CN218212635U - Terahertz spectrum test system based on superlens - Google Patents
Terahertz spectrum test system based on superlens Download PDFInfo
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- CN218212635U CN218212635U CN202222376035.8U CN202222376035U CN218212635U CN 218212635 U CN218212635 U CN 218212635U CN 202222376035 U CN202222376035 U CN 202222376035U CN 218212635 U CN218212635 U CN 218212635U
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Abstract
A superlens based terahertz spectroscopy test system comprising: the terahertz detector comprises a terahertz source, a terahertz detector, a first substrate, a first superlens surface, a second superlens surface and a second substrate which are sequentially arranged along the same optical axis; a sample to be measured can be arranged between the first superlens surface and the second superlens surface; the terahertz source is positioned on one side of the first substrate, which is far away from the surface of the first superlens; the terahertz detector is positioned on one side of the second substrate, which is far away from the surface of the second superlens; the terahertz source emits terahertz waves; the first superlens surface is used for collimating terahertz waves emitted by a terahertz source; the second superlens surface is used for converging the terahertz waves emitted into the second superlens surface to the terahertz detector. The terahertz light path is collimated and focused by the planar superlens, so that the whole terahertz light path is more compact, the terahertz spectrum testing system is simplified, the light path is convenient to adjust, and the anti-interference capability is improved.
Description
Technical Field
The utility model relates to a terahertz instrument technical field particularly, relates to a terahertz is spectrum test system now based on super lens.
Background
The terahertz wave in the terahertz spectrum tester is an approximate point source radiation spherical wave, the divergence angle is large, and when the terahertz wave tester is used, a series of focusing and collimating operations need to be carried out on the terahertz wave to carry out spectrum detection on a sample. Referring to fig. 1, a terahertz wave emitted by a terahertz source 117 needs to be converged by a hyper-hemispherical silicon lens 211 to reduce its divergence angle, and then focused by an off-axis parabolic mirror 212 to irradiate on a sample 113 to be measured. The transmitted terahertz waves are focused on the surface of the terahertz detector 118 through the off-axis parabolic mirror and the hyper-hemispherical silicon lens, and the terahertz spectrum test is realized.
In the prior art, the whole terahertz spectrum testing system is complex, the volume of the system is large, and the integration and miniaturization of the system are not facilitated; meanwhile, the position of each lens group needs to be mechanically adjusted during light path calibration, the requirement on accuracy is high, and the difficulty is high.
SUMMERY OF THE UTILITY MODEL
In view of the above, the application proposes that the planar superlens is used for collimating and focusing the terahertz light path, so that the whole terahertz light path is compact, and the terahertz light path is simplified; the light path structure is simple to adjust after being reduced, and the anti-interference capability is improved.
In order to achieve the above object, the embodiment of the present invention provides the following specific technical solutions:
a superlens based terahertz spectroscopy test system comprising: the terahertz detector comprises a terahertz source, a terahertz detector, a first substrate, a first superlens surface, a second superlens surface and a second substrate which are sequentially arranged along the same optical axis;
the first substrate and the second substrate are made of terahertz transparent materials;
a sample to be measured can be arranged between the first superlens surface and the second superlens surface;
the terahertz source is positioned on one side of the first substrate far away from the first superlens surface; the terahertz detector is positioned on one side of the second substrate far away from the surface of the second superlens;
the terahertz source is used for emitting terahertz waves;
the first superlens surface is used for collimating terahertz waves emitted by the terahertz source;
the second superlens surface is used for converging the terahertz waves emitted into the second superlens surface to the terahertz detector.
Optionally, the spectroscopic test system further comprises: a third superlens surface, a fourth superlens surface, a third substrate, and a fourth substrate; the third substrate and the fourth substrate are made of terahertz transparent materials;
the third substrate is disposed between the first substrate and the fourth substrate;
the fourth substrate is disposed between the third substrate and the second substrate;
the third superlens surface is disposed on the third substrate; the fourth superlens surface is disposed on the fourth substrate;
the first superlens surface, the second superlens surface, the third superlens surface and the fourth superlens surface are sequentially arranged coaxially;
the third superlens surface is used for converging the terahertz waves emitted into the third superlens surface;
the fourth superlens surface is used for collimating the terahertz waves incident to the fourth superlens surface.
Optionally, the first superlens surface and the third superlens surface are both disposed on a third substrate, and the second superlens surface and the fourth superlens surface are both disposed on a fourth substrate.
