CN218099928U

CN218099928U - Suction cup device

Info

Publication number: CN218099928U
Application number: CN202220652767.2U
Authority: CN
Inventors: 马运军; 李波; 蔡志兵; 张雷
Original assignee: Yuanzhuo Micro Electronic Equipment Changde Co ltd
Current assignee: Yuanzhuo Micro Nano Technology Suzhou Co ltd
Priority date: 2022-03-24
Filing date: 2022-03-24
Publication date: 2022-12-20
Anticipated expiration: 2032-03-24

Abstract

The utility model provides a sucker device, include: sucking disc main part, gas circuit subassembly, vacuum extraction device and a plurality of standard seal spare, the upper surface of sucking disc main part is adsorption zone territory, the intensive distribution has a plurality of absorption holes in the adsorption zone territory, the sucking disc main part below is passed through the gas circuit subassembly is connected to the vacuum extraction device, a plurality of standard seal spare dimensions are different, the side of a plurality of standard seal spare is equipped with the installation department, the sucking disc main part is close to the edge and corresponds and is equipped with the mounting hole, selects standard seal spare according to the size of a dimension by the absorption work piece, will the installation department of standard seal spare inserts the mounting hole of sucking disc main part, thereby reduce gas leakage through the absorption hole beyond the standard seal spare of different dimensions cover the work piece of different sizes, easy and simple to handle with low costs.

Description

Suction cup device

Technical Field

The utility model belongs to the technical field of the direct-write exposure technique and specifically relates to a sucking disc device is related to.

Background

Direct writing exposure is a direct imaging technology for forming circuit patterns by exposing the surface of a workpiece (such as a wafer, a printed circuit board and the like) by using a digital light processing technology, has the advantages of obviously improved exposure efficiency and obvious cost advantage compared with a mask type exposure technology, and can meet the processing requirements of various products such as chips, semiconductor devices, printed circuit boards and the like.

When exposing a workpiece, it is necessary to suck the workpiece with a suction cup so that the moving process of the workpiece is more reliable. The suction principle of the suction cup is to form a negative pressure near the surface suction hole by evacuating from the internal cavity, so that the workpiece is sucked to the surface of the suction cup. The region having the adsorption holes is referred to as an adsorption region. The size of the adsorption area of a common sucker is designed based on a maximum-size workpiece, and in actual exposure application, the sizes of various workpieces are different, and when the size of the workpiece is smaller than that of the adsorption area, the phenomenon of air leakage and vacuum breaking can occur, so that the adsorption force is insufficient. In order to solve the problem, the prior art mainly adopts a mode of artificially blocking holes, mostly adopts an adhesive tape to seal exposed adsorption holes, and because the adhesive tape has high viscosity, time and labor are wasted when the adhesive tape is taken down, and adhesive glue is easy to remain on the surface of a sucker, which can cause the damage of photoresist on the surfaces of workpieces with other sizes; in addition, a mode of dividing the suction cup into a plurality of independent areas is also provided, each area is independently controlled, so that the area which is not covered by the workpiece is not vacuumized, but the air path structure and the control mode are complicated when the areas are divided, and the cost is high.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to provide a simple and easy leak protection gas's sucking disc device to compensate above-mentioned prior art not enough. Therefore, the utility model adopts the following technical scheme:

a suction cup device comprising: sucking disc main part, gas circuit subassembly, vacuum extraction device and a plurality of standard sealing member, the upper surface of sucking disc main part is adsorption zone territory, the intensive distribution has a plurality of absorption holes in the adsorption zone territory, the sucking disc main part below is passed through the gas circuit subassembly is connected to the vacuum extraction device, a plurality of standard sealing member dimensions are different, the side of a plurality of standard sealing member is equipped with the installation department, the sucking disc main part is close to the edge correspondence and is equipped with the mounting hole, selects standard sealing member according to the size of a dimension by the absorption work piece, will the installation department of standard sealing member inserts the mounting hole of sucking disc main part, the standard sealing member covers the absorption hole that needs to seal beyond the work piece region.

Preferably, the sucking disc main part includes casing, lower casing, go up casing and casing butt joint installation vacuole formation down, a plurality of absorption holes are located go up the casing, the mounting hole is located casing down, upward be equipped with corresponding via hole on the casing, be equipped with a plurality of bosss in the cavity.

