CN218099598U - Scanning galvanometer driving device capable of compressing overall height dimension - Google Patents
Scanning galvanometer driving device capable of compressing overall height dimension Download PDFInfo
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- CN218099598U CN218099598U CN202222245809.3U CN202222245809U CN218099598U CN 218099598 U CN218099598 U CN 218099598U CN 202222245809 U CN202222245809 U CN 202222245809U CN 218099598 U CN218099598 U CN 218099598U
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Abstract
The utility model relates to the technical field of scanning galvanometers, in particular to a scanning galvanometer driving device with a compressed integral height dimension; including the mirror chip that shakes, magnetic drive subassembly and bearing structure, the mirror chip that shakes includes the mirror surface, anchoring structure, torsion beam and the movable frame who is equipped with metal coil, torsion beam includes a pair of fast axle roof beam and a pair of slow axle roof beam, magnetic drive subassembly includes magnet subassembly and magnetic conduction subassembly, cooperation provides at least one driving magnetic field jointly, the magnet subassembly of one of them direction is located mirror chip below that shakes, and the magnetic conduction subassembly still uses as chip bearing structure and shell when guiding the distribution of magnetic induction line, and not occupy extra space, consequently, this application provides stronger magnetic field intensity in the large space range simultaneously, with the whole high size compression of electromagnetic mirror that shakes to the limit, realized reducing the technological effect of the whole quick-witted size of laser radar, help promoting laser radar's market competition.
Description
Technical Field
The utility model relates to a scanning mirror technical field that shakes especially relates to a scanning mirror drive arrangement that shakes of whole height and size of compression.
Background
The scanning galvanometer is a core component in the laser radar and is mainly used for realizing the scanning function of emitting light beams. Along with the rapid development of the vehicle-mounted laser radar market, the laser radar provides the requirements of a large mirror surface and a large scanning angle for the scanning galvanometer so as to realize a longer detection distance and higher angular resolution, the scanning galvanometer based on the electromagnetic driving principle is driven by Lorentz force in a constant magnetic field through an electrified coil so as to drive the mirror surface to rotate around a torsion beam, and compared with other driving modes such as static electricity, electric heat, piezoelectric and the like, the scanning galvanometer has the advantages of strong driving force and large torsion angle, and is particularly suitable for driving a large-size mirror surface.
In the prior art, an electromagnetic driving structure of a scanning galvanometer is shown in fig. 1-2, the structure shown in fig. 1 adopts a horizontally magnetized magnet, the magnet is completely positioned outside a coil, and the scanning galvanometer is positioned in the middle position of the height of the magnet to obtain a strong and uniform driving magnetic field, so that the volume of the whole assembly structure is large, the structure shown in fig. 2 adopts two groups of magnet driving coils with opposite upper and lower magnetic poles, and the magnet is also positioned outside the coil, so that the whole volume is large, and the assembly is difficult due to the huge repulsive force generated by the opposite upper and lower magnetic poles.
Fig. 3 shows an application of the laser radar based on the two-dimensional scanning galvanometer in a vehicle-mounted system, as shown in fig. 3, the laser radar based on the two-dimensional scanning galvanometer is composed of a laser, a reflecting mirror, a scanning galvanometer and a detector, wherein the scanning galvanometer is generally vertically placed at the midpoint of the laser radar, so that the volume of the shell of the scanning galvanometer is positively correlated with the overall volume of the laser radar, in order to further compress the overall volume of the laser radar, the overall size, particularly the size in the height direction, of the large-sized two-dimensional scanning galvanometer needs to be further reduced, and the height direction of the two-dimensional scanning galvanometer just corresponds to the slow axis scanning angle of the galvanometer, and the laser radar generally works in a non-resonant working mode, so that a larger driving magnetic field intensity is needed.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a scanning mirror drive arrangement that shakes of whole high dimension of compression to satisfy the scanning mirror that shakes's magnetic drive arrangement not only will provide stronger magnetic field intensity in great space range, demand compact again.
In order to achieve the above purpose, the utility model provides a scanning galvanometer driving device with a compact overall height dimension, which is characterized in that,
the vibrating mirror comprises vibrating mirror chips and magnetic driving assemblies, wherein the vibrating mirror chips are arranged between the magnetic driving assemblies and fixed on the supporting structure, and each vibrating mirror chip comprises a mirror surface, an anchoring structure, a torsion beam and a movable frame provided with a metal coil;
the magnetic driving assembly comprises a magnet assembly and a magnetic conduction assembly, at least one magnet assembly consists of two magnets magnetized in the horizontal direction, parallel in magnetic surface and opposite in relative magnetic pole, and the magnet assembly is positioned below the vibrating mirror chip and is matched with the magnetic conduction assembly to guide the driving magnetic field to the metal coil above the vibrating mirror chip.
