CN218270636U

CN218270636U - Length-adjustable multi-crystal oscillator plate coating thickness detection device

Info

Publication number: CN218270636U
Application number: CN202121599980.3U
Authority: CN
Inventors: 薛照明; 黄子建; 薛海
Original assignee: Chengdu Tianyi Guotai Vacuum Equipment Co ltd
Current assignee: Chengdu Tianyi Guotai Vacuum Equipment Co ltd
Priority date: 2021-07-14
Filing date: 2021-07-14
Publication date: 2023-01-10
Anticipated expiration: 2031-07-14

Abstract

The utility model discloses a many crystal oscillator piece coating thickness detection device of adjustable length belongs to vacuum coating technical field, aim at solve present many coating thickness detection device length unadjustable and the problem of the preparation debugging product technology that brings. It includes antifouling urceolus, the antifouling urceolus endotheca is equipped with the inner tube, the inner tube top is connected with sealing flange, the last dividing head of installing of sealing flange, dividing head angle detection box are installed on the dividing head top, the last BNC of still installing of sealing flange changes radio frequency socket and dividing head angle regulating plate, frequency sampling subassembly is installed to the inner tube bottom, the inner tube bottom is located the other direct cooling formula water-cooling seat of still installing of frequency sampling subassembly, it still is provided with telescopic bracket component to be located direct cooling formula seat top in the inner tube. The utility model is suitable for a many crystal oscillator piece coating thickness detection device.

Description

Length-adjustable multi-crystal oscillator plate coating thickness detection device

Technical Field

The utility model belongs to the technical field of vacuum coating, concretely relates to length adjustable many crystal oscillator piece coating thickness detection device.

Background

The thickness measuring and detecting device for the thickness of the crystal oscillator plate utilizes the correlation between the resonant frequency of a quartz crystal wafer and the thickness of an attached coating to detect the thickness of the attached matter, and in the existing detecting device for detecting the multi-position crystal oscillator plates, the parts are too dispersed and have complex structures although the length is variable, or the length is fixed and not adjustable although the device is integrated, so that the defect that an equipment user has no way to adjust the height position of a signal detecting point is caused, and the flexibility of a trial-manufacture film process is reduced. The other disadvantage is that the length of the wafer detecting device is specially customized for the slight height change between the vacuum chamber and the workpiece holder on the structure of the equipment, thereby increasing the cost and time.

SUMMERY OF THE UTILITY MODEL

In order to solve the above problems, the present invention provides a device for detecting the thickness of a coating of a multi-bit crystal oscillator plate with adjustable length.

The utility model adopts the technical scheme as follows:

the utility model provides a many crystal oscillator piece coating thickness detection device of adjustable length, includes antifouling urceolus, the inner tube is equipped with to antifouling urceolus endotheca, the inner tube top is connected with sealing flange, the last dividing head of installing of sealing flange, dividing head top are installed dividing head angle and are detected the box, the last BNC that still installs of sealing flange changes radio frequency socket and dividing head angle regulating plate, frequency sampling component is installed to the inner tube bottom, the inner tube bottom is located the other direct cooling formula water-cooling seat of still installing of frequency sampling component, it still is provided with telescopic bracket component to be located direct cooling formula water-cooling seat top in the inner tube.

Further, telescopic bracket component includes the bracing piece, follows on the bracing piece direction of height supreme fixed mounting from down and has first fixed disk, second fixed disk, third fixed disk, it has the activity dish still to lie in third fixed disk top movable mounting on the bracing piece, it is equipped with the bracing piece cover still to lie in on the bracing piece between activity dish and the third fixed disk, bracing piece cover and activity dish fixed connection, the bracing piece cover is fixed in on the bracing piece through bracing piece set screw, run through on activity dish, first fixed disk, second fixed disk, the third fixed disk and install cold water pipe and spool, activity dish, first fixed disk, second fixed disk, third fixed disk center still run through and install the pivot, and the pivot top is located still to overlap in the sealing flange and is equipped with the pivot cover, the pivot cover is fixed in the pivot through pivot set screw, still is connected with the pivot between pivot cover and the dividing head and is connected the parallel key, install first sealing washer between pivot cover and the sealing flange, the second sealing washer is still installed with the junction of sealing flange to the cold water pipe, the activity dish passes through flange connection screw and is connected in the sealing flange.

