CN218216039U

CN218216039U - Wire rotary joint

Info

Publication number: CN218216039U
Application number: CN202221925169.4U
Authority: CN
Inventors: 彭鹏; 周宇洋; 王敬
Original assignee: Weike Saile Microelectronics Co Ltd
Current assignee: Weike Saile Microelectronics Co Ltd
Priority date: 2022-07-25
Filing date: 2022-07-25
Publication date: 2023-01-03
Anticipated expiration: 2032-07-25

Abstract

The utility model relates to a rotatable circuit connector field discloses an electric wire rotary joint, include: the inner connecting wire column is used for being electrically connected with the wafer in the rotary electroplating process; the external connection wire ring is used for being in conductive connection with the internal connection post; the outer connection ring is sleeved on the periphery of the inner connection column, the outer connection ring comprises a first cylinder, a plurality of connection rings are arranged on the inner wall of the first cylinder, conductive balls are arranged on the periphery of the inner connection column corresponding to the connection rings, and the conductive balls and the connection rings are kept in contact and are conductive when the inner connection column and the outer connection ring rotate relatively. The utility model discloses a set up the rotatory in-process all the time with the wiring environmental protection and hold contact and electrically conductive ball on the internal terminal for terminal on internal terminal and the internal terminal is rotatory and electroplates for the wafer circular telegram when can follow the rotatory electroplating of wafer, and electrically conductive ball can not produce the influence to the cleanliness factor at rotatory process.

Description

Wire rotary joint

Technical Field

The utility model relates to a rotatable line connector technical field especially relates to an electric wire rotary joint.

Background

At present in the wafer course of working, need carry out rotation machining to the wafer, need connect the power simultaneously, require at this moment to have an effectual electric wire rotary joint to carry out rotation machining to the wafer, and present rotary joint uses the carbon brush more, the clean space of being not convenient for uses, and current electric wire rotary joint structure is complicated, and the installation difficulty can not dismantle it and carry out the part change, can only abandon after appearing damaging usually, can not maintain and recycle.

SUMMERY OF THE UTILITY MODEL

In view of this, the present invention provides a wire rotary joint, which solves the problem that the conventional wire rotary joint cannot be used in a clean factory and cannot be disassembled and replaced for internal components.

The utility model discloses an above-mentioned technical problem is solved to following technical means: the method comprises the following steps: an inner post; the external connection wire ring is used for being in conductive connection with the internal connection post; the outer wiring ring is sleeved on the periphery of the inner wiring column, the outer wiring ring comprises a first cylinder, a plurality of connecting rings are arranged on the inner wall of the first cylinder, conductive balls are arranged on the periphery of the inner wiring column corresponding to the positions of the connecting rings, and the conductive balls and the connecting rings are kept in contact and conductive when the inner wiring column and the outer wiring ring rotate relatively. This application is through setting up the electrically conductive ball that contacts and electrically conduct with the wiring environmental protection throughout in rotatory in-process on the inner terminal for terminal on inner terminal and the inner terminal can be rotatory and electroplate for the wafer circular telegram when rotatory electroplating along with the wafer, and electrically conductive ball can not produce the influence to the cleanliness factor at rotatory process. Of course, the present invention can also be applied to other processes requiring the use of a rotary joint, such as wafer evaporation.

Further, the outer diameter of the connecting ring is matched with the inner diameter of the first cylinder, a round hole penetrating through the inner wall of the first cylinder is formed in the position, corresponding to the connecting ring, of the periphery of the first cylinder, and the round hole is used for enabling a fastening bolt to extrude the connecting ring so as to limit the sliding trend of the connecting ring in the first cylinder. The connecting ring is fixed on the inner wall of the first cylinder through a fastening bolt, so that the disassembly of the connecting ring is facilitated when maintenance and replacement are needed.

Further, an insulating ring with the size matched with that of the connecting ring is arranged between the adjacent connecting rings. The adjacent connecting rings are electrically conducted and isolated through the insulating rings, so that short circuit caused by contact between the connecting rings is avoided, and further, the connecting rings are fixed through the auxiliary fastening bolts of the insulating rings.

Furthermore, connecting holes penetrating from the end face of one side, close to the end cover, of the first cylinder to the connecting ring are formed in the inner wall of the first cylinder in a direction parallel to the axial direction, and connecting wires in conductive connection with the connecting ring are arranged in the connecting holes. Connecting holes with different depths are arranged to penetrate from the end face of the first cylinder to different connecting rings so as to respectively transmit current to the connecting rings, and short circuit caused by contact between different connecting rings is avoided.