The torsion beam comprises a pair of fast-axis beams and a pair of slow-axis beams, the magnet assembly comprises a first magnet group and a second magnet group, the first magnet group is located on two sides of a fast-axis driving edge of the movable frame to provide a first driving magnetic field to drive the mirror surface to rotate around the coaxial lines of the two fast-axis beams, the second magnet group is located below a slow-axis driving edge of the movable frame, and a magnetic conduction structure is matched to provide a second driving magnetic field to drive the movable frame and the mirror surface to rotate around the coaxial lines of the two slow-axis beams.
The magnetic driving assembly is used for providing a driving magnetic field for the metal coil, after the magnetic field is provided by the magnet assembly, a magnetic induction line enters the magnetic conduction assembly and then conducts along the shape of the magnetic conduction assembly, a closed loop is formed in the magnet assembly, the magnetic conduction assembly and the air gap, the movable frame is guaranteed to have strong driving magnetic field intensity in a large movement range, after the vibrating mirror chip is fixed through the anchoring structure and the magnet assembly provides two driving magnetic fields, after the metal coil of the movable frame is electrified, the mirror surface rotates around the coaxial lines of the two fast axis beams through the two fast axis beams under the driving of Lorentz force, generally performs resonant movement, the movable frame and the mirror surface rotate around the coaxial lines of the two slow axis beams through the two slow axis beams together, generally performs non-resonant movement, and accordingly dual-axis scanning of the vibrating mirror chip can be achieved.
The magnetic conduction assembly comprises a first magnetic conduction structure and a second magnetic conduction structure, the first magnetic conduction structure is arranged on the inner side below the metal coil, the height of the second magnetic conduction structure is higher than that of the metal coil, the first magnetic conduction structure and the second magnetic conduction structure are erected on two sides of a magnet of the second magnet group, and the heights of the first magnetic conduction structure and the second magnetic conduction structure are higher than that of the second magnet group.
The scanning galvanometer device capable of compressing the whole height dimension further comprises a shell structure, the shell structure comprises a base, a shell, a base, a first cover plate and a second cover plate, the base is matched with the first magnetic conduction structure and used for fixedly supporting the galvanometer chip, the shell, the base and the base are made of non-magnetic conduction materials through processing, the shell is matched with the second magnetic conduction structure, and the first cover plate and the second cover plate are arranged on the upper side of the magnet assembly.
The first magnet group can be composed of two rectangular magnets which are magnetized in the horizontal direction, have parallel magnetic surfaces and opposite relative magnetic poles, or can be composed of two groups of upper and lower magnet groups which are magnetized in the vertical direction and opposite relative magnetic poles and are respectively positioned on the upper side and the lower side of the galvanometer chip, and the upper and lower magnet groups are used for providing a driving magnetic field on the non-compression height side of the scanning galvanometer driving device for compressing the whole height size.
The vibrating mirror chip only comprises a pair of torsion beams, the magnet assembly only comprises a pair of magnet groups and a magnetic conduction structure, the magnet groups are positioned below the driving edge of the movable frame of the vibrating mirror chip and consist of a pair of first magnets and second magnets magnetized in the horizontal direction, and the vibrating mirror chip is driven to rotate around the axis of the torsion beams;
the magnetic body assembly comprises two first magnetic conduction structures and two second magnetic conduction structures, the first magnetic conduction structures are respectively located on the right side of the first magnetic body and the left side of the second magnetic body, the second magnetic conduction structures are respectively located on the left side of the first magnetic body and the right side of the second magnetic body, the first magnetic conduction structures are further used for supporting and fixing the vibrating mirror chip, and the second magnetic conduction structures are further used as shell bodies.
In the present application, the entire structure of the galvanometer chip is not shown for convenience of illustration.
The first magnetic conduction structure is matched with the base, and plays a certain supporting role for the vibrating mirror chip, the first magnetic conduction structure is at least higher than the second magnetic body group by 1mm, the anchoring structure fixes the vibrating mirror chip on the supporting structure, the second magnetic conduction structure and the shell are arranged on the outer side of the vibrating mirror chip, so that the whole scanning vibrating mirror is highly compressed to the limit along the coaxial direction of the fast axis beam, and the first cover plate and the second cover plate are used for fixing the electric connection device in the integral structure and play a certain protection role.
