CN218286228U - Spraying device, cutting fluid system and wire cutting machine - Google Patents

Abstract

The utility model relates to a wire cut electrical discharge machining technical field specifically provides a spray set, cutting fluid system and wire cut electrical discharge machining, and this application aims at solving the problem that how to make spray set's cutting flow satisfy the cooling requirement of the material of waiting to cut of unidimensional. Mesh for this purpose, this application spray set includes shower and orifice plate, and the shower both ends are sealed, are provided with the inlet on the shower and spray the hole, and the inlet setting is spraying the hole top, and the shower inside is provided with the orifice plate along the axial extension of shower, and the orifice plate is located the inlet and sprays between the hole. Through the above setting mode, make the cutting fluid that enters into in the shower earlier carry out water conservancy diversion, reposition of redundant personnel through the orifice plate, and then improved the homogeneity and the stability of cutting fluid flow, be favorable to improving among the wire-electrode cutting process the cutting fluid and treat the inside homogeneity of cutting material, improved the cooling effect of treating the cutting material, improved the cutting quality and the cutting efficiency of cutting material.

Description

Spraying device, cutting fluid system and wire cutting machine

Technical Field

The utility model relates to a wire cut electrical discharge machining field specifically provides a spray set, cutting fluid system and wire cut electrical discharge machining.

Background

At present, the wire cutting technology has the characteristics of high production efficiency, low operation cost, high operation precision and the like, and is widely applied to the cutting production of semiconductor workpieces. Taking the diamond wire cutting silicon rod as an example, when the diamond wire is used for slicing the silicon rod, the diamond wire moves at a high speed and is driven by a cutting main roller of a wire cutting machine to grind the surface of the silicon rod in a reciprocating manner at a high speed, and the silicon rod is cut and processed into a silicon wafer. However, in the cutting process, due to the friction between the diamond wire and the silicon rod, high temperature and silicon powder are generated, so that the ratio of silicon wafer line marks to TTV (Total Thickness Variation) is increased, and the cutting yield of the silicon wafer is reduced.

The existing diamond wire cutting machine is provided with a spraying device, the silicon rod is cooled by spraying cutting liquid, and the cut silicon powder is cleaned, so that the cutting yield of the silicon wafer is increased.

At present, a spraying device is easily disturbed by cutting fluid entering the spraying device in the spraying process, so that the flow of the sprayed cutting fluid is not uniform, the quantity of the cutting fluid brought to different positions of a material to be cut is inconsistent in the linear cutting process, the cooling and lubricating effects of the material to be cut are influenced, and the cutting quality of equipment is unstable.

Therefore, there is a need in the art for a new solution to the above-mentioned problems.

SUMMERY OF THE UTILITY MODEL

In order to solve at least one problem among the prior art, for solving how to realize the even problem of spray set spun cutting fluid flow, this application provides a spray set, spray set includes the shower, the shower both ends are sealed, be provided with the inlet on the shower and spray the hole, the inlet sets up spray the hole top, the shower inside is provided with the edge the axially extending's of shower orifice plate, the orifice plate is located the inlet with between the spray the hole.

Through set up the orifice plate between inlet and spraying hole, the orifice plate can carry out water conservancy diversion, reposition of redundant personnel to the cutting fluid that enters into in the shower, has improved the homogeneity and the stability of cutting fluid flow, is favorable to improving the uniformity of taking the liquid measure of cutting fluid in the different positions of waiting to cut the material among the wire-electrode cutting process, has improved the cooling effect of waiting to cut the material, has improved the cutting quality and the cutting efficiency of cutting the material.

In the preferable technical scheme of the spraying device, one end of the spraying pipe is a closed end, the other end of the spraying pipe is sealed by a sealing element, the sealing element is provided with a mounting structure, and one end of the pore plate is connected with the mounting structure; or both ends of the spray pipe are sealed through sealing parts, each sealing part is provided with a mounting structure, and both ends of the pore plate are respectively connected with one mounting structure.

One end of the spray pipe is arranged to be a closed end, the other end of the spray pipe is sealed through a sealing element, and one end of the pore plate is connected with the mounting structure on the sealing element; or both ends of the spraying pipe are sealed through the sealing element, and both ends of the pore plate are respectively connected with the mounting structures on the sealing element, so that the spraying pipe is favorable for forming a closed space, the cutting fluid is prevented from leaking, and meanwhile, the convenience in mounting the pore plate is increased.

In the preferable technical scheme of the spraying device, the mounting structure is a boss or a groove.

Through setting up mounting structure into boss or recess for the orifice plate can be connected on the boss or in the recess, makes the installation of orifice plate simpler.

