completed, and if the visible light beam does not irradiate on the sample, the position of the sample or the positions of the visible light source and the X-ray source are adjusted until the visible light beam irradiates on the sample.

Of course, in the above operation process, the visible light source and the X-ray source may also be simultaneously started, and after the light path calibration is completed, the X-ray detection device directly detects the relevant parameters of the sample. Specifically, the thickness and the composition of a film layer of a sample can be analyzed by using an X-ray fluorescence technology, the internal lattice structure of the film layer of the sample can be measured by using an X-ray diffraction technology, and the film layer stress distribution condition of the sample can be measured by using an X-ray stress analysis technology.

When the X-ray source is used, the X-ray source emits X-rays which are converged or output in parallel through the lens body 100, and the visible light source emits visible light which is emitted in parallel

The embodiment of the utility model provides an X ray capillary lens, including lens main part 100, and set up the optic fibre 200 in lens main part 100, and optic fibre 200 and lens main part 100 can focus on visible light and X ray in same light beam respectively, consequently can be through observing the position of shining of visible light, judge and reachs the X ray and shine the position, whether accessible was on shining to the sample when so using, judge and reachs X ray and shine on the sample, can pass through promptly the utility model provides an X ray capillary lens calibrates X ray light path, like this the utility model provides an X ray capillary lens not only has X ray transmission function, still has X ray light path calibration function, can improve greatly and adopt the utility model provides an X ray capillary lens's X ray analytical equipment's that the embodiment provides detection precision and speed.

The optical fiber 200 in the above embodiments may be provided with one (as shown in fig. 1 to 3, 9 and 10) or a plurality (as shown in fig. 4 to 8 and 11 to 15).

When one optical fiber 200 is provided, the optical fiber is generally disposed in the central region of the lens body 100 in order to ensure the accuracy of the X-ray optical path alignment. Specifically, the optical fiber may be disposed on the center line of the lens body 100, as shown in fig. 1, or may be disposed at any position within a certain range from the center line of the lens body 100, as shown in fig. 2 and 3. The central area of the lens body 100 is a circular area having a predetermined radius as a center of a circle about a center line of the lens body 100. The preset radius can be half, 3/4, 1/3 or other values of the radius of the light inlet of the lens body, and is specifically determined according to the calibration accuracy of the X-ray light path.

When the optical fiber 200 is provided with a plurality of optical fibers, the area of the visible light spot output by the X-ray capillary lens is large, the position of the visible light spot is easy to observe, and the optical path calibration can be performed quickly and accurately.

In addition, when there are a plurality of optical fibers 200, the plurality of optical fibers 200 can be made into different structures according to different requirements, which is illustrated as follows:

firstly, as shown in fig. 4, 5, 11 and 12, a plurality of optical fibers 200 are gathered to form an optical fiber bundle, so as to realize center point calibration;

secondly, as shown in fig. 6, 7, 13 and 14, a plurality of optical fibers 200 are arranged along a preset curve to form an arc-shaped structure or an annular structure, so as to realize circular calibration, and simultaneously, the focus can be controlled, so as to realize the concentricity of the visible light and the X-ray focus;

thirdly, as shown in fig. 8 and 15, a plurality of optical fibers 200 form a cross-shaped structure for position calibration;

fourth, the use of optical fibers 200 having a particular geometry achieves other objectives.

The structure formed by the optical fiber 200 may be a symmetric structure or an asymmetric structure, may be located on the center line of the X-ray capillary lens, or may be located on one side of the center line of the X-ray capillary lens, and specifically may be flexibly selected according to the use requirement, which is not limited herein.

Of course, the optical fiber 200 may be disposed in the lens body 100 in other manners, and may be flexibly selected according to the use requirement.

In an alternative embodiment, as shown in fig. 16, a first light limiting member 300 is disposed on the light incident side of the assembly of the lens body 100 and the optical fiber 200, the first light limiting member 300 has a first region 310 corresponding to the light incident region of the optical fiber 200 and a second region 320 corresponding to the light incident region of the lens body 100, the first region 310 is used for visible light to pass through, and the second region 320 is used for X-ray to pass through and block visible light.

Therefore, during use, visible light can only enter the optical fiber 200 through the first region 310 of the first light limiting piece 300 and cannot enter the lens body 100, so that the propagation path of the visible light can only propagate according to a preset path, the size of a visible light spot irradiated on a sample is smaller than that of a focal spot formed by an X-ray, the position of the focal spot of the X-ray can be accurately positioned through the position of the visible light spot, and the accuracy of light path calibration operation is ensured.

In a specific embodiment, the size of the first region 310 is smaller than or equal to the sum of the sizes of the light incident surfaces of all the optical fibers 200, and the first region 310 is disposed close to the light incident surface of the optical fiber 200 to ensure that the visible light passing through the first region 310 can completely enter the optical fiber 200 and not enter the lens body 100, thereby ensuring the imaging quality of the visible light.

To define the spot size of the visible light finally irradiated onto the sample, in an alternative embodiment, as shown in fig. 16, the light exit side of the assembly of the lens body 100 and the optical fiber 200 is provided with a second light limiting member 400, the second light limiting member 400 has a third region 410 corresponding to the light exit region of the optical fiber 200 and a fourth region 420 corresponding to the light exit region of the lens body 100, the third region 410 is used for visible light to pass through, and the fourth region 420 is used for X-ray to pass through and block visible light.

In this way, the visible light transmitted through the X-ray capillary lens can only exit through the third region 410 of the second light limiting member 400, so that the size of the spot of the visible light irradiated onto the sample is equivalent to the size of the third region 410. By adopting the structure, the transmission of visible light emission can be effectively avoided, so that the size of a visible light spot is limited within a preset range, the size of the formed visible light spot is small, and a user can accurately observe the position of the visible light spot when calibrating a light path conveniently.

