CN216598389U - Laser light source system - Google Patents

Laser light source system Download PDF

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Publication number
CN216598389U
CN216598389U CN202122545351.9U CN202122545351U CN216598389U CN 216598389 U CN216598389 U CN 216598389U CN 202122545351 U CN202122545351 U CN 202122545351U CN 216598389 U CN216598389 U CN 216598389U
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light source
laser
laser light
light
grating
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王欢
张锦川
刘峰奇
翟慎强
卓宁
王利军
刘俊岐
刘舒曼
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Institute of Semiconductors of CAS
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Abstract

The utility model provides a laser light source system, comprising: an integrated board device comprising: the copper plate is provided with a plurality of steps which are integrally in a step shape; the laser light sources are arranged on the steps, and each step is provided with one laser light source; the laser light source is used for emitting laser at two ends to respectively form a first light path and a second light path; light source feedback device, comprising: the blazed grating is used for carrying out dispersion processing on the received first optical path to form feedback light; the laser light source emits laser with fixed wavelength under the action of the received feedback light; a light reflecting device comprising: and the rotating mirror is used for coaxially outputting the received second light paths emitted by the laser light sources in the form of output light.

Description

Laser light source system
Technical Field
The utility model relates to the technical field of middle and far infrared semiconductor photoelectric devices and laser spectrometers, in particular to a laser light source system.
Background
The mid-far infrared band with a wavelength of 3-15 microns comprises two atmospheric windows (3-5 microns, 8-12 microns), in which the fundamental absorption spectrum lines of a large number of gas molecules are distributed, and each molecule corresponds to a specific line, so that it is called the "fingerprint" band of gas molecules. The spectrum research of the middle and far infrared wave bands has great development prospect in the aspects of in-situ process information, emission monitoring, sensitive trace detection, drug pollutant monitoring, biosensing and the like in the chemical, pharmaceutical or food industry. Infrared spectrometers are key instruments for basic research in all of the above applications, and although Fourier Transform Infrared (FTIR) spectrometers have been the standard of research institutes, FTIR also has shortcomings and limitations in the above applications:
the FTIR adopts an infrared radiation source such as a silicon carbon rod and the like in the range of 3-15 μm, and the brightness of the light source is low, so the detection sensitivity is low in the scenes of trace gas detection, remote detection and the like.
The resolution of FTIR is limited by the distance of the moving mirrors of the instrument, the larger the distance of the moving mirrors, the more expensive the instrument is in terms of volume and mechanical manufacturing cost, the highest resolution that can be achieved by the currently available laboratory equipped spectrometers is 0.125cm "1, and the higher the resolution, the longer the acquisition time.
FTIR volume is great, and the design of structure is compact enough, firm, and the portability is poor.
In conclusion, the conventional FTIR cannot meet the requirements of basic front-end research on high-brightness and high-resolution spectrums, and the intermediate and far infrared bands currently lack a spectrometer with high brightness, high resolution, high cost performance, portability, low power consumption, rapidness and wide tuning range.
The laser spectrometer prepared by replacing a non-radiative light source with a laser can meet the requirements of basic front-end research on a high-brightness and high-resolution spectrometer. The Quantum Cascade Laser (QCL) is an ideal light source in a 3-15 mu m waveband due to the advantages of large-range cutting of wavelength, large power, large tuning range, high conversion efficiency, compact volume, high reliability and the like. Therefore, researchers have combined QCLs with blazed gratings to form grating external cavity quantum cascade lasers (EC-QCLs) using gratings as wavelength selective elements in the external cavity, thereby providing a very portable and tunable laser source for spectral analysis. However, the tuning range of a single quantum cascade laser is limited, and for a QCL (quantum well laser) which is conventionally bound to a continuous state active region structure singly, the typical tuning range value of the lasing wavelength of 4.6 microns is 0.3-0.5 microns, and the typical tuning range value of the lasing wavelength of 7.6 microns is 1-1.5 microns. Obviously, it is difficult for a single QCL to achieve full coverage of the tuning line of 3-15 μm, so the concept of an ir grating external cavity laser spectrometer with a wide tuning spectrum has come to work. The wide tuning spectrum infrared grating external cavity laser spectrometer is characterized by that it uses QCL to substitute traditional incoherent radiation source, integrates several EC-QCL units together to form light source module, and selects QCLs with different central wavelengths to make their tuning ranges mutually spliced so as to implement spectrum coverage in the range of 3-15 micrometers, then makes the above-mentioned light source module, detector, electric control numerical control module and software be integrated and combined so as to implement the function of spectrometer. However, the grating external cavity laser spectrometer integrated by multiple EC-QCLs also faces many problems: 1. each EC-QCL unit of the light source module needs to contain at least three optical elements of a laser, a collimating lens and a grating, the more EC-QCL units are integrated into the light source module, the more and more complicated the optical elements are involved in the system, and the optical elements need to be fixed and adjusted, so that the stability of the light path and the portability of the system are greatly challenged. 2. Because the spectrometer needs to irradiate a sample by using an output light source, the integrated system relates to a plurality of QCLs, and therefore the coincidence of the optical axes of emergent light of each EC-QCL unit and the output of a common light path are required to be ensured, so that the subsequent sample spectrum detection is facilitated.
