CN218240135U

CN218240135U - Sub-nanometer precision three-axis fine adjustment platform

Info

Publication number: CN218240135U
Application number: CN202222022696.0U
Authority: CN
Inventors: 王福辉
Original assignee: Mapuno Guangzhou Technology Co ltd
Current assignee: Mapuno Guangzhou Technology Co ltd
Priority date: 2022-08-03
Filing date: 2022-08-03
Publication date: 2023-01-06
Anticipated expiration: 2032-08-03

Abstract

The utility model belongs to the technical field of triaxial fine setting platform technique and specifically relates to a sub-nanometer precision triaxial fine setting platform, the power distribution box comprises a box body, the top side of box is provided with the landing slab, the right-hand member fixedly connected with controller of box, the right-hand member fixed connection of box has the voltage sensor dish, the inboard and the outside of box all are provided with triaxial fine setting structure, triaxial fine setting structure contains bears the weight of seat, and bears weight of seat and box sliding connection, bear the top fixedly connected with motor of seat, the utility model discloses in the relative slip of first sliding block and resistance strip and the relative slip of second sliding block relative resistance pole, guarantee that the landing slab reliably adjusts resistance strip and resistance pole when triaxial position is finely tuned through the length of first sliding block and second access circuit respectively, voltage sensor and controller in the voltage sensor dish mutually support, the triaxial coordinate position of real-time supervision platform guarantees sub-nanometer precision adjustment platform position, increases the practicality of device.

Description

Sub-nanometer precision three-axis fine adjustment platform

Technical Field

The utility model relates to a triaxial fine setting platform technical field specifically is a sub-nanometer precision triaxial fine setting platform.

Background

Sub-nanometers, i.e., a few nanometers smaller, can also be a length concept on the order of nanometers, which ranges from a few to hundreds of nanometers, with corresponding sub-nanometers ranging from almost a few angstroms to tens of angstroms (i.e., a few nanometers).

The fine setting of sub-nanometer precision is carried out to platform triaxial can not reliably reach the precision grade through staff's manual adjustment, can not reliably reach predetermined coordinate position simultaneously behind the convenient definite platform adjustment position, and the box need be opened to staff in addition when overhauing the electrical equipment of platform triaxial adjustment and maintaining, need visit into the upper part of the body simultaneously and observe the maintenance, increases the degree of difficulty that electrical equipment maintained.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a sub-nanometer precision triaxial fine setting platform to solve the problem that whether the manual adjustment of staff who provides in the above-mentioned background art reliably can not reach the precision level and reliably can not confirm reliably that the platform adjusts the position after reliably reaches the predetermined coordinate position.

In order to achieve the above object, the utility model provides a following technical scheme:

a sub-nanometer precision three-axis fine adjustment platform comprises a box body, wherein a platform plate is arranged on the top side of the box body, a controller is fixedly connected to the right end of the box body, a voltage sensor disc is fixedly connected to the right end of the box body, three-axis fine adjustment structures are arranged on the inner side and the outer side of the box body, each three-axis fine adjustment structure comprises a bearing seat, the bearing seats are slidably connected with the box body, a motor is fixedly connected to the top end of each bearing seat, a screw rod is fixedly connected to the tail end of a main shaft of the motor and rotatably connected with the bearing seats, a movable plate is spirally connected to the outer side of each screw rod, a resistor rod is fixedly connected to the inner side of each bearing seat, a second sliding block is fixedly connected to the right end of each movable plate and slidably connected with the resistor rod, a sleeve frame is arranged on the top end of each first electromagnet, a second sliding rod is slidably connected to the inner side of the top end of each sleeve frame, a second sliding rod is fixedly connected with a fixed rod, a left sliding rod is fixedly connected with a first electromagnet, and a second sliding rod is slidably connected with the bottom end of each second sliding block, and a third sliding rod is slidably connected with a third sliding block, the left end of the sliding plate and the left end of the fixed rod are fixedly connected with a first sliding block, the left end of the first sliding block is connected with a resistor strip in a sliding mode, the resistor strip is fixedly connected with the first sliding rod and the sliding rail respectively, the top end of the supporting plate is fixedly connected with a second electric telescopic rod, a third electric telescopic rod is fixedly connected to the inner side of the right end of the box body, and a first connecting rod is fixedly connected to the rear ends of the second electric telescopic rod and the third electric telescopic rod and is located on the left side and fixedly connected with the fixed rod.

