CN218291103U - Observation window device for vacuum coating equipment - Google Patents
Observation window device for vacuum coating equipment Download PDFInfo
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- CN218291103U CN218291103U CN202222884911.8U CN202222884911U CN218291103U CN 218291103 U CN218291103 U CN 218291103U CN 202222884911 U CN202222884911 U CN 202222884911U CN 218291103 U CN218291103 U CN 218291103U
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- vacuum
- glass
- flange
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- observation window
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- 238000001771 vacuum deposition Methods 0.000 title claims abstract description 31
- 239000011521 glass Substances 0.000 claims abstract description 59
- 239000010935 stainless steel Substances 0.000 claims description 4
- 229910001220 stainless steel Inorganic materials 0.000 claims description 4
- 239000011248 coating agent Substances 0.000 abstract description 16
- 238000000576 coating method Methods 0.000 abstract description 16
- 238000004544 sputter deposition Methods 0.000 abstract description 7
- 239000000463 material Substances 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 238000007789 sealing Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 2
- 238000006467 substitution reaction Methods 0.000 description 2
- 230000005856 abnormality Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000005357 flat glass Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
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Abstract
The utility model relates to a large-scale horizontal continuous vacuum coating equipment, vacuum observation system design, coating film technical field disclose an observation window device for vacuum coating equipment, including the vacuum cavity, one side of vacuum cavity is provided with flange one, flange one is close to one side inside of vacuum side and is provided with the snap ring, the inboard of snap ring is provided with glass two, flange one keeps away from the inboard of vacuum side and is close to the edge and is provided with O type circle. The utility model discloses in, through the design that adopts double-deck high glass one and glass two, glass one is fixed observation glass, and glass two is removable formula glass, if two glass are polluted by the coating film sputtering thing at the vacuum apparatus during operation, the user can change by dismantling the snap ring to two glass that are polluted by the coating film sputtering thing, and it is more convenient to change, and convenient to use person looks over the condition of inside vacuum apparatus operation through the observation window.
Description
Technical Field
The utility model relates to a large-scale horizontal vacuum coating equipment in succession, vacuum observation system design, coating film technical field especially relate to an observation window device for vacuum coating equipment.
Background
The observation window system of the vacuum coating equipment is a key component of the vacuum coating equipment, various vacuum coating processes are required to be carried out in a vacuum chamber, different functional components are arranged in the vacuum coating chamber, and the observation window system of the vacuum coating equipment is mainly used for observing and detecting the working condition in the vacuum chamber and finding out abnormality of the treatment equipment in time.
At present, an observation window device in vacuum coating equipment is poor in sealing effect and poor in stability, and especially, the observation window glass of a process coating area is easily covered by a coating sputtering object after the observation window time is long, so that a worker cannot see the operation condition in the vacuum equipment and cannot find problems in time.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving the defects existing in the prior art and providing an observation window device for vacuum coating equipment.
In order to achieve the above purpose, the utility model adopts the following technical scheme: the utility model provides an observation window device for vacuum coating equipment, includes the vacuum cavity, one side of vacuum cavity is provided with flange one, flange one is close to the inside snap ring that is provided with in one side of vacuum side, the inboard of snap ring is provided with glass two, flange one keeps away from the inboard of vacuum side and is close to the edge and be provided with O type circle, one side that glass two kept away from the vacuum side is provided with glass one, just one side edge that glass one is close to the vacuum side contacts with O type circle.
As a further description of the above technical solution:
one side that flange one was kept away from to the vacuum cavity is provided with the vacuum clamp, the vacuum cavity is connected with flange two through the vacuum clamp, the inboard middle part of flange two is rotated and is connected with the rotation axis, the one end through connection flange two and the outside extension of vacuum cavity are kept away from to the rotation axis, the one end that the rotation axis is close to the vacuum cavity runs through the vacuum cavity and inwards extends, the one end that the rotation axis is close to the vacuum side is through bolt fixedly connected with baffle, the one end that the rotation axis is close to the atmosphere side is through bolt fixedly connected with handle.
