CN218122066U

CN218122066U - Probe station of convenient appearance of going up

Info

Publication number: CN218122066U
Application number: CN202221929517.5U
Authority: CN
Inventors: 陈福云
Original assignee: Wuhan Xinnuo Mengda Technology Co ltd
Current assignee: Wuhan Xinnuo Mengda Technology Co ltd
Priority date: 2022-07-22
Filing date: 2022-07-22
Publication date: 2022-12-23
Anticipated expiration: 2032-07-22

Abstract

The utility model relates to a probe station technical field provides a probe station of convenient appearance of going up, the on-line screen storage device comprises a base, the top fixedly connected with mounting bracket of base, the top fixedly connected with of base extends to the test platform of mounting bracket top, the top fixedly connected with of base is located mounting bracket rear side and top and one side and is the open-ended box of placing, it has the liftable and is used for placing the board of placing of chip to place to peg graft in the box, mounting bracket top one side is along its width direction fixedly connected with dead lever. The utility model discloses can stack a plurality of chip samples that need carry out wafer test on placing the board, through placing the board in placing the box rise to shift out a chip of the top to the top of placing the box, then can carry out the centre gripping with this chip through mechanical jack catch and fix, remove the chip to suitable position on test platform, can accomplish the appearance of going up of chip sample with this chip release through mechanical jack catch after that.

Description

Probe station of convenient appearance of going up

Technical Field

The utility model relates to a probe platform technical field specifically is a probe platform of convenient appearance of going up.

Background

The wafer refers to a silicon wafer used for manufacturing a silicon semiconductor integrated circuit, and is called a wafer because the shape is circular; various circuit device structures can be fabricated on a silicon wafer to form an IC product with specific electrical functions. The starting material for the wafer is silicon, while the crust surface has an inexhaustible amount of silicon dioxide. The silicon dioxide ore is refined by an electric arc furnace, chloridized by hydrochloric acid and distilled to prepare high-purity polysilicon with the purity as high as 99.999999999 percent, and a probe station is semi-automatic mechanical equipment for testing a wafer circuit in a semiconductor front-end processing process, marking the quality of a test result and collecting signals.

At present, before the wafer on the chip is subjected to contact test, a chip sample to be tested is stacked in a containing box, a worker needs to take the chip sample out of the box according to the testing progress and put the chip sample into a testing platform, but the sample loading mode is low in efficiency and consumes more energy of the worker, and therefore it is necessary to design a probe platform convenient for sample loading to solve the problem.

SUMMERY OF THE UTILITY MODEL

The utility model aims at providing a probe platform of convenient appearance of going up to solve the problem that proposes among the above-mentioned background art.

In order to achieve the above object, the utility model provides a following technical scheme:

the utility model provides a probe station of convenient appearance of going up, includes the base, the top fixedly connected with mounting bracket of base, the top fixedly connected with of base extends to the test platform of mounting bracket top, the top fixedly connected with of base is located mounting bracket rear side and top and one side and is the open-ended box of placing, it has the liftable and is used for placing the board of placing of chip to peg graft in the box, its width direction fixedly connected with dead lever is followed to mounting bracket top one side, one side of dead lever is provided with gliding electric putter around can going on, electric putter's piston rod is about axial and its end installs the mechanical claw that is used for centre gripping/release chip.

Preferably, the stroke groove has been seted up along its direction of height to one side of placing the box, one side of placing the board is formed with the stroke piece that alternates in the stroke groove, top one side of base is connected with through the bearing interlude and is vertical axial and peg graft the lead screw one on the stroke piece through the screw thread, the bottom fixed mounting of base has output shaft motor one up, just the bottom fixed connection of lead screw one can drive lead screw one and rotate when the output shaft of motor one rotates at the output shaft end of motor one to make it can drive the stroke piece through the cooperation of screw thread and reciprocate along the stroke groove to can drive and place the board and carry out synchronous lift in placing the box.