Wherein the movable frame is square, circular, elliptical or polygonal in shape; the beam structure of the torsion beam is at least one of a straight beam structure, a ring beam and a folding beam, and the shape of the mirror surface is square, circular, oval, rectangular or polygonal.
In the present application, the structures of the components in the drawing parts are merely illustrative examples, and should not be construed as limiting the scope of the present application.
The utility model discloses a scanning galvanometer driving device of compression whole height dimension, place the horizontal magnetization magnet below the metal coil, and through by magnetic material make the magnetic conduction subassembly with the magnetic field direction guide to the spatial position department that expects, all provide stronger magnetic field intensity in great spatial dimension; simultaneously the magnetic conduction subassembly has the support shake mirror chip and encapsulation casing's effect to do not occupy extra space, consequently this application when providing stronger magnetic field intensity in large space range, with the whole height dimension compression to the limit of electromagnetism mirror that shakes, realized reducing the technical effect of the whole quick-witted size of laser radar, help promoting laser radar's market competition.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
Fig. 1 is an electromagnetic driving structure of a scanning galvanometer in the prior art provided by the present invention, which adopts a horizontally magnetized magnet.
Fig. 2 is an electromagnetic driving structure of two sets of magnet driving coils with upper and lower magnetic poles opposite to each other of a scanning galvanometer provided by the present invention.
Fig. 3 is the basic structure of the laser radar based on the two-dimensional scanning galvanometer in the vehicle-mounted system in the prior art.
Fig. 4 is a structure of a galvanometer chip of a scanning galvanometer driving device of the prior art that the utility model provides a compact overall height dimension.
Fig. 5 is a structure of a magnetic driving assembly of a scanning galvanometer driving device of the prior art, which compresses the overall height dimension.
Fig. 6 is a cross-sectional view structure of a magnetic driving assembly of a scanning galvanometer driving device for compressing the overall height dimension along a direction perpendicular to the galvanometer plane and parallel to AA' in the prior art.
Fig. 7 is a magnetic field distribution diagram of a magnetic conducting component of a scanning galvanometer driving device of the prior art with a compressed overall height dimension.
Fig. 8 is a top view of a scanning galvanometer product of a scanning galvanometer driving device with a compressed overall height dimension according to the prior art.
Fig. 9 is an external structural view of a scanning galvanometer product of a scanning galvanometer driving device of the prior art, wherein the overall height dimension of the scanning galvanometer driving device is compressed.
Fig. 10 is an exploded view of a scanning galvanometer product of a scanning galvanometer driving device of the prior art which has a compressed overall height dimension.
Fig. 11 is a structural diagram of a second embodiment of a scanning galvanometer driving device of the prior art for compressing the overall height dimension.
Fig. 12 is a cross-sectional view along the AA' direction of a second embodiment of a scanning galvanometer drive arrangement of the prior art of the present invention having a reduced overall height dimension.
Fig. 13 is a structural diagram of a third embodiment of a scanning galvanometer driving device for compressing the overall height dimension in the prior art.
Fig. 14 is a schematic view of a single-axis scanning galvanometer of a third embodiment of a scanning galvanometer driving device for compressing the overall height dimension in the prior art.
31-mirror surface, 32-anchoring structure, 33-movable frame, 34-torsion beam, 331-metal coil, 341-fast axis beam, 342-slow axis beam, 343-connecting beam, 1-first magnet group, 11-upper magnet, 12-lower magnet, 2-second magnet group, 41-first magnetic conduction structure, 42-base, 51-second magnetic conduction structure, 52-shell, 53-base, 61-first cover plate and 62-second cover plate.
