CN218297197U - Double-layer composite quartz crucible detection device - Google Patents
Double-layer composite quartz crucible detection device Download PDFInfo
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- CN218297197U CN218297197U CN202222935870.0U CN202222935870U CN218297197U CN 218297197 U CN218297197 U CN 218297197U CN 202222935870 U CN202222935870 U CN 202222935870U CN 218297197 U CN218297197 U CN 218297197U
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Abstract
The utility model discloses a double-layer composite quartz crucible detection device, which comprises a movable cabinet, a detection mechanism arranged at the top of the movable cabinet, a rotary platform rotationally arranged at the top of the movable cabinet through a slewing bearing, a base arranged on the rotary platform and used for placing a crucible, and a centering mechanism used for centering the crucible; the rotary platform is circular, the centering mechanism comprises at least three centering assemblies uniformly distributed along the circumferential direction of the rotary platform, and each centering assembly comprises a screw rod sliding table and an adjusting upright post which is arranged on the screw rod sliding table and can move along the radial direction of the rotary platform; the lead screw slip table is including setting up the mount pad on rotary platform, rotating lead screw and the screw seat that the lead screw was located to the screw cover of installing on the mount pad, installs servo motor in the removal cabinet, and servo motor drives the lead screw and rotates. The utility model discloses both guaranteed the accurate nature that the position was placed to the crucible, can need not frequently to change fixing device through the position of change adjustment stand in order to adapt to the crucible diameter of different models again.
Description
Technical Field
The utility model belongs to the technical field of the crucible detects, concretely relates to double-deck compound quartz crucible detection device.
Background
In order to ensure the production quality of the monocrystalline silicon, the parameters of the double-layer composite quartz crucible, such as size, appearance and the like, need to be strictly detected before the double-layer composite quartz crucible leaves a factory. The double-layer structure of the double-layer composite quartz crucible is the transparent layer and the bubble layer, so that the information such as the space volume distribution of bubbles on the inner wall of the double-layer quartz crucible, the gas content of different depths of the transparent layer, the wall thickness of the double-layer composite quartz crucible and the like is measured and counted, and the method has important significance for the quality and performance evaluation of the monocrystalline silicon and the double-layer quartz crucible.
At present, before detecting a double-layer composite quartz crucible, a worker needs to place the crucible at a position to be detected, fix the crucible through a corresponding fixing device and finally perform manual detection. The above-described operation process has the following problems: 1. the crucible placing position is influenced by subjective factors of workers, so that the axis of the placed crucible is not coincident with the central axis of the position to be detected, and the accuracy of a detection result is influenced; 2. a fixing device corresponds to a type of crucible, and the corresponding fixing device needs to be replaced when detecting crucibles of different types, which wastes time and labor.
With the increasing demand of single crystal silicon in the semiconductor industry, the demand of double-layer composite quartz crucibles, which are used as consumable utensils, has increased significantly. Therefore, there is an urgent need for a device that can not only ensure the accuracy of the crucible placement position, but also efficiently detect the crucible without frequently replacing the fixing device.
SUMMERY OF THE UTILITY MODEL
The technical problem to be solved by the utility model is to provide a double-layer composite quartz crucible detection device aiming at the defects in the prior art, which has simple structure, reasonable design and strong practicability, and a plurality of adjusting upright posts simultaneously act on the outer side of the crucible through a coaxially arranged centering mechanism and a base, and a uniformly arranged screw rod sliding table and adjusting upright posts, so that the coincidence of the axis of the crucible and the central axis of a rotating platform is ensured, the accuracy of the crucible placing position is ensured, and the accuracy of the crucible detection result is ensured; and the adjusting upright post can slide back and forth on the screw rod sliding table along with the screw seat, and the distance from the adjusting upright post to the central shaft of the rotary platform can be controlled through the servo motor so as to adapt to the diameters of crucibles of different models, the fixing device does not need to be frequently replaced, and time and labor are saved.