In an alternative embodiment, the diameter of the visible light spot may be limited to about 20 microns by the second light limiting member.

In a specific embodiment, as shown in fig. 16, a first light limiting member 300 is disposed on the light incident side of the assembly of the lens body 100 and the optical fiber 200, and a second light limiting member 400 is disposed on the light exiting side of the assembly of the lens body 100 and the optical fiber 200. The first light limiting piece 300 and the second light limiting piece 400 have the same structure and both comprise beryllium plates, and the first region 310 or the third region 410 of the beryllium plates is provided with holes penetrating through the beryllium plates along the thickness direction. In use, visible light enters the optical fiber 200 or exits the optical fiber 200 through the hole portion, and x-rays pass through the metal plate to enter the lens body 100 or exit the lens body 100.

By adopting the structure, the diameter of the visible light can be effectively limited, so that the spot size of the visible light formed on the sample is smaller than that of the X-ray, the accuracy of the light path calibration result is ensured, the higher transmittance of the X-ray is ensured, and the first light limiting piece 300 and the second light limiting piece 400 are simple in structure and convenient to mount.

In an alternative embodiment, as shown in fig. 17, a first light limiting member 300 is disposed on the light incident side of the assembly of the lens body 100 and the optical fiber 200, and a second light limiting member 400 is disposed on the light emergent side of the assembly of the lens body 100 and the optical fiber 200. The X-ray capillary lens further comprises a housing 600. The housing 600 has a cylindrical structure with both ends open. The assembly of the lens body 100 and the optical fiber 200 is mounted in the housing 600, the first light restriction member 300 is mounted at the light inlet of the housing 600, and the second light restriction member 400 is mounted at the light outlet of the housing 600. The housing 600 is configured to support and protect the assembly of the lens body 100 and the optical fiber 200, the first light limiting member 300, and the second light limiting member 400, and the above components can be combined into a whole for easy handling.

In an alternative embodiment, as shown in fig. 18, all the surfaces of the outer surface of the optical fiber 200 except the light incident surface and the light emergent surface are plated with a reflective layer 500, so as to prevent visible light from being transmitted into the lens body, and further, the visible light entering the optical fiber 200 can be emitted and irradiated onto the sample through the optical fiber 200, so as to ensure that the visible light spot irradiated onto the sample has better imaging quality and is convenient to observe.

Specifically, the reflective layer in this embodiment may be a reflective coating layer plated on the outer surface of the optical fiber 200, a reflective adhesive film attached to the outer surface of the optical fiber 200, or a reflective structure disposed on the outer surface of the optical fiber 200 in other manners, and may be flexibly selected according to the production process, the use requirement, and the like, which is not limited herein.

The foregoing is only a preferred embodiment of the present invention, and the technical principles of the present invention have been specifically described, and the description is only for the purpose of explaining the principles of the present invention, and should not be construed as limiting the scope of the present invention in any way. Any modifications, equivalents and improvements made within the spirit and principles of the invention and other embodiments of the invention without the creative effort of those skilled in the art are intended to be included within the protection scope of the invention.

Claims (12)

1. An X-ray capillary lens is characterized by comprising a lens body and an optical fiber arranged in the lens body, wherein the lens body is used for receiving, transmitting and converging X-rays or outputting the X-rays in parallel, the optical fiber is used for receiving, transmitting and outputting visible light, and the visible light output by the optical fiber is positioned in a light beam formed by the X-rays output by the lens body.

2. The X-ray capillary lens of claim 1, wherein there is one optical fiber, the optical fiber being located within a central region of the lens body.

3. The X-ray capillary lens according to claim 1, wherein the optical fiber is provided with a plurality of fibers.

4. The X-ray capillary lens of claim 3, wherein a plurality of the optical fibers are arranged in a bundle to form a fiber bundle.

5. The X-ray capillary lens according to claim 3, wherein the plurality of optical fibers are arranged along a predetermined curve to form an arc-shaped structure or a ring-shaped structure.

6. The X-ray capillary lens of claim 3, wherein a plurality of the optical fibers form a cross-shaped structure.

7. The X-ray capillary lens of any one of claims 1-6, wherein the light-entering side of the assembly of the lens body and the optical fiber is provided with a first light-limiting member having a first region corresponding to the light-entering region of the optical fiber for passing the visible light and a second region corresponding to the light-entering region of the lens body for passing the X-rays and blocking the visible light.

8. The X-ray capillary lens according to claim 7, wherein the light exit side of the assembly of the lens body and the optical fiber is provided with a second light limiting member having a third region corresponding to the light exit region of the optical fiber for passing the visible light and a fourth region corresponding to the light exit region of the lens body for passing the X-ray and blocking the visible light.

9. The X-ray capillary lens according to claim 8, wherein the first light-limiting member and the second light-limiting member have the same structure and each comprise a beryllium plate, and the first region or the third region of the beryllium plate is provided with a hole penetrating through the beryllium plate in the thickness direction.

10. The X-ray capillary lens according to claim 8, further comprising a housing, wherein the housing is a cylindrical structure with two open ends, the lens body is mounted in the housing, the first light limiting member is mounted at a light inlet of the housing, and the second light limiting member is mounted at a light outlet of the housing.

11. The X-ray capillary lens of any one of claims 1-6, wherein all of the outer surface of the optical fiber except the light incident surface and the light exiting surface is coated with a reflective layer.

12. The X-ray capillary lens of any one of claims 1 to 6, wherein the X-ray capillary lens is a converging lens or a parallel beam lens.

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