Detailed Description
Referring to fig. 4 to 10, the present invention provides a scanning galvanometer driving device with a compact overall height dimension, which is characterized in that,
the vibrating mirror comprises a vibrating mirror chip, a magnetic driving assembly and a shell structure, wherein the vibrating mirror chip is fixed on a supporting structure, the magnetic driving assembly provides two driving magnetic fields, the vibrating mirror chip comprises a mirror surface 31, an anchoring structure 32, a torsion beam 34 and a movable frame 33 provided with a metal coil 331, the chip is fixed on the supporting structure by the anchoring structure 32, the torsion beam 34 comprises a pair of fast-axis beams 341 and a pair of slow-axis beams 342, the two fast-axis beams 341 are coaxially arranged in a mirror image mode, one ends of the two fast-axis beams 341 are connected with the movable frame 33, the other ends of the two fast-axis beams 341 are connected with the mirror surface 31, the two slow-axis beams 342 are also coaxially arranged in a mirror image mode, one ends of the two slow-axis beams 342 are connected with the movable frame 33, the other ends of the two slow-axis beams 342 are connected with the anchoring structure 32, and the metal coil 331 is arranged on the movable frame 33;
the magnetic driving assembly comprises a magnet assembly and a magnetic conducting assembly, the magnet assembly provides two driving magnetic fields, the two driving magnetic fields cooperate with the metal coil 331 and the magnetic conducting assembly to realize the biaxial scanning of the mirror 31, the biaxial scanning of the mirror 31 specifically comprises that the mirror 31 rotates around the coaxial line of the paired fast axis beams 341, and the mirror 31 and the movable frame 33 rotate together around the coaxial line of the slow axis beams 342.
The magnetic driving assembly is configured to provide a driving magnetic field for the metal coil 331, when the magnetic field is provided by the magnet assembly, a magnetic induction line enters the magnetic conducting assembly and then conducts along the shape of the magnetic conducting assembly, a closed loop is formed in the magnet assembly, the magnetic conducting assembly and the air gap, so that the movable frame 33 has a strong driving magnetic field strength in a large movement range, after the two driving magnetic fields are provided by the magnet assembly, after the metal coil 331 of the movable frame 33 is energized, the mirror 31 rotates around the coaxial lines of the two fast axis beams 341 by the two fast axis beams 341 under the driving of lorentz force, and generally performs a resonant movement, and the movable frame 33 and the mirror 31 rotate together around the coaxial lines of the two slow axis beams 342 by the two slow axis beams 342, and generally perform a non-resonant movement.
The magnet assembly comprises a first magnet group 1 and a second magnet group 2, wherein the first magnet group 1 and the second magnet group 2 are both composed of two rectangular magnets magnetized in the horizontal direction, having parallel magnetic surfaces and opposite magnetic poles, the first magnet group 1 is located at two ends of the axis of the two slow-axis beams 342 to provide a first driving magnetic field to drive the mirror 31 to rotate around the coaxial line of the two fast-axis beams 341, and the second magnet group 2 is located at two ends of the axis of the two fast-axis beams 341 to provide a second driving magnetic field to drive the movable frame 33 and the mirror 31 to rotate around the coaxial line of the two slow-axis beams 342.
Each magnet group consists of two rectangular magnets magnetized in the horizontal direction, parallel in magnetic surface and opposite in relative magnetic pole, and the first magnet group 1 is positioned on two sides of the slow shaft beam 342 of the movable frame 33 and used for providing a first driving magnetic field; the second magnet group 2 is positioned below the driving edge of the slow shaft of the frame and used for providing a second driving magnetic field; since the second magnet assembly 2 cannot provide a large enough driving magnetic field under the coil, the magnetic conductive assembly is used to guide the horizontal magnetic field to the metal coil 331, wherein the coaxial lines of the two fast axis beams 341 are shown in AA 'and the coaxial lines of the two slow axis beams 342 are shown in BB'. In the figure, B2 is the second driving magnetic field, and B1 is the first driving magnetic field.
The magnetic conduction assembly comprises a first magnetic conduction structure 41 and a second magnetic conduction structure 51, the first magnetic conduction structure 41 is arranged on the inner side below the metal coil 331, the height of the second magnetic conduction structure 51 is higher than that of the metal coil 331, the first magnetic conduction structure 41 and the second magnetic conduction structure 51 are erected on the outer side of the second magnet group 2, and the heights of the first magnetic conduction structure 41 and the second magnetic conduction structure 51 are higher than that of the second magnet group 2.
The first magnetic conductive structure 41 is matched with the second magnetic conductive structure 51 so as to guide a horizontal magnetic field to the metal coil 331 on the movable frame 33, and in this application, the entire structure of the galvanometer chip is not shown for convenience of illustration.
The shell structure comprises a base 42, a shell 52, a base 53, a first cover plate 61 and a second cover plate 62, wherein the base 42 is used for fixing the galvanometer chip, the shell 52, the base 42 and the base 53 are all made of non-magnetic conductive materials, the shell 52 is matched with the second magnetic conductive structure 51, the base 42 is matched with the first magnetic conductive structure 41 to support the galvanometer chip, and the first cover plate 61 and the second cover plate 62 are arranged on the upper side of the magnet assembly.