In order to solve the technical problem, the utility model discloses a technical scheme is: the utility model provides a double-deck compound quartz crucible detection device which characterized in that: the crucible centering device comprises a movable cabinet, a detection mechanism arranged at the top of the movable cabinet, a rotary platform rotatably arranged at the top of the movable cabinet through a slewing bearing, a base arranged on the rotary platform and used for placing a crucible, and a centering mechanism used for centering the crucible;
the rotary platform is a circular platform, the centering mechanism and the base are coaxially arranged, the centering mechanism comprises at least three centering assemblies uniformly arranged along the circumferential direction of the rotary platform, and each centering assembly comprises a screw rod sliding table and an adjusting upright post which is arranged on the screw rod sliding table and can move along the radial direction of the rotary platform;
the screw rod sliding table comprises a mounting seat arranged on the rotary platform, a screw rod rotatably mounted on the mounting seat and a nut seat sleeved on the screw rod in a threaded manner, and the adjusting upright post is mounted on the nut seat;
a servo motor is installed in the movable cabinet and drives the screw rod to rotate through a gear transmission mechanism.
The double-layer composite quartz crucible detection device is characterized in that: the gear transmission mechanism comprises a speed reducer in transmission connection with an output shaft of the servo motor, a vertical input shaft in transmission connection with the speed reducer, a driving bevel gear arranged at the top end of the vertical input shaft and at least three groups of transmission transition components in transmission connection with the driving bevel gear respectively;
each group of transmission transition parts comprises driven bevel gears meshed with the driving bevel gears and horizontal output shafts arranged in the driven bevel gears, the number of the horizontal output shafts is equal to that of the screw rods, the horizontal output shafts are in one-to-one correspondence, and the horizontal output shafts are in transmission connection with the corresponding screw rods through couplers.
The double-layer composite quartz crucible detection device is characterized in that: a bearing seat is installed on the bottom surface of the rotating platform through a first support which is detachably connected, and a bearing for the vertical input shaft to penetrate through is sleeved in the bearing seat;
the speed reducer passes through the second support with the removal cabinet can dismantle the connection.
The double-layer composite quartz crucible detection device is characterized in that: the rotary platform, the slewing bearing and the base are coaxially arranged;
the lower part of the base is provided with an outer convex edge, and the base is detachably connected to the rotary platform through the outer convex edge; the top intermediate position of base has circular recess, the top surface of base evenly is provided with universal ball along circumference, the bottom intermediate position of base has circular shape mounting groove.
The double-layer composite quartz crucible detection device is characterized in that: a transparent mounting platform is arranged at the top of the mobile cabinet, the slewing bearing comprises an outer ring and an inner ring with inner teeth, the outer ring is detachably connected with the transparent mounting platform, and the inner ring is detachably connected with the rotary platform;
the transparent mounting platform is rotatably provided with a driving gear meshed with the internal teeth, and a driving motor used for driving the driving gear to rotate is arranged in the movable cabinet.
The double-layer composite quartz crucible detection device is characterized in that: and a light supplementing lamp is arranged on the bottom surface of the transparent mounting platform.
The double-layer composite quartz crucible detection device is characterized in that: the detection mechanism comprises a mechanical arm arranged at the top of the mobile cabinet and an industrial camera arranged on the mechanical arm and used for collecting crucible video images;
the mechanical arm is located one side of rotary platform, industry camera is installed and is kept away from on the mechanical arm the one end of removing the cabinet.
The double-layer composite quartz crucible detection device is characterized in that: the movable cabinet comprises a cabinet body and four universal wheels arranged at the bottom of the cabinet body.
Compared with the prior art, the utility model has the following advantage:
1. the utility model discloses a be coaxial laying centering mechanism and base, when adjusting the position of crucible, a vertical input shaft drives three horizontal output shaft simultaneously and rotates and the rotational speed is the same, the lead screw rotates in step thereupon and the rotational speed is the same, the nut seat that the cover was located on the lead screw drives the direction synchronous motion of adjustment stand to the crucible axis, make a plurality of adjustment stands act on the crucible outside simultaneously, guarantee the axis of crucible and rotary platform's center pin coincidence, with the accurate nature of guaranteeing that the position was placed to the crucible, ensure the accurate nature of crucible testing result.