Further, frequency sampling subassembly is including connecting the antifouling dish of the crystal oscillator piece in antifouling urceolus bottom, direct cooling formula water cooling seat sets up on the antifouling dish of crystal oscillator piece, install the spacing bearing of roll between direct cooling formula water cooling seat and the pivot, the loudspeaker sample connection has been seted up to the antifouling dish bottom of crystal oscillator piece, install crystal oscillator piece mounting disc on the antifouling dish of crystal oscillator piece, lie in loudspeaker sample connection one side on the crystal oscillator piece mounting disc and install crystal oscillator piece, three horns are installed to crystal oscillator piece top, still overlap on the crystal oscillator piece mounting disc and be equipped with the contact rolling disc, lie in the other contact that still is provided with of contact rolling disc on the crystal oscillator piece mounting disc, still install the transition spring mounting disc in the direct cooling formula water cooling seat, still install transition spring and transition spring setting in the contact top on the transition spring mounting disc, lie in the transition spring top on the transition spring mounting disc and be provided with ball elasticity needle, ball elasticity needle passes through the radio frequency connector and BNC commentaries on classics radio frequency socket electric signal connection, crystal oscillator piece mounting disc passes through the fixed pin and is connected with the pivot transmission.

Further, the support rod sleeve can slide up and down along the support rod.

To sum up, owing to adopted above-mentioned technical scheme, the beneficial effects of the utility model are that:

1. the utility model discloses in, dividing head one end is connected dividing head angle and is detected the box and remove the relative position who detects the dividing head, and flat key connection pivot cover is connected through the pivot to one end in addition, passes through and fixes a position with antifriction bearing between pivot cover and the sealing flange to thereby drive the rotatory crystal oscillator piece mounting disc of pivot by the pivot cover and rotate according to the step-by-step number of degrees of dividing head, the calibration is adjusted in the waist type hole on the relative position accessible dividing head angle adjusting plate of its dividing head and crystal oscillator piece mounting disc. The rotary shaft sleeve, the rotary shaft and the dividing head are in key connection, so that the angle between the rotary shaft sleeve and the dividing head is fixed, and the position deviation caused by long-time work is overcome. Meanwhile, a transition spring is used as a connecting medium between the ball elastic needle and the contact, so that better conductivity is achieved. The telescopic bracket component is used for supporting the whole device, supporting rod fixing screws of the supporting rod sleeve and the supporting rod are loosened, flange connecting screws of the flange and the movable disc are loosened, the position of the supporting rod sleeve can be adjusted in a vertical sliding mode within a certain range after the rotating shaft fixing screws of the rotating shaft sleeve and the rotating shaft are loosened, the length of the whole telescopic bracket component is adjusted, and the telescopic bracket component can be positioned by the supporting rod fixing screws when the telescopic bracket component exceeds the range, so that the problem that the process debugging difficulty is increased due to the fact that the measuring point of the crystal oscillator piece thickness measuring device is fixed and cannot be adjusted (namely the relative position between the measuring point and a workpiece cannot be changed) when a vacuum equipment user manufactures film manufacturing equipment is effectively solved, and meanwhile, the problem that the thickness of the frequency coating of a multi-position crystal oscillator piece is specially customized due to the fact that the height difference between a vacuum cavity and a workpiece frame is different in requirements when the vacuum equipment manufacturer manufacturing equipment is produced is solved.

Drawings

In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are required to be used in the embodiments will be briefly described below, it should be understood that the following drawings only illustrate some embodiments of the present invention, and therefore should not be considered as limiting the scope, and that for those skilled in the art, other relevant drawings can be obtained according to the drawings without inventive effort, wherein:

FIG. 1 is an external structural view of the present invention;

FIG. 2 is a schematic structural view of the telescopic bracket assembly of the present invention;

fig. 3 is a cross-sectional view of the present invention;

FIG. 4 is a partial schematic view of the frequency sampling assembly and the direct-cooling water-cooling seat of the present invention;