The first magnetic conduction structure 41 is matched with the base 42 to play a certain supporting role for the vibrating mirror chip, and is at least 1mm higher than the second magnet group 2, and the vibrating mirror chip is fixed on the supporting structure through the anchoring structure 32, the second magnetic conduction structure 51 and the shell 52 are both arranged at the outer side of the vibrating mirror chip, the height of the whole scanning vibrating mirror along the coaxial direction of the two fast axis beams 341 is compressed to the limit, and the first cover plate 61 and the second cover plate 62 are used for fixing the electric connection device in the whole structure and play a certain protection role.
Wherein the movable frame 33 is square, circular, elliptical or polygonal in shape; the beam structure of the torsion beam 34 is at least one of a straight beam structure, a ring beam structure and a folded beam structure, and the shape of the mirror 31 is square, circular, oval, rectangular or polygonal.
In the present application, the structures of the components in the drawing parts are merely illustrative and should not be construed to limit the scope of the present application.
The second embodiment:
on the basis of the first embodiment, please refer to fig. 11 and 12, different from the first embodiment, the first magnet group 1 located outside the metal coil 331 is composed of an upper magnet 11 and a lower magnet 12 magnetized oppositely up and down, the lower surface of the upper magnet 11 is opposite to the upper surface of the lower magnet 12, the height of the vibrating mirror movable frame 33 is located between the gaps of the upper and lower magnets 12, a driving magnetic field at the non-compression height side can be provided, and a driving magnetic field at the size to be compressed is provided by the second magnet group 2 below the movable frame 33 in combination with the magnetic conductive component.
The third embodiment:
on the basis of the first embodiment, please refer to fig. 13, which is different from the first embodiment, the magnet assembly is composed of a second magnet group 2, a first magnetic conductive structure 41 and a second magnetic conductive structure 51, the movable frame 33 is a one-dimensional galvanometer, and under the action of electromagnetic force, the galvanometer is twisted around a shaft CC ', so that the second magnet group 2 is located below the movable frame 33 and is parallel to the twisting shaft CC', a magnetic field is guided to the vicinity of the movable frame 33 through the first magnetic conductive structure 41 and the second magnetic conductive structure 51, an effective magnetic field component in a horizontal direction is increased as much as possible, a sufficient driving force is provided for frame twisting, and an overall volume is effectively reduced compared with a structure in which a magnet is located outside.
Referring to fig. 14, the uniaxial scanning galvanometer includes a mirror surface 31, an anchor structure 32, a movable frame 33, a metal coil 331, a torsion beam 34 and a connecting beam 343, wherein the movable frame 33 and the anchor structure 32 are connected by the connecting beam 343, the movable frame 33 and the mirror surface 31 are connected by the torsion beam 34, and the torsion beam 34 may be a thin straight beam structure as shown in the figure, or may be another beam structure such as a ring beam or a folded beam. The mirror 31 is formed by evaporating or sputtering a metal reflective layer on the surface of a silicon material, and may have a square configuration as shown in the figure, or may have other configurations such as a circular, elliptical, rectangular, or polygonal shape. The magnetic driving assembly generates a magnetic field on the frame in a direction perpendicular to the direction CC 'as shown in the figure, the metal coil 331 in the driving magnetic field generates a Lorentz force after being electrified, under the action of the Lorentz force, the movable frame 33 and the mirror 31 rotate around the axis CC' together through a torsion axis, and finally the single-axis scanning of the mirror 31 is realized.
The torsion beam comprises a connecting beam and a fast axis beam, the connecting beam is connected with the movable frame and the anchoring structure, and the fast axis beam is connected with the movable frame and the mirror surface.
The utility model discloses a scan galvanometer drive arrangement of whole height dimension of compression, place the horizontal magnetization magnet in metal coil 331 below, and through by magnetic material make the magnetic conduction subassembly guide the magnetic field direction to the spatial position department that expects, all provide stronger magnetic field intensity in great spatial dimension; simultaneously the magnetic conduction subassembly has the support shake mirror chip and encapsulation casing's effect to do not occupy extra space, consequently this application when providing stronger magnetic field intensity in big space range, shake the whole high dimension compression to the limit of mirror with the electromagnetism, realized reducing the technological effect of the whole quick-witted size of laser radar, help promoting laser radar's market competition.
