CN218272021U

CN218272021U - Upper electrode gas shunt hole blockage detection tool

Info

Publication number: CN218272021U
Application number: CN202222314859.2U
Authority: CN
Inventors: 欧力铭; 杨佐东; 胡飞
Original assignee: Chongqing Zhenbao Industrial Co ltd
Current assignee: Chongqing Zhenbao Technology Co ltd
Priority date: 2022-08-30
Filing date: 2022-08-30
Publication date: 2023-01-10
Anticipated expiration: 2032-08-30

Abstract

The utility model discloses a blocking detection tool for an upper electrode gas diversion hole, which belongs to the technical field of detection and comprises a detection box; a through groove is formed in one side wall of the detection box; the detection box is connected with an illumination box capable of passing through the through groove in a sliding manner; a plurality of luminous tubes are arranged between two opposite side walls of the lighting box; the side wall of the detection box is provided with a strip-shaped opening, and the other two adjacent side walls are provided with sliding chutes communicated with the strip-shaped opening; a translucent plate is connected in the sliding chute; an imaging plate is arranged at the opening of the detection box; the device can judge whether the imaging plate is provided with a light source or not by irradiating the gas distributing hole of the upper electrode by light emitted by the luminotron, thereby judging whether the gas distributing hole is blocked or not; whether compare in the inspector and utilize magnifying glass or microscopical mode to observe gas flow distribution hole and block up, this application can be directly through observing whether there is the light source on the formation of image board to whether indirect judgement gas flow distribution hole blocks up, can effectual improvement detection efficiency, can also reduce inspector's eyesight simultaneously and descend.

Description

Upper electrode gas shunt hole blockage detection tool

Technical Field

The utility model belongs to the technical field of detect, concretely relates to gaseous reposition of redundant personnel hole of upper portion electrode blocks up and detects frock.

Background

Whether the upper electrode gas distribution holes are blocked or not influences the normal use of the electrodes, the conventional method for detecting the electrode gas distribution holes is to observe the electrode gas distribution holes through a detector by using a magnifying glass or a microscope, the detection mode is difficult to operate, the observation efficiency is low, and the eyesight of the detector can be influenced for a long time.

SUMMERY OF THE UTILITY MODEL

In view of this, the utility model aims at providing an upper portion electrode gas reposition of redundant personnel hole blocks up and detects frock to solve among the prior art technical problem that detection mode is difficult to operate, observation efficiency hangs down.

In order to achieve the above purpose, the utility model provides a following technical scheme:

the utility model provides a tool for detecting the blockage of an upper electrode gas distributing hole, which comprises a detection box with an opening at the upper end; a through groove is formed in one side wall of the detection box; the bottom edge of the through groove is flush with the bottom surface of the detection box; the bottom surface of the detection box is connected with an illuminating box which can pass through the through groove and is uncovered in a sliding manner; a plurality of luminous tubes are arranged between two opposite side walls of the lighting box along the sliding direction; the side wall of the detection box, which is perpendicular to the sliding direction of the illumination box, is provided with a strip-shaped opening, and the other two adjacent side walls are provided with sliding chutes communicated with the strip-shaped opening; a semitransparent plate for placing an upper electrode is connected in the sliding groove; and an imaging plate capable of displaying whether the upper electrode gas distribution holes are blocked or not is arranged at the opening of the detection box.

Furthermore, a clamping groove which is in the same direction as the sliding groove and is positioned above the sliding groove is formed in the side wall of the detection box; the clamping groove is communicated with the strip-shaped port; the light-transmitting plate is connected in the clamping groove; the light-transmitting plate is provided with a plurality of through holes which are coaxial with the gas distributing holes; the bottom surface of the imaging plate is connected with a plurality of light-gathering tubes which are coaxial with the through holes; the lower end of the light-gathering tube is in contact with the upper surface of the light-transmitting plate.

Further, a fixing piece for fixing the light emitting tube is arranged between the side wall of the lighting box and the light emitting tube; the fixed piece is provided with an arc-shaped light screen which is coaxial with the lighting tube and can adjust the shading angle.

Furthermore, two side walls of the lighting box, which are vertical to the length direction of the light emitting tube, are provided with reflecting mirror surfaces.

Further, the translucent plate is a PP translucent plastic plate.