Preferably, the right end of the first connecting rod on the right side is fixedly connected with a pressing plate, the bottom end of the first connecting rod on the right side is fixedly connected with a second connecting rod, the second connecting rod is fixedly connected with a bearing seat, the inner side of the right end of the box body is fixedly connected with a connecting plate, the rear end of the connecting plate on the front side is fixedly connected with a pressure sensor, the front end of the connecting plate on the rear side is fixedly connected with a pressure sensor, the left end and the right end of the bearing seat are fixedly connected with first clamping blocks, the bottom end of the bearing seat is fixedly connected with second clamping blocks, and the first clamping blocks and the second clamping blocks are respectively in sliding connection with the box body.

Preferably, the left end inboard and the right-hand member inboard of landing slab all are provided with the spout of left right direction, and the sliding plate passes through spout and landing slab sliding connection, the inboard of sliding plate is provided with the spout of direction from top to bottom, and first slide bar passes through spout and sliding plate sliding connection, the top inboard of cover frame is provided with the spout of direction from top to bottom, and the second slide bar passes through spout and cover frame sliding connection, the top inboard of slide rail is provided with the spout of fore-and-aft direction, and the fourth fixture block passes through spout and slide rail sliding connection, the left end inboard and the right-hand member inboard of box all are provided with the spout of fore-and-aft direction, and first fixture block passes through spout and box sliding connection, the bottom inboard of box is provided with the spout of fore-and-aft direction, and the second fixture block passes through spout and box sliding connection.

Preferably, the sleeve frame and the push plate are respectively an iron frame and an iron plate.

Preferably, first electric telescopic handle, second electric telescopic handle, third electric telescopic handle, motor, resistance strip, resistance pole, voltage sensor dish, pressure sensor, first sliding block and second sliding block all are connected with the controller electricity.

Preferably, three voltage sensors are arranged on the inner side of the voltage sensor disc, the voltage sensor on the left side monitors the voltage of the resistance rod, the voltage sensor in the middle monitors the voltage of the resistance strip on the bottom side, and the voltage sensor on the right side monitors the voltage of the resistance strip on the top side.

Preferably, the number of the first sliding rods and the second clamping blocks is two, and the first sliding rods and the second clamping blocks are symmetrical left and right relative to a vertical bisecting plane of the box body.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses in, push pedal through setting up, including a motor, an end cap, a controller, and a cover plate, the hob, the third fixture block, the fourth fixture block, the cover frame, a slide rail, first sliding block, the second sliding block, the resistor strip, the resistor rod, the voltage sensor dish, a controller, first electric telescopic handle, second electric telescopic handle, the sliding plate, first sliding rod, the second sliding rod, first electro-magnet and second electro-magnet, can guarantee the sub-nanometer precision adjustment of triaxial fine setting platform, guarantee the real-time supervision of platform at the triaxial coordinate position simultaneously, the relative slip of first sliding block and resistor strip and the relative slip of second sliding block relative resistance pole, guarantee that the platform board reliably adjusts the length that resistor strip and resistor rod insert the circuit through first sliding block and second sliding block respectively when the triaxial position is finely tuned, voltage sensor and controller in the voltage sensor dish mutually support, the triaxial coordinate position of real-time supervision platform, guarantee sub-nanometer precision adjustment platform position, increase the practicality of device.

2. The utility model discloses in, through the controller that sets up, first fixture block, the second fixture block, bear the seat, third electric telescopic handle, the head rod, the second connecting rod, pressure sensor and clamp plate, can guarantee the convenient maintenance of triaxial fine setting structure electrical equipment, avoid electrical equipment to be located the box inboard and can not convenient maintenance, bottom electrical equipment conveniently shifts out the box, guarantee that the staff is to its convenient maintenance, pressure sensor and controller mutually support, guarantee that convenient definite bearing seat reliably gets into or withdraws from the box, increase the practicality of device.

Drawings

Fig. 1 is a schematic view of the overall structure of the present invention;

FIG. 2 is a schematic view of the structure at A of FIG. 1 according to the present invention;

FIG. 3 is a schematic view of the structure of the utility model at B in FIG. 1;

fig. 4 is a schematic structural diagram of the point C in fig. 1 according to the present invention.