Preferably, one side top fixedly connected with link of placing the box, fixedly connected with is located directly over placing the box and is vertical axial installation pole on the link, the bottom of installation pole is provided with contact sensor, just the motor can stop the rotation of its output shaft when placing the chip on the board and contact sensor contact, just so place the board and just can lift a chip out and place the box when rising at every turn, avoid the chip quantity that rises too much and lead to the problem emergence of mechanical jack catch centre gripping a plurality of chips.

Preferably, be provided with the PLC controller on the base, the output of contact sensor links to each other with the input electrical property of PLC controller in order to be used for transmitting its signal of monitoring to the PLC controller, electric connection is passed through with the input of motor one to the output of PLC controller for the PLC controller can control motor one after receiving contact sensor transmitted signal and stop the function, thereby can ensure that only a chip can rise to placing box top, in order to be ready for the sample.

Preferably, a sliding groove is formed in one side of the fixing rod along the length direction of the fixing rod, a sliding block is inserted in the sliding groove, the electric push rod is fixedly mounted on the sliding block, a sliding assembly used for enabling the sliding block to slide back and forth is arranged in the sliding groove, and when the sliding block slides back and forth, the electric push rod can be driven to move back and forth correspondingly so as to change the position of the mechanical clamping jaw.

Preferably, the sliding assembly comprises a second screw rod which is connected in the sliding groove in a rotating mode through a bearing and is in a front-back axial direction, the second screw rod is inserted into the sliding block in a matched mode through threads, a second motor is fixedly mounted on one side of the fixed rod, one side of the second screw rod penetrates through the fixed rod and is fixedly connected with the tail end of an output shaft of the second motor, the second screw rod can be driven to rotate when the output shaft of the second motor rotates, and therefore the second screw rod can drive the sliding block to slide in the sliding groove in a front-back mode through the matched mode.

Compared with the prior art, the beneficial effects of the utility model are that:

1. the utility model discloses can stack a plurality of chip samples that need carry out wafer test on placing the board, through placing the board in the lift of placing the box, in order to shift out a chip of the top to the top of placing the box, then can carry out the centre gripping with this chip through mechanical jack catch and fix, the rethread electric putter slides around on the dead lever and the flexible of its telescopic link, can remove the chip of the centre gripping of mechanical jack catch suitable position on the test platform, after that can accomplish the appearance of going up of chip sample with this chip release through mechanical jack catch, this kind of mode of going up compares manual material loading more high-efficient swift, can effectively improve the efficiency of wafer test operation.

2. The utility model discloses a contact sensor's setting, after a chip is complete to placing box top, it just can contact with contact sensor and make the output shaft of motor one stall immediately, just can just in time lift out a chip and place the box when placing the board like this and rise at every turn, avoids the chip that raises quantity too much and leads to the problem emergence of mechanical jack catch centre gripping a plurality of chips.

Drawings

Fig. 1 is a schematic perspective view of the present invention;

FIG. 2 is a schematic side view of the structure of the present invention;

FIG. 3 is a schematic side view of another embodiment of the present invention;

FIG. 4 is a schematic bottom view of the structure of the present invention;

in the figure: 1. a base; 2. a mounting frame; 3. a test platform; 4. placing the box; 41. a stroke slot; 42. a first screw rod; 43. a first motor; 5. placing the plate; 51. a stroke block; 6. fixing the rod; 61. a chute; 62. a slider; 63. a second screw rod; 64. a second motor; 7. an electric push rod; 8. a mechanical jaw; 9. a connecting frame; 10. mounting a rod; 11. a touch sensor.

Detailed Description

The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention.

In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, however, the present invention may be practiced in other ways than those specifically described herein, and therefore the present invention is not limited to the limitations set forth in the following description of the specific embodiments.