FIG. 5 is a schematic view of the structure of the ball elastic needle and the transition spring of the present invention;

the mark in the figure is: 1-antifouling outer cylinder, 2-inner cylinder, 3-sealing flange, 4-BNC rotary radio frequency socket, 5-dividing head angle adjusting plate, 6-dividing head, 7-frequency sampling assembly, 710-triangular plate, 711-contact rotating disc, 712-contact, 713-crystal oscillator plate mounting disc, 714-crystal oscillator plate antifouling disc, 715-crystal oscillator plate, 716-horn sampling port, 8-supporting rod, 9-supporting rod sleeve, 10-cold water pipe, 11-line pipe, 12-rotating shaft, 13-rotating shaft sleeve, 14-direct cooling type water cooling seat, 141-transition spring, 142-ball elastic needle, 143-transition spring mounting disc, 144-rolling limit bearing, 145-driving pin, 15-rotating shaft connecting flat key, 16-first sealing ring, 17-rotating shaft fixing screw, 18-supporting rod fixing screw, 19-flange connecting screw, 20-dividing head angle monitoring box, 21-second sealing ring, 22-fixed disc, 23-first sealing ring, 24-second sealing ring and 25-third sealing ring.

Detailed Description

In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are some, but not all, embodiments of the present invention. The components of the embodiments of the present invention generally described and illustrated in the figures herein may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, presented in the accompanying drawings, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

It should be noted that: reference numerals and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.

In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, or the directions or positional relationships that the products of the present invention are usually placed when used, and are only for the convenience of describing the present invention, and do not indicate or imply that the device or element indicated must have a specific direction, be constructed and operated in a specific direction, and therefore should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance.

Furthermore, the terms "horizontal", "vertical" and the like do not imply that the components are required to be absolutely horizontal or pendant, but rather may be slightly inclined. For example, "horizontal" merely means that the direction is more horizontal than "vertical" and does not mean that the structure must be perfectly horizontal, but may be slightly inclined.

In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; mechanical connection or electrical connection can be realized; the two original pieces can be directly connected or indirectly connected through an intermediate medium, or the two original pieces can be communicated with each other. The specific meaning of the above terms in the present invention can be understood in specific cases to those skilled in the art.

The utility model provides a length adjustable many crystal oscillator piece coating thickness detection device, including antifouling urceolus 1, 1 endotheca of antifouling urceolus is equipped with

inner tube

2, 2 top of inner tube are connected with sealing flange 3, sealing flange installs dividing head 6 on 3, 6 angle detection boxes of dividing head are installed on 6 tops of dividing head, sealing flange 3 is last still to install BNC and changes radio frequency socket 4 and dividing head angle adjusting plate 5, frequency sampling subassembly 7 is installed to 2 bottoms of inner tube, 2 bottoms of inner tube are located the other direct cooling formula water-cooling seat 14 of still installing of frequency sampling subassembly 7, it still is provided with telescopic bracket component to be located direct cooling formula water-cooling seat 14 top in the inner tube 2.

Further, the telescopic bracket assembly includes a support rod 8, a first fixed disk 23 is fixedly installed on the support rod 8 along the height direction of the support rod 8 from bottom to top, a second fixed disk 24, a third fixed disk 25, a movable disk 22 is movably installed above the third fixed disk 25 on the support rod 8, a support rod sleeve 9 is further sleeved between the movable disk 22 and the third fixed disk 25 on the support rod 8, the support rod sleeve 9 is fixedly connected with the movable disk 22, the support rod sleeve 9 is fixed on the support rod 8 through a support rod 8 fixing screw, the movable disk 22, the first fixed disk 23, the second fixed disk 24, a cold water pipe 10 and a spool 11 are further installed on the third fixed disk 25 in a penetrating manner, the movable disk 22, the first fixed disk 23, the second fixed disk 24, a rotating shaft 12 is further installed in a penetrating manner at the center of the third fixed disk 25, a rotating shaft sleeve 13 is further sleeved in the sealing flange 3 at the top end of the rotating shaft 12, the rotating shaft sleeve 13 is fixed on the rotating shaft 12 through a rotating shaft fixing screw, a rotating shaft 12 connecting flat key is further connected between the rotating shaft sleeve 13 and the dividing head 6, a first sealing ring 16 is installed between the rotating shaft sleeve 13 and the sealing flange 3, a sealing ring 21 is further installed on the rotating flange 3 through a sealing ring 19.

