CN218137299U

CN218137299U - Clamping equipment for semiconductor processing

Info

Publication number: CN218137299U
Application number: CN202222337053.5U
Authority: CN
Inventors: 曾伟中; 黄劲松; 胡晓梅
Original assignee: Kunshan Fuxinquan Precision Machinery Co ltd
Current assignee: Kunshan Fuxinquan Precision Machinery Co ltd
Priority date: 2022-09-02
Filing date: 2022-09-02
Publication date: 2022-12-27
Anticipated expiration: 2032-09-02

Abstract

The utility model belongs to the technical field of semiconductor processing, concretely relates to centre gripping equipment for semiconductor processing, the power distribution box comprises a box body, fixedly connected with mounting bracket on the box, be provided with the equipment of polishing on the mounting bracket, the inside of box is provided with the equipment of polishing, fixedly connected with support column on the box, be connected with the base through the bearing on the support column, fixedly connected with supporting shoe on the box, supporting shoe and base contact, fixedly connected with slider on the supporting shoe, the annular has been seted up on the base. The utility model discloses a be provided with parts such as push pedal, stopper, spacing, draw-in groove, the accessible removes spacing roll-off in the draw-in groove from the base, alright remove spacing to the base, alright adjust the horizontal angle of base, solved the inconvenient problem of adjusting of horizontal angle of current centre gripping equipment for semiconductor processing base when using.

Description

Clamping equipment for semiconductor processing

Technical Field

The utility model relates to a semiconductor processing technology field specifically is a centre gripping equipment for semiconductor processing.

Background

The semiconductor refers to a material with electric conductivity between a conductor and an insulator at normal temperature. According to patent publication No. CN213702524U a centre gripping equipment for semiconductor processing, this utility model discloses a centre gripping equipment for semiconductor processing relates to semiconductor processing technology field, comprising a base plate, both sides fixed connection bracing piece on the bottom plate, bracing piece top fixed connection roof, fixed connection electric hydraulic telescopic handle on the bottom plate between the bracing piece, electric hydraulic telescopic handle, fixed connection mounting panel on the electric hydraulic telescopic handle, both sides fixed connection mount pad on the mounting panel, rotate on the mount pad and connect the gear, sliding connection movable rod on the mounting panel of gear one side, fixed connection installation shell on the movable rod, the installation shell is the U-shaped structure, fixed connection expanding spring in the installation shell, expanding spring one side fixed connection grip block, grip block and installation shell sliding connection, articulated connection transfer line on the gear, transfer line one side is connected with the installation shell lateral wall is articulated, place the semiconductor part on the mounting panel between the installation shell, device structure principle reasonable in design, the practicality is convenient, and the practicality is high. The horizontal angle of the base of the existing clamping equipment for semiconductor processing is inconvenient to adjust when the clamping equipment is used, and the cylinder which drives the clamping plate to move is inconvenient to disassemble and overhaul when the clamping equipment is used.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a clamping equipment for semiconductor processing has solved the inconvenient regulation of horizontal angle of current clamping equipment for semiconductor processing base when using, and current clamping equipment for semiconductor processing is inconvenient when using and moves the cylinder that splint removed and dismantle the problem of overhauing.

In order to achieve the above purpose, the utility model provides a following technical scheme: the utility model provides a centre gripping equipment for semiconductor processing, the power distribution box comprises a box body, fixedly connected with mounting bracket on the box, be provided with the equipment of polishing on the mounting bracket, the inside of box is provided with the equipment of polishing, fixedly connected with support column on the box, be connected with the base through the bearing on the support column, fixedly connected with supporting shoe on the box, supporting shoe and base contact, fixedly connected with slider on the supporting shoe, the annular has been seted up on the base, the inside sliding connection of annular has the slider, fixedly connected with mounting panel on the base, the contact has the cylinder on the mounting panel, the output contact of cylinder has splint, splint and base contact, fixedly connected with adapter sleeve on the splint, the output fixed connection of screw and cylinder is passed through to the inside of adapter sleeve, be provided with disassembly body on the mounting panel, be provided with adjustment mechanism on the box.

