CN218180934U

CN218180934U - Extra-high voltage and high current detachable probe card

Info

Publication number: CN218180934U
Application number: CN202221764221.2U
Authority: CN
Inventors: 张磊
Original assignee: Wuxi Proka Technology Co ltd
Current assignee: Wuxi Proka Technology Co ltd
Priority date: 2022-07-08
Filing date: 2022-07-08
Publication date: 2022-12-30
Anticipated expiration: 2032-07-08

Abstract

The utility model discloses an extra-high voltage heavy current detachable probe card, which belongs to the field of probe cards and comprises a substrate, wherein a probe card body is arranged at the top of the substrate, a plurality of mounting grooves are arranged at the inner side of the top of the substrate, mutually matched clamping mechanisms are arranged at the inner side of the mounting grooves and the bottom of the probe card body, the clamping mechanism is used for clamping the probe card body, the clamping mechanism comprises an inclined elastic fixing plate, a first clamping block is fixed at one inclined side of the inclined elastic fixing plate, and inclined elastic clamping plates which are the same as the mounting grooves in quantity and correspond to the mounting grooves in position are fixed at the bottom of the probe card body; the probe card body can be disassembled and assembled conveniently without using other tools, and the phenomenon that the probe card body leaks electricity is reduced due to the fact that cracks generated by torsion can be avoided when the probe card body is disassembled and assembled in the mode, so that the accuracy of the probe card body in wafer testing is guaranteed.

Description

Extra-high voltage and high current detachable probe card

Technical Field

The utility model relates to a probe card field, more specifically say, relate to a removable probe card of extra-high voltage heavy current.

Background

A probe card is a device for connecting a wafer to be tested with an electronic test system for wafer testing. When the probe card is used for detection, the contact points of the probe card need to form good electric contact with the bonding pads or bumps of the wafer to be detected, so that signals sent by an electronic test system can be really transmitted to the wafer to be detected to test the wafer to be detected;

the probe card body of the existing device is generally fixed on a substrate through screws, when the probe card body is disassembled and assembled, a screwdriver is often needed to be found for operation, although the mode is firm, the disassembly and the assembly are troublesome, the probe card body cannot be disassembled and assembled at any time conveniently, and under repeated disassembly and assembly for many times, if the screwing force is large, cracks are easily generated around the screws of the probe card body, so that the probe card body is damaged, and then the probe card body generates electric leakage and other phenomena, thereby influencing the accuracy of the probe card body on wafer testing.

SUMMERY OF THE UTILITY MODEL

1. Technical problem to be solved

To the problem that exists among the prior art, the utility model aims to provide a removable probe card of extra-high voltage heavy current, it makes the dismouting to the probe card body need not use other instruments, and is comparatively convenient, and under the dismouting of this kind of mode, can avoid the probe card body and appear the crackle because of torsion produces, reduces the phenomenon that the probe card body took place to leak electricity to the rate of accuracy of probe card body to wafer test has been guaranteed.

2. Technical scheme

In order to solve the above problems, the utility model adopts the following technical proposal.

The detachable extra-high voltage and high current probe card comprises a substrate, wherein a probe card body is installed at the top of the substrate, a plurality of installation grooves are formed in the inner side of the top of the substrate, clamping mechanisms which are matched with each other are arranged on the inner sides of the installation grooves and the bottom of the probe card body, and the clamping mechanisms are used for clamping the probe card body.

Furthermore, the clamping mechanism comprises an inclined elastic fixing plate, a first clamping block is fixed on one inclined side of the inclined elastic fixing plate, inclined elastic clamping plates which are the same in number as the mounting grooves and correspond to the mounting grooves in position are fixed at the bottom of the probe card body, and a second clamping block corresponding to the first clamping block is fixed on one side, close to the first clamping block, of each inclined elastic clamping plate;

the inner side of the mounting groove is located on the inclined elastic fixing plate and the two sides of the inclined elastic clamping plate are respectively provided with an elastic blocking component, and the elastic blocking components are used for blocking the inclined elastic clamping plate and the second clamping block.