Preferably, a plurality of magnetic elements are distributed in the cavity, and the standard sealing elements are made of magnetic materials.

Preferably, the magnetic elements are distributed on part of the bosses and/or distributed at intervals among the bosses.

Preferably, the adsorption area is divided into a normally-sucking area and a self-adaptive adsorption area, a normally-open air path is arranged below the adsorption hole in the normally-sucking area, and a controllable on-off air path is arranged below the adsorption hole in the self-adaptive adsorption area.

Preferably, the size of the adaptive suction area is determined by the overall size of the suction area and the minimum workpiece size.

Preferably, the plurality of standard seals includes a plurality of transverse standard seals having a transverse length equal to a transverse length of the smallest workpiece and a plurality of vertical standard seals having a vertical length equal to a vertical length of the smallest workpiece.

Preferably, the vertical lengths of the plurality of transverse standard seals are at least partially the same, and the transverse lengths of the plurality of vertical standard seals are at least partially the same.

Preferably, the vertical lengths of the plurality of transverse standard sealing elements are different, the number of the plurality of transverse standard sealing elements is equal to the number of types of workpieces with different longitudinal sizes, the transverse lengths of the plurality of vertical standard sealing elements are different, and the number of the plurality of vertical standard sealing elements is equal to the number of types of workpieces with different transverse sizes.

Preferably, the adsorption area is a normal adsorption area, and the standard sealing elements are integrated into an L shape.

Compared with the prior art, the sucker device provided by the utility model can quickly cover the exposed adsorption holes to avoid the problem of air leakage by arranging standard sealing elements with different dimensions, is convenient to operate and has high practical value; and the size of the adaptive area and the size of the standard sealing element are determined through the minimum workpiece size, so that the size specification of the standard sealing element is not too much, and the adaptive adsorption cost is obviously reduced compared with that of the whole area.

Drawings

FIG. 1 is a top schematic view of an exemplary chuck body on which a workpiece may be placed.

Fig. 2 is a schematic top view of an exemplary lower housing.

FIG. 3 is a schematic top view of an exemplary standard seal.

FIG. 4 is a schematic view of an exemplary workpiece and standard seal overlay chuck body.

FIG. 5 is yet another schematic view of the placement of the workpiece and the standard seal.

Detailed Description

In order to make the technical solution of the present invention clearer, embodiments of the present invention will be described below with reference to the accompanying drawings. It should be understood that the detailed description of the embodiments is intended only to teach one skilled in the art how to practice the invention, and is not intended to be exhaustive of all possible aspects of the invention, nor is it intended to limit the scope of the invention.

It should be noted that the terms "upper", "lower", "left", "right", "transverse", "vertical", and the like in the following embodiments are used for indicating the orientation or direction based on the drawings to describe the present invention, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed, installed and operated in a specific orientation, or be moved in a specific direction, and therefore, should not be construed as limiting the present invention. In the description of the present embodiment, "a plurality" means two or more unless specifically defined otherwise.

Referring to fig. 1 to 3, the utility model provides a simple and easy suction cup device of leak protection gas, including the sucking disc main part, the gas circuit subassembly, vacuum draw-out device and a plurality of standard sealing member, fig. 1 is the schematic view of overlooking of sucking disc main part behind the placing object piece, the regional work piece that indicates of upper left corner "×" type, the upper surface of sucking disc main part is adsorption area, the intensive distribution has a plurality of adsorption holes 111 in the adsorption area, sucking disc main part below is connected to vacuum draw-out device through the gas circuit subassembly, fig. 3 is the schematic view of overlooking of a plurality of standard sealing members, a plurality of standard sealing members are the sheet metal form, and size specification is different, the side of every standard sealing member is provided with the installation department, the sucking disc main part is close to the edge correspondence and is equipped with mounting hole 121, thereby every standard sealing member can insert the mounting hole detachable through the installation department and be connected to the sucking disc main part or whole adsorption holes 111 outside the covering work piece. Specifically, at least one standard seal of a required specification is selected according to the size of the sucked workpiece to seal the suction hole except for at least one side edge of the workpiece.