Preferably, the disassembly body includes threaded rod, baffle, knob, connecting block, mount, fixed block, the internal rotation of mounting panel is connected with the threaded rod, the inside sliding connection of mounting panel has the connecting block, be provided with positive and negative screw on the threaded rod, the connecting block passes through threaded connection with the threaded rod, the one end fixedly connected with mount of connecting block, mount and mounting panel contact, fixedly connected with fixed block on the cylinder through the design of disassembly body, can conveniently dismantle the cylinder.

Preferably, fixedly connected with baffle on the threaded rod, the baffle contacts with the mounting panel, through the design of baffle, can play limiting displacement to the threaded rod.

Preferably, the threaded rod is fixedly connected with a knob, the knob is in contact with the mounting plate, and the threaded rod can be conveniently rotated through the design of the knob.

Preferably, the fixed block contacts with the mounting panel, the inside sliding connection of fixed block has the mount, through the design of mount, can play limiting displacement to the cylinder.

Preferably, adjustment mechanism includes spacing groove, stopper, spacing, draw-in groove, gag lever post, spacing ring, spring, push pedal, the spacing groove has been seted up on the box, the inside sliding connection of spacing groove has the stopper, fixedly connected with spacing on the stopper, spacing and box contact, spacing and base contact, the draw-in groove has been seted up on the base, the inside sliding connection of draw-in groove has spacing, fixedly connected with gag lever post on the stopper, fixedly connected with spacing ring on the box, the inside sliding connection of spacing ring has the gag lever post, the inside sliding connection of box has the gag lever post, the inside of box is provided with the spring, the one end and the box contact of spring, the other end and the gag lever post contact of spring, the one end fixedly connected with push pedal of stopper, push pedal and box contact, through adjustment mechanism's design, can conveniently adjust the horizontal angle of base.

Compared with the prior art, the beneficial effects of the utility model are as follows:

1. the utility model discloses a be provided with parts such as push pedal, stopper, spacing, draw-in groove, the accessible removes spacing roll-off in the draw-in groove from the base, alright remove spacing to the base, alright adjust the horizontal angle of base, solved the inconvenient problem of adjusting of horizontal angle of current centre gripping equipment for semiconductor processing base when using.

2. The utility model discloses a be provided with parts such as threaded rod, connecting block, mount, the accessible rotates the threaded rod, makes the mount roll-off on the threaded rod drives the connecting block from the fixed block on the cylinder, alright remove spacing to the cylinder, alright pull down the cylinder from the mounting panel, solved current centre gripping equipment for semiconductor processing inconvenient when using and moved the cylinder that splint removed and dismantle the problem of overhauing.

Drawings

FIG. 1 is a perspective view of the overall structure of the present invention;

fig. 2 is a front cross-sectional view of fig. 1 of the present invention;

fig. 3 is an enlarged view of the structure of the part a in fig. 2 according to the present invention;

fig. 4 is an enlarged view of the structure of the part B in fig. 2 according to the present invention.

In the figure: 1. a box body; 2. a mounting frame; 3. polishing equipment; 4. a support pillar; 41. a base; 42. a support block; 43. a slider; 44. a ring groove; 5. mounting a plate; 51. a cylinder; 52. a splint; 53. connecting sleeves; 6. a disassembly mechanism; 61. a threaded rod; 62. a baffle plate; 63. a knob; 64. connecting blocks; 65. a fixed mount; 66. a fixed block; 7. an adjustment mechanism; 71. a limiting groove; 72. a limiting block; 73. a limiting frame; 74. a card slot; 75. a limiting rod; 76. a limiting ring; 77. a spring; 78. and (3) pushing a plate.

Detailed Description

The technical solutions in the embodiments of the present invention will be described clearly and completely with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments in the present invention, all other embodiments obtained by a person skilled in the art without creative work belong to the protection scope of the present invention.

