CN218214970U - Radio frequency power matcher adopting magnetic field to drive variable capacitor - Google Patents
Radio frequency power matcher adopting magnetic field to drive variable capacitor Download PDFInfo
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- CN218214970U CN218214970U CN202221686032.8U CN202221686032U CN218214970U CN 218214970 U CN218214970 U CN 218214970U CN 202221686032 U CN202221686032 U CN 202221686032U CN 218214970 U CN218214970 U CN 218214970U
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Abstract
The utility model discloses a radio frequency power supply matcher adopting magnetic field driving variable capacitance, which relates to the technical field of the radio frequency power supply matcher and comprises a detection board, wherein the detection board is connected with the output end of a radio frequency power supply, the detection board is connected with a control panel through a phase detection signal and an amplitude detection signal, and the other side of the detection board is connected with an inductor; the control board is connected across the inductor through a first magnetic field driven variable capacitance and a second magnetic field driven variable capacitance. The utility model discloses in, carry out input signal's detection through adopting the pick-up plate, amplitude signal and phase signal transmission to the control panel that will detect, the control panel is adjusted received input signal, increase inductance device's increase radio frequency matching impedance scope, adjust the position of tuning element rotor through variable vacuum capacitor, and then change the impedance value, make its condition that is close to the radio frequency load as far as, it is faster to match speed, it is higher to match the positioning accuracy, tuning element adjusts target in place easily.
Description
Technical Field
The utility model relates to a radio frequency power supply matcher technical field especially relates to an adopt radio frequency power supply matcher of magnetic field drive variable capacitance.
Background
The radio frequency matcher is used for matching the impedance of the plasma cavity to facilitate the radio frequency generator to output the impedance of the maximum power and reduce the reflection loss of an input signal, the matcher is used as key part equipment of plasma in the field of a pan-semiconductor, and in order to enable the power of the radio frequency generator to be transmitted to the maximum, the radio frequency matcher is used for matching the impedance of the radio frequency generator and the impedance of the load cavity.
The radio frequency matcher couples energy from a high-power radio frequency signal generator to a load, such as a processing chamber, the change of plasma in the processing chamber can be regarded as one impedance in a circuit, the matcher realizes the conjugate matching of the whole transmission circuit by adjusting two impedances in a module of the matcher, the radio frequency matcher is connected between a reaction chamber and the radio frequency generator, the impedance of the radio frequency matcher from an input end to an output end is equal to the output impedance of the radio frequency generator by adjusting a variable reactance of the radio frequency matcher, and the impedance is changed by properly adjusting a tuning element so that the load is matched with a radio frequency signal source.
The existing radio frequency matcher is connected with a tuning element by a motor to drive an adjustable capacitor or an adjustable inductor to change a capacitance value or an inductance value to change impedance so that a load is matched with a radio frequency signal source, the matching time is increased due to the driving of the motor, so that the matching positioning accuracy is reduced, the impedance range of the radio frequency matcher is insufficient, a control system drives two motors according to the size of received error signals, one motor drives a rotating handle of the adjustable inductor, the other motor drives a rotating handle of the adjustable capacitor, the two motors adjust the positions of two tuning element moving blades according to the size of the two error signals to change the impedance values of the two tuning elements, and the adjusting mode is time-consuming and low in accuracy.
SUMMERY OF THE UTILITY MODEL
The utility model aims at solving current radio frequency matcher and being connected tuning element by the motor and drive adjustable capacitance or adjustable inductance and change capacitance or inductance value and remove to change impedance and make load and radio frequency signal source produce the matching, because through the motor drive, match time has been increased, thereby match positioning accuracy has been reduced, the scope that leads to radio frequency matcher impedance is also not enough, control system removes two motors of drive through received error signal size, one is that tuning motor drives the turning handle of adjustable inductance, one is that load motor drives the turning handle of adjustable capacitance, these two motors adjust the position of two tuning element movable plates according to two error signal's size, change these two tuning element's impedance value, this kind of regulative mode shortcoming consuming time and precision is low, and the radio frequency power supply of an adoption magnetic field drive variable capacitance matcher who proposes.