Furthermore, the elastic blocking component comprises elastic pieces, the elastic pieces are arranged on two sides of the oblique elastic fixing plate and the oblique elastic clamping plate, blocking plates are fixed at the ends, close to each other, of the two elastic pieces, and the blocking plates are used for blocking the oblique elastic clamping plate and the second clamping block from moving.

Furthermore, the barrier plate is including stopping the piece, it is in to stop the piece setting the below of barrier plate, stop the piece with the flexure strip is connected, the top of stopping the piece is provided with the slope piece, the slope piece is towards keeping away from the direction and the tilt up of second fixture block, the top of slope piece is fixed with the slide, just the slide with base plate sliding connection.

Furthermore, a downward pressing prevention plate is fixed at the bottom of the inclined elastic fixing plate and is transversely arranged.

Furthermore, friction blocks are arranged on the sides, close to each other, of the first clamping block and the second clamping block.

3. Advantageous effects

Compared with the prior art, the utility model has the advantages of:

according to the scheme, the probe card body moves downwards, the inclined elastic clamping plate and the second clamping block are driven to move downwards, the second clamping block can be clamped with the first clamping block, when the probe card body needs to be disassembled, the probe card body can move leftwards or rightwards, and then the inclined elastic clamping plate and the second clamping block are driven to move transversely, so that the second clamping block can move out of the clamping range of the first clamping block, and the probe card body can move upwards, and further the inclined elastic clamping plate and the second clamping block are driven to move upwards, so that the probe card body can be disassembled, the device can complete the disassembly and assembly of the probe card body without screws, other tools are not needed for the disassembly and assembly, the convenience is realized, in the manner, cracks generated due to torsion can be avoided when the probe card body is disassembled, the damage of the probe card body is avoided, the phenomenon of electric leakage of the probe card body is reduced, and the accuracy of the probe card body on wafer testing is ensured.

Drawings

Fig. 1 is a schematic structural view of the present invention;

FIG. 2 is a schematic structural view of the base plate, the second fixture block and the mounting groove of the present invention;

FIG. 3 is a schematic structural view of the base plate, the mounting groove and the inclined plate of the present invention;

FIG. 4 is a schematic structural view of the inclined plate, the elastic plate and the first clamping block of the present invention;

FIG. 5 is a schematic view of the inclined resilient clip plate, the first clamping block and the second clamping block;

FIG. 6 is a cross-sectional view taken at A of FIG. 5 according to the present invention;

fig. 7 is a schematic view of the structure between the slider, the barrier and the elastic sheet according to the present invention.

The reference numbers in the figures illustrate:

1. a substrate; 2. a probe card body; 3. mounting grooves; 4. an inclined elastic fixing plate; 5. a first clamping block; 6. a pressure plate is prevented from being pressed down; 7. the elastic clamping plate is inclined; 8. a second fixture block; 9. a friction block; 10. an elastic sheet; 11. a barrier sheet; 12. an inclined plate; 13. a slide sheet.

Detailed Description

The technical solution in the embodiment of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiment of the present invention; obviously, the described embodiments are only a part of the embodiments of the present invention, and not all embodiments, and all other embodiments obtained by those skilled in the art without any inventive work are within the scope of the present invention based on the embodiments of the present invention.

Example (b):

referring to fig. 1-7, an extra-high voltage and high current detachable probe card includes a substrate 1, a probe card body 2 is mounted on the top of the substrate 1, a plurality of mounting grooves 3 are formed in the inner side of the top of the substrate 1, and engaging mechanisms are disposed on the inner side of the mounting grooves 3 and the bottom of the probe card body 2 and used for clamping the probe card body 2.

