CN216598389U - Laser light source system - Google Patents

Abstract

The utility model provides a laser light source system, comprising: an integrated board device comprising: the copper plate is provided with a plurality of steps which are integrally in a step shape; the laser light sources are arranged on the steps, and each step is provided with one laser light source; the laser light source is used for emitting laser at two ends to respectively form a first light path and a second light path; light source feedback device, comprising: the blazed grating is used for carrying out dispersion processing on the received first optical path to form feedback light; the laser light source emits laser with fixed wavelength under the action of the received feedback light; a light reflecting device comprising: and the rotating mirror is used for coaxially outputting the received second light paths emitted by the laser light sources in the form of output light.

Description

A laser light source system

technical field

The utility model relates to the technical field of mid-far infrared semiconductor optoelectronic device technology and laser spectrometer technology, in particular to a laser light source system.

Background technique

The mid- and far-infrared bands with wavelengths of 3-15 microns include two atmospheric windows (3-5 microns, 8-12 microns), in which a large number of fundamental frequency absorption spectral lines of gas molecules are distributed, and each molecule corresponds to a specific Therefore, it is called the "fingerprint" band of gas molecules. Spectroscopic studies in the mid- and far-infrared bands hold great promise for in-situ process information in the chemical, pharmaceutical, or food industries, as well as for emission monitoring, sensitive trace detection, drug contaminant monitoring, and biosensing. Infrared spectrometers are the key instruments for basic research on all the above applications. Although Fourier transform infrared (FTIR) spectrometers are standard in scientific research institutions, FTIR also has shortcomings and limitations in the above applications:

FTIR uses infrared radiation sources at 3-15μm, such as silicon carbon rods, etc., and the brightness of the light source is low, so the detection sensitivity is low in scenarios such as trace gas detection and long-distance detection.

The resolution of FTIR is limited by the moving mirror distance of the instrument. The longer the moving mirror distance is, the higher the resolution is, and the more expensive the instrument is in terms of volume and mechanical manufacturing cost. At present, the highest resolution that can be achieved by the spectrometer usually equipped in the laboratory is 0.125cm- 1, and the higher the resolution, the longer the acquisition time.

The FTIR is bulky, the structure is not designed to be compact and robust, and the portability is poor.

To sum up, traditional FTIR cannot meet the requirements of basic front-end research for high-brightness and high-resolution spectroscopy, and there is currently a lack of spectrometers with high brightness, high resolution, cost-effective, portable, low power consumption, fast, and wide tuning range in the mid- and far-infrared bands.

Using lasers instead of non-radiative light sources to prepare laser spectrometers can meet the needs of high-brightness, high-resolution spectrometers for basic front-end research. The quantum cascade laser (QCL) is an ideal light source in the 3-15μm band due to its advantages of wide-ranging wavelength tailoring, large power, large tuning range, high conversion efficiency, compact size, and high reliability. Therefore, the researchers combined QCL with blazed grating to form a grating external cavity quantum cascade laser (EC-QCL), using the grating as a wavelength-selective element in the external cavity, thereby providing a very portable and tunable laser source for spectroscopic analysis . However, the tuning range of a single quantum cascade laser is limited. For a conventional single QCL bound to the continuum active region structure, the tuning range of the lasing wavelength of 4.6 μm is typically 0.3 to 0.5 μm, and the tuning range of the lasing wavelength of 7.6 μm is typically 0.3 to 0.5 μm. The typical range is 1 to 1.5 μm. Obviously, it is difficult for a single QCL to achieve full coverage of the tuning spectral line of 3-15 μm, so the concept of an infrared grating external cavity laser spectrometer with a wide tuning spectrum came into being. The infrared grating external cavity laser spectrometer with wide tuning spectrum is to replace the traditional incoherent radiation source with QCL, and integrate multiple EC-QCL units together to form a light source module. By selecting QCLs with different central wavelengths, their tuning ranges are spliced , so as to achieve spectral coverage in the range of 3-15 μm, and then integrate the above-mentioned light source module and detector, electronically controlled numerical control module, software, etc. to realize the function of the spectrometer. However, multiple EC-QCL integrated grating external cavity laser spectrometers also face many problems: 1. Each EC-QCL unit of the light source module needs to contain at least three optical elements: laser, collimating lens, and grating. The light source module integrates EC -The more QCL units, the more and more complicated the optical components involved in the system, and the optical components all need to be fixed and adjusted, so the stability of the optical path and the portability of the system all face great challenges. 2. Since the spectrometer output needs to use the output light source to illuminate the sample, and the integrated system involves multiple QCLs, it is necessary to ensure that the optical axes of the outgoing light of each EC-QCL unit are coincident and output in a common optical path, which is convenient for subsequent sample spectral detection.