In order to achieve the above purpose, the utility model adopts the following technical scheme:
a radio frequency power matcher adopting a magnetic field to drive a variable capacitor comprises a detection plate, wherein the detection plate is connected with the output end of a radio frequency power supply, is connected with a control board through a phase detection signal and an amplitude detection signal, and is connected with an inductor on the other side;
the control board is connected to two ends of the inductor through a first magnetic field driven variable capacitor and a second magnetic field driven variable capacitor;
the other end of the first magnetic field driven variable capacitor is connected with a grounding end;
the other end of the second magnetic field driving variable capacitor is connected with an output end, the output end is connected with a detection plate, and the detection plate is connected with the control plate.
To sum up, owing to adopted above-mentioned technical scheme, the beneficial effects of the utility model are that:
1. the utility model discloses in, carry out input signal's detection through adopting the pick-up plate, amplitude signal and phase signal transmission to the control panel that will detect, the control panel is adjusted received input signal, increase inductance device's increase radio frequency matching impedance range, adjust the position of tuning element rotor through variable vacuum electric capacity, and then change the impedance value, make its condition that is close to the radio frequency load as far as possible, it is faster to match speed, it is higher to match the positioning accuracy, tuning element adjusts to target in place easily, and easy resonance, through such setting, a radio frequency matching detection module has been increased, can be better know radio frequency load plasma state, adjust current variable capacitance value and change built-in voice coil motor into by outside motor drive regulation and adjust, the voice coil motor has high accuracy location nature and the fast characteristic of high-speed response, make the radio frequency match more accurate high-efficient.
2. The utility model discloses in, adjust the capacitance value through adopting variable vacuum capacitor, shortened the matching required time at to a great extent, the matching time of millisecond level has also improved the matching precision at on the other hand, and this improvement has promoted the matching speed and the precision of radio frequency matcher greatly, has brought very big innovation, also will promote the development of radio frequency matcher device greatly, provides good foundation space for its development.
Drawings
FIG. 1 is a schematic diagram of a module structure of a radio frequency matcher;
FIG. 2 is a schematic diagram of a conventional RF matcher;
fig. 3 is a schematic structural diagram of a radio frequency power matcher using a magnetic field to drive a variable capacitor according to the present invention;
FIG. 4 is a schematic diagram of a circuit connection structure of a detection board in the present invention;
fig. 5 is a schematic diagram of a circuit connection structure of the probe board of the present invention;
fig. 6 is a schematic structural diagram of a control panel according to the present invention;
fig. 7 is a schematic structural view of a variable capacitor according to embodiment 1 of the present invention;
fig. 8 is a schematic structural view of a variable capacitor according to embodiment 2 of the present invention.
Illustration of the drawings:
1. detecting a plate; 2. a control panel; 3. an inductor; 4. a first magnetic field drives the variable capacitance; 5. the second magnetic field drives the variable capacitor; 6. a probe plate.
Detailed Description
The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the accompanying drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by a person of ordinary skill in the art without creative efforts belong to the protection scope of the present invention.