SUMMERY OF THE UTILITY MODEL
Technical problem to be solved
Based on the above problems, the present invention provides a laser light source system to alleviate the technical problems of low spectral resolution and the like in the prior art.
(II) technical scheme
The utility model provides a laser light source system, comprising:
an integrated board device, comprising:
the copper plate is provided with a plurality of steps, and the plurality of steps are integrally in a step shape;
the laser light sources are arranged on the steps, and each step is provided with one laser light source; the laser light source is used for emitting laser at two ends to respectively form a first light path and a second light path;
light source feedback apparatus comprising:
the blazed grating is used for carrying out dispersion processing on the received first optical path to form feedback light;
the laser light source emits laser with fixed wavelength under the action of the received feedback light;
a light reflecting device comprising:
and the rotating mirror is used for coaxially outputting the received second light paths emitted by the laser light sources in the form of output light.
In an embodiment of the present invention, the laser light source includes:
the quantum cascade laser is used for emitting laser at two ends to form first emission laser and second emission laser;
the collimating lens comprises a first collimating lens and a second collimating lens, and the first collimating lens and the second collimating lens can collimate the first emission laser and the second emission laser which are respectively received to respectively form first collimated light and second collimated light;
and the gold-plated reflecting mirror comprises a first gold-plated reflecting mirror and a second gold-plated reflecting mirror, and the first gold-plated reflecting mirror and the second gold-plated reflecting mirror can reflect the received first collimated light and second collimated light respectively to form a first light path and a second light path respectively.
In an embodiment of the present invention, the integrated board apparatus further includes:
and the first lifting platform is used for bearing the copper plate, and the first lifting platform can adjust the position of the copper plate relative to the light source feedback device or the light reflection device.
In an embodiment of the present invention, the light source feedback apparatus further includes:
the grating frame is used for clamping the blazed grating;
and the grating rotary table is connected with the grating frame and can drive the grating frame to rotate, so that the blazed grating can complete the receiving of the first light path.
In an embodiment of the present invention, the light reflection apparatus further includes:
and the rotating mirror rotating table is used for bearing the rotating mirror and can drive the rotating mirror to rotate, so that the second light paths received by the rotating mirror and emitted by the laser light sources are coaxially output.
In an embodiment of the present invention, the light reflection apparatus further includes:
and the second lifting platform is used for bearing the rotating mirror rotating platform, and the position of the rotating mirror relative to the laser light source can be adjusted by the second lifting platform.
In the embodiment of the present invention, the wavelength ranges of the laser light emitted by the laser light sources of the plurality of laser light sources are different.
In an embodiment of the present invention, the center wavelength of each of the quantum cascade lasers of the plurality of laser light sources is different.
In the embodiment of the present invention, the integrated board device, the light source feedback device and the light reflection device are all disposed on an optical bottom board.
(III) advantageous effects
According to the technical scheme, the laser light source system has at least one or part of the following beneficial effects:
the adjustment of the wide tuning spectrum can be realized, and the portability and the coaxial output of a plurality of light sources faced by a plurality of integrated grating external cavity laser spectrometers can be ensured.
Drawings
Fig. 1 is a block diagram of a laser light source system according to an embodiment of the present invention.
Fig. 2 is a schematic diagram of an integrated board device of a laser light source system according to an embodiment of the present invention.
Fig. 3 is a schematic diagram of the overall structure of a laser light source system according to an embodiment of the present invention.