As a further description of the above technical solution:
the inner side one end of the connecting flange II close to the baffle is provided with a clamp spring, the edges of the two inner side middle ends of the connecting flange II close to the middle are respectively provided with a bearing I and a bearing II, the two inner side middle ends of the connecting flange II are respectively provided with a framework oil seal I and a framework oil seal II, and one side of the inner side middle of the connecting flange II close to the baffle is provided with a retaining ring.
As a further description of the above technical solution:
a buffer cushion is arranged on one side, close to the atmosphere side, of the first glass, and a pressing plate is arranged on one side, close to the atmosphere side, of the first connecting flange.
As a further description of the above technical solution:
the handle is kept away from one end of flange two and is rotated and be connected with the anticreep bulb, the material of rotation axis and handle all adopts stainless steel material.
As a further description of the above technical solution:
the center position of the second connecting flange and the center position of the first connecting flange are on the same horizontal line.
The utility model discloses following beneficial effect has:
1. the utility model discloses in, through the design that adopts double-deck high glass one and glass two, glass one is fixed observation glass, and glass two is removable formula glass, if two glass are polluted by the coating film sputtering thing at the vacuum apparatus during operation, the user can change by dismantling the snap ring to two glass that are polluted by the coating film sputtering thing, and it is more convenient to change, and convenient to use person looks over the condition of inside vacuum apparatus operation through the observation window.
2. The utility model discloses in, through rotatable removal's baffle, drive rotation axis and baffle through turning handle when vacuum coating conveniently observes and rotate, open the baffle, make things convenient for the staff to look over the inside vacuum apparatus behavior of technology coating district, when the baffle does not use, can shelter from glass two through turning baffle, prevent that sputter from polluting glass, protect the observation window.
3. The utility model discloses in, seal up the rotation axis through two way skeleton oil sealings of skeleton oil blanket one and skeleton oil blanket, sealed effect is stable when sealed effectual to long service life.
4. The utility model discloses in, through adopting the vacuum clamp to be connected rotation axis and vacuum cavity and seal, it is sealed effectual to convenient to detach changes.
Drawings
Fig. 1 is a schematic cross-sectional view of the overall device of the observation window device for vacuum deposition equipment in the horizontal direction;
fig. 2 is a schematic perspective view of a baffle structure of an observation window device for vacuum deposition equipment according to the present invention;
fig. 3 is a schematic front view of a baffle plate structure of an observation window device for vacuum coating equipment provided by the present invention;
FIG. 4 is a schematic cross-sectional view of a baffle plate structure of an observation window device for a vacuum deposition apparatus according to the present invention in a horizontal direction;
fig. 5 is a schematic view of a cross-sectional view of a flange of an observation window device for a vacuum deposition apparatus in a horizontal direction.
Illustration of the drawings:
1. a vacuum chamber; 2. a baffle plate; 3. a snap ring; 4. an O-shaped ring; 5. pressing a plate; 6. a cushion pad; 7. first glass; 8. a second glass; 9. a first connecting flange; 10. a rotating shaft; 11. carrying out vacuum hoop clamping; 12. a first bearing; 13. a second connecting flange; 14. a framework oil seal I; 15. a retainer ring; 16. a framework oil seal II; 17. a second bearing; 18. a clamp spring; 19. a handle.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative efforts all belong to the protection scope of the present invention.
In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and simplification of description, but do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present invention; the terms "first," "second," and "third" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance, and furthermore, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood as a specific case by those skilled in the art.
Referring to fig. 1-5, the present invention provides an embodiment: the utility model provides an observation window device for vacuum coating equipment, includes vacuum cavity 1, and one side of vacuum cavity 1 is provided with flange one 9, and flange one 9 is close to one side inside snap ring 3 that is provided with of vacuum side, and the inboard of snap ring 3 is provided with two 8 glasses, and the inboard that the vacuum side was kept away from to flange one 9 is close to the edge and is provided with O type circle 4, and one side that the vacuum side was kept away from to two 8 glasses is provided with one 7 glass, and one side edge that a glass 7 is close to the vacuum side contacts with O type circle 4.