Example 1
Referring to fig. 1-7, a radio frequency power matcher using a magnetic field driven variable capacitor includes a detection board 1, a control board 2, an inductor 3, a first magnetic field driven variable capacitor 4, a second magnetic field driven variable capacitor 5 and a detection board 6, the detection board 1 is connected to an output end of a radio frequency power, the detection board 1 is connected to the control board 2 through a phase detection signal and an amplitude detection signal, and the other side of the detection board 1 is connected to the inductor 3, the detection board 1 can detect a load state and generate control and error signals, which are used to adjust a tuning element of the radio frequency matcher, the signals are transmitted to the control board 2 of the radio frequency matcher and then drive the variable vacuum capacitor to minimize the error signals, the detection board 1 serves as a sensor in a deep circulation circuit, and the detection board 6 is used to detect parameters of the radio frequency power, namely amplitude (Vpp) and direct current bias (VDC);
the control board 2 is connected to two ends of the inductor 3 through the first magnetic field driving variable capacitor 4 and the second magnetic field driving variable capacitor 5, and the inductor 3 is used for increasing inductance and increasing the radio frequency matching impedance range;
the other end of the first magnetic field driven variable capacitor 4 is connected with a grounding end, the first magnetic field driven variable capacitor 4 adopts a vacuum capacitor with the publication number of CN215955107U and the capacitance value can be adjusted through the design of a built-in voice coil motor, the time required by matching is shortened to a great extent, the matching time of millisecond level is shortened, the matching precision is improved on the other hand, and the matching speed and precision of the radio frequency matcher are greatly improved;
the other end of the second magnetic field driving variable capacitor 5 is connected with an output end, the output end is connected with a detection plate 6, the detection plate 6 is connected with the control plate 2, the second magnetic field driving variable capacitor 5 adopts a vacuum capacitor with the publication number of CN215955107U, the capacity of the capacitor can be changed, and the second magnetic field driving variable capacitor 5 is a tuning element designed with a built-in voice coil motor;
by adopting the vacuum capacitor with the publication number of CN215955107U, the variable vacuum capacitor has the advantages of high adjusting speed (50-500 ms) and high position accuracy, ensures the internal tightness of the variable vacuum capacitor, is convenient for long-term stable use of the variable vacuum capacitor, and is beneficial to prolonging the service life of the variable vacuum capacitor.
Further, the control board 2 is of the type adec AMV-2000, the first is to operate on two error signals from the sensing board 1 and provide signal processing, and then to drive the position of the variable vacuum capacitor until the error signal from the sensing board 1 is zero, and the second function is to confirm the initial or reset condition for the variable vacuum capacitor.
The working principle is as follows: in the transmission path of the matcher, the radio frequency power is divided into two parts: transmitted power and reflected power; the ideal situation is that the ratio of transmitted power/reflected power is a little higher; the ideal state can be achieved only when the impedance of the signal source and the load are matched, and the purpose of the rf matcher is to match the load to the rf generator by appropriately adjusting the tuning element to change the impedance.
When the radio frequency signal generator outputs a radio frequency signal, on one hand, the signal is coupled to the variable vacuum capacitor by the detection board 1 of the radio frequency matcher and is finally transmitted to the radio frequency load through the variable vacuum capacitor; on the other hand, as the radio frequency load is variable impedance, the situation that the radio frequency load is not matched with the radio frequency signal source necessarily occurs, so that the power obtained by the radio frequency load is not the maximum, and a power signal reflecting the radio frequency signal source is generated; the detection board 1 automatically detects the transmission signal and the reflection signal, generates a reflection phase error and an amplitude error signal, and sends the two error signals to the control board 2; the control board 2 drives the variable vacuum capacitors according to the magnitude of the two error signals, and adjusts the positions of the two variable vacuum capacitors according to the magnitude of the two error signals so as to change the reactance values of the two variable vacuum capacitors to be as close to the condition of the radio frequency load as possible, so that the power obtained by the radio frequency load is maximum; the smaller the two error signals are, the easier the variable vacuum capacitor is to adjust in place and to resonate easily; when the matcher generates tuning, the reflected power is minimal and all the transmitted power is coupled to the rf load.
The testing steps are as follows:
the method comprises the following steps: as shown in fig. 3, the line connection of the radio frequency matching unit is performed. The output of a radio frequency power supply is connected with a detection board 1, the detection board 1 is connected to a control board 2 through phase and amplitude detection, then the detection board is connected with an inductor 3, the control board 2 is connected to two ends of the inductor 3 through adjusting a first magnetic field driving variable capacitor 4 and a second magnetic field driving variable capacitor 5, then one end of the first magnetic field driving variable capacitor 4 is a grounding end of a radio frequency matcher, one end of the second magnetic field driving variable capacitor 5 is the output of the radio frequency matcher, the output of the radio frequency matcher is connected with a detection board 6, and the detection board 6 detects parameters of radio frequency power, namely amplitude, current phase and direct current bias voltage and is connected to the control board 2.