In the figure: 1-box body, 2-push plate, 3-first electric telescopic rod, 4-first clamping block, 5-bearing seat, 6-platform plate, 7-controller, 8-voltage sensor disc, 9-second electromagnet, 10-resistance rod, 11-motor, 12-second clamping block, 13-screw rod, 14-first sliding rod, 15-sliding plate, 16-first sliding block, 17-resistance strip, 18-third clamping block, 19-sleeve frame, 20-first electromagnet, 21-fixed rod, 22-sliding rail, 23-second sliding rod, 24-first connecting rod, 25-second electric telescopic rod, 26-fourth clamping block, 27-third electric telescopic rod, 28-pressing plate, 29-pressure sensor, 30-connecting plate, 31-second connecting rod, 32-second sliding block, 33-supporting plate and 34-moving plate.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, the present invention provides a technical solution:

a subnanometer precision three-axis fine adjustment platform comprises a box body 1, a platform plate 6 is arranged on the top side of the box body 1, a controller 7 is fixedly connected to the right end of the box body 1, a voltage sensor disc 8 is fixedly connected to the right end of the box body 1, three-axis fine adjustment structures are arranged on the inner side and the outer side of the box body 1, each three-axis fine adjustment structure comprises a bearing seat 5, the bearing seats 5 are slidably connected with the box body 1, a motor 11 is fixedly connected to the top end of each bearing seat 5, a spiral rod 13 is fixedly connected to the tail end of a main shaft of the motor 11, the spiral rod 13 is rotatably connected with the bearing seats 5, a movable plate 34 is spirally connected to the outer side of the spiral rod 13, a resistor rod 10 is fixedly connected to the inner side of each bearing seat 5, a second sliding block 32 is fixedly connected to the right end of each movable plate 34, a support plate 33 is fixedly connected to the top end of each second sliding block 32, a slide rail 22 is fixedly connected to the top end of each support plate 33, a fourth slide rail 26 is slidably connected to the inner side of the top end of each slide rail 22, a fixed bar 21 is fixedly connected to the top end of each first electromagnet 20, a sleeve frame 19 is arranged on the top end of each first electromagnet, a slide plate 23 is fixedly connected to the left side of each slide plate, a left side of each slide bar 14, and right side of each slide bar 14 is connected with a first electromagnet 14, and right side of each slide bar 14, and left slide bar 14 is connected with a second slide bar 14, and a left slide bar 14, and right slide bar 14, and a left slide bar 14 is connected with each slide bar 14, and third chuck block 18 and box 1 sliding connection, be located the equal fixedly connected with first sliding block 16 of the left end of left sliding plate 15 and the left end of dead lever 21, the left end sliding connection of first sliding block 16 has resistive bar 17, and resistive bar 17 respectively with first sliding rod 14 and slide rail 22 fixed connection, the top fixedly connected with second electric telescopic handle 25 of backup pad 33, the inboard fixedly connected with third electric telescopic handle 27 of right-hand member of box 1, the equal fixedly connected with head rod 24 in rear end of second electric telescopic handle 25 and third electric telescopic handle 27, and be located left head rod 24 and dead lever 21 fixed connection.