2. The utility model discloses well adjustment stand can be along with the screw seat back-and-forth movement on the lead screw slip table of below, and the adjustment stand is at the removal in-process, and the distance of adjustment stand to rotary platform's center pin can the continuation change, when detecting the crucible of different models, only needs to change the distance of adjustment stand to rotary platform center pin, just can adapt to the crucible diameter of different models fast, need not frequent change fixing device, labour saving and time saving.
In conclusion, the crucible placing device has the advantages of simple structure, reasonable design and strong practicability, can ensure the accuracy of the crucible placing position, and further ensures the accuracy of the crucible detection result; the distance from the adjusting upright post to the central shaft of the rotary platform can be changed to adapt to the diameters of crucibles of different models, the fixing device does not need to be frequently replaced, and time and labor are saved.
The technical solution of the present invention is further described in detail by the accompanying drawings and examples.
Drawings
Fig. 1 is a schematic structural view of the present invention;
FIG. 2 is an enlarged view taken at A in FIG. 1;
fig. 3 is a top view of the present invention shown in fig. 1.
Description of reference numerals:
101-a transparent mounting platform; 102-universal wheels; 103-a cabinet body;
201-a mechanical arm; 202-an industrial camera; 301-a rotating platform;
302-a base; 303-slewing bearing; 3031-outer ring;
3032-inner ring; 3033-a drive gear; 304-a circular groove;
305-mounting a recess; 306-a convex edge; 307-a drive motor;
308-a universal ball; 401-screw rod sliding table; 4011-lead screw;
4012-nut stand; 402-adjusting the upright post; 403-horizontal output shaft;
404-vertical input shaft; 405-a servo motor; 406-a driven bevel gear;
407-a driving bevel gear; 408-a bearing seat; 409-a reducer;
410-a coupler; 411 — first bracket; 412-a second support;
5-a crucible; 6-light supplement lamp.
Detailed Description
As shown in fig. 1-3, the present invention comprises a mobile cabinet, a detection mechanism disposed on the top of the mobile cabinet, a rotary platform 301 rotatably mounted on the top of the mobile cabinet via a rotary support 303, a base 302 disposed on the rotary platform 301 for placing a crucible 5, and a centering mechanism for centering the crucible 5;
the rotary platform 301 is a circular platform, the centering mechanism and the base 302 are coaxially arranged, the centering mechanism comprises at least three centering assemblies uniformly arranged along the circumferential direction of the rotary platform 301, and each centering assembly comprises a screw rod sliding table 401 and an adjusting upright column 402 which is arranged on the rod sliding table 401 and can move along the radial direction of the rotary platform 301;
the screw rod sliding table 401 comprises an installation seat arranged on the rotary platform 301, a screw rod 4011 rotatably installed on the installation seat and a nut seat 4012 which is sleeved on the screw rod 4011 in a threaded manner, and the adjusting upright post 402 is installed on the nut seat 4012;
install servo motor 405 in the mobile cabinet, servo motor 405 passes through gear drive and drives lead screw 4011 rotates.
It should be noted that, the centering mechanism and the base 302 which are coaxially arranged and the centering components which are uniformly arranged are arranged; the crucible 5 can be ensured to be coincident with the axis of the base 302 after the crucible 5 is centered by the adjusting column 402 in the centering mechanism.
It should be noted that, a guide device for guiding the screw socket 4012 is further arranged on the screw rod sliding table 401, the guide device may be a guide rod which penetrates through the screw socket 4012 and is parallel to the screw rod 4011, two ends of the guide rod are respectively connected to two ends of the mounting seat, the guide device may also be a guide rail which is arranged at the bottom of the mounting seat and is parallel to the screw rod 4011, and the lower portion of the screw socket 4012 is arranged on the guide rail in a sliding manner through a pulley.
It should be noted that the specific number of centering assemblies can be increased according to actual situations. Before detection device dispatches from the factory, can be close to center pin department and be close to the equal angle scale that marks in the corresponding position of circumference department at rotary platform 301, be convenient for when the in-service use, can adjust its mounted position according to lead screw slip table 401's specific quantity, guarantee that lead screw slip table 401 installs on rotary platform 301 along circumference uniformly.
