CN218115575U - Coated silver palladium structure - Google Patents
Coated silver palladium structure Download PDFInfo
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- CN218115575U CN218115575U CN202221986316.9U CN202221986316U CN218115575U CN 218115575 U CN218115575 U CN 218115575U CN 202221986316 U CN202221986316 U CN 202221986316U CN 218115575 U CN218115575 U CN 218115575U
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Abstract
The utility model relates to the field of glass coating equipment, in particular to a silver palladium coating structure, which comprises a silver palladium body; the silver palladium body comprises an end silver palladium block, a middle silver palladium block and a bridging silver palladium block; the end silver palladium block is butted with the middle silver palladium block through a bridging silver palladium block; the silver-palladium structure is formed by splicing an end silver-palladium block, a middle silver-palladium block and a bridging silver-palladium block; the utility model discloses a coating film silver palladium structure, the utility model discloses a silver palladium body is formed by the concatenation of a plurality of silver palladium pieces, changes the size of silver palladium body as required when convenient follow-up use, and the convenience is used in the reality.
Description
Technical Field
The utility model relates to the field of glass coating equipment, in particular to a coating silver-palladium structure.
Background
The magnetron sputtering target is a sputtering source which sputters on a substrate to form various functional films under proper process conditions through a magnetron sputtering coating system.
The coated glass is one with one or several layers of metal, alloy or metal compound film coated on the surface of glass to change the optical performance of glass and meet specific requirement.
There are two main categories according to function: solar control coated glass and low emissivity coated glass.
With the development of coating technology, the application of the high-intensity magnetic field planar cathode is more and more extensive, and the longer service cycle of the silver target and better sputtering uniformity are required while the magnetic field intensity is pursued.
Therefore, the technical defects of the existing high-intensity magnetic field plane cathode can be overcome, and a high-utilization-rate coating silver target structure is provided.
SUMMERY OF THE UTILITY MODEL
The utility model aims at providing a modular coating film silver palladium structure.
In order to realize the purpose, the utility model discloses a technical scheme be:
a coated silver-palladium structure comprises a silver-palladium body;
the silver palladium body comprises an end silver palladium block, a middle silver palladium block and a bridging silver palladium block;
the end silver palladium block is butted with the middle silver palladium block through a bridging silver palladium block;
the silver-palladium structure is formed by splicing an end silver-palladium block, a middle silver-palladium block and a bridging silver-palladium block.
The thickness of the end silver palladium block is not less than that of the middle silver palladium block.
The end silver palladium blocks comprise a first silver palladium block and a second silver palladium block; the bridging silver-palladium block comprises a first bridging block and a second bridging block; the first silver palladium block and the second silver palladium block are distributed at two ends of the film-coated silver palladium structure; the first silver palladium block is connected with the middle silver palladium block through a first bridging block, and the second silver palladium block is connected with the middle silver palladium block through a second bridging block; the middle silver palladium block comprises a plurality of monomer silver palladium blocks, and adjacent monomer silver palladium blocks are sequentially butted.
And the monomer silver palladium block, the first silver palladium block, the second silver palladium block, the first bridging block and the second bridging block are provided with mounting holes for mounting.
The first bridging block comprises a first bridging block body, the first bridging block body comprises a left block body, a middle block body and a right block body, and the left block body is connected with the first silver palladium block; the thickness of the left block body is larger than the height of the right block body, and the thickness of the middle block body close to one side of the left block body is the same as that of the left block body; the height of one side of the middle block body, which is close to the right block body, is the same as that of the right block body; the upper end face of the middle block body is an inclined face.
The second silver palladium block comprises a second block body, and a first thickening block is arranged on one side, close to the second bridging block, of the second block body.
The second bridging block comprises a second bridging block body, a second thickening block body is arranged on the second bridging block body, the second thickening block body comprises a butt-joint block and a transition block which are arranged on the second bridging block body, and the butt-joint block and the first thickening block are arranged oppositely; the butt joint block is attached to the first thickening block; the transition blocks are distributed on one side, far away from the first thickening block, of the butt joint block; the vertical section of the transition block is triangular; the upper end surface of the transition block is an inclined surface.