Referring to fig. 4-5, the clamping mechanism includes an inclined elastic fixing plate 4, a first fixture block 5 is fixed on one inclined side of the inclined elastic fixing plate 4, inclined elastic clamping plates 7 corresponding to the mounting grooves 3 in the same number and position are fixed at the bottom of the probe card body 2, a second fixture block 8 corresponding to the first fixture block 5 is fixed on one side of each inclined elastic clamping plate 7 close to the first fixture block 5, and an inclined surface is arranged on one side of each first fixture block 5 away from the corresponding second fixture block 8, so that when the second fixture block 8 moves downwards, and contacts with the first fixture block 5, it is convenient to continue to move downwards, when the probe card body 2 needs to be mounted on the substrate 1, the inclined elastic clamping plates 7 and the second fixture blocks 8 at the bottom of the probe card body 2 are aligned with the mounting grooves 3, and the probe card body 2 moves downwards, so that the inclined elastic clamping plates 7 and the second fixture blocks 8 move downwards, and when the second fixture blocks 8 move downwards to the bottom of the first fixture blocks 5, the second fixture blocks 5 can block, so that the second fixture blocks 8 cannot move upwards, and the probe card body can be mounted on the probe card body 2;

the inboard of mounting groove 3 and the both sides that are located slope elastic fixing plate 4 and slope elastic clamping plate 7 all are provided with elasticity and hinder the subassembly, elasticity hinders the subassembly and is used for blockking slope elastic clamping plate 7 and second fixture block 8, the bottom of slope elastic fixing plate 4 is fixed with prevents holding down plate 6, prevent holding down plate 6 and be horizontal setting, through preventing the setting of holding down plate 6, make slope elastic clamping plate 7 and second fixture block 8 can not remove to too low, and then play the effect that blocks to slope elastic clamping plate 7 and second fixture block 8, one side that first fixture block 5 and second fixture block 8 are close to each other all is provided with clutch blocks 9, setting through clutch blocks 9, make the frictional force increase between first fixture block 5 and the second fixture block 8, and then can reduce the range of rocking about probe card body 2.

Referring to fig. 4 and 7, the elastic blocking assembly includes an elastic sheet 10, the elastic sheet 10 is disposed on two sides of the oblique elastic fixing plate 4 and the oblique elastic clamping plate 7, one end of each of the two elastic sheets 10, which is close to each other, is fixed with a blocking plate, the blocking plate is used for blocking the oblique elastic clamping plate 7 and the second fixture block 8 from moving, due to the material characteristics of the oblique elastic clamping plate 7 and the oblique elastic fixing plate 4, the oblique elastic clamping plate 7 and the oblique elastic fixing plate 4 can bounce towards the direction of being close to each other, so that the first fixture block 5 and the second fixture block 8 can be better attached, so that when the probe card body 2 needs to be removed, the probe card body 2 can be moved leftwards or rightwards, so as to drive the oblique elastic clamping plate 7 and the second fixture block 8 to move, when moving, an extrusion effect can be formed on the elastic sheet 10, so that the elastic sheet 10 is compressed, so that the oblique elastic clamping plate 7 and the second fixture block 8 move to the place where the first fixture block 5 cannot be clamped, and then the probe card body can be moved, and can be moved out of the probe card 1 can be moved, after the second fixture block 8 is moved out, after the probe card 8 is moved out of the second fixture block 8 is moved out, the second fixture block 11 is moved back to the elastic sheet 10, so that the probe card body can be reset again, and then the probe card body 2 can be conveniently installed next time can be installed.

Referring to fig. 7, the blocking plate includes a blocking piece 11, the blocking piece 11 is disposed below the blocking plate, the blocking piece 11 is connected to the elastic piece 10, an inclined piece 12 is disposed on the top of the blocking piece 11, the inclined piece 12 is inclined upward toward a direction away from the second fixture block 8, a slider 13 is fixed on the top of the inclined piece 12, and the slider 13 is slidably connected to the substrate 1, by such arrangement, the elastic piece 10 is in contact with the blocking piece 11, and the blocking piece 11 can compress the elastic piece 10 when being stressed, when the probe card body 2 needs to be installed, the inclined piece 12 is disposed so that the inclined elastic clamp plate 7 and the second fixture block 8 can only slide to a position corresponding to the first fixture block 5 through the inclined piece 12, and the inclined elastic clamp plate 7 and the second fixture block 8 can be guided, so that a user can mount the probe card body 2 without causing the mounting groove 3 to be too large, and the inclined elastic clamp plate 7 and the second fixture block 8 are not aligned with the first fixture block 5, and the slider 13 and the substrate 1 can not be inclined due to some sliding reasons.