In one embodiment, the suction cup main body comprises an upper shell 11 and a lower shell 12, and the upper shell 11 and the lower shell 12 are installed in a butt joint mode to form a cavity, so that fig. 1 is a top view of the upper shell, and the suction holes are located in the upper shell 11. Fig. 2 shows a schematic top view of the lower housing, the mounting holes 121 are located on the lower housing, and the upper housing is provided with corresponding through holes 112. A plurality of bosses 122 are provided in the cavity to reduce the amount of air in the cavity. Preferably, a plurality of magnetic elements 123 are distributed in the cavity, a plurality of standard sealing elements are made of magnetic materials, and the standard sealing elements are attached to the upper shell and attract the magnetic elements 123. The magnetic elements 123 may be distributed on part of the bosses, or may be distributed between the bosses at intervals. The installation and positioning of the standard sealing element can be conveniently and quickly realized through manual or mechanical operation of the installation part and the installation hole, and the standard sealing element is stably attached by the magnetic element to prevent slippage.

In one embodiment, the adsorption region is divided into a normally adsorbing region a and an adaptive adsorbing region B, as shown in fig. 1, the adaptive adsorbing region is a region within a dashed line frame, and the other regions are normally adsorbing regions. The lower part of the adsorption hole of the normally-sucking area A is a normally-open air path, the lower part of the adsorption hole of the self-adaptive adsorption area B is a controllable on-off air path, and an air blocking assembly is arranged in the air path. When the vacuum pumping device is used for vacuumizing, all the adsorption holes of the normally-sucking area A can continuously generate suction force, the adsorption holes covered by the workpiece in the self-adaptive adsorption area B have suction force, the air path below the exposed adsorption holes is separated by the air blocking assembly, suction force does not exist, and the air leakage problem cannot be generated.

In a preferred embodiment, the size of the adaptive adsorption area B is determined by the overall size of the adsorption area and the minimum workpiece size, and specifically is as follows: the size of the whole adsorption area is: a transverse length L and a vertical length H; the minimum workpiece size is: a transverse length L0, a vertical length H0; the lateral length of the adaptation region is equal to L-L0 and the vertical length is equal to H-H0. Further, as shown in fig. 3, the plurality of standard seals includes a plurality of transverse standard seals 21 and a plurality of vertical standard seals 22, and it should be noted that the number shown in the figure is only used as an example and is not limited to the number of each standard seal in practical application. Wherein, the horizontal lengths of the plurality of horizontal standard sealing elements 21 are the same and are all L0, and the vertical lengths are different or at least partially the same, for example, as shown in fig. 3-a, when the plurality of horizontal standard sealing elements 21 include M1, M2, M3, the size specifications of the horizontal standard sealing elements are different; when the plurality of transverse standard seals 21 includes M2, M3, M4, and M5, the dimension of M3, M4, and M5 are the same. The vertical standard seals 22 have the same vertical length, which is H0, and have different or at least partially the same horizontal length, for example, as shown in fig. 3-b, when the vertical standard seals 22 include N1, N2, and N3, the vertical standard seals have different dimensions; when the plurality of vertical standard seals 22 includes N2, N3, N4, wherein the dimensions of N3 and N4 are the same. Further preferably, when the vertical lengths of the plurality of transverse standard seal pieces 21 are different from each other, the longitudinal size of the transverse standard seal pieces is determined based on different longitudinal sizes of the workpieces, and the vertical length of the workpieces is Hx, then the vertical length Hm = H-Hx of the transverse standard seal pieces, that is, the different longitudinal sizes Hm of the transverse standard seal pieces are obtained according to the different vertical lengths Hx of the workpieces, where the number of the plurality of transverse standard seal pieces is equal to the number of types of the workpieces with different longitudinal sizes; when the transverse lengths of the plurality of vertical standard seal elements 22 are different, the transverse dimension of the vertical standard seal elements is determined based on different transverse dimensions of the workpieces, the transverse length of the workpieces is Lx, and then the transverse length Ln = L-Lx of the vertical standard seal elements is obtained, that is, different transverse dimensions Ln of the vertical standard seal elements are obtained according to different transverse lengths Lx of the workpieces, and the number of the plurality of vertical standard seal elements is equal to the number of types of the workpieces with different transverse dimensions. As shown in fig. 4, after the workpiece is placed on the chuck, the suction holes of the uncovered normal suction area are covered by the standard sealing members M2 and N2, and the shaded portion is the adaptive suction area covered by the workpiece. Because the structure that realizes the self-adaptation and adsorb is complicated, and the installation wastes time and energy and with high costs, and this embodiment uses the regional cooperation of different standard sealing members that specification and size confirmed and self-adaptation absorption, compares and wholly adopts the mode that the self-adaptation adsorbs can effectively reduce time and economic cost wholly.