In this embodiment, the gear transmission mechanism includes a speed reducer 409 in transmission connection with an output shaft of a servo motor 405, a vertical input shaft 404 in transmission connection with the speed reducer 409, a driving bevel gear 407 arranged at the top end of the vertical input shaft 404, and at least three sets of transmission transition components in transmission connection with the driving bevel gear 407 respectively;
each group of power transmission transition parts comprises a driven bevel gear 406 meshed with a driving bevel gear 407 and horizontal output shafts 403 installed in the driven bevel gear 406, the number of the horizontal output shafts 403 is equal to that of the screw rods 4011, the horizontal output shafts 403 correspond to the screw rods 4011 one by one, and the horizontal output shafts 403 are connected with the corresponding screw rods 4011 through couplers 410.
It should be noted that the vertical input shaft 404 is inserted through the top of the mobile cabinet, and the driving bevel gear 407 is inserted through the rotating platform 301.
It should be noted that, when the servo motor 405 rotates forward, the vertical input shaft 404 is driven to rotate by the speed reducer 409, the driving bevel gear 407 at the upper end of the vertical input shaft 404 engages with the three driven bevel gears 406 to drive the three horizontal output shafts 403 to rotate synchronously at the same speed, the three lead screws 4011 rotate synchronously at the same speed, the nut base 4012 sleeved on the lead screws 4011 moves synchronously along the radial direction of the rotating platform 301 at the same speed, in the process of moving the nut base 4012, the three adjusting columns 402 connected to the nut base 4012 move synchronously in the direction close to the crucible 5, and the distances from the three adjusting columns 402 to the central axis of the rotating platform 301 are always equal until the upper portions of the adjusting columns 402 simultaneously abut against the outer side of the crucible 5 and simultaneously apply an acting force to the crucible 5 to ensure that the axis of the crucible 5 coincides with the central axis of the rotating platform 301 under the action of the adjusting columns 402. After the detection is completed, only the servo motor 405 needs to be controlled to rotate reversely, so that the adjusting upright post moves towards the direction away from the central shaft of the rotating platform 301, the crucible 5 is replaced, and the next crucible 5 can be continuously detected.
It should be noted that, when crucibles 5 of different models need to be detected, the distance between the vertical column 402 and the central axis of the rotating platform 301 can be controlled and adjusted by the servo motor 405 to adapt to the diameter of the corresponding crucible 5, and the fixing device does not need to be frequently replaced.
It should be noted that the driving bevel gear 407 is engaged with the three driven bevel gears 406, so that the three driven bevel gears 406 can rotate synchronously at the same speed, and the positions of the three adjusting columns can be synchronously adjusted by controlling one servo motor 405.
In this embodiment, a bearing seat 408 is installed on the bottom surface of the rotating platform 301 through a first bracket 411 that is detachably connected, and a bearing for the vertical input shaft 404 to penetrate through is sleeved in the bearing seat 408;
the decelerator 409 is detachably connected to the mobile cabinet through a second bracket 412.
It should be noted that, the first bracket 411 may adopt a cylindrical structure, an upper end of the cylindrical structure has an outer convex edge for detachably connecting with the rotating platform 301, and a lower end of the cylindrical structure has an inner convex edge for detachably connecting with the bearing seat 408; the second support 412 may also be a cylindrical structure, and the upper end of the second support has an outer convex edge for connecting to the top of the mobile cabinet, and the lower end of the second support has an inner convex edge for detachably connecting to the speed reducer 409.
In this embodiment, the rotating platform 301, the slewing bearing 303 and the base 302 are coaxially arranged;
the lower part of the base 302 is provided with a convex edge 306, and the base 302 is detachably connected on the rotating platform 301 through the convex edge 306; the middle position of the top of the base 302 is provided with a circular groove 304, the top surface of the base 302 is uniformly provided with universal balls 308 along the circumferential direction, and the middle position of the bottom of the base 302 is provided with a circular mounting groove 305.
