CN218123433U - Laser transfer device - Google Patents
Laser transfer device Download PDFInfo
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- CN218123433U CN218123433U CN202221979410.1U CN202221979410U CN218123433U CN 218123433 U CN218123433 U CN 218123433U CN 202221979410 U CN202221979410 U CN 202221979410U CN 218123433 U CN218123433 U CN 218123433U
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Abstract
The embodiment of the application discloses a laser transfer device, which comprises two laser generators, two reflecting elements, a dimming unit and a light condensing unit, wherein the laser generators are used for emitting laser; the two reflecting elements are respectively arranged on the light paths of the laser emitted by the corresponding laser generators and are used for reflecting the laser and forming a reflected light beam; the dimming unit is arranged on a light path of the reflected light beams and is used for adjusting the distance between the two corresponding reflected light beams, and the reflected light beams form offset light beams through the dimming unit; the condensing unit is arranged on the light path of the offset light beam and used for focusing the offset light beam, and the offset light beam forms a focused light beam after passing through the condensing unit, so that the technical problem of low transfer efficiency of the LED chip can be solved.
Description
Technical Field
The application relates to the field of display, in particular to a laser transfer device.
Background
As shown in fig. 1, in the display field, a manufacturing process of a Light-emitting diode (LED) display includes: the epitaxial wafer 1 is formed, then the epitaxial wafer 1 is subjected to patterning processing so as to be divided into a plurality of LED chips 11, and finally the LED chips 11 are transferred onto the receiving substrate 4, so that the LED chips 11 are arranged in an array on the receiving substrate 4, which involves a problem of precise transfer of a huge amount of minute LED chips 11.
At present, the common transfer methods include van der waals force transfer, pick-up and release transfer, roller transfer, laser transfer, etc., and the van der waals force transfer is mainly realized by utilizing the relationship between the picking-up speed of PDMS stamp and the energy release rate between materials. Laser transfer is a trend of future technology development due to the advantages of high transfer speed, high precision and the like. As shown in fig. 2, the transfer principle is that the laser source 5 emits a laser beam 51, the mask plate 2 blocks light, and the laser beam 51 irradiates the laser sacrificial layer 3 in a scanning manner, so that the laser sacrificial layer 3 is deactivated, and the LED chip 11 is transferred to the receiving substrate 4.
In the course of research and practice on the prior art, the inventors of the present application found that it is difficult to integrate the beams of two laser sources 5 with one laser source device due to the bulky laser source device, and the beam transfer capability of a single laser source 5 is limited, resulting in low transfer efficiency of the LED chip 11.
SUMMERY OF THE UTILITY MODEL
The embodiment of the application provides a laser transfer device, which can solve the technical problem that the transfer efficiency of an LED chip is low.
The embodiment of the application provides a laser transfer device, includes:
two laser generators for emitting laser light;
the two reflecting elements are respectively arranged on the light paths of the laser emitted by the corresponding laser generators and are used for reflecting the laser and forming a reflected light beam;
the dimming unit is arranged on a light path of the reflected light beam and used for adjusting the distance between the two corresponding reflected light beams, and the reflected light beams form offset light beams through the dimming unit; and
and the light condensing unit is arranged on the light path of the offset light beam, is used for focusing the offset light beam, and forms a focused light beam after the offset light beam passes through the light condensing unit.
Optionally, in some embodiments of the present application, the dimming unit includes at least one dimming module, the dimming module includes two light-transmitting portions that are symmetrically disposed, the light-transmitting portions are disposed on the light path of the corresponding reflection light beam, and an included angle between the two light-transmitting portions is greater than 0 ° and less than 180 °.
Optionally, in some embodiments of the application, a groove is formed between the two light-transmitting portions in an enclosing manner, the dimming module has a first state and a second state, in the first state, a caliber of the groove is gradually increased along an exit direction of the reflected light beam, and the dimming module is configured to reduce a distance between two corresponding reflected light beams; in the second state, the aperture of the groove is gradually reduced along the emergent direction of the reflected light beam, and the dimming module is used for increasing the distance between the two corresponding reflected light beams.