Furthermore, a through hole is formed in the end face of one end, connected with the end cover, of the first cylinder, a small hole is formed in the position, corresponding to the through hole, of the end cover, and the end cover can be connected to the end face of the first cylinder through bolts penetrating through the small hole and the through hole. An end cap is provided on an end surface of the first cylinder to prevent the inner terminal from falling out of the first cylinder when the inner terminal is rotated.

Furthermore, the peripheral side of the inner terminal is provided with a conductive hole which penetrates through the inner terminal along the axial direction corresponding to the position of the connecting ring, the orifices at the two ends of the conductive hole are provided with conductive balls which are used for being in contact with the connecting ring and conducting electricity, and the conductive balls are connected through a spring terminal which is arranged in the conductive hole and is in a compressed state. The conductive ball is always in contact with the connecting ring and is conductive in the rotating process under the action of the elastic force of the spring binding post, and short circuit caused by displacement until the conductive ball is not in contact with the connecting ring during rotation is avoided. Further, at present, rotary joint uses the carbon brush mostly, and the clean space of being not convenient for uses, uses the electrically conductive ball of metal that has higher hardness and cleanliness factor in this application, can use in the production area that has certain cleanliness factor requirement.

Further, the aperture of the conductive hole is constricted to prevent the conductive ball from slipping out of the conductive hole.

The utility model has the advantages that:

1. the rotary joint conducts electricity by using the metal conductive balls with higher hardness and cleanliness, and can be used in a production area with certain cleanliness requirement;

2. the inner wiring column can rotate along with a wafer in a rotary electroplating process, so that the inner wiring column and wiring columns on the inner wiring column can electrify the wafer to be electroplated when rotating along with the wafer; in the process, the conductive balls on the peripheral side of the inner connecting column are always in contact with and are conductive to the connecting ring on the inner wall of the external connecting ring, and the connecting ring is communicated with the external power supply through the connecting wire, so that a conductive path is still kept among the external power supply, the rotary joint and the wafer when the wafer rotates.

3. A plurality of parts in this application adopt the bolt to fix, convenient to detach and change.

Drawings

Fig. 1 is an assembly view of the wire rotary joint of the present invention;

fig. 2 is a front sectional view of the outer wire ring of the rotary electric wire connector according to the present invention;

fig. 3 is a schematic top view of the outer wire loop of the rotary electric wire connector of the present invention;

fig. 4 is a front sectional view of an inner terminal of the rotary electric wire connector of the present invention;

fig. 5 is a schematic view of the distribution of the conductive holes in the top view direction of the inner terminal of the rotary electric wire connector according to the present invention;

fig. 6 is a schematic view of a conductive hole of the wire rotary joint of the present invention;

fig. 7 is a perspective view of an inner post of the electric wire rotary joint according to the present invention;

wherein the content of the first and second substances,

100: connecting a wire loop externally; 110: a first cylinder; 120: a second cylinder; 130: a connecting ring; 140: a circular hole; 150: connecting wires; 160: connecting holes; 170: a through hole; 180: an insulating ring; 200: the inner connecting wire column; 210: a wiring hole; 220: a conductive via; 221: a spring terminal; 222: a conductive ball; 223: a conductive ball cushion block; 224: conducting rings; 230: a binding post; 240: a terminal post cushion block; 300: and (6) end covers.

Detailed Description

The following description is given by way of specific embodiments, and those skilled in the art will appreciate the advantages and effects of the present invention from the disclosure provided in the present specification. It should be noted that the drawings provided in the following embodiments are for illustrative purposes only, and are only schematic drawings rather than actual drawings, which should not be construed as limiting the present invention, and in order to better illustrate the embodiments of the present invention, some components in the drawings may be omitted, enlarged or reduced, and do not represent the size of an actual product; it will be understood by those skilled in the art that certain well-known structures in the drawings and descriptions thereof may be omitted.

In the description of the present invention, it should be understood that if there are the terms "upper", "lower", "left", "right", "front", "back", etc. indicating the orientation or position relationship based on the orientation or position relationship shown in the drawings, it is only for convenience of description and simplification of description, but not for indicating or implying that the indicated device or element must have a specific orientation, be constructed in a specific orientation, and be operated, therefore, the terms describing the position relationship in the drawings are used only for exemplary illustration, and should not be construed as limiting the present invention, and those skilled in the art can understand the specific meaning of the terms according to the specific situation.

As shown in fig. 1, the electric wire rotary joint of the present invention includes an outer wire ring 100, an inner post 200, and an end cap 300. The outer wire ring 100 is used to be sleeved on the periphery of the inner wire column 200, and relative rotation movement with collinear axes can be carried out between the outer wire ring 100 and the inner wire column 200. The inner wall of the outer wire loop 100 is provided with a connecting wire 150 for maintaining conductive connection with the conductive ball 222 disposed on the circumferential side of the inner terminal 200. The outer wire loop 100 may be connected at one end to an end cap 300. The end cap 300 prevents the inner post 200 from being thrown out of the outer wire ring 100 when rotated.