It should be noted that, by providing the circular groove 304 and the universal balls 308, it can be ensured that when the crucible 5 is placed on the base 302, the central region of the bottom of the crucible 5 is located in the circular groove, and one circle of the bottom of the crucible 5 contacts with the plurality of universal balls 308 arranged along the circumferential direction of the top surface of the base, and compared with a point-to-point contact form, by adopting the above arrangement, the contact area between the crucible and the base 302 can be increased, so that the crucible 5 is placed more stably. When the centering mechanism centers the crucible 5, the crucible 5 can displace relative to the base 302, and the universal ball 308 is arranged, so that the crucible 5 can be moved more easily, and the surface of the crucible 5 is prevented from being scratched.
It should be noted that, by providing the mounting groove, it can be ensured that the driving bevel gear 407 and the three driven bevel gears 406 are located in a space defined by the mounting groove and the rotating platform 301, so that the driving bevel gear drives the driven bevel gears to rotate.
In this embodiment, a transparent mounting platform 101 is disposed at the top of the mobile cabinet, the slewing bearing 303 includes an outer ring 3031 and an inner ring 3032 having internal teeth, the outer ring 3031 is detachably connected to the transparent mounting platform 101, and the inner ring 3032 is detachably connected to the rotating platform 301;
a driving gear 3033 engaged with the internal teeth is rotatably mounted on the transparent mounting platform 101, and a driving motor 307 for driving the driving gear 3033 is arranged in the movable cabinet.
It should be noted that the driving gear 3033 is mounted on the transparent mounting platform 101 through a vertical shaft sleeved therein, and the lower end of the vertical shaft penetrates through the mounting platform 101 and is in transmission connection with the output shaft of the driving motor 307.
It should be noted that balls are provided between the inner ring 307 and the outer ring 308 of the slewing bearing 303 to reduce friction between bearing surfaces. It should be noted that, the inner ring 3032 and the rotating platform 301 are connected to a position of the rotating platform 301 close to the circumference, and with this arrangement, the rotating platform 301 can be driven to rotate around the central axis, and can also form a support for the rotating platform 301, so as to ensure that the rotating platform 301 rotates stably. In addition, the load of the rotating platform 301 can be increased, so that the crucible 5 with a large size can be detected conveniently, and the application range of the detection device provided by the application is wider.
It should be noted that, when detecting the large-sized crucible 5, it is not necessary to arrange a plurality of detection mechanisms in a circle outside the crucible 5, but only one detection mechanism is arranged at any position outside the crucible 5, the rotary platform 301 is driven to rotate by the slewing bearing, and the crucible 5 rotates synchronously therewith, so that sampling can be completed in one circle on the side wall of the crucible 5. The cost can be reduced.
In this embodiment, a light supplement lamp 6 is disposed on the bottom surface of the transparent mounting platform 101.
It should be noted that the transparent mounting platform 101 is made of a transparent material, so that the light supplement lamp 6 can supplement light to the crucible conveniently. The light filling lamp 6 is arranged on the bottom surface of the transparent mounting platform 101 and located on the outer side of the rotary platform 301 for one circle, so that the light filling effect is guaranteed, and meanwhile, the damage caused by collision can be avoided. The quality of the video image collected by the industrial camera 202 can be improved by additionally installing the light supplement lamp 6.
In this embodiment, the detection mechanism includes a mechanical arm 201 installed on the top of the mobile cabinet, and an industrial camera 202 arranged on the mechanical arm 201 and used for acquiring a video image of the crucible 5;
the mechanical arm 201 is located at one side of the rotating platform 301, and the industrial camera 202 is mounted at one end of the mechanical arm 201 far away from the moving cabinet.
It should be noted that the robot arm 201 may be a BRTIRUS0707A robot, the BRTIRUS0707A robot has six degrees of freedom, which are rotation, lower arm, upper arm, wrist rotation, wrist swing and wrist rotation, respectively, and a speed reducer is installed at each joint. The device has the advantages of small volume, large working range, high speed, high precision and the like, and can flexibly work in a narrow space.
It should be noted that, when detecting the crucible 5, information of 5 to 10 detection points needs to be collected along the height direction of the crucible 5, and the BRTIRUS0707A robot is selected to not only quickly drive the industrial camera 202 to complete information collection, but also enable the detection points to be uniformly distributed.
It should be noted that, when the diameter of the crucible 5 is smaller than 1.5m, the rotating platform 301 does not need to rotate, and the robot britirus 0707A is selected, and the mechanical arm thereof can drive the industrial camera 202 to collect a circle of information of the crucible 5.