Utility model content

(1) Technical problems to be solved

Based on the above problems, the present invention provides a laser light source system to alleviate the technical problems such as low spectral resolution in the prior art.

(2) Technical solutions

The utility model provides a laser light source system, comprising:

Integrated board assembly including:

The copper plate is provided with a plurality of steps, and the plurality of steps are in the shape of steps as a whole;

A plurality of laser light sources are arranged on a plurality of the steps, and each of the steps is provided with one of the laser light sources; the laser light sources are used for emitting laser light at both ends, respectively forming a first optical path and a second optical path;

Light source feedback device, including:

a blazed grating for performing dispersion processing on the received first optical path to form feedback light;

Wherein, the laser light source emits laser light of a fixed wavelength through the action of the received feedback light;

Light reflection device, including:

The rotating mirror is used for coaxially outputting the received second optical paths emitted by the laser light sources in the form of output light.

In the embodiment of the present invention, the laser light source includes:

Quantum cascade laser, used for emitting lasers at both ends to form the first emitting laser and the second emitting laser;

A collimating lens, including a first collimating lens and a second collimating lens, the first collimating lens and the second collimating lens can respectively receive the first emission laser and the second emission The laser is collimated to form the first collimated light and the second collimated light respectively;

A gold-plated reflector, including a first gold-plated reflector and a second gold-plated reflector, the first gold-plated reflector and the second gold-plated reflector are capable of collimating the first collimated light and the second collimated light respectively received The light is reflected to form a first optical path and a second optical path respectively.

In the embodiment of the present invention, the integrated board device further includes:

The first lifting platform is used for carrying the copper plate, and the first lifting platform can adjust the position of the copper plate relative to the light source feedback device or the light reflection device.

In the embodiment of the present invention, the light source feedback device further includes:

a grating holder for holding the blazed grating;

The grating turntable is connected with the grating frame, and the grating turntable can drive the grating frame to rotate, so that the blazed grating completes the reception of the first optical path.

In the embodiment of the present invention, the light reflection device further includes:

The rotating mirror turntable is used to carry the rotating mirror, and the rotating mirror turntable can drive the rotating mirror to rotate, thereby realizing coaxial output of the second optical paths emitted by each of the laser light sources received by the rotating mirror.

In the embodiment of the present invention, the light reflection device further includes:

The second lifting platform is used to carry the rotating mirror turntable, and the second lifting platform can adjust the position of the rotating mirror relative to the laser light source.

In the embodiment of the present invention, the wavelength range of the laser light emitted by each of the plurality of laser light sources is different.

In the embodiment of the present invention, the center wavelengths of the quantum cascade lasers of the plurality of laser light sources are different.

In the embodiment of the present invention, the integrated board device, the light source feedback device and the light reflection device are all arranged on the optical base plate.

(3) Beneficial effects

It can be seen from the above technical solutions that a laser light source system of the present invention has at least one or a part of the following beneficial effects:

The adjustment of the wide tuning spectrum can be realized, and the portability and the coaxial output of multiple light sources that are faced by multiple integrated grating external cavity laser spectrometers can be guaranteed.

Description of drawings

Fig. 1 is a structural block diagram of a laser light source system according to an embodiment of the present invention.

2 is a schematic diagram of an integrated board device of a laser light source system according to an embodiment of the present invention.

3 is a schematic diagram of the overall structure of a laser light source system according to an embodiment of the present invention.

[Description of the main components of the embodiment of the present utility model in the accompanying drawings]

100 integrated board unit

120 Laser light source

200 light source feedback device

300 Light Reflector

101, 102, 103 Quantum Cascade Lasers

104, 105, 106 The first collimating lens

107, 108, 109 The first gold-plated mirror

110, 111, 112 Second collimating lens

113, 114, 115 Second gold-plated mirror

116 copper plate

201 The first lift table

202 blazed grating

203 Grating Holder

204 Mirror

205 mirror turntable

206 Second lift table

207 Optical backplane

Detailed ways

The utility model provides a laser light source system, which integrates a laser, a collimating lens and a grating which are required to be included in each EC-QCL unit of a light source module. The problem of fixing and adjusting the optical element is solved, and the main shortcomings and deficiencies of the existing laser light source can be overcome.