The side faces, far away from the first thickening block and the second thickening block, of the single silver-palladium block, the first silver-palladium block, the second silver-palladium block, the first bridging block and the second bridging block are located on the same plane.
The utility model has the advantages of:
the utility model discloses a coating film silver palladium structure, the utility model discloses a silver palladium body is formed by splicing a plurality of silver palladium pieces, the size of the silver palladium body is changed according to needs when the silver palladium body is used subsequently, the silver palladium body is convenient to use in practice, in addition, the utility model can ensure that the silver palladium piece thickness of the position with stronger magnetic field is larger by limiting the silver palladium piece thickness at the end part of the silver palladium body, thereby ensuring that the position target piece with stronger magnetic field and other position target pieces have equal service lives; the sputtering uniformity can be better ensured in the later period of use.
Drawings
The contents of the various figures of the specification and the labels in the figures are briefly described as follows:
fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic structural diagram of the first silver palladium block of the present invention.
Fig. 3 is a schematic structural diagram of a second silver palladium block of the present invention.
Fig. 4 is a schematic structural diagram of the first bridging block of the present invention.
Fig. 5 is a schematic structural diagram of the second bridging block of the present invention.
Fig. 6 is a schematic structural diagram of a single bridging block in the present invention.
The labels in the above figures are:
1. the device comprises a middle silver palladium block 11, a monomer silver palladium block 3, a second bridging block 4-1, a first silver palladium block 4-2, a second silver palladium block 6 and a first bridging block.
Detailed Description
The following description of the preferred embodiments of the present invention will be made in further detail with reference to the accompanying drawings.
A coated silver-palladium structure comprises a silver-palladium body; the silver palladium body comprises an end silver palladium block, a middle silver palladium block 1 and a bridging silver palladium block; the end silver palladium block is butted with the middle silver palladium block 1 through a bridging silver palladium block; the silver-palladium structure is formed by splicing an end silver-palladium block, a middle silver-palladium block 1 and a bridging silver-palladium block; the utility model discloses a coating film silver palladium structure, the utility model discloses a silver palladium body is formed by the concatenation of a plurality of silver palladium pieces, changes the size of silver palladium body as required when convenient follow-up use, and the convenience is used in the reality.
The structure of the coating silver palladium mainly comprises an end silver palladium block, a middle silver palladium block 1 and a bridging silver palladium block; the silver palladium body is formed by splicing three types of silver palladium blocks, the length of the silver palladium body can be changed as required in actual use, and the use length of the utility model is increased; meanwhile, due to the split mounting structure, a silver palladium block at a certain position can be replaced locally, the silver palladium block structure can be replaced locally, and the service efficiency of the film-coated silver palladium structure is improved.
Furthermore, the thickness of the end silver palladium block is not less than that of the middle silver palladium block 1; the purpose of the design of the utility model is that the magnetic field intensity at the two ends of the sputtering area is larger than the magnetic field intensity in the middle part when in actual magnetron sputtering, and the consumption of the silver palladium block at the end part of the conventional silver palladium structure is large when in actual sputtering operation, so that the target block at the position with stronger magnetic field and the target blocks at other positions have the same service life; therefore, the utility model discloses prescribe a limit to the thickness of tip silver palladium piece for the thickness of tip silver palladium piece is not less than the thickness of middle part silver palladium piece 1.
Furthermore, the end silver palladium block in the utility model comprises a first silver palladium block 4-1 and a second silver palladium block 4-2; the bridging silver palladium block comprises a first bridging block 6 and a second bridging block 3; the first silver palladium block 4-1 and the second silver palladium block 4-2 are distributed at two ends of the film-coated silver palladium structure; the first silver palladium block 4-1 is connected with the middle silver palladium block 1 through a first bridging block 6, and the second silver palladium block 4-2 is connected with the middle silver palladium block 1 through a second bridging block 3; the middle silver palladium block 1 comprises a plurality of monomer silver palladium blocks 11, and the adjacent monomer silver palladium blocks 11 are sequentially butted; the utility model discloses a such structural design has made things convenient for assembling of whole coating film silver palladium structure.