It should be noted that, compare in the mode that detects often and adopt and set up detection mechanism in the top of crucible 5 at present, the utility model discloses in with detection mechanism setting in one side of crucible 5, need not to install additional and carry out the device of hoist and mount to arm 201, can reduce cost.
In this embodiment, the mobile cabinet includes a cabinet body 103 and four universal wheels 102 disposed at the bottom of the cabinet body 103.
It should be noted that the universal wheel 102 may be a universal wheel with a brake, so as to facilitate the movement of the detection device.
The detachable connection mode can be selected to be connected through screws or bolts, and threaded holes are formed in corresponding positions of the two connected components. So as to be convenient for maintaining and replacing each part of the detection device.
In actual work, firstly, a worker places the crucible 5 on the upper part of the base 301, so that the central area of the bottom of the crucible 5 is positioned in the circular groove 301, and the universal ball 308 is completely contacted with the bottom of the crucible 5;
secondly, the servo motor 405 is turned on to drive the crucible to rotate forwards, the servo motor 405 is meshed with three horizontal output shafts 403 from three bevel gear wheels 407 through a driving bevel gear wheel 407 on the upper portion of a vertical input shaft 404, the three screw rods rotate with the three bevel gear wheels to drive three nuts 403 to move towards the direction close to the crucible 5 at the same time, the speed of the three screw rods is the same, the adjusting columns 402 move synchronously with the three bevel gear wheels, in the moving process, the distance from each adjusting column 402 to the central shaft of the rotating platform 301 is always the same until the upper ends of the adjusting columns 402 act on the side wall of the crucible 5 at the same time, and at the moment, the adjusting columns 302 apply force to the crucible 5 uniformly to enable the axis of the crucible 5 to coincide with the central shaft of the rotating platform 301;
then, detecting the crucible 5, and when the diameter of the crucible 5 is smaller than 1.5m, only driving the industrial camera 202 to detect one circle of the side wall of the crucible by operating the mechanical arm 201; when the diameter of the crucible 5 is larger than 1.5m, the motion position of the mechanical arm 201 is limited, the industrial camera 202 cannot acquire video image information of one side of the crucible away from the detection mechanism, the driving gear 3033 can be driven by the driving motor 307 to drive the inner ring 3032 and the rotating platform 301 connected thereto to rotate around the central axis of the rotating platform 301, and the crucible 5 rotates along with the rotation, so that the information of one circle of the side wall of the crucible 5 can be detected;
when detecting crucibles 5 of different models, the vertical input shaft 404 is driven only by the servo motor 405 to change the distance from the adjusting upright 302 to the central shaft of the rotary platform 301, so that the diameter of the crucibles 5 of different models can be adapted, and different fixing devices do not need to be replaced.
Above, only the preferred embodiment of the present invention is not right the present invention does any limitation, all according to the present invention is to any simple modification, change and equivalent structure change made to the above embodiments by the technical entity, all still belong to the protection scope of the present invention.
Claims (8)
1. The utility model provides a double-deck compound quartz crucible detection device which characterized in that: the crucible centering device comprises a movable cabinet, a detection mechanism arranged at the top of the movable cabinet, a rotary platform (301) rotatably arranged at the top of the movable cabinet through a slewing bearing (303), a base (302) arranged on the rotary platform (301) and used for placing a crucible (5), and a centering mechanism used for centering the crucible (5);
the rotary platform (301) is a circular platform, the centering mechanisms and the base (302) are coaxially arranged, each centering mechanism comprises at least three centering assemblies uniformly arranged along the circumferential direction of the rotary platform (301), and each centering assembly comprises a screw rod sliding table (401) and an adjusting upright column (402) which is arranged on the screw rod sliding table (401) and can move along the radial direction of the rotary platform (301);
the screw rod sliding table (401) comprises a mounting seat arranged on a rotary platform (301), a screw rod (4011) rotatably mounted on the mounting seat and a nut seat (4012) sleeved on the screw rod (4011) in a threaded manner, and the adjusting upright post (402) is mounted on the nut seat (4012);
install servo motor (405) in the removal cabinet, servo motor (405) pass through gear drive and drive lead screw (4011) rotate.