In order to make the purpose, technical solutions and advantages of the present utility model more clearly understood, the present utility model will be further described in detail below in conjunction with specific embodiments and with reference to the accompanying drawings.

In the embodiment of the present invention, a laser light source system is provided. As shown in FIG. 1 to FIG. 3, the laser light source system includes: an integrated board device 100, including: a copper plate 116, which is provided with a plurality of steps 117, and a plurality of steps 117 as a whole is stepped; a plurality of laser light sources 120 are arranged on a plurality of steps 117, and each step 117 is provided with a laser light source 120; light path. The light source feedback device 200 includes: a blazed grating 202 for performing dispersion processing on the received first optical path to form feedback light; wherein, the laser light source 120 emits a fixed wavelength through the action of the received feedback light. laser. The light reflection device 300 includes: a rotating mirror 204, which is used for coaxially coaxially outputting the second optical paths emitted by the received laser light sources 120 in the form of output light.

In the embodiment of the present invention, as shown in FIG. 2 , the laser light source includes: quantum cascade lasers 101 , 102 , and 103 for emitting lasers at both ends to form a first emitting laser and a second emitting laser. The collimating lens includes the first collimating lens 104, 105, 106 and the second collimating lens 110, 111, 112. The first collimating lens 104, 105, 106 and the second collimating lens 110, 111, 112 can The respectively received first emitted laser light and second emitted laser light are collimated to form a first collimated light and a second collimated light respectively. Gold-coated mirrors, including first gold-coated mirrors 107, 108, 109 and second gold-coated mirrors 113, 114, 115, the first gold-coated mirrors 107, 108, 109 and second gold-coated mirrors 113, 114, 115 can The respectively received first collimated light and second collimated light are subjected to reflection processing to form a first optical path and a second optical path respectively.

In the embodiment of the present invention, as shown in FIG. 3 , the integrated board device further includes: a first lifting platform 201 for carrying the copper plate, and the first lifting platform 201 can adjust the position of the copper plate relative to the light source feedback device or the light reflection device .

In the embodiment of the present invention, as shown in FIG. 3 , the light source feedback device further includes: a grating frame 203 for holding the blazed grating 202; The blazed grating 202 finishes receiving the first optical path.

In the embodiment of the present invention, as shown in FIG. 3 , the light reflection device further includes: a rotating mirror turntable 205 for carrying the rotating mirror 204 , and the rotating mirror turntable 205 can drive the rotating mirror 204 to rotate, thereby realizing the receiving of the rotating mirror 204 The second optical paths emitted by the received laser light sources are coaxially output.

In the embodiment of the present invention, as shown in FIG. 3 , the light reflection device further includes: a second lifting platform 206 for carrying the rotating mirror turntable 205, and the second lifting platform 206 can adjust the position of the rotating mirror 204 relative to the laser light source .

In the embodiment of the present invention, the wavelength ranges of the laser light emitted by each of the plurality of laser light sources are different.

In the embodiment of the present invention, the center wavelengths of the quantum cascade lasers of the multiple laser light sources are different.

In the embodiment of the present invention, the integrated board device, the light source feedback device and the light reflection device are all arranged on the optical base plate.

Specifically, as shown in FIG. 2 to FIG. 3 , the present invention discloses a laser light source system, including:

The integrated board device 100 is fixed on the lifting platform 201 that can move in the vertical direction. In this embodiment, QCL is used as the light source. The light emitted by the QCL is TM polarized, and the polarization direction is perpendicular to the plane shown in FIG. The blazed grating 202 used in the embodiment has the highest incident diffraction efficiency in the vertical grating direction, so in this embodiment, the blazed grating 202 is fixed on a vertically movable lifting table to obtain the best diffraction efficiency of the grating.

In an embodiment of the present invention, the integrated board device includes:

The copper plate 116, which is vertically fixed on the lifting platform, provides functions such as support and heat dissipation, and the number of steps is the same as that of the quantum cascade laser.