The beneficial effects of the utility model reside in that:

the utility model judges whether the imaging plate has light source to judge whether the gas shunting hole is blocked by irradiating the gas shunting hole of the upper electrode by the light emitted by the luminotron; whether compare in the inspector and utilize magnifying glass or microscopical mode to observe gas flow distribution hole and block up, this application can be directly through observing whether there is the light source on the formation of image board to whether indirect judgement gas flow distribution hole blocks up, can effectual improvement detection efficiency, can also reduce inspector's eyesight simultaneously and descend.

Additional advantages, objects, and features of the invention will be set forth in the description which follows and in part will become apparent to those having ordinary skill in the art upon examination of the following or may be learned from practice of the invention. The objectives and other advantages of the invention may be realized and attained by the means of the instrumentalities and/or combinations particularly pointed out in the appended claims.

Drawings

In order to make the purpose, technical scheme and beneficial effect of the utility model clearer, the utility model provides a following figure explains:

fig. 1 is a sectional view of the present invention.

The drawings are numbered as follows: the device comprises a detection box 1, a lighting box 2, a light-emitting tube 3, a sliding chute 4, a translucent plate 5, a groove 6, an imaging plate 7, a clamping groove 8, a light-transmitting plate 9, a through hole 10, a light-collecting tube 11, a fixing piece 12, a connecting shaft 121, a connecting pipe 122, a sliding block 123, a circular ring 124, a Z-shaped rod 125, an arc-shaped light shading plate 13, a motor 14, a reflector 15, an upper electrode 16 and a gas shunting hole 17.

Detailed Description

As shown in fig. 1, the utility model provides a tool for detecting the blockage of an upper electrode gas shunt hole, which comprises a detection box 1 with an opening at the upper end; a through groove is formed in the left side wall of the detection box 1; the bottom edge of the through groove is flush with the bottom surface of the detection box 1; the bottom surface of the detection box 1 is connected with an illuminating box 2 which can pass through the through groove and has no cover in a sliding way; a plurality of light emitting tubes 3 are arranged between the left side wall and the right side wall of the lighting box 2, and the light emitting tubes 3 are LED lamps; the front side wall of the detection box 1 is provided with a strip-shaped opening, the adjacent left and right side walls of the detection box are provided with sliding chutes 4 communicated with the strip-shaped opening, and the sliding chutes 4 are arranged along the front and back directions; a semitransparent plate 5 for placing an upper electrode 16 is clamped in the sliding groove 4; grooves 6 positioned on the same horizontal plane are formed on four side walls at the opening of the detection box 1; an imaging plate 7 capable of displaying whether the gas distributing holes 17 of the upper electrode 16 are blocked is arranged in the groove 6.

The principle and the beneficial effects of the technical scheme are as follows:

the upper electrode 16 is placed on the transparent plate 9 and then slides into the detection box 1, light rays released by the light emitting tube 3 penetrate through the translucent plate 5 and then penetrate through the gas flow distribution holes 17 and irradiate on the imaging plate 7, and whether the gas flow distribution holes 17 of the upper electrode 16 are blocked or not is judged by observing whether the imaging plate 7 has a light source or not.

Whether compare in the inspector and utilize magnifying glass or microscopical mode to observe gaseous reposition of redundant personnel hole 17 and block up, this application can be directly through observing whether there is the light source on the formation of image board 7 to whether indirect judgement gaseous reposition of redundant personnel hole 17 blocks up, can effectual improvement detection efficiency, can also reduce inspector's eyesight simultaneously and descend.

In the embodiment, the left side wall and the right side wall of the detection box 1 are provided with clamping grooves 8 which have the same direction as the opening direction of the sliding grooves 4 and are positioned above the sliding grooves 4; the clamping groove 8 is communicated with the strip-shaped port; a light transmission plate 9 is clamped in the clamping groove 8; a plurality of gas distributing holes 17 are formed in the light-transmitting plate 9, and each gas distributing hole 17 is coaxial with the corresponding through hole 10; the bottom surface of the imaging plate 7 is connected with a plurality of light-gathering tubes 11, and each light-gathering tube 11 is coaxial with the corresponding through hole 10; the lower end of the light-gathering tube 11 is in contact with the upper surface of the light-transmitting plate 9.

after the light emitted by the light-emitting tube 3 passes through the gas distributing hole 17, the light can irradiate on the imaging plate 7 along the light-gathering tube 11; the light-gathering tube 11 can reduce the scattering of light during the transmission process, and gathers the light, so that the light irradiated on the imaging plate 7 can be observed more easily.