[ description of main reference symbols of embodiments of the utility model ] in the drawings
100 integrated board device
120 laser light source
200 light source feedback device
300 light reflection device
101. 102, 103 quantum cascade laser
104. 105, 106 first collimating lens
107. 108, 109 first gold-plated mirror
110. 111, 112 second collimating lens
113. 114, 115 second gold-plated mirror
116 copper plate
201 first elevating platform
202 blazed grating
203 grating frame
204 rotating mirror
205 rotating mirror turntable
206 second lifting platform
207 optical backplane
Detailed Description
The utility model provides a laser light source system which integrates a laser, a collimating lens and a grating which are required to be contained by each EC-QCL unit of a light source module. The problems of fixing and adjusting the optical element are solved, and the main defects and shortcomings of the existing laser light source can be overcome.
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is described in further detail below with reference to specific embodiments and the accompanying drawings.
In an embodiment of the present invention, there is provided a laser light source system, as shown in fig. 1 to 3, including: an integrated board device 100 comprising: a copper plate 116 provided with a plurality of steps 117, the plurality of steps 117 being stepped as a whole; a plurality of laser light sources 120 disposed on the plurality of steps 117, and one laser light source 120 is disposed on each step 117; the laser light source 120 is used for emitting laser light at two ends to form a first light path and a second light path respectively. Light source feedback device 200, comprising: a blazed grating 202 for performing dispersion processing on the received first optical path to form feedback light; wherein, the laser light source 120 emits the laser with fixed wavelength through the action of the received feedback light by the laser light source 120. Light reflecting device 300, comprising: and the rotating mirror 204 is configured to coaxially output the received second optical paths emitted by the respective laser light sources 120 in the form of output light.
In an embodiment of the present invention, as shown in fig. 2, the laser light source includes: the quantum cascade lasers 101, 102, 103 are used for emitting laser at two ends to form a first emitting laser and a second emitting laser. The collimating lens comprises first collimating lenses 104, 105 and 106 and second collimating lenses 110, 111 and 112, and the first collimating lenses 104, 105 and 106 and the second collimating lenses 110, 111 and 112 can collimate the received first emission laser and second emission laser to form first collimated light and second collimated light respectively. The gold-plated reflecting mirrors comprise first gold-plated reflecting mirrors 107, 108 and 109 and second gold-plated reflecting mirrors 113, 114 and 115, and the first gold-plated reflecting mirrors 107, 108 and 109 and the second gold-plated reflecting mirrors 113, 114 and 115 can reflect the received first collimated light and second collimated light to form a first light path and a second light path respectively.
In the embodiment of the present invention, as shown in fig. 3, the board integrating device further includes: a first elevating stage 201 for carrying the copper plate, the first elevating stage 201 being capable of adjusting the position of the copper plate relative to the light source feedback device or the light reflection device.
In the embodiment of the present invention, as shown in fig. 3, the light source feedback device further includes: a grating holder 203 for holding the blazed grating 202; and the grating turntable is connected with the grating frame and can drive the grating frame 203 to rotate, so that the blazed grating 202 can receive the first optical path.
In an embodiment of the present invention, as shown in fig. 3, the light reflection apparatus further includes: the rotating mirror rotating table 205 is configured to carry the rotating mirror 204, and the rotating mirror rotating table 205 can drive the rotating mirror 204 to rotate, so as to implement coaxial output on the second light paths received by the rotating mirror 204 and emitted by the laser light sources.
In an embodiment of the present invention, as shown in fig. 3, the light reflection apparatus further includes: and a second lifting platform 206 for carrying the rotating mirror rotating platform 205, wherein the second lifting platform 206 can adjust the position of the rotating mirror 204 relative to the laser light source.
In the embodiment of the utility model, the wavelength ranges of the laser beams emitted by the laser light sources are different.
In the embodiment of the utility model, the central wavelengths of the quantum cascade lasers of the plurality of laser light sources are different.
In the embodiment of the utility model, the integrated board device, the light source feedback device and the light reflection device are all arranged on the optical bottom board.
Specifically, as shown in fig. 2 to 3, the present invention discloses a laser light source system, including:
the integration plate device 100 is fixed on the vertically movable lifting platform 201, in the embodiment, a QCL is used as a light source, the light emitted by the QCL is TM polarized, and the polarization direction is vertical to the plane shown in fig. 1, and the incident diffraction efficiency in the vertical groove direction of the blazed grating 202 used in the embodiment is the highest, so the integration plate device 100 in the embodiment is fixed on the vertically movable lifting platform to obtain the best diffraction efficiency of the grating.
In one embodiment of the present invention, the board integration apparatus includes:
and the copper plate 116 is vertically fixed on the lifting platform, and has the functions of supporting, heat dissipation and the like, and the number of steps is the same as that of the quantum cascade lasers.
