CN218155996U - Large-view-field flash equipment - Google Patents

Large-view-field flash equipment Download PDF

Info

Publication number
CN218155996U
CN218155996U CN202222761008.2U CN202222761008U CN218155996U CN 218155996 U CN218155996 U CN 218155996U CN 202222761008 U CN202222761008 U CN 202222761008U CN 218155996 U CN218155996 U CN 218155996U
Authority
CN
China
Prior art keywords
light source
light
measurement
workpiece
examples
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202222761008.2U
Other languages
Chinese (zh)
Inventor
徐爱文
陈源
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chotest Technology Inc
Original Assignee
Chotest Technology Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chotest Technology Inc filed Critical Chotest Technology Inc
Priority to CN202222761008.2U priority Critical patent/CN218155996U/en
Application granted granted Critical
Publication of CN218155996U publication Critical patent/CN218155996U/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Length Measuring Devices By Optical Means (AREA)

Abstract

The utility model discloses a sudden strain of a muscle equipment in big visual field, including bearing the weight of the mechanism, set up in the supporting mechanism that bears the weight of the mechanism, set up in the supporting mechanism and with the relative measuring mechanism who sets up including two telecentric lenses of the work piece of bearing the weight of the mechanism and supplementary measuring mechanism carry out the light measurement's a plurality of light sources to the work piece, a plurality of light sources are including setting up in the first light source of bearing end one side and the second light source of bearing end opposite side, first light source combines the second light source to be used for exposing the work piece. In the present embodiment, measurement of a plurality of workpieces can be efficiently performed in a wide range by performing measurement of a large field of view using the double telecentric lens, and thus, measurement efficiency can be improved.