The quantum cascade lasers, which in this embodiment are independent of each other in the time domain, ie do not operate simultaneously. In the embodiment, there are three quantum cascade lasers 101 , 102 and 103 , which are fixed on different steps of the copper plate 116 by screws. The number of quantum cascade lasers can be increased or decreased according to actual needs.

The first collimating lens 104 and the second collimating lens 110 of the quantum cascade laser 101, the first collimating lens 105 and the second collimating lens 111 of the quantum cascade laser 102, the first collimating lens of the quantum cascade laser 103 The lens 106 and the second collimating lens 112, the cavity surface collimating lens is located outside the front cavity surface of the laser, and the second collimating lens is located outside the rear cavity surface of the laser, and is fixed on the copper plate 116 by ultraviolet glue. Collimating the diverging light from a quantum cascade laser into a parallel beam.

The first gold-coated mirror 107 and the second gold-coated mirror 113 of the quantum cascade laser 101, the first gold-coated mirror 108 and the second gold-coated mirror 114 of the quantum cascade laser 102, the first gold-coated reflection of the quantum cascade laser 101 The mirror 109 and the second gold-coated mirror 115 are fixed on the copper plate 116 by ultraviolet glue, and are used to change the propagation direction of the light beam, and are respectively located outside the first collimating lens and the second collimating lens.

The blazed grating 202 is fixed on the rotatable grating frame 203 .

In an embodiment of the present invention, the grating frame 203 is rotated by a traveling wave reducer. In another embodiment of the present invention, the MEMS scanning grating can integrate the blazed grating 202 and the grating frame 203 into one body to realize high-frequency scanning.

In an embodiment of the present invention, the design wavelength of the blazed grating 202 is 12 μm, the grating line is 120 g/mm, and within the wavelength range of 8-15 μm, the diffraction efficiency of the grating in the vertical line direction is all >80%. In another embodiment of the present invention, the design wavelength of the blazed grating 202 is 10.6 μm, the grating line is 150 g/mm, and within the wavelength range of 4.5-12.5 μm, the grating diffraction efficiency in the vertical line direction is all >80%. In another embodiment of the present invention, the design wavelength of the blazed grating 202 is 3.5 μm, the grating line is 300 g/mm, and within the wavelength range of 2.5-6.5 μm, the grating diffraction efficiency in the vertical line direction is all >80%. A suitable grating can be selected according to the actual required tuning range of the system.

The rotating mirror 204 is fixed on the rotating mirror turntable 205 which can be rotated. The mirror turntable 205 is fixed on the second lifting platform 206 which can move in the vertical direction.

In an embodiment of the present invention, the turntable is rotated by a traveling wave reducer. In another embodiment of the present invention, the MEMS scanning galvanometer can integrate the rotating mirror 204 and the rotating mirror turntable 205 into one body to realize high frequency switching.

For the optical base plate 207, in an embodiment of the present invention, the first lifting platform 201, the second lifting platform 206, and the grating turntable are all fixed on the base plate. In another embodiment of the present invention, the optical base plate can be replaced with a casing to provide protection and facilitate transportation.

In the embodiment of the present invention, the laser light source system integrates multiple wide-tuning external cavity optical paths 1 with EC-QCL feedback optical paths, including: lasers 101, 102, 103, first collimating lenses 104, 105, 106, front cavity Gold-plated reflections 107, 108, 109 and blazed grating 202.

Each QCL corresponds to a Littrow external cavity optical path. The light emitted from the front cavity surfaces of the lasers 101, 102 and 103 is collimated by the lenses 104, 105 and 106, respectively, and then passes through the stepped copper plate 116 and the first gold-plated mirrors 107, 108, The reflection of 109 makes these light beams in the same plane and incident on the blazed grating 202 in parallel with each other. The blazed grating 202 selects light of different frequencies to feed back to the lasers 101, 102 and 103 to form an EC-QCL optical path. The blazed grating 202 The response wavelength range is very wide, and the incident beams are parallel to each other, so multiple EC-QCL feedback optical paths can share the same grating, and the combination of multiple EC-QCL optical paths forms an integrated wide-tuning external cavity optical path.