The working principle is as follows: when a user uses the device, when the probe card body 2 needs to be installed on the substrate 1, the inclined elastic clamping plate 7 and the second fixture block 8 at the bottom of the probe card body 2 are aligned to the installation groove 3, the probe card body 2 is moved downwards, so that the inclined elastic clamping plate 7 and the second fixture block 8 move downwards, when the second fixture block 8 is in contact with the first fixture block 5, the second fixture block 8 can continuously move downwards, further the second fixture block 8 can continuously move downwards through the arrangement of the bottom inclined plane, and when the second fixture block 8 moves downwards to the bottom of the first fixture block 5, the second fixture block 8 cannot move upwards through the blocking of the first fixture block 5, so that the installation of the probe card body 2 is completed;

when the probe card body 2 needs to be detached, the probe card body 2 can be moved leftwards or rightwards, so that the inclined elastic clamping plate 7 and the second clamping block 8 are driven to move, when the probe card body is moved, an extrusion effect can be formed on the elastic sheet 10, the elastic sheet 10 is further compressed, the inclined elastic clamping plate 7 and the second clamping block 8 are further moved to a place where the first clamping block 5 cannot be clamped, and the substrate 1 can be moved out.

The above description is only the preferred embodiment of the present invention; the scope of the present invention is not limited thereto. Any person skilled in the art should also be able to cover the protection scope of the present invention by replacing or changing the technical solution and the modified concept of the present invention within the technical scope of the present invention.

Claims

1. An extra-high voltage large-current detachable probe card comprises a substrate (1), and is characterized in that: the probe card comprises a substrate (1), wherein a probe card body (2) is installed at the top of the substrate (1), a plurality of installation grooves (3) are formed in the inner side of the top of the substrate (1), clamping mechanisms which are matched with each other are arranged on the inner sides of the installation grooves (3) and the bottom of the probe card body (2), and the clamping mechanisms are used for clamping the probe card body (2).

2. The extra-high voltage high current detachable probe card of claim 1, wherein: the clamping mechanism comprises an inclined elastic fixing plate (4), a first clamping block (5) is fixed on one inclined side of the inclined elastic fixing plate (4), inclined elastic clamping plates (7) which are the same in number and correspond to the mounting grooves (3) in position are fixed at the bottom of the probe card body (2), and a second clamping block (8) corresponding to the first clamping block (5) is fixed on one side, close to the first clamping block (5), of each inclined elastic clamping plate (7);

the inner side of the mounting groove (3) is located on the inclined elastic fixing plate (4) and the two sides of the inclined elastic clamping plate (7) are provided with elastic blocking components, and the elastic blocking components are used for blocking the inclined elastic clamping plate (7) and the second clamping block (8).

3. The extra-high voltage high current detachable probe card of claim 2, wherein: the elastic blocking component comprises elastic pieces (10), the elastic pieces (10) are arranged on two sides of the inclined elastic fixing plate (4) and the inclined elastic clamping plate (7), one ends, close to each other, of the two elastic pieces (10) are respectively and fixedly provided with a blocking plate, and the blocking plates are used for blocking the inclined elastic clamping plate (7) and the second clamping block (8) from moving.

4. The extra-high voltage high current detachable probe card according to claim 3, wherein: the baffle is including stopping piece (11), it sets up to stop piece (11) the below of baffle, stop piece (11) with flexure strip (10) are connected, the top that stops piece (11) is provided with slope piece (12), slope piece (12) are towards keeping away from the direction and the tilt up of second fixture block (8), the top of slope piece (12) is fixed with slide (13), just slide (13) with base plate (1) sliding connection.

5. The extra-high voltage high current detachable probe card of claim 2, wherein: the bottom of the inclined elastic fixing plate (4) is fixed with a downward pressing prevention plate (6), and the downward pressing prevention plate (6) is transversely arranged.

6. The extra-high voltage high current detachable probe card of claim 3, wherein: and friction blocks (9) are arranged on the sides, close to each other, of the first fixture block (5) and the second fixture block (8).