Referring to fig. 1-4, a clamping device for semiconductor processing comprises a box body 1, an installation frame 2 is fixedly connected to the box body 1, a polishing device 3 is arranged on the installation frame 2, the polishing device 3 is arranged inside the box body 1, a support column 4 is fixedly connected to the box body 1, a base 41 is connected to the support column 4 through a bearing, a support block 42 is fixedly connected to the box body 1, the support block 42 is in contact with the base 41, a slider 43 is fixedly connected to the support block 42, a ring groove 44 is formed in the base 41, the slider 43 is slidably connected to the inside of the ring groove 44, an installation plate 5 is fixedly connected to the base 41, an air cylinder 51 is in contact with the installation plate 5, a clamping plate 52 is in contact with the output end of the air cylinder 51, the clamping plate 52 is in contact with the base 41, a connecting sleeve 53 is fixedly connected to the clamping plate 52, the inside of the connecting sleeve 53 is fixedly connected to the output end of the air cylinder 51 through a screw, and a dismounting mechanism 6 is arranged on the installation plate 5.

Referring to fig. 2-3, the detaching mechanism 6 includes a threaded rod 61, a baffle 62, a knob 63, a connecting block 64, a fixing frame 65, and a fixing block 66, the threaded rod 61 is rotatably connected to the inside of the mounting plate 5, the baffle 62 is fixedly connected to the threaded rod 61, the baffle 62 contacts with the mounting plate 5, the threaded rod 61 can be limited by the design of the baffle 62, the knob 63 is fixedly connected to the threaded rod 61, the knob 63 contacts with the mounting plate 5, the threaded rod 61 can be conveniently rotated by the design of the knob 63, the connecting block 64 is slidably connected to the inside of the mounting plate 5, the threaded rod 61 is provided with a positive thread and a negative thread, the connecting block 64 is in threaded connection with the threaded rod 61, the fixing frame 65 is fixedly connected to one end of the connecting block 64, the fixing frame 65 contacts with the mounting plate 5, the fixing block 66 contacts with the mounting plate 5, the fixing frame 65 is slidably connected to the inside of the fixing frame 66, the cylinder 51 can be limited by the design of the fixing frame 65, and the cylinder 51 can be conveniently detached by the design of the detaching mechanism 6.

Referring to fig. 2 and 4, an adjusting mechanism 7 is disposed on the box body 1, the adjusting mechanism 7 includes a limiting groove 71, a limiting block 72, a limiting frame 73, a clamping groove 74, a limiting rod 75, a limiting ring 76, a spring 77, and a push plate 78, the limiting groove 71 is disposed on the box body 1, the limiting block 72 is slidably connected to the inside of the limiting groove 71, the limiting frame 73 is fixedly connected to the limiting block 72, the limiting frame 73 is in contact with the box body 1, the limiting frame 73 is in contact with the base 41, the clamping groove 74 is disposed on the base 41, the limiting frame 73 is slidably connected to the inside of the clamping groove 74, the limiting rod 75 is fixedly connected to the limiting block 72, the limiting ring 76 is fixedly connected to the box body 1, the limiting rod 75 is slidably connected to the inside of the box body 1, the spring 77 is disposed inside the box body 1, one end of the spring 77 is in contact with the box body 1, the other end of the spring 77 is in contact with the limiting rod 75, one end of the limiting block 72 is fixedly connected to the push plate 78, the push plate 78 is in contact with the box body 1, and the horizontal angle of the base 41 can be conveniently adjusted through the design of the adjusting mechanism 7.