Description

Large-view-field flash equipment
Technical Field
The utility model particularly relates to a sudden strain of a muscle equipment in big visual field.
Background
Because the flash measurement imager (flash measurement instrument) is simple to operate and the precision of size measurement is higher, in the measurement field, it becomes one of common operations to measure an object to be measured (for example, a workpiece) by using the flash measurement imager, and the size measurement can be realized quickly and accurately by identifying the appearance shape of the workpiece by using the flash measurement imager.
The traditional instrument for measuring by acquiring images mostly analyzes the images through a traditional shooting camera to acquire size data and the like of workpieces, and when the test requirements of batch workpieces are related, the traditional shooting camera is limited in view field range, so that frequent and multiple operations may be required to complete measurement. This operation takes a long time and is inefficient.
Disclosure of Invention
The utility model discloses a situation in view of above-mentioned prior art and propose, its aim at provides one kind can realize that big field of view scope measures and improves measurement of efficiency's sudden strain of a muscle equipment.
Therefore, the utility model provides a equipment of sudden strain of a muscle of big visual field, including bearing mechanism, set up in bearing mechanism's supporting mechanism, set up in supporting mechanism and with be located what the work piece of bearing mechanism's loading end set up relatively including two telecentric mirror heads the work piece carries out measuring mechanism and supplementary measuring mechanism is right the work piece carries out the multiple light sources of light measuring, a plurality of light sources including set up in the first light source of loading end one side with the second light source of loading end opposite side, first light source combines the second light source is used for exposing the work piece.
The utility model discloses in, when bearing the weight of and placing the work piece on the mechanism, measuring mechanism can measure the work piece through two telecentric mirror heads, because the visual field of two telecentric mirror heads is great, the scope is also wider, consequently can realize the scope measurement of big visual field. Therefore, the measurement of multiple workpieces can be completed simultaneously, and the measurement efficiency is improved. In addition, because the flash equipment also comprises a plurality of light sources which can be used for illumination, the first light source and the second light source are oppositely arranged on the two sides of the bearing surface, so that the workpiece can be illuminated relatively comprehensively, and the measurement mechanism can measure conveniently.
Additionally, in the utility model relates to a sudden strain of a muscle equipment, optionally, two telecentric mirror heads orientation the work piece and with loading end interval predetermined distance. In this case, the double telecentric lens can measure the workpiece at a predetermined position.
Additionally, in the present invention, optionally, the first light source comprises a plurality of reflectors. Thus, the light rays can be reflected by the plurality of reflecting mirrors to form parallel light.
Additionally, in the utility model relates to a flash equipment, optionally, the first light source sends out a plurality of bundles of parallel light. In this case, the illumination measurement of the workpiece is performed in combination with the light source of the parallel light, and the information of the workpiece can be acquired relatively accurately.
In addition, in the utility model relates to a flash equipment, optionally, the second light source movably set up in supporting mechanism. Thereby, the measurement can be facilitated.
Additionally, in the utility model relates to a sudden strain of a muscle equipment, optionally, the second light source with two telecentric mirror heads are coaxial.
Additionally, in the utility model relates to a equipment is equipped with to dodge, optionally, the light direction of multibeam parallel light is adjustable. In this case, the rays of the parallel light may be adjusted to obtain the desired parallel light.
Additionally, in the utility model relates to a flash on equipment, optionally, the light direction of multi-beam parallel light is perpendicular to the loading end. Therefore, the measuring mechanism can measure the workpiece more accurately.
Additionally, in the utility model relates to a flash equipment, optionally, a plurality of light sources still include the third light source that two telecentric mirror heads set up.
Additionally, in the utility model relates to a flash on equipment, optionally, the third light source is annular light source. This enables illumination of the double telecentric lens.
According to the utility model discloses, can provide one kind and can realize that big field of view scope measures and improves measurement of efficiency's sudden strain of a muscle equipment.
Drawings
The invention will now be explained in further detail by way of example only with reference to the accompanying drawings, in which:
fig. 1 is a schematic diagram showing a partial structure of a flash apparatus according to an embodiment of the present invention.
Fig. 2 is a schematic diagram illustrating an overall structure of the flash apparatus according to the embodiment of the present invention.
Fig. 3 is a first perspective view schematically showing a part of the mechanism of the flash apparatus according to the embodiment of the present invention.
Fig. 4 is a second perspective view schematically showing a part of the mechanism of the flash apparatus according to the embodiment of the present invention.
Fig. 5 is a diagram showing an optical path configuration of the first light source according to the embodiment of the present invention.
Fig. 6 is an ideal schematic view showing the light emitted from the first light source according to the embodiment of the present invention.
Fig. 7 is a schematic diagram showing the light path structure according to the embodiment of the present invention reflecting light.
Detailed Description
Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, the same components are denoted by the same reference numerals, and redundant description thereof is omitted. The drawings are schematic, and the proportions of the dimensions of the components and the shapes of the components may be different from the actual ones.
It is noted that the terms "comprises" and "comprising," and any variations thereof, in this disclosure, such that a process, method, system, article, or apparatus that comprises or has a list of steps or elements is not necessarily limited to those steps or elements expressly listed, but may include or have other steps or elements not expressly listed or inherent to such process, method, article, or apparatus.
In addition, the headings and the like referred to in the following description of the present invention are not intended to limit the content or scope of the present invention, but only serve as a reminder for reading. Such a subtitle should neither be understood as a content for segmenting an article, nor should the content under the subtitle be limited to only the scope of the subtitle.