Alternatively, as shown in fig. 2, the circumscribed wire ring 100 is constructed in a hollow cylindrical structure. The end surface of the end of the circumscribed wire ring 100 connected to the end cap 300 is provided with a plurality of through holes 170 having internal threads. The end cap 300 is provided with a small hole corresponding to the through hole. The outer wire loop 100 and end cap 300 are based on a bolted connection through a small hole and through hole 170. The inner diameter of the hollow cylinder in the outer wire ring 100 is increased in a stepwise manner in the direction toward the end cap to facilitate engagement of the inner post 200 with the outer wire ring 100 after insertion. For convenience of description, a cylinder having a larger inner diameter is defined herein as the first cylinder 110, and a cylinder having a smaller inner diameter is defined herein as the second cylinder 120. The outer wire loop 100 is a plastic loop having a certain thickness. Preferably, the outer wire ring 100 may be formed of an insulating material such as rubber.

Optionally, several connection rings 130 are provided at different height positions on the inner wall of the first cylinder 110. The number of the connection rings 130 is set to 3 in this application to be connected to the positive power supply electrode, the negative power supply electrode, and the ground line, respectively. The outer diameter of the connecting ring 130 is disposed to match the inner diameter of the first cylinder 110. An insulating ring 180 is provided between adjacent connection rings 130 to prevent short circuit due to contact. The axes of the first cylinder 110 and the connecting ring 130 are collinear. The circumferential side of the first cylinder 110 is provided with a circular hole 140 penetrating to the inner wall of the first cylinder 110 in the radial direction corresponding to the height position of the connection ring 130. The inner wall of the circular hole 140 is provided with an internal thread for connecting a fastening bolt. The fastening bolt can press the connection ring 130 to be fixed to the inner wall of the first cylinder 110. The connection ring 130 is a chrome copper connection ring, and has good conductivity. Preferably, the material of the connection ring 130 may also be a combination of one or more of conductive metals such as aluminum, nickel, and iron.

Alternatively, referring to fig. 2 and 3, the inner wall of the first cylinder 110 is provided with connection holes 160 corresponding to the connection rings 130, respectively, in parallel to the axial direction. The number of the connection holes 160 is set to 3 corresponding to the connection ring 130. The three connection holes 160 are provided so as to correspond to the connection rings 130 that can penetrate from the outer wire ring 100 to the end cap 300 to different heights. The three connection holes 160 are respectively provided with corresponding connection wires 150 which are electrically connected to the connection rings 130 at different heights, i.e. the three connection rings 130 are respectively electrically connected with an external power source through the connection wires 150 in the connection holes 160 which are respectively communicated to the ends of the external wire ring 100. Preferably, the connection line 150 may be composed of a metal conductive pillar.

Alternatively, as shown in fig. 4 and 7, the inner post 200 may be integrally provided to be engaged with the first cylinder 110 and the second cylinder 120. The inner post 200 is collinear with the axis of the outer wire ring 100 to enable relative rotational movement between the inner post 200 and the outer wire ring 100. In practice, the inner post 200 and the wafer coupled to the inner post 200 are typically rotated (described in detail below).

Alternatively, as shown in fig. 4 and 7, the inner post 200 is provided with conductive holes 220 penetrating the inner post 200 at positions corresponding to the three connection rings 130 at different heights. The conductive vias 220 are arranged in a radial direction of the plane of the substrate. Preferably, as shown in fig. 5, the three conductive holes 220 bisect the circular face of the inner stud 200 as viewed in the axial direction. A spring post 221, a conductive ball 222, and a conductive ball pad 223 are disposed in the conductive hole 220. Specifically, as shown in fig. 6, the number of the conductive balls 222 is 2, and the conductive balls are respectively disposed at the opening positions of the conductive holes 220. The conductive balls 222 are connected to each other by spring terminals 221. The conductive ball 222 is electrically connected to the connection ring 130 disposed on the inner wall of the outer wire ring 100 under the action of the spring terminal 221. Preferably, the connection ring 130 is concavely curved corresponding to the connection of the conductive balls 222 to sufficiently contact the conductive balls 222. The conductive ball 222 is provided with a conductive ball pad 223 at the connection position with the spring post 221, so that the conductive ball 222 is connected with the spring post 221 in an insulation manner. Preferably, the aperture location of the conductive via 220 is narrowed to a spherical shape to prevent the conductive ball 222 from sliding out of the conductive via 220. The conductive balls 222 may be metal balls such as chrome copper balls, or steel balls. The conductive hole 220 is integrally provided with a conductive ring 224 on the inner wall thereof for electrically connecting with the conductive ball 222.