Further, the frequency sampling assembly 7 includes a crystal oscillator plate anti-fouling disc 714 connected to the bottom of the anti-fouling outer cylinder 1, the direct cooling type water cooling seat 14 is disposed on the crystal oscillator plate anti-fouling disc 714, a rolling limit bearing 144 is installed between the direct cooling type water cooling seat 14 and the rotating shaft 12, a horn sampling port 716 is formed in the bottom of the crystal oscillator plate anti-fouling disc 714, a crystal oscillator plate mounting disc 713 is installed on the crystal oscillator plate anti-fouling disc 714, a crystal oscillator plate 715 is installed on one side of the horn sampling port 716 on the crystal oscillator plate mounting disc 713, a triangular plate 710 is installed above the crystal oscillator plate 715, a contact rotating disc 711 is further sleeved on the crystal oscillator plate mounting disc 713, a contact 712 is further disposed beside the contact rotating disc 711 on the crystal oscillator plate mounting disc 713, a transition spring 141 mounting disc is further installed in the direct cooling type water cooling seat 14, a transition spring 141 is further installed on the transition spring 141 mounting disc 141, the transition spring 141 is disposed above the transition spring 141, a ball elastic needle 142 is disposed above the transition spring 141, the ball elastic needle 142 is connected with a radio frequency c transition socket 4 through an electrical signal connector 713, and the crystal oscillator plate is connected with the rotating shaft 12 through a fixed pin.

Further, the support rod sleeve 9 can slide up and down along the support rod 8.

The utility model discloses in the implementation, dividing head 6 is fixed on angle adjustment plate 5, passes waist type hole on the angle adjustment plate 5 and is connected with sealing flange 3 with the screw simultaneously, utilizes waist type hole correctable aligning crystal oscillator piece 715 center and the antifouling dish of crystal oscillator piece to go up the angular position at the center of loudspeaker sample connection 716. When the dividing head 6 rotates, the rotating shaft sleeve 13 and the rotating shaft 12 are driven to rotate by the rotating shaft connecting flat key 15, and the rotating shaft 12 drives the frequency sampling assembly 7 to rotate by the transmission pin 145, so that when the dividing head 6 rotates for one station, the crystal oscillator plate 715 in the crystal oscillator plate mounting disc 713 also accurately rotates for one station along with the dividing head 6. In the coating process, fine particles generated after material evaporation are attached to the crystal oscillator plate 715 through the horn sampling port 716, the resonance frequency of the crystal oscillator plate 715 is changed along with the increase of attachment of the crystal oscillator plate, the frequency of the crystal oscillator plate 715 is transmitted to the transition reed 141 through the contact 712 of the oscillator plate mounting disc 713 and then transmitted to the ball elastic needle 142, and is transmitted to the BNC (bayonet nut connector) on the sealing flange 3 through the radio frequency connector and the shielding wire on the ball elastic needle 142 and then connected to a special crystal thickness measuring instrument through an external high-frequency cable to perform correlation calculation of the frequency and the attachment, so that the thickness of the attachment of the crystal oscillator plate is obtained.

When the length of the water pipe is adjusted, the antifouling outer cylinder 1 and the antifouling inner cylinder 2 are taken off, the rotating shaft fixing screw 17, the supporting rod fixing screw 18, the movable disc 22 and the flange connecting screw 19 are loosened, then the whole telescopic bracket assembly can be freely adjusted up and down within a certain range, the cold water pipe 10 is sealed by the movable disc 22, the tapered groove in the sealing flange 3 and the second sealing ring 21 together, and the cold water pipe can be easily sealed by pressing the movable disc 22 and the flange connecting screw 19 of the sealing flange 3. The sealing of the rotating shaft sleeve 13 is also realized by the movable disc 22 and the flange connecting screw 19, and the first sealing ring 16 can be axially extruded to radially shrink by pressing the flange connecting screw 19, so that the air sealing between the rotating shaft sleeve 13 and the sealing flange 3 is realized.