In a preferred technical scheme of the spraying device, the sealing element is fixed at the end part of the spraying pipe through a fastening element; or the sealing element is screwed on the end part of the spray pipe.

The sealing element is fixed at the end part of the spray pipe in a fastening or screwing mode, so that the spray pipe is favorable for forming a closed space, and the installation portability of the sealing element is improved.

In a preferred embodiment of the above spraying apparatus, at least one of the two long sides of the orifice plate extending in the axial direction of the shower pipe abuts against the inner wall of the shower pipe.

Through with two of orifice plate along the long limit of the axial extension of shower have at least one butt on the inner wall of shower, can increase the stability of orifice plate on the one hand, on the other hand can make the cutting fluid that enters into in the shower probably through reposition of redundant personnel, the water conservancy diversion of orifice plate as far as possible, improves the homogeneity of spun cutting fluid flow, increases the cooling effect of waiting to cut the material.

In the preferable technical scheme of the spraying device, the spraying holes are arranged in a plurality, the spraying holes are distributed along the axial direction of the spraying pipe, and each spraying hole is provided with a nozzle.

Through setting up a plurality of holes that spray, every sprays and is provided with a nozzle on the hole for cutting fluid can follow the nozzle blowout, can improve spray set's the effect that sprays, makes the homogeneity of spun cutting fluid flow obtain improving, increases the cooling effect of waiting to cut the material.

In the preferable technical scheme of the spraying device, a plurality of connecting sleeves with openings at the bottoms are arranged on the outer wall of the spraying pipe, the connecting sleeves correspond to the spraying holes one to one and enclose the spraying holes in the connecting sleeves, and the nozzles are connected to the connecting sleeves.

Through set up the adapter sleeve on the outer wall at the shower, the nozzle is connected in the adapter sleeve, has increased the installation convenience of nozzle.

Through being provided with the mounting panel on the shower, the mounting panel can be with spray set installation on wire cut electrical discharge machining, treats the cutting material and cools off.

The utility model also provides a cutting fluid system, the cutting fluid system includes above-mentioned spray set.

It should be noted that the cutting fluid system has all the technical effects of the spraying device, and the description thereof is omitted.

The utility model also provides a wire cutting machine, wire cutting machine includes above-mentioned spray set, perhaps above-mentioned cutting fluid system.

It should be noted that the wire cutting machine has all the technical effects of the foregoing spraying device, and the details are not repeated herein.

Drawings

Preferred embodiments of the present invention are described below with reference to the accompanying drawings, in which:

fig. 1 is a block diagram of a spray device according to an embodiment of the present invention;

fig. 2 is a partial sectional view of a spray device according to an embodiment of the present invention.

List of reference numerals:

1. a spray pipe; 11. spraying holes; 12. a liquid inlet; 13. mounting a plate; 2. a nozzle; 3. connecting sleeves; 4. a seal member; 41. a boss; 42. a bolt; 5. and (4) a pore plate.

Detailed Description

Preferred embodiments of the present application are described below with reference to the accompanying drawings. It should be understood by those skilled in the art that these embodiments are only for explaining the technical principles of the present application, and are not intended to limit the scope of protection of the present application. For example, although the present embodiment is described in connection with application to a wire cutting machine, this is not intended to limit the scope of the present application, and those skilled in the art can apply the present application to other application scenarios without departing from the principles of the present application. For example, the spraying device of the present application can obviously be applied to other types of cutting machines, such as a plasma cutting machine, a laser cutting machine, and the like.

It should be noted that in the description of the present application, the terms of direction or positional relationship indicated by the terms "upper", "lower", "inner", "bottom", "end", etc. are based on the directions or positional relationships shown in the drawings, which are merely for convenience of description, and do not indicate or imply that the device or element must have a specific orientation, be constructed and operated in a specific orientation, and thus, should not be construed as limiting the present application.

Further, it should be noted that, in the description of the present application, unless otherwise explicitly specified or limited, the terms "disposed," "connected," and "communicating" are to be construed broadly, e.g., as being fixedly connected, detachably connected, or integrally connected; they may be mechanically coupled, directly coupled, indirectly coupled through intervening media, or may be interconnected between two elements. The specific meaning of the above terms in the present application can be understood by those skilled in the art according to specific situations.

Referring first to fig. 1 to 2, the spray device of the present application will be described. Fig. 1 is a structural view of the spray device of the present application, and fig. 2 is a partial sectional view of the spray device of the present application.