Quantum cascade lasers, which in the present embodiment are mutually independent in the time domain, i.e. do not operate simultaneously. In the embodiment, the number of the quantum cascade lasers is 3, and the quantum cascade lasers 101, 102 and 103 are respectively fixed on different steps of the copper plate 116 through screws, and the number of the quantum cascade lasers can be increased or decreased according to actual needs.
The laser comprises a first collimating lens 104 and a second collimating lens 110 of a quantum cascade laser 101, a first collimating lens 105 and a second collimating lens 111 of the quantum cascade laser 102, a first collimating lens 106 and a second collimating lens 112 of the quantum cascade laser 103, a cavity surface collimating lens located on the outer side of a front cavity surface of the laser, and a second collimating lens located on the outer side of a rear cavity surface of the laser and fixed on a copper plate 116 through ultraviolet glue. The diverging light emitted by the quantum cascade laser is collimated into parallel beams.
The first gold-plated reflector 107 and the second gold-plated reflector 113 of the quantum cascade laser 101, the first gold-plated reflector 108 and the second gold-plated reflector 114 of the quantum cascade laser 102, and the first gold-plated reflector 109 and the second gold-plated reflector 115 of the quantum cascade laser 101 are fixed on the copper plate 116 through ultraviolet glue, are used for changing the propagation direction of light beams, and are respectively positioned outside the first collimating lens and the second collimating lens.
A blazed grating 202, which is fixed on a rotatable grating holder 203.
In an embodiment of the present invention, the grating frame 203 is rotated by a traveling wave reducer. In another embodiment of the present invention, the MEMS scanning grating may integrate the blazed grating 202 and the grating mount 203 into one body, enabling high frequency scanning.
In an embodiment of the present invention, the blazed grating 202 is designed to have a wavelength of 12 μm, the grating grooves are 120g/mm, and the grating diffraction efficiency in the direction perpendicular to the grooves is greater than 80% in the wavelength range of 8-15 μm. In another embodiment of the present invention, the blazed grating 202 is designed with a wavelength of 10.6 μm, the grating grooves are 150g/mm, and the grating diffraction efficiency in the vertical groove direction is more than 80% in the wavelength range of 4.5-12.5 μm. In another embodiment of the present invention, the blazed grating 202 is designed with a wavelength of 3.5 μm, the grating grooves are 300g/mm, and the grating diffraction efficiency in the vertical groove direction is more than 80% in the wavelength range of 2.5-6.5 μm. The appropriate grating may be selected based on the actual desired system tuning range.
And a rotating mirror 204 fixed to a rotatable rotating mirror turret 205. The mirror turret 205 is fixed to a second elevating table 206 movable in the vertical direction.
In an embodiment of the present invention, the turntable is rotated by a traveling wave reducer. In another embodiment of the present invention, the MEMS scanning galvanometer may integrate the rotating mirror 204 and the rotating mirror turret 205 to achieve high frequency switching.
The optical base plate 207, in one embodiment of the present invention, has the first and second stages 201 and 206, and the reticle turret fixed to the base plate. In another embodiment of the utility model, the optical backplane can be replaced by a shell to provide protection and facilitate transportation.
In the embodiment of the utility model, the laser light source system integrates a wide tuning external cavity light path 1 of a plurality of EC-QCL feedback light paths, and comprises: lasers 101, 102, 103, first collimating lenses 104, 105, 106, front facet gold-plated reflections 107, 108, 109 and blazed gratings 202.
Each QCL corresponds to a Littrow external cavity optical path, light emitted by the front cavity surfaces of the lasers 101, 102 and 103 is collimated by the lenses 104, 105 and 106 respectively and then enters the blazed grating 202 in the same plane in parallel through the reflection action of the stepped copper plate 116 and the first gold-plated reflecting mirrors 107, 108 and 109, the blazed grating 202 selects light with different frequencies to feed back to the lasers 101, 102 and 103 to form the EC-QCL optical path, the response wavelength range of the blazed grating 202 is wide, and incident light beams are parallel to each other, so that a plurality of EC-QCL feedback optical paths can share the same grating, and a plurality of EC-QCL optical paths are combined to form an integrated wide-tuned external cavity optical path.