The light emitted from the front cavity surface of the lasers 101, 102, and 103 is collimated by the lenses 110, 111, and 112, respectively, and then passes through the stepped copper plate 116 and the reflection effect of the back cavity surface gold-plated reflections 113, 114, and 115, so that these beams are in the same plane. incident on the same point on the rotating mirror 204 within and at different angles. By precisely controlling the rotation angle of the rotating mirror 204 by the rotating mirror turntable 205 , different EC-QCL optical paths can be output on the same optical axis.

So far, the present embodiment has been described in detail with reference to the accompanying drawings. Based on the above description, those skilled in the art should have a clear understanding of the miniaturized wide-tuning mid-infrared grating external cavity quantum cascade laser light source system of the present invention.

To sum up, the present invention provides a laser light source system. The system fixes the laser, front and rear cavity lens, and front second gold-coated mirror required for the EC-QCL optical path through UV glue by designing a stepped integrated board device. The light from the front cavity surface of the QCL is reflected by the first gold-coated mirror to form beams that are parallel to each other and in the same plane. The light on the rear cavity surface of the QCL is reflected by the second gold-coated mirror to form a beam in the same plane, and incident on the rotating mirror at different incident angles, and the coaxial output is realized by rotating the rotating mirror. This scheme firstly integrates most of the components on an integrated board device, which greatly improves the integration and portability of the system; secondly, it simplifies the mechanical fixation and adjustment of the components required for the external cavity optical path, and replaces the mechanical fixation with UV glue, simplifying the At the same time, the stability of the system is improved; then a blazed grating is shared by multiple EC-QCL optical paths, which reduces the number of optical components, and reduces the complexity of the system volume and structure; finally, multiple EC-QCL optical paths are used. QCL coaxial output is convenient for subsequent sample spectral testing.

So far, the embodiments of the present invention have been described in detail with reference to the accompanying drawings. It should be noted that, in the accompanying drawings or the text of the description, the implementations that are not shown or described are in the form known to those of ordinary skill in the technical field, and are not described in detail. In addition, the above definitions of various elements and methods are not limited to various specific structures, shapes or manners mentioned in the embodiments, and those of ordinary skill in the art can simply modify or replace them.

Based on the above description, those skilled in the art should have a clear understanding of the laser light source system of the present invention.

To sum up, the present invention provides a laser light source system, which integrates the laser, collimating lens and grating required to be included in each EC-QCL unit of the light source module. It solves the problem of fixation and adjustment of optical components. The adjustment of optical components determines the parallelism and beam quality of the optical path, which ultimately affects the tuning range and spectral line single mode of EC-QCL. The fixation of optical components improves the stability of the system. Sex matters. Since the spectrometer output needs to use the output light source to illuminate the sample, and the integrated system involves multiple QCLs, it is necessary to ensure that the optical axes of the outgoing light of each EC-QCL unit are coincident and output in a common optical path, which is convenient for subsequent sample spectral detection.

It should also be noted that the directional terms mentioned in the embodiments, such as "up", "down", "front", "rear", "left", "right", etc., only refer to the directions of the drawings, not It is used to limit the protection scope of the present invention. Throughout the drawings, the same elements are denoted by the same or similar reference numbers. Conventional structures or constructions will be omitted when it may cause confusion in the understanding of the present invention.

Moreover, the shapes and sizes of the components in the figures do not reflect the actual size and proportion, but merely illustrate the contents of the embodiments of the present invention. Furthermore, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim.

Unless known to the contrary, the numerical parameters set forth in the specification and attached claims are approximations that can vary depending upon the desired properties sought to be obtained from the teachings of the present disclosure. Specifically, all numbers used in the specification and claims to indicate compositional contents, reaction conditions, etc., should be understood as being modified by the word "about" in all cases. In general, the meaning expressed is meant to include a change of ±10% in some embodiments, a change of ±5% in some embodiments, a change of ±1% in some embodiments, and a change of ±1% in some embodiments. Example ±0.5% variation.

Furthermore, the word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.

The ordinal numbers such as "first", "second", "third", etc. used in the description and the claims are used to modify the corresponding elements, which themselves do not mean that the elements have any ordinal numbers, nor do they Representing the order of a certain element and another element, or the order in the manufacturing method, the use of these ordinal numbers is only used to clearly distinguish an element with a certain name from another element with the same name.