In one embodiment, as shown in fig. 5, the suction area is a normal suction area, and the plurality of standard seals are in an integrated "L" shape, that is, a blank portion covering the suction area except for the workpiece. Each standard seal has two inner edges 201, two outer edges 202, a transverse edge 203 and a vertical edge 204, the two inner edges 201 being adjacent to respective sides of the workpiece in use. The size of the whole adsorption area is transverse length L and vertical length H, the size of the workpiece is transverse length Lx and vertical length Hx, the lengths of two inner side edges 201 are respectively Lx and Hx, the lengths of two outer side edges 202 are respectively L and H, the length of a transverse edge 203 is L-Lx, and the length of a vertical edge 204 is H-Hx. The integrated standard sealing element is adopted, and after the size specification of the required standard sealing element is determined according to the size and the model of a workpiece, the exposed adsorption hole can be covered by one-time placement, so that the operation is convenient.

Finally, it should be pointed out that the above-described embodiments are only illustrative and not exhaustive due to the limited nature of the words of expression, and that the present invention is not limited to the embodiments disclosed, but that several modifications and variations can be made by those skilled in the art without departing from the scope and spirit of the above-described embodiments, which modifications and variations are to be regarded as the scope of the invention. Therefore, the protection scope of the present invention should be subject to the claims.

Claims

1. A suction cup device, comprising: sucking disc main part, gas circuit subassembly, vacuum extraction device and a plurality of standard sealing member, the upper surface of sucking disc main part is adsorption zone territory, the intensive distribution has a plurality of absorption holes in the adsorption zone territory, the sucking disc main part below is passed through the gas circuit subassembly is connected to the vacuum extraction device, a plurality of standard sealing member dimensions are different, the side of a plurality of standard sealing member is equipped with the installation department, the sucking disc main part is close to the edge correspondence and is equipped with the mounting hole, selects standard sealing member according to the size of a dimension by the absorption work piece, will the installation department of standard sealing member inserts the mounting hole of sucking disc main part, the standard sealing member covers the absorption hole that needs to seal beyond the work piece region.

2. The suction cup device of claim 1, wherein: the sucking disc main part includes casing, lower casing, go up casing and casing butt joint installation vacuole formation down, a plurality of absorption holes are located go up the casing, the mounting hole is located casing down, upward be equipped with corresponding via hole on the casing, be equipped with a plurality of bosss in the cavity.

3. The suction cup device of claim 2, wherein: a plurality of magnetic elements are distributed in the cavity, and the standard sealing elements are made of magnetic materials.

4. The suction cup device of claim 3, wherein: the magnetic elements are distributed on part of the bosses and/or distributed among the bosses at intervals.

5. The suction cup device of claim 1, wherein: the adsorption area is divided into a normally-sucking area and a self-adaptive adsorption area, a normally-open air path is arranged below the adsorption hole in the normally-sucking area, and a controllable on-off air path is arranged below the adsorption hole in the self-adaptive adsorption area.

6. The suction cup device according to claim 5, wherein: the size of the adaptive adsorption area is determined by the overall size of the adsorption area and the minimum workpiece size.

7. The suction cup device of claim 6, wherein: the plurality of standard seals comprise a plurality of transverse standard seals and a plurality of vertical standard seals, the transverse lengths of the transverse standard seals are the same as the transverse length of the minimum workpiece, and the vertical lengths of the vertical standard seals are the same as the vertical length of the minimum workpiece.

8. The suction cup device of claim 7, wherein: the vertical lengths of the plurality of transverse standard seals are at least partially the same, and the transverse lengths of the plurality of vertical standard seals are at least partially the same.

9. The suction cup device of claim 7, wherein: the vertical lengths of the plurality of transverse standard sealing elements are different, the number of the plurality of transverse standard sealing elements is equal to the number of types of workpieces with different longitudinal sizes, the transverse lengths of the plurality of vertical standard sealing elements are different, and the number of the plurality of vertical standard sealing elements is equal to the number of types of workpieces with different transverse sizes.

10. The suction cup device of claim 1, wherein: the adsorption area is a normal adsorption area, and the standard sealing elements are integrated into an L shape.