As shown in fig. 1, in order to solve the problem of how to realize that spray set spun cutting fluid flow is even, the spray set of this application includes shower 1 and orifice plate 5, and 1 both ends of shower are sealed, is provided with inlet 12 on the shower 1 and sprays hole 11, and inlet 12 sets up in the hole 11 top that sprays. The orifice plate 5 is arranged inside the spray pipe 1 and extends along the axial direction of the spray pipe 1, and the orifice plate 5 is positioned between the liquid inlet 12 and the spray holes 11.

When adopting the utility model discloses when spray set treats the cutting material and cools off, the cutting fluid that enters into in the shower 1 passes through orifice plate 5 earlier, and orifice plate 5 can shunt the water conservancy diversion with the cutting fluid that enters into in shower 1 way, reduces the cutting fluid flow fluctuation, then the cutting fluid rethread sprays 11 blowout in hole for the cutting fluid can continuously treat the cutting material uniformly and cool off, improves the cooling effect of treating the cutting material.

In this application, through set up orifice plate 5 between inlet 12 and spray hole 11, orifice plate 5 can carry out water conservancy diversion and reposition of redundant personnel to the cutting fluid that enters into in shower 1, has reduced the cutting fluid flow and has fluctuated, has improved cutting fluid flow uniformity and stability, is favorable to improving the uniformity of the liquid measure of taking of cutting fluid in the different positions of waiting to cut the material among the wire-electrode cutting process, has improved the cutting quality and the cutting efficiency of cutting material.

With further reference to fig. 1-2, a preferred embodiment of the spray assembly of the present application will now be described. It will be appreciated by those skilled in the art that the following embodiments are presented merely to illustrate the principles of the application and are not intended to limit the scope of the application. Satisfying spray set and including shower 1 and orifice plate 5 at least, being provided with inlet 12 and spraying hole 11 on the shower 1, orifice plate 5 is located inlet 12 and sprays under the prerequisite between the hole 11, and the technical staff in the art can adjust following mode of setting to this application can be applicable to more specific application scenario.

Referring to fig. 1 and 2, in a more preferred embodiment, the spray device includes a shower pipe 1, nozzles 2, and an orifice plate 5.

Referring to fig. 1 and 2, the spray pipe 1 is cylindrical, two liquid inlets 12 and a mounting plate 13 are arranged at the top of the spray pipe 1, a plurality of spray holes 11 are arranged at the bottom of the spray pipe 1, the spray holes 11 are arranged along the axial direction of the spray pipe 1, the liquid inlets 12 are fast-assembling clamp joints, the cross sections of the fast-assembling clamp joints are circular, and the liquid inlets 12 can be connected with a liquid supply pipeline or a channel through clamps. The mounting plate 13 is positioned between the two liquid inlets 12, and can mount the spraying device on a wire cutting machine to cool materials to be cut.

Of course, the present application is not a trivial matter of changing the shape of the shower pipe 1, and those skilled in the art can change the shape thereof based on the specific application scenario. For example, the cross section of the shower pipe 1 may be rectangular, elliptical, etc. In addition, the present application is not a constant matter for the specific arrangement positions, numbers and shapes of the liquid inlet 12, the mounting plate 13 and the spray holes 11, and those skilled in the art can change the arrangement positions, numbers and shapes based on the specific application scenario. For example, the cross section of the liquid inlet 12 may also be triangular, square, oval, etc., and/or the liquid inlet 12 may also be a threaded port, or a wrench type quick-connect joint, etc., and/or the top of the shower pipe 1 is open as the liquid inlet 12, and/or the mounting plate 13 may also be disposed on the side surface or the bottom surface of the shower pipe 1, and/or the bottom of the shower pipe 1 may be provided with 1 elongated hole as the shower hole 11, and/or the shower hole 11 may be a circular hole, a square hole, etc., and/or the shower hole 11 may be disposed at any position of the shower pipe 1 below the orifice plate 5.

It should be noted that the connection between the liquid inlet 12 and the liquid supply pipe or channel is not a constant one, and those skilled in the art can change the arrangement based on the specific application scenario. For example, the threaded inlet 12 may be threadably connected to a liquid supply conduit or passage, or the wrench-type quick coupler inlet 12 may be threadably connected to a liquid supply conduit or passage by a C-type quick coupler.

Referring to fig. 1 and 2, a sealing member 4 is provided at each end of the shower pipe 1, and the sealing member 4 is inserted into the shower pipe 1 and coupled to the shower pipe 1 by a bolt 42 to seal the shower pipe 1.

Certainly, this application is not limited to shower 1's sealed mode and all is provided with sealing member 4 at shower 1 both ends, can also be that shower 1 one end is the blind end, and the other end is provided with sealing member 4, or shower 1 both ends are the blind end, or adopt other sealed forms, as long as can seal shower 1 both ends, technical personnel in the art can select shower 1's sealed mode according to concrete application scene is nimble.