Optionally, in some embodiments of the present application, the reflected light beam may be shifted when passing through the dimming module in a direction perpendicular to a propagation direction of the reflected light beam, and a shift distance of the reflected light beam satisfies the following formula:
wherein Δ x is an offset distance of the reflected light beam, D is a thickness of the light transmission portions, θ is an included angle between the two light transmission portions, and n is a refractive index of the light transmission portions.
Optionally, in some embodiments of the present application, the dimming unit includes three dimming modules, the three dimming modules are respectively a first dimming module, a second dimming module and a third dimming module, and the first dimming module, the second dimming module and the third dimming module are sequentially arranged along the light path of the reflected light beam.
Optionally, in some embodiments of the present application, the first dimming module is configured to reduce a distance between two corresponding reflected light beams, and the second dimming module and the third dimming module are both configured to increase the distance between two corresponding reflected light beams.
Optionally, in some embodiments of the present application, the first dimming module, the second dimming module, and the third dimming module are all configured to reduce a distance between two corresponding reflected light beams.
Optionally, in some embodiments of the present application, a symmetry axis of the first dimming module, a symmetry axis of the second dimming module, and a symmetry axis of the third dimming module are all parallel to each other.
Optionally, in some embodiments of the present application, the light condensing unit includes a light-transmissive layer, and at least two focusing lenses are disposed on the light-transmissive layer.
Optionally, in some embodiments of the application, the light condensing unit further includes a mask layer, the mask layer covers the light incident side of the light transmissive layer, the mask layer is provided with at least two hollow openings, and the hollow openings correspond to the focusing lenses one to one.
The embodiment of the application adopts a laser transfer device, including two laser generator, two reflection element, light modulation unit and spotlight unit, form the reflected light beam through the laser reflection that the reflection element will correspond laser generator sent, the reflected light beam forms the focus light beam behind light modulation unit and the spotlight unit in proper order to be used for the LED chip to shift. Compared with the prior art, the laser transfer device can integrate two beams of light, so that the transfer efficiency is greatly improved; the distance between the two reflected light beams can be adjusted through the dimming unit; the application can further improve the transfer efficiency through the focusing effect of the light condensing unit, thereby flexibly adjusting the parameters of the light beams.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the description of the embodiments are briefly introduced below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings based on these drawings without creative efforts.
FIG. 1 is a schematic diagram of a light emitting diode display;
FIG. 2 is a schematic diagram of a laser transfer mode;
fig. 3 is a schematic structural diagram of a laser transfer device provided in an embodiment of the present application in a first state;
fig. 4 is an optical simulation diagram of a dimming module provided in an embodiment of the present application;
fig. 5 is a schematic structural diagram of a laser transfer device provided in an embodiment of the present application in a second state;
fig. 6 is a schematic top view of a light-condensing unit provided in an embodiment of the present application.
Detailed Description
The technical solutions in the embodiments of the present application will be described clearly and completely with reference to the drawings in the embodiments of the present application, and it is obvious that the described embodiments are only some embodiments of the present application, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present application. Furthermore, it should be understood that the detailed description and specific examples, while indicating preferred embodiments of the present application, are given by way of illustration and explanation only, and are not intended to limit the present application. In the present application, unless indicated to the contrary, the use of the directional terms "upper" and "lower" generally refer to the upper and lower positions of the device in actual use or operation, and more particularly to the orientation of the figures of the drawings; while "inner" and "outer" are with respect to the outline of the device.
The embodiment of the application provides a laser transfer device. The following are detailed below. It should be noted that the following description of the embodiments is not intended to limit the preferred order of the embodiments.
Referring to fig. 3, the present disclosure provides a laser transfer device including two laser generators 100 and two reflecting elements 200. The laser generator 100 is configured to emit laser L1, the two reflective elements 200 are respectively disposed on an optical path of the laser L1 emitted by the corresponding laser generator 100, the reflective elements 200 are configured to reflect the laser L1 and form a reflected light beam L2, and the reflected light beams L2 formed by the two reflective elements 200 are symmetrically disposed.
In this embodiment, the reflective elements 200 correspond to the laser generators 100 one-to-one, each reflective element 200 reflects the laser light L1 emitted by the corresponding laser generator 100 and forms a reflected light beam L2, and the reflected light beams L2 formed by different reflective elements 200 are parallel.