The above is the embodiment of the present invention. The foregoing is the preferred embodiments of the present invention, and if the preferred embodiments in the preferred embodiments are not obviously contradictory or are based on a certain preferred embodiment, the preferred embodiments can be combined and used by being superimposed at will, and the specific parameters in the embodiments and examples are only for the purpose of clearly describing the verification process of the present invention, and are not used to limit the patent protection scope of the present invention, which is still based on the claims, and all the equivalent structural changes made by applying the contents of the specification and the drawings of the present invention should be included in the protection scope of the present invention.

Claims

1. The utility model provides a length adjustable many crystal oscillator piece coating thickness detection device, a serial communication port, including antifouling urceolus (1), inner tube (2) are established to antifouling urceolus (1) endotheca, inner tube (2) top is connected with sealing flange (3), install dividing head (6) on sealing flange (3), dividing head (6) angle detection box is installed on dividing head (6) top, still install BNC on sealing flange (3) and change radio frequency socket (4) and dividing head angle regulating plate (5), frequency sampling subassembly (7) are installed to inner tube (2) bottom, inner tube (2) bottom is located frequency sampling subassembly (7) other direct cooling formula water-cooling seat (14) of still installing, it still is provided with telescopic bracket component to be located direct cooling formula water-cooling seat (14) top in inner tube (2).

2. The device for detecting the thickness of a coating of a multi-crystal oscillator plate with adjustable length according to claim 1, wherein the telescopic bracket assembly comprises a supporting rod (8), a first fixed disk (23), a second fixed disk (24) and a third fixed disk (25) are fixedly arranged on the supporting rod (8) along the height direction of the supporting rod (8) from bottom to top, a movable disk (22) is further movably arranged on the supporting rod (8) above the third fixed disk (25), a supporting rod sleeve (9) is further sleeved between the movable disk (22) and the third fixed disk (25), the supporting rod sleeve (9) is fixedly connected with the movable disk (22), the supporting rod sleeve (9) is fixed on the supporting rod (8) through a supporting rod (8) fixing screw, a cold water pipe (10) and a spool (11) are installed on the movable disk (22), the first fixed disk (23), the second fixed disk (24) and the third fixed disk (25) in a penetrating manner, a rotating shaft (12) is further installed on the rotating shaft (13) through a rotating shaft (12), and a rotating shaft (13) is further installed on the rotating shaft (13) through a rotating shaft fixing screw sleeve, still be connected with pivot (12) between pivot cover (13) and dividing head (6) and be connected the parallel key, install first sealing washer (16) between pivot cover (13) and sealing flange (3), second sealing washer (21) are still installed with the junction of sealing flange (3) in cold water pipe (10), activity dish (22) are connected on sealing flange (3) through flange joint screw (19).

3. The device for detecting the thickness of a coating of a multi-bit crystal oscillator plate with adjustable length according to claim 1 or 2, wherein the frequency sampling assembly (7) comprises a crystal oscillator plate anti-fouling disc (714) connected to the bottom of the anti-fouling outer cylinder (1), the direct-cooling water cooling seat (14) is arranged on the crystal oscillator plate anti-fouling disc (714), a rolling limit bearing (144) is arranged between the direct-cooling water cooling seat (14) and the rotating shaft (12), a horn sampling port (716) is formed in the bottom of the crystal oscillator plate anti-fouling disc (714), a crystal oscillator plate mounting disc (713) is arranged on the crystal oscillator plate anti-fouling disc (714), a crystal oscillator plate (715) is arranged on one side of the horn sampling port (716) on the crystal oscillator plate mounting disc (713), a triangular plate (710) is arranged above the crystal oscillator plate (715), a rotating disc (711) is further sleeved on the crystal oscillator plate mounting disc (713), a contact (712) is further arranged on the crystal plate mounting disc (713) beside the contact rotating disc (711), a transition spring (141) is further arranged on the transition spring (141), and a transition spring (141) is arranged on the transition spring (141) and a transition spring (141) is arranged on the transition spring (712), ball elastic pin (142) change radio frequency socket (4) signal connection through radio frequency connector and BNC, crystal oscillator piece mounting disc (713) is connected with pivot (12) transmission through the fixed pin.

4. A length-adjustable thickness detection apparatus for multiple crystal oscillator plate coatings as claimed in claim 2, wherein said support rod sleeve (9) is slidable up and down along the support rod (8).