The right end of the first connecting rod 24 on the right side is fixedly connected with a pressing plate 28, the bottom end of the first connecting rod 24 on the right side is fixedly connected with a second connecting rod 31, the second connecting rod 31 is fixedly connected with the bearing seat 5, the inner side of the right end of the box body 1 is fixedly connected with a connecting plate 30, the rear end of the connecting plate 30 on the front side and the front end of the connecting plate 30 on the rear side are both fixedly connected with a pressure sensor 29, the left end and the right end of the bearing seat 5 are both fixedly connected with a first clamping block 4, the bottom end of the bearing seat 5 is fixedly connected with a second clamping block 12, the first clamping block 4 and the second clamping block 12 are respectively connected with the box body 1 in a sliding mode, and it is guaranteed that electrical equipment can conveniently withdraw from and take in the box body 1 in the using process; the inner sides of the left end and the right end of the platform plate 6 are both provided with sliding grooves in the left-right direction, the sliding plate 15 is in sliding connection with the platform plate 6 through the sliding grooves, the inner side of the sliding plate 15 is provided with sliding grooves in the up-down direction, the first sliding rod 14 is in sliding connection with the sliding plate 15 through the sliding grooves, the inner side of the top end of the sleeve frame 19 is provided with sliding grooves in the up-down direction, the second sliding rod 23 is in sliding connection with the sleeve frame 19 through the sliding grooves, the inner side of the top end of the sliding rail 22 is provided with sliding grooves in the front-back direction, the fourth fixture block 26 is in sliding connection with the sliding rail 22 through the sliding grooves, the inner sides of the left end and the right end of the box body 1 are both provided with sliding grooves in the front-back direction, the first fixture block 4 is in sliding connection with the box body 1 through the sliding grooves, and the second fixture block 12 is in sliding connection with the box body 1 through the sliding grooves, and stable sliding of moving parts is guaranteed in the using process; the sleeve frame 19 and the push plate 2 are respectively an iron frame and an iron plate, and the first electromagnet 20 and the second electromagnet 9 are respectively ensured to reliably adsorb and attach the sleeve frame 19 and the push plate 2 in the use process; the first electric telescopic rod 3, the second electric telescopic rod 25, the third electric telescopic rod 27, the motor 11, the resistance strip 17, the resistance rod 10, the voltage sensor disc 8, the pressure sensor 29, the first sliding block 16 and the second sliding block 32 are all electrically connected with the controller 7, and the automatic control of the device is ensured in the using process; the inner side of the voltage sensor disc 8 is provided with three voltage sensors, the voltage sensor positioned on the left side monitors the voltage of the resistance rod 10, the voltage sensor positioned in the middle monitors the voltage of the resistance strip 17 positioned on the bottom side, the voltage sensor positioned on the right side monitors the voltage of the resistance strip 17 positioned on the top side, and the voltage sensors and the controller 7 are guaranteed to be matched with each other in the using process so as to monitor the position of the platform in the three-axis direction in real time; the number of the first sliding rods 14 and the second fixture blocks 12 is two, and the sliding rods are bilaterally symmetrical about the vertical bisecting plane of the box body 1, so that the sliding plates 15 on the left side and the sliding plates on the right side and the bearing seat 5 can be stably moved in the using process.