The utility model discloses the concrete implementation process as follows: during the use, through removing push pedal 78, make push pedal 78 drive stopper 72 and slide in spacing groove 71 to make stopper 72 drive gag lever post 75 and extrude spring 77, and make stopper 72 drive spacing frame 73 from the draw-in groove 74 roll-off on base 41, alright remove the spacing to base 41, alright will adjust the horizontal angle of base 41. The screw on the connecting sleeve 53 is screwed out by rotating, and then the threaded rod 61 is rotated, so that the threaded rod 61 and the connecting block 64 are in threaded motion, the connecting block 64 drives the fixing frame 65 to slide out of the fixing block 66 on the air cylinder 51, the limit of the air cylinder 51 can be released, and the air cylinder 51 can be detached from the mounting plate 5.

Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.

Claims

1. The utility model provides a centre gripping equipment for semiconductor processing, includes box (1), its characterized in that: fixedly connected with mounting bracket (2) is gone up in box (1), be provided with equipment of polishing (3) on mounting bracket (2), the inside of box (1) is provided with equipment of polishing (3), fixedly connected with support column (4) is gone up in box (1), be connected with base (41) through the bearing on support column (4), fixedly connected with supporting shoe (42) is gone up in box (1), supporting shoe (42) and base (41) contact, fixedly connected with slider (43) is gone up in supporting shoe (42), annular (44) have been seted up on base (41), the inside sliding connection of annular (44) has slider (43), fixedly connected with mounting panel (5) is gone up in base (41), the contact has cylinder (51) on mounting panel (5), the output contact of cylinder (51) has splint (52), splint (52) and base (41) contact, fixedly connected with adapter sleeve (53) is gone up in splint (52), the inside of adapter sleeve (53) is through the output fixed connection of screw and cylinder (51), be provided with disassembly mechanism (6) on mounting panel (5), be provided with adjustment mechanism (7) on mounting bracket (1).

2. The clamping apparatus for semiconductor processing according to claim 1, wherein: disassembly body (6) are including threaded rod (61), baffle (62), knob (63), connecting block (64), mount (65), fixed block (66), the inside rotation of mounting panel (5) is connected with threaded rod (61), the inside sliding connection of mounting panel (5) has connecting block (64), be provided with positive and negative screw thread on threaded rod (61), connecting block (64) pass through threaded connection with threaded rod (61), the one end fixedly connected with mount (65) of connecting block (64), mount (65) and mounting panel (5) contact, fixedly connected with fixed block (66) on cylinder (51).

3. The clamping apparatus for semiconductor processing according to claim 2, wherein: fixedly connected with baffle (62) on threaded rod (61), baffle (62) and mounting panel (5) contact.

4. The clamping apparatus for semiconductor processing according to claim 2, wherein: fixedly connected with knob (63) on threaded rod (61), knob (63) and mounting panel (5) contact.

5. The clamping apparatus for semiconductor processing according to claim 2, wherein: the fixing block (66) is in contact with the mounting plate (5), and a fixing frame (65) is connected to the inside of the fixing block (66) in a sliding mode.

6. The clamping apparatus for semiconductor processing according to claim 1, wherein: the adjusting mechanism (7) comprises a limiting groove (71), a limiting block (72), a limiting frame (73), a clamping groove (74), a limiting rod (75), a limiting ring (76), a spring (77) and a push plate (78), the limiting groove (71) is formed in the box body (1), the limiting block (72) is connected to the inner portion of the limiting groove (71) in a sliding mode, the limiting frame (73) is fixedly connected to the limiting block (72), the limiting frame (73) is in contact with the box body (1), the limiting frame (73) is in contact with the base (41), the clamping groove (74) is formed in the base (41), the limiting frame (73) is connected to the inner portion of the clamping groove (74) in a sliding mode, the limiting rod (75) is fixedly connected to the limiting block (72), the limiting ring (76) is fixedly connected to the box body (1), the limiting rod (75) is connected to the inner portion of the limiting ring (76) in a sliding mode, the limiting rod (75) is connected to the inner portion of the box body (1) in a sliding mode, the spring (77) is arranged in the box body (1), one end of the spring (77) is in contact with the push plate (78), the push plate (78) is in contact with the box body (1).