The light emitted from the front cavity surface of the lasers 101, 102 and 103 is collimated by the lenses 110, 111 and 112, and then is reflected by the gold-plated reflection 113, 114 and 115 of the stepped copper plate 116 and the rear cavity surface, so that the light beams are in the same plane and enter the same point on the rotating mirror 204 at different angles. The rotating angle of the rotating mirror 204 is precisely controlled by the rotating mirror rotating table 205, so that the same-optical-axis output of different EC-QCL optical paths can be realized.
Up to this point, the present embodiment has been described in detail with reference to the accompanying drawings. From the above description, those skilled in the art should clearly understand that the utility model is a miniaturized wide-tuning mid-ir grating external-cavity quantum cascade laser light source system.
In summary, the present invention provides a laser light source system. The system fixes the laser, the front cavity surface lens, the rear cavity surface lens and the front second gold-plated reflector required by the EC-QCL optical path through ultraviolet glue by designing a step-shaped integrated board device. The light of the front cavity surface of the QCL forms light beams which are parallel to each other and in the same plane through the reflection of the first gold-plated reflecting mirror, and the light beams enter a blazed grating with extremely high diffraction efficiency in a wide frequency band to form external cavity feedback. And the light of the rear cavity surface of the QCL forms light beams in the same plane through the reflection of the second gold-plated reflecting mirror, the light beams are incident on the rotating mirror at different incidence angles, and the coaxial output is realized through rotating the rotating mirror. According to the scheme, most elements are integrated on an integrated board device, so that the integration level and the portability of the system are greatly improved; mechanical fixing and adjustment of elements required by an external cavity light path are simplified, and the mechanical fixing is replaced by ultraviolet glue, so that the system is simplified, and the stability is improved; then, a blazed grating is shared by a plurality of EC-QCL light paths, so that the number of optical elements is reduced, and the complexity of the volume and the structure of the system is reduced; and finally, the coaxial output of the multiple EC-QCLs is realized through a multi-light path multiplexing mechanism, so that the subsequent sample spectrum test is facilitated.
So far, the embodiments of the present invention have been described in detail with reference to the accompanying drawings. It is to be noted that, in the attached drawings or in the description, the implementation modes not shown or described are all the modes known by the ordinary skilled person in the field of technology, and are not described in detail. Further, the above definitions of the various elements and methods are not limited to the various specific structures, shapes or arrangements of parts mentioned in the examples, which may be easily modified or substituted by those of ordinary skill in the art.
From the above description, those skilled in the art should clearly recognize that the laser light source system of the present invention is applicable.
In summary, the present invention provides a laser light source system, which integrates a laser, a collimating lens and a grating, which are required to be included in each EC-QCL unit of a light source module. The problems of fixing and adjusting the optical element are solved, the parallelism and the beam quality of an optical path are determined by adjusting the optical element, the tuning range and the spectral line single-mode performance of the EC-QCL are influenced finally, and the fixing of the optical element is important for improving the stability of the system. Because the spectrometer needs to irradiate a sample by using an output light source, the integrated system relates to a plurality of QCLs, and therefore the coincidence of the optical axes of emergent light of each EC-QCL unit and the output of a common light path are required to be ensured, so that the subsequent sample spectrum detection is facilitated.
It should also be noted that directional terms, such as "upper", "lower", "front", "rear", "left", "right", etc., used in the embodiments are only directions referring to the drawings, and are not intended to limit the scope of the present invention. Throughout the drawings, like elements are represented by like or similar reference numerals. Conventional structures or constructions will be omitted when they may obscure the understanding of the present invention.
And the shapes and sizes of the respective components in the drawings do not reflect actual sizes and proportions, but merely illustrate contents of the embodiments of the present invention. Furthermore, in the claims, any reference signs placed between parentheses shall not be construed as limiting the claim.
Unless otherwise indicated, the numerical parameters set forth in the specification and attached claims are approximations that can vary depending upon the desired properties sought to be obtained by the present invention. In particular, all numbers expressing quantities of ingredients, reaction conditions, and so forth used in the specification and claims are to be understood as being modified in all instances by the term "about". Generally, the expression is meant to encompass variations of ± 10% in some embodiments, 5% in some embodiments, 1% in some embodiments, 0.5% in some embodiments by the specified amount.
Furthermore, the word "comprising" does not exclude the presence of elements or steps not listed in a claim. The word "a" or "an" preceding an element does not exclude the presence of a plurality of such elements.
The use of ordinal numbers such as "first," "second," "third," etc., in the specification and claims to modify a corresponding element does not by itself connote any ordinal number of the element or any ordering of one element from another or the order of manufacture, and the use of the ordinal numbers is only used to distinguish one element having a certain name from another element having a same name.