Optionally, the phase distributions of the first superlens surface, the second superlens surface, the third superlens surface, and the fourth superlens surface are hyperbolic phase distributions.
Optionally, the superlens surface phase distribution satisfies:
wherein (x, y) is a coordinate on the surface of the superlens with the center as an origin,
denotes a phase at coordinates (x, y), f is a focal length of the superlens surface, and k is a wave vector of the terahertz wave.
Optionally, the superlens surface comprises a plurality of nanostructures arranged periodically.
Preferably, the material of the surface of the super lens comprises at least one of silicon, gallium arsenide, silicon nitride and metal.
Optionally, in a case where the material of the superlens surface includes a metal, the metal includes at least one of gold, silver, aluminum, copper, and platinum.
Optionally, two sides of the surface of the first superlens are respectively attached to the first substrate and the third substrate, and two sides of the surface of the second superlens are respectively attached to the fourth substrate and the second substrate.
Optionally, a distance between the terahertz source and the first superlens surface is a focal length of the first superlens surface, and a distance between the terahertz detector and the second superlens surface is a focal length of the second superlens surface;
the distance between the third superlens surface and the fourth superlens surface is the sum of the focal length of the third superlens surface and the focal length of the fourth superlens surface.
Optionally, the terahertz source is an optical terahertz radiation source or an electronic terahertz radiation source, and the terahertz detector is an optical terahertz detector or an electronic terahertz detector.
Compared with the prior art, the embodiment of the utility model has the following beneficial effects:
the terahertz spectrum testing system is simplified by using the combination of the plurality of superlenses with the same optical axis, so that the miniaturization integration of the spectrum testing system is facilitated; meanwhile, the traditional hyper-hemispherical silicon lens and off-axis parabolic mirror are replaced by the hyper-lens with a planar structure, the semiconductor process can be used for processing, the nano-scale alignment can be realized, and the large-scale mass production and high-precision alignment are easier; the superlens with the planar structure can be integrated with a terahertz source and a terahertz detector, and is simple in system adjustment and high in anti-interference capability.
In order to make the aforementioned and other objects, features and advantages of the present invention comprehensible, preferred embodiments accompanied with figures are described in detail below.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 shows a schematic diagram of a prior art spectral detection system;
fig. 2 is a schematic diagram illustrating a first structure of a spectrum detection system according to an embodiment of the present invention;
fig. 3 is a schematic diagram illustrating a second structure of the spectrum detection system according to the embodiment of the present invention;
fig. 4 shows a schematic diagram of a third structure of a spectrum detection system provided by an embodiment of the present invention;
fig. 5 shows a fourth structural schematic diagram of a spectrum detection system provided by the embodiment of the present invention;
fig. 6 shows a fifth structural schematic diagram of the spectrum detection system according to the embodiment of the present invention.
Description of reference numerals:
110. a first substrate; 111. a first superlens surface; 112. a third substrate; 113. a sample to be tested; 114. a fourth substrate; 115. a second superlens surface; 116. a second substrate; 117. a terahertz source; 118. a terahertz detector; 119. a third superlens surface; 210. a fourth superlens surface; 211. a hyper-hemispherical lens; 212. an off-axis parabolic mirror.
Detailed Description
For better understanding of the above technical solutions, the following detailed descriptions will be provided in conjunction with the drawings and the detailed description of the embodiments.
In the description of the present invention, it is to be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the drawings, and are only for convenience of description and to simplify the description, but do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore should not be construed as limiting the present invention.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present invention, "a plurality" means two or more unless specifically limited otherwise.
In the present invention, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "fixed" are to be construed broadly and may, for example, be fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meaning of the above terms in the present invention can be understood according to specific situations by those skilled in the art.
The embodiment of the utility model provides a replace current super hemisphere lens 211 and off-axis parabolic mirror 212 through super lens of terahertz now, make terahertz spectrum test system's volume reduce now. The super lens is a plane structure and is suitable for mass production of semiconductor processes. Moreover, the problems that the light paths of a plurality of lenses need to be aligned and focused can be avoided, systematic adjustment is easier, and the anti-interference capability of the terahertz spectrum testing system is enhanced.