In this embodiment, the left and right side walls of the illumination box 2 are provided with a fixing member 12 for fixing the light emitting tube 3; each fixing member 12 includes a connecting hole provided on the left and right side walls; a connecting shaft 121 is rotatably connected in the connecting hole; one end of the connecting shaft 121 extending into the lighting box 2 is coaxially welded with a connecting pipe 122; a sliding block 123 is connected in the connecting pipe 122 in a sliding manner; the sliding block 123 is connected with the bottom of the connecting pipe 122 through a spring; the two ends of the light-emitting tube 3 are respectively connected in the tubes of the two connecting tubes 122 in a sliding manner and are in contact with the sliding block 123; a circular ring 124 welded with the connecting pipe 122 is sleeved outside the connecting pipe 122; the circular rings 124 are connected with Z-shaped rods 125; an arc-shaped shading plate 13 with adjustable shading angle is connected between the two Z-shaped rods 125; the left connecting shaft 121 passes through the left side wall of the lighting box 2 and is coaxially connected with the motor 14; the motor 14 is connected to the left side wall of the illumination box 2 through a connection plate disposed below the motor 14.

the motor 14 drives the connecting shaft 121 at the left end to rotate, so as to drive the connecting pipe 122 to rotate, so that the ring 124 on the connecting pipe 122 drives the arc-shaped light shielding plate 13 to rotate, thereby enabling the intensity of the light emitted upwards by the light-emitting tube 3 to be in a changing state, enabling the light emitted on the imaging plate 7 after passing through the light-collecting tube 11 to be in a changing state, and enabling an inspector to judge whether the gas distribution holes 17 are blocked more easily.

In this embodiment, the front and rear inner side walls of the illumination box 2 are connected to the reflecting mirror surfaces 15.

the reflector surface 15 can reflect the light scattered around, thereby improving the light intensity passing through the gas distribution holes 17, and enabling an inspector to judge whether the gas distribution holes 17 are blocked or not more easily by observing the imaging plate 7.

In this embodiment, the translucent plate 5 is a PP translucent plastic plate.

the plastic plate made of the material has good light transmission and low cost.

Finally, it is noted that the above-mentioned preferred embodiments illustrate rather than limit the invention, and that, although the invention has been described in detail with reference to the above-mentioned preferred embodiments, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the scope of the invention as defined by the appended claims.

Claims

1. Gaseous reposition of redundant personnel hole of upper portion electrode blocks up detection frock, its characterized in that: the detection box comprises an opening at the upper end; a through groove is formed in one side wall of the detection box; the bottom edge of the through groove is flush with the bottom surface of the detection box; the bottom surface of the detection box is connected with an illuminating box which can pass through the through groove and is uncovered in a sliding manner; a plurality of luminous tubes are arranged between two opposite side walls of the lighting box along the sliding direction; the side wall of the detection box, which is perpendicular to the sliding direction of the illumination box, is provided with a strip-shaped opening, and the other two adjacent side walls are provided with sliding chutes communicated with the strip-shaped opening; a semitransparent plate for placing an upper electrode is connected in the sliding groove; and an imaging plate capable of displaying whether the upper electrode gas distribution holes are blocked or not is arranged at the opening of the detection box.

2. The upper electrode gas distribution hole blockage detection tool according to claim 1, characterized in that: the side wall of the detection box is provided with a clamping groove which has the same direction as the opening direction of the sliding groove and is positioned above the sliding groove; the clamping groove is communicated with the strip-shaped port; the light-transmitting plate is connected in the clamping groove; the light-transmitting plate is provided with a plurality of through holes which are coaxial with the gas distributing holes; the bottom surface of the imaging plate is connected with a plurality of light-gathering tubes which are coaxial with the through holes; the lower extreme of spotlight pipe and the upper surface contact of light-passing board.

3. The upper electrode gas distribution hole blockage detection tool according to claim 2, characterized in that: a fixing piece for fixing the light emitting tube is arranged between the side wall of the lighting box and the light emitting tube; the fixed piece is provided with an arc-shaped light screen which is coaxial with the lighting tube and can adjust the shading angle.

4. The upper electrode gas distribution hole blockage detection tool according to claim 3, characterized in that: two side walls of the lighting box, which are vertical to the length direction of the light emitting tube, are provided with reflecting mirror surfaces.

5. The upper electrode gas distribution hole blockage detection tool according to claim 4, characterized in that: the semi-transparent plate is a PP semi-transparent plastic plate.