In addition, unless steps are specifically described or must occur in sequence, the order of the steps is not limited to that listed above and may be changed or rearranged as desired by the desired design. The embodiments described above may be mixed and matched with each other or with other embodiments based on design and reliability considerations, i.e., technical features in different embodiments may be freely combined to form further embodiments.
Those skilled in the art will appreciate that the modules in the device in an embodiment may be adaptively changed and disposed in one or more devices different from the embodiment. The modules or units or components of the embodiments may be combined into one module or unit or component, and furthermore they may be divided into a plurality of sub-modules or sub-units or sub-components. All of the features disclosed in this specification (including any accompanying claims, abstract and drawings), and all of the processes or elements of any method or apparatus so disclosed, may be combined in any combination, except combinations where at least some of such features and/or processes or elements are mutually exclusive. Each feature disclosed in this specification (including any accompanying claims, abstract and drawings) may be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. Also in the unit claims enumerating several means, several of these means may be embodied by one and the same item of hardware.
Similarly, it should be appreciated that in the foregoing description of exemplary embodiments of the utility model, various features of the utility model are sometimes grouped together in a single embodiment, figure, or description thereof for the purpose of streamlining the utility model and aiding in the understanding of one or more of the various disclosed aspects. However, the disclosed method should not be construed to reflect the intent: that the utility model as claimed requires more features than are expressly recited in each claim. Rather, as the following claims reflect, disclosed aspects lie in less than all features of a single foregoing disclosed embodiment. Thus, the claims following the detailed description are hereby expressly incorporated into this detailed description, with each claim standing on its own as a separate embodiment of this invention.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention, and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.

Claims (9)

1. A laser light source system, comprising:
an integrated board device, comprising:
the copper plate is provided with a plurality of steps, and the plurality of steps are integrally in a step shape;
the laser light sources are arranged on the steps, and each step is provided with one laser light source; the laser light source is used for emitting laser at two ends to respectively form a first light path and a second light path;
light source feedback apparatus comprising:
the blazed grating is used for carrying out dispersion processing on the received first optical path to form feedback light;
the laser light source emits laser with fixed wavelength under the action of the received feedback light;
a light reflecting device comprising:
and the rotating mirror is used for coaxially outputting the received second light paths emitted by the laser light sources in the form of output light.
2. The laser light source system of claim 1, wherein the laser light source comprises:
the quantum cascade laser is used for emitting laser at two ends to form first emission laser and second emission laser;
the collimating lens comprises a first collimating lens and a second collimating lens, and the first collimating lens and the second collimating lens can collimate the first emission laser and the second emission laser which are respectively received to respectively form first collimated light and second collimated light;
and the gold-plated reflector comprises a first gold-plated reflector and a second gold-plated reflector, and the first gold-plated reflector and the second gold-plated reflector can reflect the received first collimated light and second collimated light respectively to form a first light path and a second light path respectively.
3. The laser light source system of claim 1 wherein the integration board arrangement further comprises:
and the first lifting platform is used for bearing the copper plate, and the first lifting platform can adjust the position of the copper plate relative to the light source feedback device or the light reflection device.
4. The laser light source system of claim 1 wherein the light source feedback arrangement further comprises:
the grating frame is used for clamping the blazed grating;
and the grating rotary table is connected with the grating frame and can drive the grating frame to rotate, so that the blazed grating can complete the receiving of the first light path.
5. The laser light source system as claimed in claim 1 wherein the light reflection means further comprises:
and the rotating mirror rotating table is used for bearing the rotating mirror and can drive the rotating mirror to rotate, so that the second light paths received by the rotating mirror and emitted by the laser light sources are coaxially output.
6. The laser light source system as claimed in claim 5 wherein the light reflection means further comprises:
and the second lifting platform is used for bearing the rotating mirror rotating platform, and the position of the rotating mirror relative to the laser light source can be adjusted by the second lifting platform.
7. The laser light source system according to claim 1, wherein a wavelength range of the laser light emitted from each of the plurality of laser light sources is different.
8. The laser light source system of claim 2 wherein the center wavelength of each of the quantum cascade lasers of the plurality of laser light sources is different.
9. The laser light source system of claim 1 wherein the integration plate means, the light source feedback means, and the light reflection means are disposed on an optical backplane.
CN202122545351.9U 2021-10-21 2021-10-21 Laser light source system Active CN216598389U (en)

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