2. The double-layer composite quartz crucible detection device according to claim 1, characterized in that: the gear transmission mechanism comprises a speed reducer (409) in transmission connection with an output shaft of the servo motor (405), a vertical input shaft (404) in transmission connection with the speed reducer (409), a driving bevel gear (407) arranged at the top end of the vertical input shaft (404) and at least three groups of transmission transition components in transmission connection with the driving bevel gear (407);
each group the transmission transition part all includes driven bevel gear (406) and the installation that meshes with initiative bevel gear (407) each other horizontal output shaft (403) in driven bevel gear (406), horizontal output shaft (403) with the quantity of lead screw (4011) is equal and the one-to-one, horizontal output shaft (403) with its correspond lead screw (4011) pass through shaft coupling (410) transmission connection.
3. The double-layer composite quartz crucible detection device according to claim 2, wherein: a bearing seat (408) is installed on the bottom surface of the rotary platform (301) through a first support (411) which is detachably connected, and a bearing for the vertical input shaft (404) to penetrate through is sleeved in the bearing seat (408);
the speed reducer (409) is detachably connected with the mobile cabinet through a second bracket (412).
4. The double-layer composite quartz crucible detection device according to claim 1, wherein: the rotating platform (301), the slewing bearing (303) and the base (302) are coaxially arranged;
the lower part of the base (302) is provided with a convex edge (306), and the base (302) is detachably connected to the rotating platform (301) through the convex edge (306); the top middle position of the base (302) is provided with a circular groove (304), the top surface of the base (302) is uniformly provided with universal balls (308) along the circumferential direction, and the bottom middle position of the base (302) is provided with a circular mounting groove (305).
5. The double-layer composite quartz crucible detection device according to claim 1, wherein: a transparent mounting platform (101) is arranged at the top of the mobile cabinet, the slewing bearing (303) comprises an outer ring (3031) and an inner ring (3032) with internal teeth, the outer ring (3031) is detachably connected with the transparent mounting platform (101), and the inner ring (3032) is detachably connected with the rotary platform (301);
and a driving gear (3033) meshed with the internal teeth is rotatably mounted on the transparent mounting platform (101), and a driving motor (307) for driving the driving gear (3033) to rotate is arranged in the movable cabinet.
6. The double-layer composite quartz crucible detection device according to claim 5, characterized in that: and a light supplement lamp (6) is arranged on the bottom surface of the transparent mounting platform (101).
7. The double-layer composite quartz crucible detection device according to claim 1, characterized in that: the detection mechanism comprises a mechanical arm (201) arranged at the top of the mobile cabinet and an industrial camera (202) arranged on the mechanical arm (201) and used for acquiring a video image of the crucible (5);
the mechanical arm (201) is located on one side of the rotating platform (301), and the industrial camera (202) is installed at one end, far away from the moving cabinet, of the mechanical arm (201).
8. The double-layer composite quartz crucible detection device according to claim 1, wherein: the mobile cabinet comprises a cabinet body (103) and four universal wheels (102) arranged at the bottom of the cabinet body (103).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222935870.0U CN218297197U (en) | 2022-11-04 | 2022-11-04 | Double-layer composite quartz crucible detection device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202222935870.0U CN218297197U (en) | 2022-11-04 | 2022-11-04 | Double-layer composite quartz crucible detection device |
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| CN218297197U true CN218297197U (en) | 2023-01-13 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116518894A (en) * | 2023-07-05 | 2023-08-01 | 西安地山视聚科技有限公司 | Method for detecting thickness of transparent layer of double-layer composite quartz crucible |
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2022
- 2022-11-04 CN CN202222935870.0U patent/CN218297197U/en active Active
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116518894A (en) * | 2023-07-05 | 2023-08-01 | 西安地山视聚科技有限公司 | Method for detecting thickness of transparent layer of double-layer composite quartz crucible |
| CN116518894B (en) * | 2023-07-05 | 2023-09-12 | 西安地山视聚科技有限公司 | Method for detecting thickness of transparent layer of double-layer composite quartz crucible |
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