Furthermore, in the utility model, the single silver palladium block 11, the first silver palladium block 4-1, the second silver palladium block 4-2, the first bridging block 6 and the second bridging block 3 are provided with mounting holes 1-1 for mounting; the arrangement of the mounting holes 1-1 facilitates the subsequent use, installation and fixation of the subsequent monomer silver palladium block 11, the first silver palladium block 4-1, the second silver palladium block 4-2, the first bridging block 6 and the second bridging block 3, and facilitates the butt joint and assembly of adjacent silver palladium blocks.
Further, in the present invention, the first bridging block 6 includes a first bridging block 6-1, the first bridging block 6-1 includes a left block 61, a middle block 62 and a right block 63, the left block 61 is connected to the first silver-palladium block 4-1; the thickness of the left block body 61 is greater than the height of the right block body 63, and the thickness of one side, close to the left block body 61, of the middle block body 62 is the same as that of the left block body 61; the height of one side of the middle block body 62 close to the right block body 63 is the same as that of the right block body 63; the upper end surface of the middle block body 62 is an inclined surface; through the arrangement, the thickness of the first bridging block body 6-1 close to the first silver palladium block 4-1 is larger, and the thickness of the right block body 63 is the same as that of the middle silver palladium block 1; the middle block 62 in the middle part plays a role in transition, and the transition between the left block 61 and the right block 63 is facilitated.
Furthermore, the second silver palladium block 4-2 in the utility model comprises a second block 4-21, and a first thickening block 4-22 is arranged on one side of the second block 4-21 close to the second bridging block 3; the first thickening block 4-22 plays a good role in increasing the thickness, and is beneficial to ensuring that the area of the second silver palladium block 4-2 has longer service life.
Further, in the present invention, the second bridging block 3 includes a second bridging block 31, a second thickening block 32 is disposed on the second bridging block 31, the second thickening block 32 includes a butt-joint block 321 and a transition block 322 disposed on the second bridging block 31, the butt-joint block 321 is disposed opposite to the first thickening blocks 4-22; the butt joint block 321 is jointed with the first thickened blocks 4-22; the transition blocks 322 are distributed on the side, away from the first thickening blocks 4-22, of the butt joint block 321; the vertical section of the transition block 322 is triangular; the upper end surface of the transition block 322 is an inclined surface; the utility model has the advantages that the arrangement of the butt joint block 321 plays a role in increasing the local thickness of the second bridging block 3, which is beneficial to ensuring that the area of the second bridging block 3 has longer service life, in addition, the arrangement of the transition block 322 not only increases the local thickness of the second bridging block 3, is beneficial to increasing the service life of the area of the second bridging block, but also plays a good transition role; facilitating the transition of the docking block 321 to the upper end face of the second bridging block 31.
Furthermore, in the utility model, the side surfaces of the single silver palladium block 11, the first silver palladium block 4-1, the second silver palladium block 4-2, the first bridging block 6 and the second bridging block 3, which are far away from the first thickening block 4-22 and the second thickening block, are positioned on the same plane; due to the arrangement, the smoothness of the inner side surface of the silver-palladium structure is well ensured, and the subsequent installation and fixation are facilitated; in addition, in addition to the above, it can be known from the drawings that the silver palladium body of the present invention is of a planar structure except for the side provided with the first thickened blocks 4 to 22 and the second thickened block.
Concretely;
the utility model discloses a coating silver palladium structure, which is formed by combining a plurality of silver target blocks with different sizes, and the target block structure is unique, so that compared with the traditional coating silver target, the novel coating silver target with high utilization rate has more uniform etching allowance, longer practical service life and better sputtering uniformity performance in the later use period; meanwhile, the novel high-utilization-rate coated silver target structure improves the production efficiency, reduces the time consumption of target replacement years, and is suitable for industrial production.
Specifically, the silver target structure disclosed by the utility model comprises 14 silver target blocks of 5 different shapes which are combined in sequence; is formed by sequentially combining 1 first silver target block, 1 first bridging block 6, 10 single silver target blocks, 1 second bridging block 3 and 1 second silver target block.
The thickness of the target block at the position with stronger magnetic field of the silver target is increased by 3 mm, and the target block with normal thickness is processed into smooth transition, so that the target block at the position with stronger magnetic field can have the same service life as the target blocks at other positions.