Furthermore, unless the steps are specifically described or must occur sequentially, the order of the above steps is not limited to those listed above, and may be varied or rearranged according to the desired design. And the above embodiments can be mixed and matched with each other or with other embodiments based on the consideration of design and reliability, that is, the technical features in different embodiments can be freely combined to form more embodiments.

Those skilled in the art will understand that the modules in the device in the embodiment can be adaptively changed and arranged in one or more devices different from the embodiment. The modules or units or components in the embodiments may be combined into one module or unit or component, and further they may be divided into multiple sub-modules or sub-units or sub-assemblies. All features disclosed in this specification (including accompanying claims, abstract and drawings) and any method so disclosed may be employed in any combination, unless at least some of such features and/or procedures or elements are mutually exclusive. All processes or units of equipment are combined. Each feature disclosed in this specification (including accompanying claims, abstract and drawings) may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. Also, in a unit claim enumerating several means, several of these means can be embodied by one and the same item of hardware.

Similarly, it will be appreciated that in the above description of exemplary embodiments of the invention, various features of the invention are sometimes grouped together into a single Examples, figures, or descriptions thereof. However, this method of disclosure should not be construed to reflect an intention that the claimed invention requires more features than are expressly recited in each claim. Rather, as the following claims reflect, disclosed aspects lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the Detailed Description are hereby expressly incorporated into this Detailed Description, with each claim standing on its own as a separate embodiment of this invention.

The specific embodiments described above further describe the purpose, technical solutions and beneficial effects of the present invention in detail. It should be understood that the above are only specific embodiments of the present invention, and are not intended to limit the present invention. In the utility model, any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present utility model shall be included within the protection scope of the present utility model.

Claims (9)

1. A laser light source system, comprising:

an integrated board device, comprising:

the copper plate is provided with a plurality of steps, and the plurality of steps are integrally in a step shape;

the laser light sources are arranged on the steps, and each step is provided with one laser light source; the laser light source is used for emitting laser at two ends to respectively form a first light path and a second light path;

light source feedback apparatus comprising:

the blazed grating is used for carrying out dispersion processing on the received first optical path to form feedback light;

the laser light source emits laser with fixed wavelength under the action of the received feedback light;

a light reflecting device comprising:

and the rotating mirror is used for coaxially outputting the received second light paths emitted by the laser light sources in the form of output light.

2. The laser light source system of claim 1, wherein the laser light source comprises:

the quantum cascade laser is used for emitting laser at two ends to form first emission laser and second emission laser;

the collimating lens comprises a first collimating lens and a second collimating lens, and the first collimating lens and the second collimating lens can collimate the first emission laser and the second emission laser which are respectively received to respectively form first collimated light and second collimated light;

and the gold-plated reflector comprises a first gold-plated reflector and a second gold-plated reflector, and the first gold-plated reflector and the second gold-plated reflector can reflect the received first collimated light and second collimated light respectively to form a first light path and a second light path respectively.

3. The laser light source system of claim 1 wherein the integration board arrangement further comprises:

and the first lifting platform is used for bearing the copper plate, and the first lifting platform can adjust the position of the copper plate relative to the light source feedback device or the light reflection device.

4. The laser light source system of claim 1 wherein the light source feedback arrangement further comprises:

the grating frame is used for clamping the blazed grating;

and the grating rotary table is connected with the grating frame and can drive the grating frame to rotate, so that the blazed grating can complete the receiving of the first light path.

5. The laser light source system as claimed in claim 1 wherein the light reflection means further comprises:

and the rotating mirror rotating table is used for bearing the rotating mirror and can drive the rotating mirror to rotate, so that the second light paths received by the rotating mirror and emitted by the laser light sources are coaxially output.

6. The laser light source system as claimed in claim 5 wherein the light reflection means further comprises:

and the second lifting platform is used for bearing the rotating mirror rotating platform, and the position of the rotating mirror relative to the laser light source can be adjusted by the second lifting platform.

7. The laser light source system according to claim 1, wherein a wavelength range of the laser light emitted from each of the plurality of laser light sources is different.

8. The laser light source system of claim 2 wherein the center wavelength of each of the quantum cascade lasers of the plurality of laser light sources is different.

9. The laser light source system of claim 1 wherein the integration plate means, the light source feedback means, and the light reflection means are disposed on an optical backplane.

Images