The embodiment of the utility model provides a terahertz spectrum test system now based on super lens, it is shown to refer to fig. 6, and this terahertz spectrum test system now includes: the terahertz source 117, the terahertz detector 118, and the first substrate 110, the first superlens surface 111, the second superlens surface 115, and the second substrate 116 arranged in this order on the same optical axis. In the system, the first substrate 110 and the second substrate 116 are both made of terahertz transparent materials, and a sample 113 to be detected can be placed between the first superlens surface 111 and the second superlens surface 115; the terahertz source 117 is used for emitting terahertz waves, and the terahertz source 117 is positioned on one side of the first substrate 110 away from the first superlens surface 111; the terahertz detector 118 is located on the side of the second substrate 116 away from the second superlens surface 115. The first superlens surface 111 collimates the terahertz waves emitted from the terahertz source 117, and the second superlens surface 115 converges the terahertz waves incident on the second superlens surface 115 and onto the terahertz detector 118.
Referring to fig. 2, in the embodiment of the present invention, the terahertz source 117 can emit a point source radiation wave to provide light to the first superlens surface 111 on the light emitting side without being affected by the system orientation; as shown in fig. 2, the optical path in the thz spectroscopy test system is from left to right, i.e. the thz source 117 can emit thz waves used by the system to the right side of fig. 2, and accordingly, the first superlens surface 111 is located on the light-emitting side of the thz source 117, i.e. the right side of fig. 2. The first substrate 110 may be used to support the terahertz source 117.
The third superlens surface 119 realizes the focusing of terahertz waves, the focused terahertz waves irradiate the sample 113 to be tested, the terahertz waves transmitted from the sample 113 to be tested are collected by the fourth superlens surface 210 to become collimated waves, and the collimated waves enter the second superlens surface 115, so that the second superlens surface 115 focuses the terahertz waves on the surface of the terahertz detector 118, and the terahertz spectrum test is realized. Compared with fig. 1, the terahertz spectrum testing system in fig. 2 removes various optical lenses in the original free space, and realizes the reduction of the structure.
The embodiment of the utility model provides an in, terahertz source 117 can be all kinds of optics terahertz sources or electron terahertz sources, including but not limited to photoconductive antenna, terahertz quantum cascade laser instrument, nonlinear crystal, light rectification, spin terahertz source, gas laser, resonance tunneling diode, frequency doubling source etc. now. The first, second, third and fourth superlens surfaces 111, 115, 119 and 210 may adopt a scheme of a dielectric superlens or a metal superlens:
the material of the dielectric super lens can be selected from silicon, gallium arsenide, silicon nitride and other materials with large refractive index and small loss in the terahertz wave band. The metal superlens is made of at least one of gold, silver, copper, aluminum, platinum and other metals. The first substrate 110, the second substrate 116, the third substrate 112 and the fourth substrate 114 are all made of terahertz transparent materials, and the transparent substrates do not affect the terahertz source 117 to emit terahertz waves and the terahertz detector 118 to receive the terahertz waves.
Alternatively, the substrate (here, the substrate includes the first substrate 110, the second substrate 116, the third substrate 112, and the fourth substrate 114) may be made of a material with high transmittance and low loss in the terahertz band, such as silicon, gallium arsenide, indium phosphide, sapphire, quartz glass, magnesium oxide, polyimide, PDMS (polydimethylsiloxane), PMMA (acrylic glass), PET (polyester resin), BCB (benzocyclobutene), and the like, so as to ensure that the substrate is transparent. The terahertz detector 118 may be various optical terahertz detectors or electronic terahertz detectors, including photoconductive antennas, nonlinear crystals, schottky diodes, bolometers, glaciers, terahertz quantum well detectors, and the like.
The first superlens surface 111, the second superlens surface 115, the third superlens surface 119, and the fourth superlens surface 210 (hereinafter collectively referred to as superlens surfaces, that is, the superlens surfaces include the first superlens surface 111, the second superlens surface 115, the third superlens surface 119, and the fourth superlens surface 210) are planar superlens surfaces manufactured based on a semiconductor process, and have a small thickness, the minimum thickness may reach a micrometer level, and the terahertz waves emitted by the terahertz source 117 can be modulated. Moreover, different surfaces of the superlens can collimate or focus the terahertz waves emitted by the terahertz source 117 according to different phase distributions. Optionally, the superlens surface is a hyperbolic phase distribution. In the embodiment of the present invention, the super lens surface is periodically arranged with a plurality of nano structures, and the phases of the plurality of nano structures form the phase distribution of the super lens surface; in the embodiment of the present invention, the phase distribution on the surface of the superlens
Satisfies the following conditions:
wherein (x, y) is the coordinate with the center as the origin on the surface of the super lens,
denotes a phase at coordinates (x, y), f is a focal length of the superlens surface, and k is a wave vector of the terahertz wave.