Whole observation window device adopts the design of double-deck high glass 7 and two 8 of glass, glass 7 is fixed observation glass, glass two 8 are removable formula glass, if two 8 of glass are polluted by the coating film sputter in the vacuum apparatus during operation, the user can change by dismantling snap ring 3 to two 8 of glass polluted by the coating film sputter, it is more convenient to change, convenient to use person looks over the condition of inside vacuum apparatus operation through the observation window, make things convenient for the staff can in time confirm the vacuum apparatus behavior in the technology coating area, guarantee the normal clear of normal vacuum coating operation.
One side that connecting flange 9 was kept away from to vacuum cavity 1 is provided with vacuum clamp 11, vacuum cavity 1 is connected with connecting flange two 13 through vacuum clamp 11, the inboard middle part of connecting flange two 13 is rotated and is connected with rotation axis 10, the one end through connection flange two 13 and the outside extension of vacuum cavity 1 are kept away from to rotation axis 10, the one end that rotation axis 10 is close to vacuum cavity 1 runs through vacuum cavity 1 and inwards extends, bolt fixedly connected with baffle 2 is passed through to the one end that rotation axis 10 is close to the vacuum side, bolt fixedly connected with handle 19 is passed through to the one end that rotation axis 10 is close to the atmosphere side.
When vacuum coating needs to be observed, the rotating shaft 10 and the baffle 2 are driven to rotate through the rotating handle 19, the baffle 2 is opened, the operation condition of vacuum equipment in a process coating area is convenient to check by workers, when the baffle 2 is not used, two 8 pieces of glass can be shielded through the rotating baffle 2, the sputtered object is prevented from polluting the glass, and the workers can check the condition of the inner coating through the observation window conveniently.
The clamp spring 18 is arranged at one end, close to the inner side of the baffle 2, of the second connecting flange 13, the first bearing 12 and the second bearing 17 are arranged at the edges, close to the two ends, of the middle of the inner side of the second connecting flange 13, the first skeleton oil seal 14 and the second skeleton oil seal 16 are arranged at the two ends, close to the two ends, of the middle of the inner side of the second connecting flange 13, and the retainer ring 15 is arranged on one side, close to the middle of the inner side of the baffle 2, of the second connecting flange 13.
Adopt skeleton oil blanket one 14 and two 16 double-track skeleton oil blanket of skeleton oil blanket to seal rotation axis 10 on the rotation axis 10, sealed effectual while sealed effect is stable to long service life, difficult emergence damage, and rotate through bearing one 12 and the supplementary rotation axis 10 of bearing two 17 in step, friction when reducing rotation axis 10 and rotating.
The side, close to the atmosphere, of the first glass 7 is provided with the cushion pad 6, the side, close to the atmosphere, of the first connecting flange 9 is provided with the pressing plate 5, the first glass 7 is a fixed glass window when in use, the first glass 7 is fixed through the pressing plate 5, and the first glass 7 can be prevented from being crushed by the pressing plate 5 through the cushion pad 6 arranged between the first glass 7 and the pressing plate 5.
The central position of the second connecting flange 13 and the central position of the first connecting flange 9 are on the same horizontal line, and the central positions of the second connecting flange 13 and the first connecting flange 9 are on the same horizontal line, so that the second glass 8 can be fully shielded by the baffle 2 in the rotating process, the glass on the glass observation window is prevented from being polluted and covered by the coating sputtering material, and the normal observation effect of the glass on the observation window is ensured.
The working principle is as follows: when vacuum coating needs to be shielded on a pipe window, a user can rotate the handle 19, the handle 19 rotates and simultaneously drives the baffle 2 to rotate through the rotating shaft 10, the first glass 8 on the first connecting flange 9 is shielded through the baffle 2, the rotating shaft 10 rotates and simultaneously performs auxiliary rotation through the first bearing 12 and the second bearing 17 in the second connecting flange 13, meanwhile, the rotating shaft 10 rotates and simultaneously ensures sealing when the rotating shaft 10 rotates through the first framework oil seal 14 and the second framework oil seal 16 in the second connecting flange 13, the vacuum equipment is prevented from entering the atmosphere during working, when the second glass 8 does not need to be shielded, the user can rotate the handle 19, the handle 19 rotates and simultaneously drives the baffle 2 to reset through the rotating shaft 10, after the vacuum equipment works for a period of time, the second glass 8 is polluted by a coating sputtering object, the user can replace the second glass 8 by disassembling the clamping ring 3, and normal operation of subsequent vacuum coating is ensured.