Optionally, three wire connecting holes 210 penetrating to the three conductive holes 220 are disposed on the end surface of the inner terminal 200 near one end of the second cylinder 120 along the parallel axial direction. The connecting line between the three wiring holes 210 is not limited to the center of the inner terminal 200 so as to avoid one wiring hole 210 penetrating two conductive holes 220. Each of the three wiring holes 210 has a wiring post 230 electrically connected to the corresponding conductive ring 224. The post 230 has one end connected to the conductive ring 224 and the other end led out of the inner post 200 to be connected to a wafer during electroplating. The wiring hole 210 is provided with a terminal pad 240 corresponding to the connection position of the terminal 230 and the conductive ring 224. The post spacer 240 has one surface formed as an arc groove and one surface formed as a spherical groove for processing a thread and fastening the post 230. The corresponding connection position of the terminal 230 is spherical and corresponds to the spherical groove on the terminal pad 240. The diameter of the post 230 is configured to match the wire receiving hole 210.

The utility model discloses a use method as follows: when the wafer electroplating device is used, the lower end cover 300 is taken firstly to remove the rotation limitation of the inner wiring column 200, the whole inner wiring column 200 can rotate along with the wafer, and the wiring column 230 on the inner wiring column 200 is in conductive connection with the wafer in the rotary electroplating process. The conductive ball 222, which is disposed on the circumferential side of the inner terminal 200 and is conductively connected to the terminal 230, is always in contact with and electrically connected to the connection ring 130 disposed on the inner wall of the first cylinder 110 by the elastic force of the spring terminal 221. The connection ring 130 is connected to an external plating power source through a connection line 150 in the connection hole 160, so as to perform energization and plating on the wafer during the plating rotation.

Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art will understand that the present invention can be modified or replaced with other embodiments without departing from the spirit and scope of the present invention, which should be construed as limited only by the appended claims. The technology, shape and construction parts which are not described in detail in the present invention are known technology.

Claims

1. A wire rotary joint, comprising:

an inner stud (200);

an outer wire loop (100) for electrically conductive connection with the inner terminal (200);

the outer wire ring (100) is sleeved on the periphery of the inner terminal (200) and can rotate relative to the inner terminal (200), the outer wire ring (100) comprises a first cylinder (110), a plurality of connecting rings (130) are arranged on the inner wall of the first cylinder (110), the periphery of the inner terminal (200) corresponds to the positions of the connecting rings (130) and is provided with a conductive ball (222), and the conductive ball (222) and the connecting rings (130) are in contact and conduction when relative rotation is carried out between the inner terminal (200) and the outer wire ring (100).

2. The wire rotary joint according to claim 1, wherein: the outer diameter of the connecting ring (130) is matched with the inner diameter of the first cylinder (110), a round hole (140) penetrating through the inner wall of the first cylinder (110) is arranged on the periphery side of the first cylinder (110) corresponding to the connecting ring (130), and the round hole (140) is used for arranging a fastening bolt to extrude the connecting ring (130) so as to limit the sliding tendency of the connecting ring (130) in the first cylinder (110).

3. The wire rotary joint according to claim 2, wherein: an insulating ring (180) with the size matched with that of the connecting ring (130) is arranged between the adjacent connecting rings (130).

4. The wire rotary joint according to claim 3, wherein: the inner wall of the first cylinder (110) is provided with connecting holes (160) which penetrate from the end face of one side, close to the end cover (300), of the first cylinder (110) to the connecting ring (130) along the direction parallel to the axial direction, and connecting wires (150) which are in conductive connection with the connecting ring (130) are arranged in the connecting holes (160).

5. The wire rotary joint according to claim 4, wherein: the end face of one end, connected with the end cover (300), of the first cylinder (110) is provided with a through hole (170), a small hole is formed in the position, corresponding to the through hole (170), of the end cover (300), and the end cover (300) can be connected to the end face of the first cylinder (110) based on bolts penetrating through the small hole and the through hole (170).

6. The wire rotary joint according to claim 5, wherein: the peripheral side of the inner terminal (200) is provided with a conductive hole (220) which axially penetrates through the inner terminal (200) corresponding to the position of the connecting ring (130), the orifices at two ends of the conductive hole (220) are provided with conductive balls (222) which are used for being in contact with the connecting ring (130) and conducting electricity, and the conductive balls (222) are connected through spring terminals (221) which are arranged in the conductive hole (220) and are in a compressed state.

7. The wire rotary joint according to claim 6, wherein: the aperture of the conductive hole (220) is constricted to prevent the conductive ball (222) from slipping out of the conductive hole (220).