In the embodiment of the present invention, as shown in fig. 2, the first superlens surface 111 and the fourth superlens surface 210 both collimate the terahertz wave emitted by the terahertz source 117; the second superlens surface 115 and the third superlens surface 119 both focus the terahertz waves emitted by the terahertz source 117. In the embodiment of the present invention, the first substrate 110 and the second substrate 116 are substrates of the terahertz source 117 and the terahertz detector 118, and the first substrate 110 and the second substrate 116 support the terahertz source 117 and the terahertz detector 118; the third substrate 112 supports the first and third superlens surfaces 111 and 119; the fourth substrate 114 supports the second superlens surface 115 and the fourth superlens surface 210. Since the minimum thickness of the superlens surface is only in the order of micrometers, complete tiling cannot be achieved by virtue of the superlens surface itself, which needs to be attached to both sides of the third substrate 112 and the fourth substrate 114.
In the embodiment of the present invention, as shown in fig. 2, the sample 113 to be measured can be disposed between the third superlens surface 119 and the fourth superlens surface 210; the preferred position of the sample 113 to be measured is a convergence point of the terahertz waves in the interval before exiting from the third superlens surface 119 and entering the fourth superlens surface 210.
As shown in fig. 2, the sample 113 to be tested is placed in the central region between the third superlens surface and the fourth superlens surface for spectrum detection, and at this time, the terahertz spectrum testing system satisfies:
the distance between the terahertz source 117 and the first superlens surface 111 is the focal length of the first superlens surface 111, and at this time, the terahertz wave entering the first superlens surface 111 is in a collimated state. Further, the point where the terahertz wave 117 is collimated and then emitted from the third superlens surface 119 becomes focused and passes through the sample to be measured, and the point where the terahertz wave converges between the third superlens surface 119 and the fourth superlens surface 210 may be located at the confocal plane between the third superlens surface 119 and the fourth superlens surface 210. The fourth superlens surface 210 may collimate the terahertz waves incident on the fourth superlens surface 210; moreover, the distance between the terahertz detector 118 and the second superlens surface 115 is the focal length of the second superlens surface 115, and the terahertz waves collimated by the fourth superlens surface 210 can be converged to the terahertz detector 118 after passing through the second superlens surface 115.
The embodiment of the utility model provides an in, first super lens surface 111 and the super lens surface 119 of third have realized the central alignment of nanometer owing to adopt semiconductor processing technology, aim at back relative position fixed, and the mode precision of adjusting than traditional machinery is higher, and the interference killing feature is stronger. The second superlens surface 115 and the fourth superlens surface 210 can also achieve high precision center alignment.
Optionally, referring to fig. 3, in the embodiment of the present invention, the terahertz source 117, the first superlens surface 111, and the third superlens surface 119 may be integrated into a transmitting end of the terahertz wave, the terahertz detector 118, the fourth superlens surface 210, and the second superlens surface 115 are integrated into a receiving end of the terahertz wave, and the transmitting end and the receiving end are integrated with the collimating and focusing functions; the terahertz spectrum testing system can stably transmit terahertz waves, can further reduce the volume of the terahertz spectrum testing system, and is easy to realize miniaturization of the system.
In the embodiment of the present invention, as shown in fig. 3, the distance from the terahertz wave emitted by the terahertz source 117 to the first super lens surface 111 is shortened, and the interference of the external world to the terahertz wave is reduced.
Alternatively, referring to fig. 4, the terahertz wave passes through the sample to be measured and becomes a collimated wave; compared with fig. 2 and fig. 3, the detection position of the sample 113 to be detected in fig. 4 does not need to be aligned to the focusing position of the terahertz wave, the sample 113 to be detected can be placed more randomly, and the detection efficiency of the sample 113 to be detected can be improved.
Optionally, as shown in fig. 5, only two superlens surfaces are used in the embodiment of the present invention, the cost is further saved, the structure in the terahertz spectrum testing system is compact, and the anti-interference capability is improved. Meanwhile, when the terahertz waves emitted by the terahertz source 117 in fig. 4 and 5 pass through the sample 113 to be measured, the terahertz waves are collimated, the placement area of the sample 113 to be measured between the second substrate 116 and the third substrate 112 can be automatically adjusted according to requirements, the volume of the terahertz light path structure is further reduced, and integration is achieved.