It will be appreciated that the laser transfer device may comprise more laser generators 100, as the case may be, and as the particular requirements set. For example, the laser transfer device includes an even number of laser generators 100, the even number of laser generators 100 are symmetrically distributed on two sides, and all the reflective elements 200 are also symmetrically distributed on two sides, specifically, a portion of the laser generators 100 is disposed on a first side, another portion of the laser generators 100 is disposed on a second side, the laser generators 100 on the first side and the laser generators 100 on the second side are symmetrically disposed, and all the laser generators 100 respectively correspond to one reflective element 200, but in order to save cost, the laser generator 100 on the first side may correspond to one reflective element 200, and the laser generator 100 on the second side may correspond to another reflective element 200.
Specifically, the laser transfer device further includes a dimming unit 300 and a condensing unit 400. The light adjusting unit 300 is disposed on the light path of the reflected light beam L2, the light adjusting unit 300 is used for adjusting the distance between two corresponding reflected light beams L2, and the reflected light beams L2 pass through the light adjusting unit 300 to form an offset light beam L3. The condensing unit 400 is disposed on the optical path of the offset light beam L3, the condensing unit 400 is configured to perform a focusing process on the offset light beam L3, and the offset light beam L3 passes through the condensing unit 400 to form a focused light beam L4. The focused light beam L4 is irradiated onto the original substrate 500, so that the LED chip 510 on the original substrate 500 is detached and transferred onto a target substrate (not shown).
In this embodiment, the offset light beam L3 may be parallel to the reflected light beam L2, and the focused light beam L4 may also be parallel to the reflected light beam L2, and of course, other optical elements may be added to the laser transfer device to change the directions of the offset light beam L3 and the focused light beam L4 according to the selection of the actual situation and the specific requirement, which is not limited herein.
Compared with the prior art, the laser transfer device can integrate two beams of light, so that the transfer efficiency is greatly improved; the distance between the two reflected light beams L2 can be adjusted by the dimming unit 300, so that the reflected light beams L2 are corrected; the transfer efficiency can be further improved through the focusing effect of the light condensing unit 400, so that the parameters of the light beams can be flexibly adjusted.
Specifically, with reference to fig. 3 and 4, the light modulation unit 300 includes at least one light modulation module 310, the light modulation module 310 includes two light-transmitting portions 3101 symmetrically disposed, the light-transmitting portions 3101 are disposed on the light path of the corresponding reflected light beam L2, and an included angle between the two light-transmitting portions 3101 is greater than 0 ° and less than 180 °, for example, the included angle between the two light-transmitting portions 3101 may be 30 °, 60 °, 90 °, 120 ° or 150 °. In this structure, a groove 3102 having an opening is formed between the two light-transmitting portions 3101, and the distance between the two corresponding reflected light beams L2 can be reduced or increased by adjusting the opening direction of the groove 3102. It is understood that the specific structure of the dimming module 310 can be modified appropriately according to the choice of actual situations and specific requirements, and is not limited only herein.
As shown in fig. 4, when the reflected light beam L2 enters the light-transmitting portion 3101 of the light modulation module 310 from the non-opening side, the reflected light beam L2 is shifted toward the inner side, so that the two reflected light beams L2 respectively transmitted through the two light-transmitting portions 3101 approach each other, thereby reducing the distance between the two reflected light beams L2; on the contrary, when the reflected light beam L2 enters the light-transmitting portions 3101 of the dimming module 310 from the opening side, the reflected light beam L2 is shifted outward, so that the two reflected light beams L2 respectively transmitted through the two light-transmitting portions 3101 are separated from each other, thereby increasing the distance between the two reflected light beams L2.
Specifically, the dimming module 310 has a first state and a second state. In the first state, the aperture of the groove 3102 is gradually increased along the emitting direction of the reflected light beam L2, and the dimming module 310 is configured to reduce the distance between the two corresponding reflected light beams L2. In the second state, the aperture of the groove 3102 is gradually reduced along the exit direction of the reflected light beam L2, and the dimming module 310 is configured to increase the distance between the two corresponding reflected light beams L2.