Referring to fig. 1-4, the present invention provides a probe station for convenient sample loading: including base 1, base 1's top fixedly connected with mounting bracket 2, base 1's top fixedly connected with extends to the test platform 3 of mounting bracket 2 top, base 1's top fixedly connected with is located mounting bracket 2 rear side and top and one side are the open-ended and places box 4, it has liftable and be used for placing the placing plate 5 of chip to place 4 interpolation of box, mounting bracket 2 top one side is along its width direction fixedly connected with dead lever 6, one side of dead lever 6 is provided with gliding electric putter 7 around can going on, electric putter 7's piston rod is about axial and its end is installed and is used for centre gripping/release chip's mechanical jack catch 8, thus, can stack a plurality of chip samples that need carry out the wafer test on placing plate 5, and chip sample can be located and place box 4, when carrying out the contact test with the probe on test platform 3 with chip sample when needs, can be earlier through placing the rising of plate 5 in placing box 4, with shifting out the chip sample to the top of placing box 4, then can carry out centre gripping fixing this chip through mechanical jack catch 7 on the dead lever 6 and the chip sample can be more swift through this kind of efficient test that the chip that can be compared with this jack catch that this test platform on the mechanical jack catch that can be more the telescopic work efficiency of chip.

Specifically, as to place the mode that board 5 can go up and down as follows, place one side of box 4 and seted up stroke groove 41 along its direction of height, place one side of board 5 and be formed with the stroke piece 51 of interlude in stroke groove 41, base 1's top one side is connected with through the bearing interlude and is vertical axial and peg graft the lead screw 42 on stroke piece 51 through the screw thread, base 1's bottom fixed mounting has output shaft motor 43 up, and the bottom fixed connection of lead screw 42 is terminal at the output shaft of motor 43, can drive lead screw 42 when the output shaft of motor 43 rotates and rotate, so that it can drive stroke piece 51 through the cooperation of screw thread and reciprocate along stroke groove 41, and can drive and place board 5 and carry out synchronous lift in placing box 4, so that can upwards lift the chip of stacking on placing board 5, in order to prepare for the appearance.

In addition, a connecting frame 9 is fixedly connected to the top of one side of the placing box 4, a mounting rod 10 which is located right above the placing box 4 and is in the vertical axial direction is fixedly connected to the connecting frame 9, a contact sensor 11 is arranged at the bottom of the mounting rod 10, and a motor 43 can stop rotation of an output shaft of the motor when a chip on the placing plate 5 is in contact with the contact sensor 11.

Specifically, be provided with the PLC controller on base 1, the output of contact sensor 11 links to each other with the input electrical property of PLC controller in order to be used for transmitting its signal of monitoring to the PLC controller, electric connection is passed through with the input of motor 43 to the output of PLC controller for the PLC controller can control motor 43 after receiving contact sensor 11 transmitted signal and stop the function, thereby can ensure that only a chip can rise to placing box 4 top, in order to be ready for the appearance.

Regarding the concrete connection mode between electric putter 7 and the dead lever 6 as follows, the spout 61 has been seted up along its length direction to one side of dead lever 6, it has slider 62 to peg graft in the spout 61, and electric putter 7 fixed mounting is on slider 62, be provided with in the spout 61 and be used for making slider 62 carry out the gliding slip subassembly in front and back, can drive electric putter 7 and carry out corresponding back-and-forth movement when slider 62 carries out the fore-and-aft slip, in order to change the position of mechanical claw 8, make mechanical claw 8 can place the chip of its centre gripping on test platform 3.

In some embodiments, in order to enable the sliding block 62 to slide back and forth, it is provided that the sliding assembly includes a second lead screw 63 rotatably connected in the sliding groove 61 through a bearing and having a front-back axial direction, the second lead screw 63 is inserted into the sliding block 62 through a threaded fit, a second motor 64 is fixedly mounted on one side of the fixing rod 6, one side of the second lead screw 63 penetrates through the fixing rod 6 and is fixedly connected with the tail end of an output shaft of the second motor 64, the second lead screw 63 is driven to rotate when the output shaft of the second motor 64 rotates, so that the second lead screw 63 can drive the sliding block 62 to slide back and forth in the sliding groove 61 through the threaded fit.