The utility model relates to a sudden strain of a muscle equipment in big visual field, the following sudden strain of a muscle equipment that can be called for short, when sudden strain of a muscle equipment measures, can big visual field, disposable completion shooting on a large scale. This can improve the efficiency of measurement.
Through the utility model discloses a sudden strain of a muscle equipment has placed the work piece when bearing the weight of on the mechanism, and measuring mechanism can measure the work piece through two telecentric mirror heads. The double telecentric lens has a larger field of view and a wider range, so that the wide-field range measurement can be realized. In addition, the flash equipment further comprises a plurality of light sources for illumination, and the first light source and the second light source are oppositely arranged on two sides of the bearing surface and can illuminate the workpiece comprehensively, so that the measurement mechanism can conveniently measure.
In some examples, the flash device may also be referred to as a "flash meter" or "gauge. In some examples, the flash device may be used in the fields of precision machinery, optical communication devices, precision molds, magnetic materials, precision stamping, cell phone precision accessories, medical instruments, clocks, cutters, metrology inspection, and the like.
Hereinafter, the flash device according to the present embodiment will be described in detail with reference to the drawings.
Fig. 1 is a schematic diagram showing a partial structure of a flash apparatus 1 according to an embodiment of the present invention. Fig. 2 is a schematic diagram illustrating the overall structure of the flash apparatus 1 according to the embodiment of the present invention. In some examples, fig. 2 may represent that the flash device in fig. 1 is provided with a second light source 21 (described later).
In the present embodiment, the flash apparatus 1 may include a carrying mechanism 10, a supporting mechanism 20, a measuring mechanism 30, and a plurality of light sources. In some examples, the carrier mechanism 10 may be used to carry a workpiece, the support mechanism 20 may be used to support the measurement mechanism 30, the measurement mechanism 30 may be used to measure a workpiece, and the plurality of light sources may illuminate a workpiece. In this case, it is possible to illuminate the workpiece placed on the carrier 10 by a plurality of light sources and measure the workpiece by the measuring mechanism 30 to obtain measurement information of the workpiece.
In some examples, the support mechanism 20 may be disposed on the carriage mechanism 10. In some examples, the support mechanism 20 may be generally cylindrical in shape.
In some examples, the support mechanism 10 may have a support surface that may be used for a workpiece.
In some examples, the measurement mechanism 30 may be provided to the support mechanism 20 (see fig. 1). That is, the support mechanism 20 may be fixed by the measurement mechanism 30. In some examples, one side of the support mechanism 20 may be slightly curved. In this case, the deformation that may be caused by carrying the measuring mechanism 30 can be reduced to some extent.
In some examples, the measurement mechanism 30 may be disposed opposite the carrier mechanism 10. This facilitates the measurement of the workpiece on the carrier mechanism 10 by the measuring mechanism 30.
In some examples, the measurement mechanism 30 may include a double telecentric lens 31. In some examples, the field of view of the double telecentric lens 31 is large, so when multiple workpieces are placed on the carriage 10, the double telecentric lens 31 can also perform multiple workpiece measurements simultaneously. In this case, the number of measurements can be reduced to some extent, whereby the efficiency of the measurement can be improved. In addition, the measurement accuracy of the double telecentric lens 31 is also high. Therefore, a more accurate measurement result can be obtained.
Generally speaking, the telecentric lens can filter most diffuse reflection light rays, receive parallel light rays and form dark images in a natural environment, so that the advantage of the double telecentric lens 31 can be exerted to a great extent by selecting a light source of the parallel light rays, and an object to be measured, such as a workpiece, has clear and stable edges. That is, when measurement is performed by the measurement mechanism 30, it is necessary to provide a good measurement environment for the double telecentric lens 31 based on a predetermined light source. In some examples, sufficient light and a wide range of parallel light may be provided by a preset light source. In the present embodiment, a plurality of light sources may be provided to assist the measurement mechanism 30 in performing measurement.
In some examples, the plurality of light sources may include a first light source 40 (described later) and a second light source 21. In some examples, the first light source 40 may be a collimated light source. The first light source 40 may provide a larger range of parallel light to the double telecentric lens 31. In some examples, the parallel light may be selected by a corresponding light path structure (described later in detail). In some examples, the optical path structure may be disposed below the carrier mechanism 10. Thereby, the first light source 40 may form parallel light entering the double telecentric lens 31 based on the optical path structure.
In some examples, because the measurement mechanism 30 is required to measure the orientation of a workpiece placed on the bearing surface, when the parallel light rays are perpendicular to the bearing surface, the parallel light rays at the workpiece location may be blocked when the measurement mechanism 30 is used to measure the workpiece. In this case, if the parallel light exits from below the workpiece, the profile of the workpiece can be made more prominent, and a better backlight environment is provided for the measurement by the measurement mechanism 30. Thus, measurement of the workpiece can be facilitated.
In some examples, the second light source 21 may be coaxial with the double telecentric lens 31 when the second light source 21 is in operation. When a coaxial light source is used, part of light rays are reflected by the workpiece and then enter the measuring mechanism 30 (the double telecentric lens 31), so that the measuring mechanism 30 can form different light and shade areas when the workpiece is measured, and the local characteristics of the workpiece can be measured based on the corresponding areas. Thereby, the measurement of the respective characteristics can be facilitated. For example, surface inspection, scratch inspection, may be performed on the workpiece.
In some examples, the second light source 21 may be disposed on the support mechanism 20. In some examples, the second light source 21 may be movably disposed at the support mechanism 20. Thereby, the measurement can be facilitated.
In some examples, the second light source 21 may move up and down in a vertical direction. In this case, when the height of the workpiece is different, the position of the second light source 21 may be adjusted so that the second light source 21 illuminates the workpiece at a certain height. Meanwhile, workpieces are polished at different heights (different distances), so that different polishing states can be provided, and the measuring mechanism 30 can conveniently perform corresponding measurement.