While the invention has been described with reference to a preferred embodiment, it will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.
Claims (6)
1. A scanning galvanometer driving device for compressing the overall height dimension is characterized in that,
the vibrating mirror comprises vibrating mirror chips and magnetic driving assemblies, wherein the vibrating mirror chips are arranged between the magnetic driving assemblies and are fixed on a supporting structure, and each vibrating mirror chip comprises a mirror surface, an anchoring structure, a torsion beam and a movable frame provided with a metal coil;
the magnetic driving assembly comprises a magnet assembly and a magnetic conduction assembly, at least one magnet assembly consists of two magnets magnetized in the horizontal direction, parallel in magnetic surface and opposite in relative magnetic pole, and the magnet assembly is positioned below the vibrating mirror chip and is matched with the magnetic conduction assembly to guide the driving magnetic field to the metal coil above the vibrating mirror chip.
2. A scanning galvanometer driver arrangement for compressing overall height dimensions as recited in claim 1,
the torsion beam comprises a pair of fast-axis beams and a pair of slow-axis beams, the magnet assembly comprises a first magnet group and a second magnet group, the first magnet group is located on two sides of a fast-axis driving edge of the movable frame to provide a first driving magnetic field to drive the mirror surface to rotate around the coaxial lines of the two fast-axis beams, the second magnet group is located below a slow-axis driving edge of the movable frame, and a magnetic conduction structure is matched to provide a second driving magnetic field to drive the movable frame and the mirror surface to rotate around the coaxial lines of the two slow-axis beams.
3. A scanning galvanometer driver arrangement for compressing overall height dimensions as recited in claim 2,
the magnetic conduction assembly comprises a first magnetic conduction structure and a second magnetic conduction structure, the first magnetic conduction structure is arranged on the inner side below the metal coil, the height of the second magnetic conduction structure is higher than that of the metal coil, the first magnetic conduction structure and the second magnetic conduction structure are erected on two sides of a magnet of the second magnet group, and the heights of the first magnetic conduction structure and the second magnetic conduction structure are higher than that of the second magnet group.
4. A scanning galvanometer drive mechanism of compressed overall height dimension as set forth in claim 3,
the scanning galvanometer device capable of compressing the whole height dimension further comprises a shell structure, wherein the shell structure comprises a base, a shell, a base, a first cover plate and a second cover plate, the base is matched with the first magnetic conduction structure and used for fixedly supporting the galvanometer chip, the shell, the base and the base are made of non-magnetic conduction materials in a machining mode, the shell is matched with the second magnetic conduction structure, and the first cover plate and the second cover plate are arranged on the upper side of the magnet assembly.
5. A scanning galvanometer driver arrangement for compressing overall height dimensions as recited in claim 2,
the first magnet group can be composed of two rectangular magnets which are magnetized in the horizontal direction, have parallel magnetic surfaces and opposite relative magnetic poles, or can be composed of two groups of upper and lower magnet groups which are magnetized in the vertical direction and opposite relative magnetic poles and are respectively positioned on the upper side and the lower side of the galvanometer chip, and the upper and lower magnet groups are used for providing a driving magnetic field on the non-compression height side of the scanning galvanometer driving device for compressing the whole height size.
6. A scanning galvanometer driver arrangement for compressing overall height dimensions as recited in claim 1,
the vibrating mirror chip only comprises a pair of torsion beams, the magnet assembly only comprises a pair of magnet groups and a magnetic conduction structure, the magnet groups are positioned below the driving edge of the movable frame of the vibrating mirror chip and consist of a pair of first magnets and second magnets magnetized in the horizontal direction, and the vibrating mirror chip is driven to rotate around the axis of the torsion beams;
the magnetic body assembly comprises two first magnetic conduction structures and two second magnetic conduction structures, the first magnetic conduction structures are respectively located on the right side of the first magnetic body and the left side of the second magnetic body, the second magnetic conduction structures are respectively located on the left side of the first magnetic body and the right side of the second magnetic body, the first magnetic conduction structures are further used for supporting and fixing the vibrating mirror chip, and the second magnetic conduction structures are further used as shell bodies.
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| CN202222245809.3U CN218099598U (en) | 2022-08-25 | 2022-08-25 | Scanning galvanometer driving device capable of compressing overall height dimension |
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| CN202222245809.3U CN218099598U (en) | 2022-08-25 | 2022-08-25 | Scanning galvanometer driving device capable of compressing overall height dimension |
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