Specifically, as shown in fig. 4, in a direction perpendicular to the propagation direction of the reflected light beam L2, the reflected light beam L2 is shifted through the dimming module 310, and the shift distance of the reflected light beam L2 satisfies the following formula:
where Δ x is the offset distance of the reflected light beam L2, D is the thickness of the light-transmitting portions 3101, θ is the angle between the two light-transmitting portions 3101, and n is the refractive index of the light-transmitting portions 3101. With this structure, the offset distance of the reflected light beam L2 can be adjusted by adjusting the angle between the two light-transmitting portions 3101.
Specifically, as shown in fig. 3, the dimming unit 300 includes three dimming modules 310, the three dimming modules 310 are a first dimming module 311, a second dimming module 312 and a third dimming module 313, respectively, and the first dimming module 311, the second dimming module 312 and the third dimming module 313 are sequentially disposed along the light path of the reflected light beam L2. With this structure, by adjusting the placement states of the first dimming module 311, the second dimming module 312, and the third dimming module 313, the distance between the two corresponding reflected light beams L2 can be adjusted.
Specifically, as shown in fig. 3, the first dimming module 311 is used to reduce the distance between the two corresponding reflected light beams L2, and the second dimming module 312 and the third dimming module 313 are both used to increase the distance between the two corresponding reflected light beams L2.
In another embodiment of the present application, as shown in fig. 5, the first dimming module 311, the second dimming module 312, and the third dimming module 313 are all used to reduce the distance between two corresponding reflected light beams L2.
It can be understood that, according to the selection of the actual situation and the specific requirement setting, the placement states of the first dimming module 311, the second dimming module 312 and the third dimming module 313 can be adjusted, so as to adjust the distance between the two corresponding reflected light beams L2.
Specifically, the symmetry axis of the first dimming module 311, the symmetry axis of the second dimming module 312, and the symmetry axis of the third dimming module 313 are all parallel to each other. In this embodiment, the symmetry axis of the first dimming module 311 refers to a symmetry axis corresponding to the two light-transmitting portions 3101 of the first dimming module 311, the symmetry axis of the second dimming module 312 refers to a symmetry axis corresponding to the two light-transmitting portions 3101 of the second dimming module 312, and the symmetry axis of the third dimming module 313 refers to a symmetry axis corresponding to the two light-transmitting portions 3101 of the third dimming module 313.
Specifically, the symmetry axis of the first dimming module 311, the symmetry axis of the second dimming module 312, and the symmetry axis of the third dimming module 313 are coplanar.
Specifically, the symmetry axis of the first dimming module 311, the symmetry axis of the second dimming module 312, and the symmetry axis of the third dimming module 313 are collinear.
Specifically, as shown in fig. 3 and 6, the light condensing unit 400 includes a light transmitting layer 410, and at least two focusing lenses 411 are disposed on the light transmitting layer 410. With this configuration, the offset light beam L3 can be focused by the focusing lens 411, and the offset light beam L3 passes through the condensing unit 400 to form a focused light beam L4. In this embodiment, the light-transmitting layer 410 is provided with 12 focusing lenses 411, the laser transfer device further includes a displacement unit, the laser generator 100, the reflection element 200 and the dimming unit 300 are disposed on the displacement unit, and the positions of the laser generator 100, the reflection element 200 and the dimming unit 300 can be adjusted by the displacement unit, so that the offset light beam L3 is irradiated on the corresponding focusing lens 411.
Specifically, as shown in fig. 3 and fig. 6, the light condensing unit 400 further includes a mask layer 420, where the mask layer 420 may be, but is not limited to, a metal material such as cadmium, and a patterned mask layer 420 is formed on the light-transmitting layer 410 by electroplating. The mask layer 420 covers the light incident side of the transparent layer 410, the mask layer 420 is provided with at least two hollow openings 421, and the hollow openings 421 correspond to the focusing lenses 411 one by one. With this structure, the mask layer 420 is used to filter the excessive light and prevent the adjacent LED chips 510 from being transferred; the shape of the light spot is matched with that of the hollowed opening 421, and the shape and the size of the light spot can be controlled through the hollowed opening 421, so that the operation space and the application range are enlarged. In this embodiment, the shape of the hollow 421 may be rectangular (rectangle or square), circular, oval or other shapes, which is not limited herein, as long as the shape of the hollow 421 is adapted to the shape of the LED chip 510.