It should be noted that the connection between the shower pipe 1 and the sealing member 4 is not a constant one, and those skilled in the art can change the connection based on the specific application scenario. For example, the sealing element 4 may also be attached by other fasteners, such as screws, bolts, etc. Or the outer side of the sealing element 4 can be provided with external threads, the inner side of the end part of the spray pipe 1 is provided with internal threads, and the sealing element 4 is screwed at the end part of the spray pipe 1 to seal the spray pipe 1. Or the sealing element 4 can be fixed at the end part of the spray pipe 1 by adopting glue bonding, clamping, welding and other modes. The sealing member 4 may be made of an elastic material, or may be made of another material, as long as a gap between the shower pipe 1 and the sealing member 4 can be eliminated to play a role of sealing the shower pipe 1, and those skilled in the art can flexibly change the sealing member based on a specific application scenario. After the sealing element 4 is made of other materials, a sealing ring or a sealing strip and the like can be arranged on the side surface of the sealing element 4, so that a gap between the spray pipe 1 and the sealing element 4 is eliminated.

In addition, in the present application, the sealing member 4 may be not only inserted into the shower pipe 1 to seal the end portion of the shower pipe 1, but also the sealing member 4 may be a component having a cover structure, and the component having the cover structure is disposed at the end portion of the shower pipe 1 to seal the end portion of the shower pipe 1, so long as the shower pipe 1 can be sealed, and a person skilled in the art may change the sealing manner of the shower pipe 1 based on a specific application scenario. When the spray pipe 1 is sealed by using the component with the cover structure, the spray pipe can be fixed at the end part of the spray pipe 1 by using the modes of screw joint, glue bonding, clamping, screw joint and the like.

Referring to fig. 1 and 2, bosses 41 are respectively arranged on the inner sides of the two sealing elements 4 of the spray pipe 1, and two ends of the pore plate 5 are respectively connected with one boss 41, so that the pore plate 5 is fixed in the spray pipe 1, the cutting fluid entering the spray pipe 1 is firstly divided and guided by the pore plate 5 and then flows out through the spray holes 11, the flow uniformity and stability of the cutting fluid entering the spray pipe 1 are improved, and the cooling effect of the material to be cut is favorably improved.

Of course, the installation position of the boss 41 is not always the same in the present application, and those skilled in the art can change the installation position of the boss 41 based on the specific application scenario. For example, a boss 41 may be provided on the inner side of one sealing member 4, and one end of the orifice plate 5 is connected to the boss 41, so that the orifice plate 5 can be fixed in the shower pipe 1; or one end or two ends of the spray pipe 1 are closed ends, the boss 41 can also be arranged at the closed end, and one end or two ends of the orifice plate 5 are connected to the boss 41.

It should be noted that the installation manner of the orifice plate 5 in the shower pipe 1 is not always the same in the present application, and those skilled in the art may change the installation manner of the orifice plate 5 in the shower pipe 1 based on the specific application scenario. For example, two bosses 41 may be provided on the inner side of one sealing member 4 or on the inner sides of two sealing members 4, the two bosses 41 are provided up and down with a gap therebetween, and the end of the orifice plate 5 is inserted into the gap. And/or the inner side of one seal 4 or the inner sides of both seals 4 may be provided with grooves into which the ends of the orifice plate 5 are plugged. And/or, a threaded hole is arranged on one sealing element 4 or two sealing elements 4, a thread groove is arranged at one end or two ends of the pore plate 5, a bolt is in threaded connection with the threaded hole and the thread groove at the same time, and the pore plate 5 is fixed on the sealing element 4 by the bolt.

In addition, it should be noted that the orifice plate 5 may be a straight plate, an arc plate, a horizontal plate, or an inclined plate, and the size and arrangement of the orifices on the orifice plate 5 may be set arbitrarily, so long as the size and arrangement of the orifices on the orifice plate 5 can be set arbitrarily, and as long as the cutting fluid entering the shower pipe 1 can be divided and guided, a person skilled in the art can select the arrangement form and structure of the orifice plate 5 according to a specific application scenario. In order to divide and guide the cutting fluid entering the spray pipe 1 as much as possible through the orifice plate 5 and improve the uniformity of the flow rate of the sprayed cutting fluid, one or two long sides of the orifice plate 5 extending in the axial direction of the spray pipe 1 can be abutted or fixed on the inner wall of the spray pipe 1, so that the spray pipe 1 is divided into two relatively closed spaces. Or more than 2 orifice plates 5 can be arranged on the spray pipe 1, and bosses 41, gaps, grooves or threaded holes with corresponding quantity are arranged on the inner side of one sealing element 4 or the inner sides of two sealing elements 4, so that the plurality of orifice plates 5 can be fixed.