Finally, it should be noted that: although the present invention has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions on some technical features, and any modifications, equivalent substitutions, improvements, etc. made within the spirit and principles of the present invention should be included in the scope of the present invention.
Claims (6)
1. The utility model provides an observation window device for vacuum coating equipment, includes vacuum cavity (1), its characterized in that: one side of vacuum chamber body (1) is provided with flange (9), flange (9) are close to inside snap ring (3) that is provided with in one side of vacuum side, the inboard of snap ring (3) is provided with two (8) of glass, the inboard that the vacuum side was kept away from in flange (9) is close to the edge and is provided with O type circle (4), one side that the vacuum side was kept away from in two (8) of glass is provided with one (7) of glass, just one side edge that one (7) of glass is close to the vacuum side contacts with O type circle (4).
2. The observation window device for vacuum coating equipment according to claim 1, wherein: one side that flange (9) was kept away from in vacuum cavity (1) is provided with vacuum clamp (11), vacuum cavity (1) is connected with flange two (13) through vacuum clamp (11), the inboard middle part of flange two (13) is rotated and is connected with rotation axis (10), the one end that vacuum cavity (1) was kept away from in rotation axis (10) runs through flange two (13) and outwards extends, the one end that rotation axis (10) is close to vacuum cavity (1) runs through vacuum cavity (1) and inwards extends, bolt fixedly connected with baffle (2) are passed through to the one end that rotation axis (10) are close to the vacuum side, bolt fixedly connected with handle (19) are passed through to the one end that rotation axis (10) are close to the atmosphere side.
3. The observation window device for vacuum coating equipment according to claim 2, wherein: the inboard one end that flange two (13) are close to baffle (2) is provided with jump ring (18), the edge that is close to at the inboard middle part both ends of flange two (13) is provided with bearing (12) and bearing (17) respectively, the inboard middle part both ends of flange two (13) are provided with skeleton oil blanket one (14) and skeleton oil blanket two (16) respectively, inboard middle part one side that flange two (13) are close to baffle (2) is provided with retaining ring (15).
4. The observation window device for vacuum coating equipment according to claim 1, wherein: a buffer pad (6) is arranged on one side, close to the atmosphere, of the first glass (7), and a pressing plate (5) is arranged on one side, close to the atmosphere, of the first connecting flange (9).
5. The observation window device for vacuum coating equipment according to claim 2, wherein: the handle (19) is far away from the end of the second connecting flange (13) and is connected with an anti-dropping ball head in a rotating mode, and the rotating shaft (10) and the handle (19) are made of stainless steel.
6. The observation window device for vacuum coating equipment according to claim 2, wherein: the central position of the second connecting flange (13) and the central position of the first connecting flange (9) are on the same horizontal line.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222884911.8U CN218291103U (en) | 2022-10-31 | 2022-10-31 | Observation window device for vacuum coating equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202222884911.8U CN218291103U (en) | 2022-10-31 | 2022-10-31 | Observation window device for vacuum coating equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218291103U true CN218291103U (en) | 2023-01-13 |
Family
ID=84809405
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202222884911.8U Expired - Fee Related CN218291103U (en) | 2022-10-31 | 2022-10-31 | Observation window device for vacuum coating equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN218291103U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117364039A (en) * | 2023-09-12 | 2024-01-09 | 中国人民解放军国防科技大学 | Magnetron sputtering coating vacuum cavity |
-
2022
- 2022-10-31 CN CN202222884911.8U patent/CN218291103U/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117364039A (en) * | 2023-09-12 | 2024-01-09 | 中国人民解放军国防科技大学 | Magnetron sputtering coating vacuum cavity |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20230113 |