The foregoing detailed description is directed to a laser transfer apparatus provided in an embodiment of the present application, and specific examples are applied herein to illustrate the principles and implementations of the present application, and the above description of the embodiments is only provided to help understand the method and the core idea of the present application; meanwhile, for those skilled in the art, according to the idea of the present application, there may be variations in the specific embodiments and the application scope, and in summary, the content of the present specification should not be construed as a limitation to the present application.
Claims (10)
1. A laser transfer apparatus, comprising:
two laser generators for emitting laser light;
the two reflecting elements are respectively arranged on the light paths of the laser emitted by the corresponding laser generators and are used for reflecting the laser and forming a reflected light beam;
the dimming unit is arranged on a light path of the reflected light beams and is used for adjusting the distance between the two corresponding reflected light beams, and the reflected light beams form offset light beams through the dimming unit; and
and the light condensing unit is arranged on the light path of the offset light beam, is used for focusing the offset light beam, and forms a focused light beam after the offset light beam passes through the light condensing unit.
2. The laser transfer apparatus of claim 1, wherein the light modulation unit comprises at least one light modulation module, the light modulation module comprises two light transmission portions symmetrically disposed on the light path of the corresponding reflected light beam, and the included angle between the two light transmission portions is greater than 0 ° and less than 180 °.
3. The laser transfer apparatus according to claim 2, wherein a groove is defined between the two light-transmitting portions, the dimming module has a first state and a second state, in the first state, the aperture of the groove increases along the emitting direction of the reflected light beam, and the dimming module is configured to reduce the distance between the two corresponding reflected light beams; in the second state, the aperture of the groove is gradually reduced along the emergent direction of the reflected light beam, and the dimming module is used for increasing the distance between the two corresponding reflected light beams.
4. The laser transfer apparatus of claim 3, wherein the reflected beam is shifted perpendicular to the propagation direction of the reflected beam by the dimming module, and the shift distance of the reflected beam satisfies the following equation:
wherein Δ x is an offset distance of the reflected light beam, D is a thickness of the light transmission portions, θ is an included angle between the two light transmission portions, and n is a refractive index of the light transmission portions.
5. The laser transfer apparatus of claim 3, wherein the dimming unit comprises three dimming modules, the three dimming modules are respectively a first dimming module, a second dimming module and a third dimming module, and the first dimming module, the second dimming module and the third dimming module are sequentially arranged along the optical path of the reflected light beam.
6. The laser transfer apparatus of claim 5, wherein the first dimming module is configured to decrease a distance between two corresponding reflected light beams, and the second dimming module and the third dimming module are configured to increase the distance between two corresponding reflected light beams.
7. The laser transfer apparatus of claim 5, wherein the first dimming module, the second dimming module, and the third dimming module are configured to reduce a distance between two corresponding reflected light beams.
8. The laser transfer device of claim 5, wherein the axis of symmetry of the first dimming module, the axis of symmetry of the second dimming module, and the axis of symmetry of the third dimming module are all parallel to one another.
9. The laser transfer device according to any one of claims 1 to 8, wherein the light condensing unit comprises a light-transmissive layer, and at least two focusing lenses are arranged on the light-transmissive layer.
10. The laser transfer apparatus according to claim 9, wherein the light condensing unit further comprises a mask layer, the mask layer covers the light incident side of the light transmissive layer, the mask layer is provided with at least two hollowed-out openings, and the hollowed-out openings correspond to the focusing lenses one to one.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221979410.1U CN218123433U (en) | 2022-07-28 | 2022-07-28 | Laser transfer device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221979410.1U CN218123433U (en) | 2022-07-28 | 2022-07-28 | Laser transfer device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218123433U true CN218123433U (en) | 2022-12-23 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221979410.1U Active CN218123433U (en) | 2022-07-28 | 2022-07-28 | Laser transfer device |
Country Status (1)
| Country | Link |
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| CN (1) | CN218123433U (en) |
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2022
- 2022-07-28 CN CN202221979410.1U patent/CN218123433U/en active Active
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