Referring to fig. 2, a plurality of cylindrical connection sleeves 3 with openings at the bottom are arranged at the bottom of the spray pipe 1, the connection sleeves 3 correspond to the spray holes 11 one by one and enclose the spray holes 11 therein, and the nozzles 2 are connected in the connection sleeves 3.

Of course, the shape and the arrangement of the connecting sleeve 3 are not constant, and those skilled in the art can change the shape and the arrangement based on the specific application scenario. For example, the connecting sleeve 3 may be rectangular, elliptical, etc., and/or the connecting sleeve 3 may be disposed obliquely or even horizontally, and/or the connecting sleeve 3 may be inserted into the shower pipe 1.

It should be noted that one end of the nozzle 2 may be connected not only inside the connection sleeve 3, but also outside the connection sleeve 3, as long as the nozzle 2 can be connected to the connection sleeve 3, and a person skilled in the art may select a connection mode between the nozzle 2 and the connection sleeve 3 based on a specific application scenario. The nozzle 2 can be connected with the connecting sleeve 3 through a screw connector, glue bonding, clamping, screw connection and other modes.

Furthermore, the utility model also provides a cutting fluid system, this cutting fluid system be in above-mentioned arbitrary embodiment spray set.

Furthermore, the utility model also provides a wire cutting machine, this wire cutting machine include in any one of the above-mentioned embodiment spray set, perhaps foretell cutting fluid system.

To sum up, the utility model discloses a wire cut electrical discharge machining disposes spray set. This spray set can shunt, the water conservancy diversion with the cutting fluid that enters into 1 way in the shower, reduces the cutting fluid flow fluctuation, has improved cutting fluid flow uniformity and stability, is favorable to improving the uniformity of the different positions of cutting fluid in waiting to cut the material taking the liquid measure among the wire-electrode cutting process, has improved the cooling effect of waiting to cut the material, has improved the cutting quality and the cutting efficiency of cutting the material.

Those skilled in the art will appreciate that although some embodiments described herein include some features included in other embodiments instead of others, combinations of features of different embodiments are meant to be within the scope of the application and form different embodiments. For example, in the claims of the present application, any of the claimed embodiments may be used in any combination.

So far, the technical solutions of the present application have been described in connection with the preferred embodiments shown in the drawings, but it is easily understood by those skilled in the art that the scope of the present application is obviously not limited to these specific embodiments. Equivalent changes or substitutions of related technical features can be made by those skilled in the art without departing from the principle of the present application, and the technical scheme after the changes or substitutions will fall into the protection scope of the present application.

Claims (10)

1. The utility model provides a spray set, its characterized in that, spray set includes the shower, the shower both ends are sealed, be provided with the inlet on the shower and spray the hole, the inlet sets up spray the hole top, the shower is inside to be provided with along the axially extended orifice plate of shower, the orifice plate is located the inlet with spray between the hole.

2. The spray device of claim 1, wherein one end of the spray pipe is a closed end, the other end of the spray pipe is sealed by a sealing element, a mounting structure is arranged on the sealing element, and one end of the orifice plate is connected with the mounting structure; or

The two ends of the spray pipe are sealed through sealing parts, each sealing part is provided with a mounting structure, and the two ends of the pore plate are respectively connected with one mounting structure.

3. The spray device of claim 2 wherein said mounting structure is a boss or a recess.

4. The spray assembly of claim 2 wherein said seal is secured to an end of said spray tube by a fastener; or

The sealing element is screwed at the end part of the spray pipe.

5. The spray assembly of claim 1 wherein at least one of the two long sides of said orifice plate extending axially of said spray header abuts an inner wall of said spray header.

6. The spraying device according to any one of claims 1 to 5, wherein a plurality of spraying holes are provided, the plurality of spraying holes are arranged along the axial direction of the spraying pipe, and each spraying hole is provided with a nozzle.

7. The spraying device of claim 6, wherein a plurality of connecting sleeves with openings at the bottom are arranged on the outer wall of the spraying pipe, the connecting sleeves correspond to the spraying holes one by one and enclose the spraying holes, and the nozzles are connected to the connecting sleeves.

8. The spray device of claim 1, wherein a mounting plate is provided on the spray tube.

9. A cutting fluid system, characterized in that it comprises a spraying device according to any one of claims 1-8.

10. A wire cutting machine comprising a spraying device according to any one of claims 1 to 8 or a cutting fluid system according to claim 9.

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