When in specific design;
the thickness of the first silver palladium block 4-1 is 33 mm, the thickness of the first bridging block 6 is smoothly transited to 30 mm from 33 mm, and the thickness of the silver target block 6 is smoothly transited from 33 mm on the left side to 30 mm on the right side; in addition, the thickness of the interface position at the lower part of the second silver palladium block 4-2 in the utility model is 33 mm, and other positions are smoothly transited to 30 mm; the thickness of the second thickened block on the second bridging block 3 is transited from 33 mm to 30 mm of the thickness of the lower L-shaped plane; each of the monolithic silver palladium blocks 11 has a thickness of 30 mm.
Obviously the specific implementation of the present invention is not limited by the above-mentioned manner, and various insubstantial improvements made by the method concept and technical solution of the present invention are all within the protection scope of the present invention.
Claims (8)
1. A structure of coated silver palladium is characterized by comprising a silver palladium body;
the silver palladium body comprises an end silver palladium block, a middle silver palladium block and a bridging silver palladium block;
the end silver palladium block is butted with the middle silver palladium block through the bridging silver palladium block;
the silver-palladium structure is formed by splicing an end silver-palladium block, a middle silver-palladium block and a bridging silver-palladium block.
2. The structure of claim 1, wherein the thickness of the end ag-pd blocks is no less than the thickness of the central ag-pd block.
3. The structure of claim 1, wherein the end silver palladium blocks comprise a first silver palladium block and a second silver palladium block; the bridging silver-palladium block comprises a first bridging block and a second bridging block; the first silver palladium block and the second silver palladium block are distributed at two ends of the film-coated silver palladium structure; the first silver palladium block is connected with the middle silver palladium block through a first bridging block, and the second silver palladium block is connected with the middle silver palladium block through a second bridging block; the middle silver palladium block comprises a plurality of monomer silver palladium blocks, and adjacent monomer silver palladium blocks are sequentially butted.
4. The structure of claim 3, wherein the monolithic Ag-Pd block, the first Ag-Pd block, the second Ag-Pd block, the first bridge block and the second bridge block are provided with mounting holes for mounting.
5. The structure of claim 3, wherein the first bridge piece comprises a first bridge piece, the first bridge piece comprises a left piece, a middle piece and a right piece, and the left piece is connected with the first silver palladium piece; the thickness of the left block body is greater than the height of the right block body, and the thickness of one side, close to the left block body, of the middle block body is the same as that of the left block body; the height of one side of the middle block body, which is close to the right block body, is the same as that of the right block body; the upper end face of the middle block body is an inclined face.
6. The structure of claim 3, wherein the second Ag-Pd block comprises a second block body, and a first thickening block is disposed on a side of the second block body adjacent to the second bridging block.
7. The structure according to claim 6, wherein the second bridging block comprises a second bridging block, a second thickened block is disposed on the second bridging block, the second thickened block comprises a butt-joint block and a transition block disposed on the second bridging block, and the butt-joint block is disposed opposite to the first thickened block; the butt joint block is attached to the first thickening block; the transition blocks are distributed on one side, far away from the first thickening block, of the butt joint block; the vertical section of the transition block is triangular; the upper end surface of the transition block is an inclined surface.
8. The structure of claim 7, wherein the sides of the monolithic Ag-Pd block, the first Ag-Pd block, the second Ag-Pd block, the first bridging block, and the second bridging block that are away from the first thickening block and the second thickening block are in the same plane.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221986316.9U CN218115575U (en) | 2022-07-29 | 2022-07-29 | Coated silver palladium structure |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202221986316.9U CN218115575U (en) | 2022-07-29 | 2022-07-29 | Coated silver palladium structure |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN218115575U true CN218115575U (en) | 2022-12-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202221986316.9U Active CN218115575U (en) | 2022-07-29 | 2022-07-29 | Coated silver palladium structure |
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| Country | Link |
|---|---|
| CN (1) | CN218115575U (en) |
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2022
- 2022-07-29 CN CN202221986316.9U patent/CN218115575U/en active Active
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