In some examples, the second light source 21 may also rotate in a plane parallel to the bearing surface. In addition, when performing measurements for different characteristics, it is possible to select whether or not to operate the second light source 21. That is, when the second light source 21 is not required to be used, the possibility of blocking the measurement of the double telecentric lens 31 can be reduced by unscrewing the second light source 21.
In some examples, the first light source 40 and the second light source 21 may be disposed on opposite sides of the carrying surface, respectively. The first light source 40 may be used in combination with the second light source 21 to expose a workpiece. In some examples, exposure may also mean that the respective light sources illuminate the workpiece at a predetermined brightness.
In some examples, the plurality of light sources may further include a third light source. In some examples, the third light source may be disposed at a lens front end of the double telecentric lens 31. In some examples, the third light source may be an annular light source.
Fig. 3 is a first perspective view schematically showing a part of the mechanism of the flash apparatus 1 according to the embodiment of the present invention. Fig. 4 is a second perspective view schematically showing a part of the structure of the flash apparatus 1 according to the embodiment of the present invention. For ease of understanding, the positions of the double telecentric lens 31 and the carrier mechanism 10 are illustrated by fig. 3 and 4, and the first viewing angle and the second viewing angle are illustrated from different sides, respectively.
In some examples, light from first light source 40 may enter measuring mechanism 30 through the bearing surface. Referring to fig. 3 and 4, light emitted from the first light source 40 may enter the double telecentric lens 31 in the measuring mechanism 30 through the bearing surface. This can assist the double telecentric lens 31 in measurement.
In some examples, the double telecentric lens 31 may be spaced from the bearing surface by a predetermined distance. In this case, the double telecentric lens can measure the workpiece at a predetermined position. In addition, the parallel light beam is formed more uniformly as the path becomes longer. Thus, measurement can be performed relatively accurately based on the light distribution.
Fig. 5 is an optical path configuration diagram illustrating the first light source 40 according to the embodiment of the present invention. Fig. 6 is an ideal schematic diagram showing the light emitted from the first light source 40 according to the embodiment of the present invention. Fig. 7 is a schematic diagram showing the light path structure according to the embodiment of the present invention reflecting light.
In some examples, as shown in fig. 5, the first light source 40 may include a plurality of mirrors 42. In some examples, the first light source 40 may further include a light emitting unit 41. In some examples, the light emitting unit 41 may emit light, and the light may sequentially reach the plurality of mirrors 42, and the light reaches the plurality of mirrors 42 to be reflected a plurality of times to form parallel light.
In some examples, the first light source 40 emits a plurality of light beams, and the plurality of light beams may form parallel light.
In some examples, the light emitted from the light emitting unit 41 may be reflected via a plurality of lower mirrors 42. In some examples, the mirror faces of the plurality of mirrors 42 may be perpendicular to each other. In this case, when the light emitted from the light emitting unit 41 reaches the plurality of reflecting mirrors 42, the emitted light can be formed in parallel with the emitted light. In some examples, the ray direction of the parallel light may be adjusted. In this case, the rays of the parallel light may be adjusted to obtain the desired parallel light.
In some examples, this may be adjusted by the arrangement of the mirror 42. Preferably, the plurality of mirrors 42 may be perpendicular to each other. In this case, the direction of the parallel light rays may be perpendicular to the bearing surface, and the light rays emitted by the first light source 40 may be incident on the measuring mechanism 30 (i.e., the double telecentric lens 31) at right angles to the workpiece.
In some examples, it is desirable to obtain the desired parallel light through the schematic light path shown in fig. 6, however, in actual practice, the light emitted from the light emitting unit 41 is divergent and contains a large amount of undesired light. Based on the optical path structure, when light is reflected, more dispersed light may be processed to filter part of the undesired light as shown in fig. 7.
For ease of understanding, some undesired rays (more dispersed, non-uniform rays) are also distinguished in the figure, and the reflected undesired rays are indicated by dashed lines. It can also be seen in fig. 7 that after being reflected by the plurality of mirrors 42, part of the undesired light may escape out of the optical path structure, in which case the composition of the undesired light in the light may be reduced, thereby contributing to the formation of parallel light. Therefore, parallel light can be obtained through the light path structure.
In some examples, the first light source 40 may be disposed on one side of the carrying surface. In some examples, the first light source 40 may be disposed below the carrying surface. In other words, the light emitting unit 41 and the reflector may be disposed below the supporting surface. In some examples, after the light emitting unit 41 emits light, the light may be reflected by a plurality of mirrors 42 as shown in fig. 5 to filter undesired light and then form parallel light beams. The multiple parallel light beams reach the workpiece carried by the carrying surface through the carrying surface or enter the double telecentric lens 31.
In some examples, the light emitting unit 41 and the plurality of reflection mirrors 42 may be spaced apart by a long distance. In the present embodiment, the longer the distance that the light travels, the higher the accuracy with which the light is used for detection. In the present embodiment, as shown in fig. 3 or fig. 4, the double telecentric lens 31 may be disposed at the flash apparatus 1 at a certain distance from the bearing surface. Therefore, the light emitted by the first light source 40 can enter the double telecentric lens 31 after passing through a long distance.
In this embodiment, a large field of view is shot through the double telecentric lens 31, and when shooting is performed through the double telecentric lens 31, a certain light environment is formed by the first light source 40 and the second light source 21, so that the measurement accuracy of the flash device 1 can be effectively ensured when measuring a plurality of workpieces.
While the present invention has been described in detail in connection with the drawings and examples, it is to be understood that the above description is not intended to limit the invention in any way. Those skilled in the art can make modifications and variations to the present invention as needed without departing from the true spirit and scope of the invention, and such modifications and variations are intended to be within the scope of the invention.