In the device, all electric devices and drivers matched with the electric devices are arranged, and all driving parts, namely power elements, the electric devices and adaptive power supplies, are connected through leads by a person skilled in the art, and specific connecting means refer to the above expression that the electric devices are electrically connected in sequence, and detailed connecting means thereof are well known in the art.

The above, only be the concrete implementation of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art is in the technical scope of the present invention, according to the technical solution of the present invention and the utility model, the concept of which is equivalent to replace or change, should be covered within the protection scope of the present invention.

Claims

1. The utility model provides a probe station of convenient appearance of going up, includes base (1), top fixedly connected with mounting bracket (2) of base (1), the top fixedly connected with of base (1) extends to test platform (3) of mounting bracket (2) top, a serial communication port, the top fixedly connected with of base (1) is located mounting bracket (2) rear side and top and one side and is open-ended placing box (4), it has board (5) of placing that the liftable was used for placing the chip to place box (4) interpolation joint, mounting bracket (2) top one side is along its width direction fixedly connected with dead lever (6), one side of dead lever (6) is provided with gliding electric putter (7) around can going on, the piston rod of electric putter (7) is about axial and its end installs mechanical jack catch (8) that are used for centre gripping/release chip.

2. The convenient sample loading probe station according to claim 1, characterized in that: the automatic feeding device is characterized in that a stroke groove (41) is formed in one side of the placing box (4) along the height direction of the placing box, a stroke block (51) penetrating into the stroke groove (41) is formed in one side of the placing plate (5), a first screw rod (42) which is in the vertical axial direction and is inserted into the stroke block (51) through threads is connected to one side of the top of the base (1) through a bearing in a penetrating manner, a first motor (43) with an upward output shaft is fixedly mounted at the bottom of the base (1), and the first screw rod (42) is fixedly connected to the tail end of the output shaft of the first motor (43).

3. The convenient sample loading probe station according to claim 2, characterized in that: the novel electric power tool is characterized in that a connecting frame (9) is fixedly connected to the top of one side of the placing box (4), the connecting frame (9) is fixedly connected with an installing rod (10) which is located right above the placing box (4) and is in the vertical axial direction, a contact type sensor (11) is arranged at the bottom of the installing rod (10), and a first motor (43) can stop rotation of an output shaft of the first motor when a chip on the placing plate (5) is in contact with the contact type sensor (11).

4. The convenient sample loading probe station according to claim 3, characterized in that: the PLC is arranged on the base (1), the output end of the contact sensor (11) is electrically connected with the input end of the PLC to transmit monitored signals to the PLC, the output end of the PLC is electrically connected with the input end of the motor I (43), and the PLC can control the motor I (43) to stop operating after receiving the signals transmitted by the contact sensor (11).

5. The convenient sample loading probe station according to claim 1, characterized in that: one side of the fixed rod (6) is provided with a sliding groove (61) along the length direction of the fixed rod, a sliding block (62) is inserted in the sliding groove (61), the electric push rod (7) is fixedly installed on the sliding block (62), and a sliding assembly used for enabling the sliding block (62) to slide back and forth is arranged in the sliding groove (61).

6. The convenient sample loading probe station according to claim 5, characterized in that: the sliding assembly comprises a second screw rod (63) which is rotatably connected in the sliding groove (61) through a bearing and is in a front-back axial direction, the second screw rod (63) is inserted in the sliding block (62) through thread fit, a second motor (64) is fixedly mounted on one side of the fixing rod (6), and one side of the second screw rod (63) penetrates through the fixing rod (6) and is fixedly connected with the tail end of an output shaft of the second motor (64).