The above descriptions are only specific embodiments of the present invention, but the scope of the embodiments of the present invention is not limited thereto, and any person skilled in the art can easily think of changes or substitutions within the technical scope of the embodiments of the present invention, and all the changes and substitutions should be covered within the scope of the embodiments of the present invention. Therefore, the protection scope of the embodiments of the present invention shall be subject to the protection scope of the claims.
Claims (11)
1. A terahertz spectrum test system based on a superlens is characterized by comprising: the terahertz wave detector comprises a terahertz wave source (117), a terahertz wave detector (118), and a first substrate (110), a first superlens surface (111), a second superlens surface (115) and a second substrate (116) which are sequentially arranged along the same optical axis;
the first substrate (110) and the second substrate (116) are made of terahertz transparent materials;
a sample (113) to be measured can be arranged between the first superlens surface (111) and the second superlens surface (115);
the terahertz source (117) is located on a side of the first substrate (110) away from the first superlens surface (111); the terahertz detector (118) is positioned on the side of the second substrate (116) far away from the second superlens surface (115);
the terahertz source (117) is used for emitting terahertz waves;
the first superlens surface (111) is used for collimating terahertz waves emitted by the terahertz source (117);
the second superlens surface (115) is used for converging the terahertz waves incident to the second superlens surface (115) to the terahertz detector (118).
2. The superlens-based terahertz spectroscopic testing system of claim 1, further comprising: a third superlens surface (119), a fourth superlens surface (210), a third substrate (112), and a fourth substrate (114); the third substrate (112) and the fourth substrate (114) are both made of terahertz transparent materials;
the third substrate (112) is disposed between the first substrate (110) and the fourth substrate (114);
the fourth substrate (114) is disposed between the third substrate (112) and the second substrate (116);
the third superlens surface (119) is disposed on the third substrate (112); the fourth superlens surface (210) is disposed on the fourth substrate (114);
said first superlens surface (111), said second superlens surface (115), said third superlens surface (119), and said fourth superlens surface (210) are coaxially aligned in sequence;
the third superlens surface (119) is used for converging terahertz waves incident to the third superlens surface (119);
the fourth superlens surface (210) is used for collimating the terahertz waves incident to the fourth superlens surface (210).
3. The superlens-based terahertz spectroscopy testing system of claim 2, wherein the first superlens surface (111) and the third superlens surface (119) are both disposed on a third substrate (112);
the second superlens surface (115) and the fourth superlens surface (210) are both disposed on a fourth substrate (114).
4. The superlens-based terahertz spectroscopy test system of claim 2, wherein the phase distributions of the first superlens surface (111), the second superlens surface (115), the third superlens surface (119), and the fourth superlens surface (210) are hyperbolic phase distributions.
5. The superlens-based terahertz spectroscopy testing system of claim 3, wherein the superlens surface phase distribution satisfies:
wherein (x, y) is a coordinate on the surface of the superlens with the center as an origin,
denotes a phase at coordinates (x, y), f is a focal length of the superlens surface, and k is a wave vector of the terahertz wave.
6. The superlens-based terahertz spectroscopy test system of claim 2, wherein the superlens surface comprises a plurality of nanostructures arranged periodically.
7. The system according to claim 6, wherein the material of the surface of the superlens comprises at least one of silicon, gallium arsenide, silicon nitride and metal.
8. The superlens-based terahertz spectroscopy testing system of claim 7, wherein in the case that the material of the superlens surface comprises a metal, the metal comprises at least one of gold, silver, aluminum, copper, platinum.
9. The superlens-based terahertz spectroscopy testing system of claim 2, wherein both sides of the first superlens surface (111) are respectively attached to a first substrate (110) and a third substrate (112);
two sides of the second super lens surface (115) are respectively attached to a fourth substrate (114) and a second substrate (116).
10. The superlens-based terahertz spectroscopy test system of claim 2, wherein a distance between the terahertz source (117) and the first superlens surface (111) is a focal length of the first superlens surface (111), and a distance between the terahertz detector (118) and the second superlens surface (115) is a focal length of the second superlens surface (115);
the distance between the third superlens surface (119) and the fourth superlens surface (210) is the sum of the focal length of the third superlens surface (119) and the focal length of the fourth superlens surface (210).
11. The superlens-based terahertz spectroscopy test system according to any one of claims 1-10, wherein the terahertz source (117) is an optical terahertz radiation source or an electronic terahertz radiation source, and the terahertz detector (118) is an optical terahertz detector or an electronic terahertz detector.
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