Step two: as shown in fig. 1, module combining is performed. The output end of the radio frequency power supply is connected with one end of the coaxial cable, the other end of the radio frequency power supply is connected with the input interface of the radio frequency matcher, and the output interface of the radio frequency matcher is connected with the input interface of the reaction chamber.
Step three: the radio frequency matcher receives a transmission signal of a radio frequency power supply, and then the detection board 1 detects the transmitted signal and sends the detected signal to the control board 2.
Step four: the control panel 2 respectively adjusts the variable vacuum capacitors of the radio frequency matcher according to the received phase and amplitude signals, the phase signals are adjusted through the second magnetic field driving variable capacitors 5, and the amplitude signals are adjusted through the first magnetic field driving variable capacitors 4, so that the load impedance of the radio frequency power supply is matched with the input impedance, and accurate matching control of the radio frequency matcher is achieved.
Has the advantages that:
1. the radio frequency matcher can better know the state of radio frequency load plasma by adding the radio frequency matching detection module, the existing variable capacitance value is adjusted to be adjusted by a built-in voice coil motor through external motor driving, and the voice coil motor has the characteristics of high precision positioning and high accelerated response speed, so that the radio frequency matching is more accurate and efficient.
2. The utility model discloses in, the radio frequency matcher adopts variable vacuum capacitor to adjust the capacitance value, has shortened the matching required time at to a great extent, and the matching precision has also been improved at the matching time of millisecond level on the other hand, and this improvement has promoted the matching speed and the precision of radio frequency matcher greatly, has brought very big innovation, also will promote the development of radio frequency matcher device greatly, provides good foundation space for its development.
Example 2
Referring to fig. 8, the difference between the present embodiment and embodiment 1 is: placing a drive coil inside the hollow tube;
the advantages of this embodiment over embodiment 1 are: the vacuum capacitor has the advantages of being high in speed, high in response, high in matching accuracy, long in service life, stable in vacuum degree sealing performance for a long time and small in size, and due to the fact that the driving coil is arranged in the vacuum capacitor, the size of the vacuum capacitor is further reduced, and the vacuum capacitor can be applied to a more precise small-size instrument.
Above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the design of the present invention, equivalent replacement or change should be covered within the protection scope of the present invention.
Claims (1)
1. The utility model provides an adopt radio frequency power matcher of magnetic field drive variable capacitance, includes pick-up plate (1), its characterized in that: the detection board (1) is connected with the output end of the radio frequency power supply, the detection board (1) is connected with the control board (2) through a phase detection signal and an amplitude detection signal, and the other side of the detection board (1) is connected with the inductor (3);
the control board (2) is connected to two ends of the inductor (3) through a first magnetic field driving variable capacitor (4) and a second magnetic field driving variable capacitor (5);
the other end of the first magnetic field driven variable capacitor (4) is connected with a grounding end;
the other end of the second magnetic field driven variable capacitor (5) is connected with an output end, the output end is connected with a detection plate (6), and the detection plate (6) is connected with the control plate (2).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221686032.8U CN218214970U (en) | 2022-07-01 | 2022-07-01 | Radio frequency power matcher adopting magnetic field to drive variable capacitor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221686032.8U CN218214970U (en) | 2022-07-01 | 2022-07-01 | Radio frequency power matcher adopting magnetic field to drive variable capacitor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218214970U true CN218214970U (en) | 2023-01-03 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221686032.8U Active CN218214970U (en) | 2022-07-01 | 2022-07-01 | Radio frequency power matcher adopting magnetic field to drive variable capacitor |
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| Country | Link |
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| CN (1) | CN218214970U (en) |
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- 2022-07-01 CN CN202221686032.8U patent/CN218214970U/en active Active
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