The working process is as follows: the device of the utility model needs to be powered by an external power supply before use, can ensure the sub-nanometer precision adjustment of the three-axis fine adjustment platform, simultaneously ensure the real-time monitoring of the platform on the three-axis coordinate position, when the position of the platform on the X axis in the left and right direction needs to be adjusted, the controller 7 starts the first electromagnet 20 and the second electromagnet 9 and starts the motor 11 to drive the spiral rod 13 to rotate, the first electromagnet 20 and the second electromagnet 9 respectively attract the sleeve frame 19 and the push plate 2 which are jointed with iron after being powered, under the matching of the spiral rod 13 and the movable plate 34 in spiral connection and the sliding connection of the resistance rod 10 and the movable plate 34, the movable plate 34 drives the platform plate 6 to move left and right along with the rotation of the spiral rod 13, under the matching of the sliding connection of the sliding plate 15 and the platform plate 6, the platform plate 6 reliably adjusts the position on the X axis, and simultaneously, the second sliding block 32 jointed with the resistance rod 10 is driven by the movable plate 34 to slide relative to the movable plate, the voltage sensor positioned on the left side in the voltage sensor disc 8 monitors the voltage of the resistance rod 10 connected into the circuit through the second sliding block 32 in real time and feeds the voltage back to the controller 7, the controller 7 determines the length of the resistance rod 10 connected into the circuit according to the voltage of the resistance rod 10 fed back, further determines the position of the second sliding block 32, and simultaneously determines the coordinate position of the platform plate 6 on the X axis, further the controller 7 stops the motor 11 from rotating after adjusting to a predetermined position, when the position of the platform plate 6 needs to be finely adjusted on the Y axis in the front-back direction, the fixing rod 21 is driven by the controller 7 to move back and forth by the second electric telescopic rod 25 which is stretched and the first connecting rod 24 positioned on the left side, and under the matching of the sliding rail 22 and the fourth clamping block 26 in sliding connection and the third clamping block 18 and the box body 1 in sliding connection, the fixing rod 21 drives the platform plate 6 to finely adjust back and forth, meanwhile, the platform plate 6 drives the first sliding block 16 positioned at the bottom side to move back and forth through the fixed rod 21, then the first sliding block 16 attached to the resistance strip 17 at the bottom side slides relative to the first sliding block 16, the voltage sensor positioned in the middle in the voltage sensor disc 8 monitors the voltage of the resistance strip 17 connected to the circuit at the bottom side through the first sliding block 16 in real time and feeds the voltage back to the controller 7, the controller 7 determines the length of the resistance strip 17 connected to the circuit according to the fed voltage of the resistance strip 17, further determines the position of the first sliding block 16 at the bottom side, and simultaneously determines the coordinate position of the platform plate 6 on the Y axis, and then the controller 7 stops the extension and retraction of the second electric telescopic rod 25 after adjusting to a preset position, and when the position of the platform plate 6 needs to be finely adjusted on the Z axis in the up-down direction, the first electric telescopic rod 3 is extended and retracted through the controller 7 to drive the platform plate 6 to move up and down through the push plate 2, under the matching of the sliding connection of the first sliding rod 14 and the sliding plate 15 and the sliding connection of the sleeve frame 19 and the second sliding rod 23, the second sliding rod 23 drives the platform plate 6 to finely adjust up and down, meanwhile, the platform plate 6 drives the top side first sliding block 16 to move up and down through the sliding plate 15, and then the first sliding block 16 attached to the top side resistor strip 17 slides relative to the first sliding block 16, a voltage sensor on the right side in the voltage sensor disc 8 monitors the voltage of the resistor strip 17 connected to the circuit on the top side through the first sliding block 16 in real time and feeds the voltage back to the controller 7, the controller 7 determines the length of the resistor strip 17 connected to the circuit according to the voltage of the resistor strip 17 fed back, and then determines the position of the top side first sliding block 16, and simultaneously determines the coordinate position of the platform plate 6 on the Z axis, and then the controller 7 stops the expansion and contraction of the first electric telescopic rod 3 after being adjusted to a predetermined position, and in addition, the convenient maintenance of the telescopic rod with a three-axis fine adjustment structure can be ensured, the situation that the electric equipment is located on the inner side of the box body 1 and cannot be conveniently overhauled is avoided, when the electric equipment needs to be maintained, the first electromagnet 20 and the second electromagnet 9 are disconnected through the controller 7, the electromagnet loses magnetism after being powered off and cannot adsorb other components on the top end any more, the third electric telescopic rod 27 is extended through the controller 7, the bearing seat 5 is driven to move outwards through the right first connecting rod 24 and the second connecting rod 31, until the first connecting rod 24 drives the pressing plate 28 to move backwards to be attached to the pressure sensor 29 located on the rear side, the pressure sensor 29 monitors the pressure of the pressing plate 28 in real time and feeds the pressure back to the controller 7, after the preset pressure is reached, the controller 7 stops extending the third electric telescopic rod 27, meanwhile, when the electric equipment is completely stored in the box body 1 after maintenance is completed, the third electric telescopic rod 27 is shortened through the controller 7, the bearing seat 5 is driven to move inwards through the first connecting rod 24 and the second connecting rod 31, until the first connecting rod 24 drives the pressing plate 28 to be attached to the pressure sensor 29 located on the front side, the pressing plate 28 to be attached to the controller 7, the pressure sensor 29 monitors the pressure of the pressing plate 28 in real time and feeds back to the controller 7, and the electric telescopic rod 27 is shortened after the preset pressure is reached, and the controller 7 stops moving forwards and the telescopic rod 27 is shortened after the preset pressure is reached.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a sub-nanometer precision triaxial fine setting platform, includes box (1), its characterized in that: a platform plate (6) is arranged on the top side of the box body (1), a controller (7) is fixedly connected to the right end of the box body (1), a voltage sensor disc (8) is fixedly connected to the right end of the box body (1), and three-axis fine adjustment structures are arranged on the inner side and the outer side of the box body (1);