Claims (10)

1. The large-field-of-view flash equipment is characterized by comprising a bearing mechanism, a supporting mechanism arranged on the bearing mechanism, a measuring mechanism which is arranged on the supporting mechanism and is opposite to a workpiece on a bearing surface of the bearing mechanism and comprises a double telecentric lens, and a plurality of light sources for assisting the measuring mechanism to carry out illumination measurement on the workpiece, wherein the plurality of light sources comprise a first light source arranged on one side of the bearing surface and a second light source arranged on the other side of the bearing surface, and the first light source is combined with the second light source to expose the workpiece.
2. The flash device according to claim 1,
the double telecentric lens faces the workpiece and is spaced from the bearing surface by a preset distance.
3. The flash device according to claim 1,
the first light source includes a plurality of mirrors.
4. The flash device according to claim 1,
the first light source emits a plurality of parallel beams of light toward the measuring mechanism.
5. The flash device according to claim 1,
the second light source is movably arranged on the supporting mechanism.
6. The flash device according to claim 1,
the second light source is coaxial with the double telecentric lens.
7. The device according to claim 4,
the light ray directions of the plurality of parallel light rays can be adjusted.
8. The device according to claim 4,
the light ray direction of the multiple parallel light beams is vertical to the bearing surface.
9. The flash device of claim 1,
the plurality of light sources further includes a third light source disposed at the double telecentric lens.
10. The flash device according to claim 9,
the third light source is an annular light source.
CN202222761008.2U 2022-10-19 2022-10-19 Large-view-field flash equipment Active CN218155996U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202222761008.2U CN218155996U (en) 2022-10-19 2022-10-19 Large-view-field flash equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202222761008.2U CN218155996U (en) 2022-10-19 2022-10-19 Large-view-field flash equipment

Publications (1)

Publication Number Publication Date
CN218155996U true CN218155996U (en) 2022-12-27

Family

ID=84570145

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202222761008.2U Active CN218155996U (en) 2022-10-19 2022-10-19 Large-view-field flash equipment

Country Status (1)

Country Link
CN (1) CN218155996U (en)

Similar Documents

Publication Publication Date Title
KR101656045B1 (en) System and method for inspecting a wafer
CN1226590C (en) Apparatus for measuring film thickness formed on object, apparatus and method for measuring spectral reflectance of object, and apparatus and method of inspecting foreign material on object
CN112683494B (en) Device and method for testing comprehensive performance parameters of optical lens
JP2001021449A (en) Method and system for automatically non-contact measuring optical characteristics of optical object
NO164946B (en) OPTO-ELECTRONIC SYSTEM FOR EXACTLY MEASURING A FLAT GEOMETRY.
CN105890875B (en) A kind of projection objective performance testing device and method based on mask plate
CN105662314A (en) Endoscope detection system
KR20030062507A (en) Machine and method for inspecting ferrule of optical connector
CN108871207B (en) Photogrammetry reference ruler length calibration device and use method
JP2007078635A (en) Calibration fixture, and offset calculation method of image measuring machine
CN115166932B (en) Optical axis adjusting method of large-caliber long-focus off-axis optical system
CN106461572A (en) Non-imaging coherent line scanner systems and methods for optical inspection
US6870606B2 (en) Process for measuring the surface of a polished precious stone
CN218155996U (en) Large-view-field flash equipment
US7656542B2 (en) Method for evaluating microstructures on a workpiece based on the orientation of a grating on the workpiece
CN220708334U (en) Optical detection device, detection equipment and probe station
US4279513A (en) Optical inspection system for large parts and for multiple measurements
CN110174240B (en) Device and method for measuring at least one optically effective object
US5296914A (en) Electro-optical measurement and focusing apparatus
CN107036791B (en) Device and method for measuring focal length, back intercept and discrimination of different coaxial optical system
CN115683566A (en) Light beam parallelism testing method
US20040114035A1 (en) Focusing panel illumination method and apparatus
CN109341587B (en) Splicing measuring device and method
CN218158570U (en) Angle-adjustable light path structure for obtaining parallel light
CN112254938A (en) Off-axis parabolic mirror optical axis detection device and detection method

Legal Events

Date Code Title Description
GR01 Patent grant
GR01 Patent grant