the three-axis fine adjustment structure comprises a bearing seat (5), the bearing seat (5) is connected with a box body (1) in a sliding manner, a motor (11) is fixedly connected to the top end of the bearing seat (5), a screw rod (13) is fixedly connected to the tail end of a main shaft of the motor (11), the screw rod (13) is rotatably connected with the bearing seat (5), a movable plate (34) is spirally connected to the outer side of the screw rod (13), a resistance rod (10) is fixedly connected to the inner side of the bearing seat (5), a second sliding block (32) is fixedly connected to the right end of the movable plate (34), the second sliding block (32) is slidably connected with the resistance rod (10), a support plate (33) is fixedly connected to the top end of the movable plate (34), a sliding rail (22) is fixedly connected to the top end of the support plate (33), a fourth clamping block (26) is slidably connected to the inner side of the top end of the sliding rail (22), a fixing rod (21) is fixedly connected to the top end of the fourth clamping block (26), a first electromagnet (20) is fixedly connected to the top end of the first electromagnet (20), a sleeve frame (19) is arranged at the top end of the first electromagnet (20), a second sliding frame (19) is fixedly connected to the sliding plate (23), and a second sliding rod (23) is fixedly connected with the left platform (23) and a push plate (2) is connected with the second sliding rod (23), a second electromagnet (9) is arranged at the bottom end of the push plate (2), a first electric telescopic rod (3) is fixedly connected at the bottom end of the second electromagnet (9), and the first electric telescopic rod (3) is fixedly connected with the supporting plate (33), sliding plates (15) are connected with the inner sides of the left end and the right end of the platform plate (6) in a sliding way, a first sliding rod (14) is connected with the inner side of the sliding plate (15) in a sliding way, the bottom end of the first sliding rod (14) is fixedly connected with a third clamping block (18), the third block (18) is connected with the box body (1) in a sliding way, the left end of the sliding plate (15) positioned at the left side and the left end of the fixed rod (21) are both fixedly connected with a first sliding block (16), the left end of the first sliding block (16) is connected with a resistance strip (17) in a sliding way, and the resistance strip (17) is respectively and fixedly connected with the first sliding rod (14) and the sliding rail (22), the top end of the supporting plate (33) is fixedly connected with a second electric telescopic rod (25), a third electric telescopic rod (27) is fixedly connected with the inner side of the right end of the box body (1), the rear ends of the second electric telescopic rod (25) and the third electric telescopic rod (27) are both fixedly connected with a first connecting rod (24), and the first connecting rod (24) positioned on the left side is fixedly connected with the fixed rod (21).

2. The sub-nanometer precision tri-axial fine tuning platform of claim 1, wherein: be located the right side right-hand member fixedly connected with clamp plate (28) of head rod (24), be located the right side the bottom fixedly connected with second connecting rod (31) of head rod (24), and second connecting rod (31) with bear seat (5) fixed connection, the inboard fixedly connected with connecting plate (30) of right-hand member of box (1) is located the front side the rear end of connecting plate (30) with be located the rear side the equal fixedly connected with pressure sensor (29) of front end of connecting plate (30), bear the equal fixedly connected with first fixture block (4) in both ends about seat (5), bear the bottom fixedly connected with second fixture block (12) of seat (5), and first fixture block (4) and second fixture block (12) respectively with box (1) sliding connection.

3. The sub-nanometer precision tri-axial fine tuning platform of claim 2, wherein: the utility model discloses a sliding mechanism for the elevator, including landing plate (6), sliding plate (15), cover frame (19), second slide bar (23), slide rail (22), box body (1), box body (12), sliding groove, spout, sliding rail (6), sliding plate (15) and sliding plate (6), the inboard of left end and the right-hand member inboard of landing plate (6) all are provided with the spout of direction about, and sliding plate (15) pass through spout and sliding connection, the inboard spout of direction about being provided with of inboard of sliding plate (15), and first slide bar (14) pass through spout and sliding plate (15) sliding connection, the top inboard of cover frame (19) is provided with the spout of direction about, and fourth fixture block (26) pass through spout and slide rail (22) sliding connection, the inboard of left end and the right-hand member inboard of box body (1) all are provided with the spout of direction about, and first fixture block (4) pass through spout and box body (1) sliding connection, the inboard of bottom of box body (1) is provided with the spout of direction about, and second fixture block (12) sliding connection through spout and box body (1).

4. The sub-nanometer precision three-axis fine adjustment platform according to claim 1, characterized in that: the sleeve frame (19) and the push plate (2) are respectively an iron frame and an iron plate.

5. The sub-nanometer precision tri-axial fine tuning platform of claim 2, wherein: the electric control device is characterized in that the first electric telescopic rod (3), the second electric telescopic rod (25), the third electric telescopic rod (27), the motor (11), the resistor strip (17), the resistor rod (10), the voltage sensor disc (8), the pressure sensor (29), the first sliding block (16) and the second sliding block (32) are all electrically connected with the controller (7).

6. The sub-nanometer precision tri-axial fine tuning platform of claim 1, wherein: the voltage sensor disc (8) is characterized in that three voltage sensors are arranged on the inner side of the voltage sensor disc (8), the voltage sensor on the left side monitors the voltage of the resistance rod (10), the voltage sensor in the middle monitors the voltage of the resistance strip (17) on the bottom side, and the voltage sensor on the right side monitors the voltage of the resistance strip (17) on the top side.

7. The sub-nanometer precision tri-axial fine tuning platform of claim 2, wherein: the number of the first sliding rods (14) and the second clamping blocks (12) is two, and the first sliding rods and the second clamping blocks are symmetrical left and right relative to a vertical bisection plane of the box body (1).